{"id":"https://openalex.org/W2751657673","doi":"https://doi.org/10.1109/nems.2017.8017052","title":"High performance piezoresistive accelerometer based on the slot etching in the EB(eight-beam) structure","display_name":"High performance piezoresistive accelerometer based on the slot etching in the EB(eight-beam) structure","publication_year":2017,"publication_date":"2017-04-01","ids":{"openalex":"https://openalex.org/W2751657673","doi":"https://doi.org/10.1109/nems.2017.8017052","mag":"2751657673"},"language":"en","primary_location":{"id":"doi:10.1109/nems.2017.8017052","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2017.8017052","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5043351160","display_name":"Peng Wang","orcid":"https://orcid.org/0000-0002-0610-4754"},"institutions":[{"id":"https://openalex.org/I87445476","display_name":"Xi'an Jiaotong University","ror":"https://ror.org/017zhmm22","country_code":"CN","type":"education","lineage":["https://openalex.org/I87445476"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Peng Wang","raw_affiliation_strings":["State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, xi'an, shanxi, china"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, xi'an, shanxi, china","institution_ids":["https://openalex.org/I87445476"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5056618863","display_name":"Yulong Zhao","orcid":"https://orcid.org/0000-0001-9186-3204"},"institutions":[{"id":"https://openalex.org/I87445476","display_name":"Xi'an Jiaotong University","ror":"https://ror.org/017zhmm22","country_code":"CN","type":"education","lineage":["https://openalex.org/I87445476"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yulong Zhao","raw_affiliation_strings":["State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, Shaanxi, CN","State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, xi'an, shanxi, china"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, Shaanxi, CN","institution_ids":["https://openalex.org/I87445476"]},{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, xi'an, shanxi, china","institution_ids":["https://openalex.org/I87445476"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5083126155","display_name":"You Zhao","orcid":"https://orcid.org/0000-0002-8305-5984"},"institutions":[{"id":"https://openalex.org/I87445476","display_name":"Xi'an Jiaotong University","ror":"https://ror.org/017zhmm22","country_code":"CN","type":"education","lineage":["https://openalex.org/I87445476"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"You Zhao","raw_affiliation_strings":["State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, Shaanxi, CN","State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, xi'an, shanxi, china"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, Shaanxi, CN","institution_ids":["https://openalex.org/I87445476"]},{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, xi'an, shanxi, china","institution_ids":["https://openalex.org/I87445476"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100360474","display_name":"Qi Zhang","orcid":"https://orcid.org/0009-0008-7984-7453"},"institutions":[{"id":"https://openalex.org/I87445476","display_name":"Xi'an Jiaotong University","ror":"https://ror.org/017zhmm22","country_code":"CN","type":"education","lineage":["https://openalex.org/I87445476"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Qi Zhang","raw_affiliation_strings":["State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, xi'an, shanxi, china"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, xi'an, shanxi, china","institution_ids":["https://openalex.org/I87445476"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5100619983","display_name":"Zixi Wang","orcid":"https://orcid.org/0000-0001-7983-8372"},"institutions":[{"id":"https://openalex.org/I87445476","display_name":"Xi'an Jiaotong University","ror":"https://ror.org/017zhmm22","country_code":"CN","type":"education","lineage":["https://openalex.org/I87445476"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zixi Wang","raw_affiliation_strings":["State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, xi'an, shanxi, china"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, xi'an, shanxi, china","institution_ids":["https://openalex.org/I87445476"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I87445476"],"apc_list":null,"apc_paid":null,"fwci":null,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":null,"cited_by_percentile_year":null,"biblio":{"volume":"16","issue":null,"first_page":"406","last_page":"409"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9991999864578247,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/piezoresistive-effect","display_name":"Piezoresistive effect","score":0.931318998336792},{"id":"https://openalex.org/keywords/accelerometer","display_name":"Accelerometer","score":0.9257618188858032},{"id":"https://openalex.org/keywords/sensitivity","display_name":"Sensitivity (control systems)","score":0.7209904193878174},{"id":"https://openalex.org/keywords/beam","display_name":"Beam (structure)","score":0.6868258118629456},{"id":"https://openalex.org/keywords/natural-frequency","display_name":"Natural frequency","score":0.6860234141349792},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.6182687282562256},{"id":"https://openalex.org/keywords/finite-element-method","display_name":"Finite element