{"id":"https://openalex.org/W2753829967","doi":"https://doi.org/10.1109/nems.2017.8017009","title":"A real-time temperature compensation algorithm for a force-rebalanced MEMS capacitive accelerometer based on resonant frequency","display_name":"A real-time temperature compensation algorithm for a force-rebalanced MEMS capacitive accelerometer based on resonant frequency","publication_year":2017,"publication_date":"2017-04-01","ids":{"openalex":"https://openalex.org/W2753829967","doi":"https://doi.org/10.1109/nems.2017.8017009","mag":"2753829967"},"language":"en","primary_location":{"id":"doi:10.1109/nems.2017.8017009","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2017.8017009","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5053297903","display_name":"Jiehui Du","orcid":null},"institutions":[{"id":"https://openalex.org/I76130692","display_name":"Zhejiang University","ror":"https://ror.org/00a2xv884","country_code":"CN","type":"education","lineage":["https://openalex.org/I76130692"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Jiehui Du","raw_affiliation_strings":["Micro-Satellite Research Center, Zhejiang University, Hangzhou, P.R., China"],"affiliations":[{"raw_affiliation_string":"Micro-Satellite Research Center, Zhejiang University, Hangzhou, P.R., China","institution_ids":["https://openalex.org/I76130692"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5075962861","display_name":"Yixuan Guo","orcid":"https://orcid.org/0000-0003-2572-4120"},"institutions":[{"id":"https://openalex.org/I76130692","display_name":"Zhejiang University","ror":"https://ror.org/00a2xv884","country_code":"CN","type":"education","lineage":["https://openalex.org/I76130692"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yixuan Guo","raw_affiliation_strings":["Micro-Satellite Research Center, Zhejiang University, Hangzhou, P.R., China"],"affiliations":[{"raw_affiliation_string":"Micro-Satellite Research Center, Zhejiang University, Hangzhou, P.R., China","institution_ids":["https://openalex.org/I76130692"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101792374","display_name":"Yiyu Lin","orcid":"https://orcid.org/0000-0002-9827-5955"},"institutions":[{"id":"https://openalex.org/I76130692","display_name":"Zhejiang University","ror":"https://ror.org/00a2xv884","country_code":"CN","type":"education","lineage":["https://openalex.org/I76130692"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yiyu Lin","raw_affiliation_strings":["Micro-Satellite Research Center, Zhejiang University, Hangzhou, P.R., China"],"affiliations":[{"raw_affiliation_string":"Micro-Satellite Research Center, Zhejiang University, Hangzhou, P.R., China","institution_ids":["https://openalex.org/I76130692"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5013403439","display_name":"Xudong Zheng","orcid":"https://orcid.org/0000-0003-2685-9844"},"institutions":[{"id":"https://openalex.org/I76130692","display_name":"Zhejiang University","ror":"https://ror.org/00a2xv884","country_code":"CN","type":"education","lineage":["https://openalex.org/I76130692"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xudong Zheng","raw_affiliation_strings":["Micro-Satellite Research Center, Zhejiang University, Hangzhou, P.R., China"],"affiliations":[{"raw_affiliation_string":"Micro-Satellite Research Center, Zhejiang University, