{"id":"https://openalex.org/W2752453076","doi":"https://doi.org/10.1109/nems.2017.8017012","title":"A robust triangular-electrode based capacitive detection method for MEMS gyroscopes","display_name":"A robust triangular-electrode based capacitive detection method for MEMS gyroscopes","publication_year":2017,"publication_date":"2017-04-01","ids":{"openalex":"https://openalex.org/W2752453076","doi":"https://doi.org/10.1109/nems.2017.8017012","mag":"2752453076"},"language":"en","primary_location":{"id":"doi:10.1109/nems.2017.8017012","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2017.8017012","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5101792374","display_name":"Yiyu Lin","orcid":"https://orcid.org/0000-0002-9827-5955"},"institutions":[{"id":"https://openalex.org/I76130692","display_name":"Zhejiang University","ror":"https://ror.org/00a2xv884","country_code":"CN","type":"education","lineage":["https://openalex.org/I76130692"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yiyu Lin","raw_affiliation_strings":["Micro-satellite Research Center, Zhejiang University, Hangzhou, P.R., China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Micro-satellite Research Center, Zhejiang University, Hangzhou, P.R., China","institution_ids":["https://openalex.org/I76130692"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100455559","display_name":"Wei Ma","orcid":"https://orcid.org/0000-0002-5665-7840"},"institutions":[{"id":"https://openalex.org/I76130692","display_name":"Zhejiang University","ror":"https://ror.org/00a2xv884","country_code":"CN","type":"education","lineage":["https://openalex.org/I76130692"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Wei Ma","raw_affiliation_strings":["Micro-satellite Research Center, Zhejiang University, Hangzhou, P.R., China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Micro-satellite Research Center, Zhejiang University, Hangzhou, P.R., China","institution_ids":["https://openalex.org/I76130692"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5115594099","display_name":"Siqi Liu","orcid":"https://orcid.org/0000-0002-4184-175X"},"institutions":[{"id":"https://openalex.org/I76130692","display_name":"Zhejiang University","ror":"https://ror.org/00a2xv884","country_code":"CN","type":"education","lineage":["https://openalex.org/I76130692"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Siqi Liu","raw_affiliation_strings":["Micro-satellite Research Center, Zhejiang University, Hangzhou, P.R., China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Micro-satellite Research Center, Zhejiang University, Hangzhou, P.R., China","institution_ids":["https://openalex.org/I76130692"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5013403439","display_name":"Xudong Zheng","orcid":"https://orcid.org/0000-0003-2685-9844"},"institutions":[{"id":"https://openalex.org/I76130692","display_name":"Zhejiang University","ror":"https://ror.org/00a2xv884","country_code":"CN","type":"education","lineage":["https://openalex.org/I76130692"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xudong Zheng","raw_affiliation_strings":["Micro-satellite Research Center, Zhejiang University, Hangzhou, P.R., China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Micro-satellite Research Center, Zhejiang University, Hangzhou, P.R., China","institution_ids":["https://openalex.org/I76130692"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5041236599","display_name":"Zhonghe Jin","orcid":"https://orcid.org/0000-0002-2039-1390"},"institutions":[{"id":"https://openalex.org/I76130692","display_name":"Zhejiang University","ror":"https://ror.org/00a2xv884","country_code":"CN","type":"education","lineage":["https://openalex.org/I76130692"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zhonghe Jin","raw_affiliation_strings":["Micro-satellite Research Center, Zhejiang University, Hangzhou, P.R., China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Micro-satellite Research Center, Zhejiang University, Hangzhou, P.R., China","institution_ids":["https://openalex.org/I76130692"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I76130692"],"apc_list":null,"apc_paid":null,"fwci":null,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":null,"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"226","last_page":"230"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/gyroscope","display_name":"Gyroscope","score":0.8178111910820007},{"id":"https://openalex.org/keywords/capacitive-sensing","display_name":"Capacitive sensing","score":0.7434535026550293},{"id":"https://openalex.org/keywords/robustness","display_name":"Robustness (evolution)","score":0.6660809516906738},{"id":"https://openalex.org/keywords/vibrating-structure-gyroscope","display_name":"Vibrating structure gyroscope","score":0.6085222363471985},{"id":"https://openalex.org/keywords/capacitance","display_name":"Capacitance","score":0.5824880003929138},{"id":"https://openalex.org/keywords/control-theory","display_name":"Control theory (sociology)","score":0.5438460111618042},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.47667554020881653},{"id":"https://openalex.org/keywords/capacitor","display_name":"Capacitor","score":0.44848430156707764},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.41603511571884155},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.38922929763793945},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.3506178855895996},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.3299162983894348},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.22580614686012268},{"id":"https://openalex.org/keywords/electrode","display_name":"Electrode","score":0.2144578993320465},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.17556002736091614},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.15381473302841187},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.12514981627464294}],"concepts":[{"id":"https://openalex.org/C158488048","wikidata":"https://www.wikidata.org/wiki/Q483400","display_name":"Gyroscope","level":2,"score":0.8178111910820007},{"id":"https://openalex.org/C206755178","wikidata":"https://www.wikidata.org/wiki/Q1131271","display_name":"Capacitive