{"id":"https://openalex.org/W2753280365","doi":"https://doi.org/10.1109/nems.2017.8017022","title":"An electrostatic vertical comb-drive micromirror with self-aligned assembly","display_name":"An electrostatic vertical comb-drive micromirror with self-aligned assembly","publication_year":2017,"publication_date":"2017-04-01","ids":{"openalex":"https://openalex.org/W2753280365","doi":"https://doi.org/10.1109/nems.2017.8017022","mag":"2753280365"},"language":"en","primary_location":{"id":"doi:10.1109/nems.2017.8017022","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2017.8017022","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5100561564","display_name":"Yanjun Fan","orcid":null},"institutions":[{"id":"https://openalex.org/I113940042","display_name":"Shanghai University","ror":"https://ror.org/006teas31","country_code":"CN","type":"education","lineage":["https://openalex.org/I113940042"]},{"id":"https://openalex.org/I4210092495","display_name":"Suzhou Institute of Nano-tech and Nano-bionics","ror":"https://ror.org/0027d9x02","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210092495"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yanjun Fan","raw_affiliation_strings":["Chinese Academic of Sciences (CAS), Suzhou Institute of Nano-Tech and Nano-Bionics, China","School of Materials Science and Engineering, Shanghai University, Shanghai, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Chinese Academic of Sciences (CAS), Suzhou Institute of Nano-Tech and Nano-Bionics, China","institution_ids":["https://openalex.org/I4210092495"]},{"raw_affiliation_string":"School of Materials Science and Engineering, Shanghai University, Shanghai, China","institution_ids":["https://openalex.org/I113940042"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5023794303","display_name":"Can Cui","orcid":"https://orcid.org/0000-0002-1115-9629"},"institutions":[{"id":"https://openalex.org/I21193070","display_name":"Beijing Jiaotong University","ror":"https://ror.org/01yj56c84","country_code":"CN","type":"education","lineage":["https://openalex.org/I21193070"]},{"id":"https://openalex.org/I4210092495","display_name":"Suzhou Institute of Nano-tech and Nano-bionics","ror":"https://ror.org/0027d9x02","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210092495"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Can Cui","raw_affiliation_strings":["Chinese Academic of Sciences (CAS), Suzhou Institute of Nano-Tech and Nano-Bionics, China","Key Lab of Education Ministry on Luminescence and Optical Information Technology, Beijing Jiaotong University, Beijing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Chinese Academic of Sciences (CAS), Suzhou Institute of Nano-Tech and Nano-Bionics, China","institution_ids":["https://openalex.org/I4210092495"]},{"raw_affiliation_string":"Key Lab of Education Ministry on Luminescence and Optical Information Technology, Beijing Jiaotong University, Beijing, China","institution_ids":["https://openalex.org/I21193070"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5088995369","display_name":"Huijun Yu","orcid":"https://orcid.org/0000-0003-1072-825X"},"institutions":[{"id":"https://openalex.org/I4210092495","display_name":"Suzhou Institute of Nano-tech and Nano-bionics","ror":"https://ror.org/0027d9x02","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210092495"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Huijun Yu","raw_affiliation_strings":["Chinese Academic of Sciences (CAS), Suzhou Institute of Nano-Tech and Nano-Bionics, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Chinese Academic of Sciences (CAS), Suzhou Institute of Nano-Tech and Nano-Bionics, China","institution_ids":["https://openalex.org/I4210092495"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5109391909","display_name":"Wenjiang Shen","orcid":null},"institutions":[{"id":"https://openalex.org/I4210092495","display_name":"Suzhou Institute of Nano-tech and Nano-bionics","ror":"https://ror.org/0027d9x02","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210092495"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Wenjiang Shen","raw_affiliation_strings":["Chinese Academic of Sciences (CAS), Suzhou Institute of Nano-Tech and Nano-Bionics, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Chinese Academic of Sciences (CAS), Suzhou Institute of Nano-Tech and Nano-Bionics, China","institution_ids":["https://openalex.org/I4210092495"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100631251","display_name":"Zhi Wang","orcid":"https://orcid.org/0000-0002-0293-4099"},"institutions":[{"id":"https://openalex.org/I21193070","display_name":"Beijing Jiaotong University","ror":"https://ror.org/01yj56c84","country_code":"CN","type":"education","lineage":["https://openalex.org/I21193070"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zhi Wang","raw_affiliation_strings":["Key Lab of Education Ministry on Luminescence and Optical Information Technology, Beijing Jiaotong University, Beijing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Key Lab of Education Ministry on Luminescence and Optical Information Technology, Beijing Jiaotong