{"id":"https://openalex.org/W2751519405","doi":"https://doi.org/10.1109/nems.2017.8017065","title":"Double-side exposure UV-LED CNC lithography for fine 3D microfabrication","display_name":"Double-side exposure UV-LED CNC lithography for fine 3D microfabrication","publication_year":2017,"publication_date":"2017-04-01","ids":{"openalex":"https://openalex.org/W2751519405","doi":"https://doi.org/10.1109/nems.2017.8017065","mag":"2751519405"},"language":"en","primary_location":{"id":"doi:10.1109/nems.2017.8017065","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2017.8017065","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5074821186","display_name":"Jungkwun Kim","orcid":"https://orcid.org/0000-0001-7428-4315"},"institutions":[{"id":"https://openalex.org/I189590672","display_name":"Kansas State University","ror":"https://ror.org/05p1j8758","country_code":"US","type":"education","lineage":["https://openalex.org/I189590672"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Jungkwun Kim","raw_affiliation_strings":["Department of Electrical and Computer Engineering, Kansas State University, Manhattan, KS, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical and Computer Engineering, Kansas State University, Manhattan, KS, USA","institution_ids":["https://openalex.org/I189590672"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5079082184","display_name":"Yong\u2010Kyu Yoon","orcid":"https://orcid.org/0000-0002-7775-683X"},"institutions":[{"id":"https://openalex.org/I33213144","display_name":"University of Florida","ror":"https://ror.org/02y3ad647","country_code":"US","type":"education","lineage":["https://openalex.org/I33213144"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Yong-Kyu Yoon","raw_affiliation_strings":["Department of Electrical and Computer Engineering, University of Florida, Gainesville, FL, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical and Computer Engineering, University of Florida, Gainesville, FL, USA","institution_ids":["https://openalex.org/I33213144"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5024864686","display_name":"Mark G. Allen","orcid":"https://orcid.org/0000-0003-3963-6359"},"institutions":[{"id":"https://openalex.org/I79576946","display_name":"University of Pennsylvania","ror":"https://ror.org/00b30xv10","country_code":"US","type":"education","lineage":["https://openalex.org/I79576946"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Mark G. Allen","raw_affiliation_strings":["Department of Electrical and Systems Engineering, University of Pennsylvania, Philadelphia, PA, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical and Systems Engineering, University of Pennsylvania, Philadelphia, PA, USA","institution_ids":["https://openalex.org/I79576946"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.1313,"has_fulltext":false,"cited_by_count":3,"citation_normalized_percentile":{"value":0.49082099,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":94},"biblio":{"volume":"3","issue":null,"first_page":"463","last_page":"466"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12224","display_name":"Nanofabrication and Lithography Techniques","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12224","display_name":"Nanofabrication and Lithography Techniques","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10783","display_name":"Additive Manufacturing and 3D Printing Technologies","score":0.9968000054359436,"subfield":{"id":"https://openalex.org/subfields/2203","display_name":"Automotive Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.9966999888420105,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/microfabrication","display_name":"Microfabrication","score":0.8320424556732178},{"id":"https://openalex.org/keywords/lithography","display_name":"Lithography","score":0.7004243731498718},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.5784544348716736},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.37822961807250977},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.33277779817581177},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.18057072162628174}],"concepts":[{"id":"https://openalex.org/C527607","wikidata":"https://www.wikidata.org/wiki/Q175538","display_name":"Microfabrication","level":4,"score":0.8320424556732178},{"id":"https://openalex.org/C204223013","wikidata":"https://www.wikidata.org/wiki/Q133036","display_name":"Lithography","level":2,"score":0.7004243731498718},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5784544348716736},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.37822961807250977},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.33277779817581177},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.18057072162628174},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems.2017.8017065","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2017.8017065","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320309370","display_name":"University of Pennsylvania","ror":"https://ror.org/00b30xv10"}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":15,"referenced_works":["https://openalex.org/W1490587261","https://openalex.org/W1968505967","https://openalex.org/W2031386373","https://openalex.org/W2031805860","https://openalex.org/W2043392422","https://openalex.org/W2094484796","https://openalex.org/W2096254130","https://openalex.org/W2148047620","https://openalex.org/W2157838692","https://openalex.org/W2157866515","https://openalex.org/W2330547497","https://openalex.org/W2404212016","https://openalex.org/W2528926171","https://openalex.org/W2555011944","https://openalex.org/W6713472552"],"related_works":["https://openalex.org/W4391375266","https://openalex.org/W2748952813","https://openalex.org/W2364197227","https://openalex.org/W2353550828","https://openalex.org/W4225886664","https://openalex.org/W1987738811","https://openalex.org/W2041762612","https://openalex.org/W2366666218","https://openalex.org/W1974412727","https://openalex.org/W3195913282"],"abstract_inverted_index":{"This":[0,92,105],"paper":[1],"presents":[2],"a":[3,32,38,41,47,86,130,133,137,141],"double-side-exposure":[4],"scheme":[5,53],"based":[6],"on":[7,58],"computer-numerical-controlled":[8],"(CNC)":[9],"UVLED":[10],"lithography":[11,19],"for":[12],"fine":[13],"3-D":[14,95,112],"microfabrication.":[15],"The":[16,50,64],"CNC":[17,65],"UV-LED":[18,35,66],"manipulates":[20],"the":[21,25,29,61,74,102,108],"exposure":[22,52,79,123],"angle":[23],"of":[24,60,80,85,110,145],"UV":[26,71,89],"light":[27,39,72,90,96],"where":[28],"system":[30],"comprises":[31],"switchable,":[33],"movable":[34],"array":[36],"as":[37,154],"source,":[40],"motorized":[42],"tilt-rotational":[43,70],"sample":[44],"holder,":[45],"and":[46,140,148],"computer-control":[48],"unit.":[49],"double-sided":[51],"utilizes":[54],"an":[55],"additional":[56],"photomask":[57],"top":[59],"photoresist-bearing":[62],"photomask/substrate.":[63],"apparatus":[67],"programmably":[68],"introduces":[69],"through":[73],"two":[75],"photomasks":[76],"via":[77],"sequential":[78],"each":[81],"side":[82],"by":[83],"use":[84],"synchronized":[87],"switchable":[88],"source.":[91],"creates":[93],"user-definable":[94],"traces,":[97],"which":[98],"are":[99,152],"transferred":[100],"into":[101],"photosensitive":[103],"resist.":[104],"approach":[106],"enables":[107],"fabrication":[109],"new":[111],"structures":[113,151],"that":[114],"have":[115],"previously":[116],"been":[117],"impossible":[118],"to":[119],"implement":[120],"using":[121],"single-side":[122],"lithography.":[124],"Sample":[125],"fabricated":[126],"3D":[127],"microstructures":[128],"include":[129],"micro":[131,134,138,142,146,149],"spear,":[132],"golf":[135],"club,":[136],"folder,":[139],"bird.":[143],"Arrays":[144],"\u2018y\u2019":[147],"mushroom":[150],"demonstrated":[153],"batch":[155],"fabrications.":[156]},"counts_by_year":[{"year":2022,"cited_by_count":1},{"year":2021,"cited_by_count":1},{"year":2019,"cited_by_count":1}],"updated_date":"2026-06-11T09:08:48.828518","created_date":"2025-10-10T00:00:00"}