sensing","level":2,"score":0.7434535026550293},{"id":"https://openalex.org/C63479239","wikidata":"https://www.wikidata.org/wiki/Q7353546","display_name":"Robustness (evolution)","level":3,"score":0.6660809516906738},{"id":"https://openalex.org/C72768775","wikidata":"https://www.wikidata.org/wiki/Q844456","display_name":"Vibrating structure gyroscope","level":3,"score":0.6085222363471985},{"id":"https://openalex.org/C30066665","wikidata":"https://www.wikidata.org/wiki/Q164399","display_name":"Capacitance","level":3,"score":0.5824880003929138},{"id":"https://openalex.org/C47446073","wikidata":"https://www.wikidata.org/wiki/Q5165890","display_name":"Control theory (sociology)","level":3,"score":0.5438460111618042},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.47667554020881653},{"id":"https://openalex.org/C52192207","wikidata":"https://www.wikidata.org/wiki/Q5322","display_name":"Capacitor","level":3,"score":0.44848430156707764},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.41603511571884155},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.38922929763793945},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.3506178855895996},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.3299162983894348},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.22580614686012268},{"id":"https://openalex.org/C17525397","wikidata":"https://www.wikidata.org/wiki/Q176140","display_name":"Electrode","level":2,"score":0.2144578993320465},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.17556002736091614},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.15381473302841187},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.12514981627464294},{"id":"https://openalex.org/C2775924081","wikidata":"https://www.wikidata.org/wiki/Q55608371","display_name":"Control (management)","level":2,"score":0.0},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.0},{"id":"https://openalex.org/C146978453","wikidata":"https://www.wikidata.org/wiki/Q3798668","display_name":"Aerospace engineering","level":1,"score":0.0},{"id":"https://openalex.org/C104317684","wikidata":"https://www.wikidata.org/wiki/Q7187","display_name":"Gene","level":2,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.0},{"id":"https://openalex.org/C55493867","wikidata":"https://www.wikidata.org/wiki/Q7094","display_name":"Biochemistry","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems.2017.8017012","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2017.8017012","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":10,"referenced_works":["https://openalex.org/W603393728","https://openalex.org/W1597130591","https://openalex.org/W1991619555","https://openalex.org/W2069067985","https://openalex.org/W2078828266","https://openalex.org/W2132975762","https://openalex.org/W2149128480","https://openalex.org/W2171467647","https://openalex.org/W2542673593","https://openalex.org/W6635597956"],"related_works":["https://openalex.org/W2018733833","https://openalex.org/W4320019880","https://openalex.org/W2138812454","https://openalex.org/W2348740411","https://openalex.org/W2185308786","https://openalex.org/W2039007435","https://openalex.org/W2363375256","https://openalex.org/W4312831286","https://openalex.org/W2387531099","https://openalex.org/W2080828231"],"abstract_inverted_index":{"This":[0],"paper":[1],"presents":[2],"a":[3,65,112,171],"robust":[4,74],"triangular-electrode":[5],"based":[6],"(TEB)":[7],"capacitive":[8],"detection":[9],"method":[10,16,90,93,104],"for":[11],"MEMS":[12,113],"gyroscopes.":[13],"The":[14],"TEB":[15,22,80,92,99,103,141,165],"utilizes":[17],"the":[18,28,31,37,49,52,56,96,102,118,124,127,145],"inherent":[19],"nonlinearity":[20],"of":[21,33,44,98,126,148,164,174,180],"variable-area":[23],"sense":[24,54],"capacitor":[25],"to":[26,75,94,138,160],"measure":[27],"amplitude":[29,39],"and":[30,36,40,69,84,91,121,177],"phase":[32,41,59,153],"mechanical":[34],"motion,":[35],"derived":[38],"are":[42,73,86],"independent":[43],"such":[45],"system":[46,76],"parameters":[47],"as":[48],"carrier":[50,131],"voltage,":[51],"nominal":[53],"capacitance,":[55],"gain":[57],"or":[58],"shift":[60,154],"in":[61,107],"C/V":[62],"circuit.":[63],"As":[64],"result,":[66],"gyroscope":[67,149],"outputs":[68],"their":[70],"scale":[71,128],"factor":[72,129],"parameter":[77],"fluctuations":[78],"using":[79,140],"method.":[81,100,142],"Working":[82],"principles":[83],"robustness":[85],"compared":[87],"between":[88],"linear-EAM":[89],"manifest":[95],"superiority":[97],"Finally,":[101],"is":[105,134,156],"implemented":[106],"an":[108,178],"FPGA-based":[109],"PCB":[110],"with":[111],"gyroscope.":[114],"Experimental":[115],"results":[116],"verify":[117],"theoretical":[119],"analysis":[120,169],"demonstrate":[122],"that":[123],"sensitivity":[125],"on":[130,151],"voltage":[132],"variations":[133,155],"highly":[135],"suppressed":[136,158],"up":[137,159],"99.77%":[139],"In":[143],"addition,":[144],"offset":[146],"drift":[147],"output":[150],"circuit":[152],"greatly":[157],"99.96%":[161],"by":[162],"virtue":[163],"control.":[166],"Allan":[167],"variance":[168],"demonstrates":[170],"bias":[172],"instability":[173],"4.0":[175],"\u00b0/h,":[176],"ARW":[179],"0.32":[181],"\u00b0/\u221ah":[182],"at":[183],"atmosphere.":[184]},"counts_by_year":[],"updated_date":"2026-07-14T23:27:15.235271","created_date":"2025-10-10T00:00:00"}