University, Beijing, China","institution_ids":["https://openalex.org/I21193070"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5100361625","display_name":"Jun Li","orcid":"https://orcid.org/0000-0001-5845-8602"},"institutions":[{"id":"https://openalex.org/I113940042","display_name":"Shanghai University","ror":"https://ror.org/006teas31","country_code":"CN","type":"education","lineage":["https://openalex.org/I113940042"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jun Li","raw_affiliation_strings":["School of Materials Science and Engineering, Shanghai University, Shanghai, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Materials Science and Engineering, Shanghai University, Shanghai, China","institution_ids":["https://openalex.org/I113940042"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":6,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.4386,"has_fulltext":false,"cited_by_count":5,"citation_normalized_percentile":{"value":0.66109843,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":94},"biblio":{"volume":null,"issue":null,"first_page":"268","last_page":"272"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12452","display_name":"Electrowetting and Microfluidic Technologies","score":0.9990000128746033,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11255","display_name":"Microfluidic and Bio-sensing Technologies","score":0.9988999962806702,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/comb-drive","display_name":"Comb drive","score":0.696499228477478},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.5431408882141113},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.4552307724952698},{"id":"https://openalex.org/keywords/digital-micromirror-device","display_name":"Digital micromirror device","score":0.447074830532074},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.36573851108551025},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.2785930633544922},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.22711944580078125},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.18116557598114014}],"concepts":[{"id":"https://openalex.org/C155840801","wikidata":"https://www.wikidata.org/wiki/Q5150581","display_name":"Comb drive","level":4,"score":0.696499228477478},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5431408882141113},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.4552307724952698},{"id":"https://openalex.org/C18645525","wikidata":"https://www.wikidata.org/wiki/Q1369469","display_name":"Digital micromirror device","level":2,"score":0.447074830532074},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.36573851108551025},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.2785930633544922},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.22711944580078125},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.18116557598114014},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems.2017.8017022","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2017.8017022","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.7799999713897705,"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7"}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":7,"referenced_works":["https://openalex.org/W1953055458","https://openalex.org/W2008934722","https://openalex.org/W2009819806","https://openalex.org/W2027256062","https://openalex.org/W2045275746","https://openalex.org/W2112423056","https://openalex.org/W6656986082"],"related_works":["https://openalex.org/W2353426333","https://openalex.org/W2326564110","https://openalex.org/W4246450666","https://openalex.org/W4388998267","https://openalex.org/W2898370298","https://openalex.org/W2137437058","https://openalex.org/W752721784","https://openalex.org/W1650140711","https://openalex.org/W2536454736","https://openalex.org/W2366092625"],"abstract_inverted_index":{"The":[0,67],"fabrication":[1],"and":[2,33,47,55,70,76,108],"test":[3],"of":[4,8,99,112],"a":[5,34,57,79,95,103],"new":[6,58],"type":[7],"electrostatic":[9],"vertical":[10,21,64,80],"comb":[11,65,81],"drive":[12,82],"scanning":[13,97],"micromirror":[14],"is":[15],"presented":[16],"in":[17,87],"this":[18],"paper.":[19],"Conventional":[20],"comb-drive":[22],"actuators":[23],"need":[24],"two":[25],"structural":[26],"layers,":[27],"one":[28,51],"for":[29,36],"the":[30,37,45,63,90,109,113],"rotor":[31,46],"fingers":[32,49],"second":[35],"stator":[38,48],"fingers.":[39],"In":[40],"our":[41],"work,":[42],"we":[43],"fabricated":[44,91],"using":[50],"mask":[52],"lithography":[53],"step":[54],"designed":[56],"assembly":[59],"method":[60],"to":[61],"achieve":[62,94],"drive.":[66],"mirror":[68,83,92],"wafer":[69,72],"mesa":[71],"were":[73],"stacked":[74],"up":[75],"assembled":[77],"into":[78],"easily.":[84],"When":[85],"operating":[86],"resonant":[88,110],"mode,":[89],"can":[93],"mechanical":[96],"angle":[98],"+/\u2212":[100],"10.8\u00b0":[101],"with":[102],"95":[104],"Vpp":[105],"sinusoidal":[106],"signal,":[107],"frequency":[111],"device":[114],"was":[115],"393":[116],"Hz.":[117]},"counts_by_year":[{"year":2023,"cited_by_count":1},{"year":2022,"cited_by_count":1},{"year":2020,"cited_by_count":1},{"year":2019,"cited_by_count":1},{"year":2018,"cited_by_count":1}],"updated_date":"2026-06-11T09:08:48.828518","created_date":"2025-10-10T00:00:00"}