method","score":0.6100712418556213},{"id":"https://openalex.org/keywords/vibration","display_name":"Vibration","score":0.5780737400054932},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.5737467408180237},{"id":"https://openalex.org/keywords/etching","display_name":"Etching (microfabrication)","score":0.5724338293075562},{"id":"https://openalex.org/keywords/proof-mass","display_name":"Proof mass","score":0.5710762143135071},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.3872295022010803},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.31762176752090454},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.2968713939189911},{"id":"https://openalex.org/keywords/structural-engineering","display_name":"Structural engineering","score":0.2775471806526184},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.26066961884498596},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.17538616061210632},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.11932915449142456},{"id":"https://openalex.org/keywords/layer","display_name":"Layer (electronics)","score":0.0880841314792633}],"concepts":[{"id":"https://openalex.org/C198490522","wikidata":"https://www.wikidata.org/wiki/Q1932915","display_name":"Piezoresistive effect","level":2,"score":0.931318998336792},{"id":"https://openalex.org/C89805583","wikidata":"https://www.wikidata.org/wiki/Q192940","display_name":"Accelerometer","level":2,"score":0.9257618188858032},{"id":"https://openalex.org/C21200559","wikidata":"https://www.wikidata.org/wiki/Q7451068","display_name":"Sensitivity (control systems)","level":2,"score":0.7209904193878174},{"id":"https://openalex.org/C168834538","wikidata":"https://www.wikidata.org/wiki/Q3705329","display_name":"Beam (structure)","level":2,"score":0.6868258118629456},{"id":"https://openalex.org/C78736273","wikidata":"https://www.wikidata.org/wiki/Q946764","display_name":"Natural frequency","level":3,"score":0.6860234141349792},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6182687282562256},{"id":"https://openalex.org/C135628077","wikidata":"https://www.wikidata.org/wiki/Q220184","display_name":"Finite element method","level":2,"score":0.6100712418556213},{"id":"https://openalex.org/C198394728","wikidata":"https://www.wikidata.org/wiki/Q3695508","display_name":"Vibration","level":2,"score":0.5780737400054932},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.5737467408180237},{"id":"https://openalex.org/C100460472","wikidata":"https://www.wikidata.org/wiki/Q2368605","display_name":"Etching (microfabrication)","level":3,"score":0.5724338293075562},{"id":"https://openalex.org/C2780330379","wikidata":"https://www.wikidata.org/wiki/Q16990023","display_name":"Proof mass","level":3,"score":0.5710762143135071},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.3872295022010803},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.31762176752090454},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.2968713939189911},{"id":"https://openalex.org/C66938386","wikidata":"https://www.wikidata.org/wiki/Q633538","display_name":"Structural engineering","level":1,"score":0.2775471806526184},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.26066961884498596},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.17538616061210632},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.11932915449142456},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.0880841314792633},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems.2017.8017052","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2017.8017052","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":7,"referenced_works":["https://openalex.org/W1980843646","https://openalex.org/W1987795816","https://openalex.org/W2011900623","https://openalex.org/W2023044806","https://openalex.org/W2552148320","https://openalex.org/W2559810474","https://openalex.org/W6729596145"],"related_works":["https://openalex.org/W2276816319","https://openalex.org/W45665305","https://openalex.org/W2122708814","https://openalex.org/W2367743327","https://openalex.org/W4245472411","https://openalex.org/W2520125024","https://openalex.org/W2049900425","https://openalex.org/W2045042928","https://openalex.org/W4379746342","https://openalex.org/W2586631215"],"abstract_inverted_index":{"Presented":[0],"in":[1,17,52],"this":[2],"paper":[3],"is":[4],"a":[5,8,38,104],"development":[6],"of":[7,26,37,64,84,116],"high-performance":[9],"piezoresistive":[10,65,117],"micro-accelerometer":[11],"based":[12],"on":[13],"the":[14,18,23,56,59,78,85,101,109],"slot":[15],"etching":[16],"EB":[19],"(eight-beam)":[20],"structure":[21,35],"for":[22,76],"vibration":[24],"detection":[25],"high":[27],"speed":[28],"spindle.":[29],"The":[30,67,88],"proposed":[31],"SEB":[32],"(slotted":[33],"eight-beam)":[34],"consists":[36],"proof":[39],"mass":[40],"supported":[41],"by":[42],"four":[43,48],"slotted":[44],"sensing":[45],"beams":[46,102],"and":[47,61,70,80,93,113],"suspension":[49],"beams,":[50],"which":[51],"order":[53],"to":[54,107],"improve":[55,108],"trade-off":[57,110],"between":[58,111],"sensitivity":[60,79,112],"natural":[62,81,114],"frequency":[63,82,115],"accelerometer.":[66,118],"mechanical":[68],"model":[69],"its":[71],"mathematical":[72],"solution":[73],"are":[74],"established":[75],"calculating":[77],"behavior":[83],"designed":[86],"structure.":[87],"FEA":[89],"(finite":[90],"element":[91],"analysis)":[92],"experimental":[94],"results":[95],"demonstrate":[96],"that":[97],"incorporating":[98],"slots":[99],"into":[100],"have":[103],"great":[105],"help":[106]},"counts_by_year":[{"year":2019,"cited_by_count":1}],"updated_date":"2026-07-14T23:27:15.235271","created_date":"2025-10-10T00:00:00"}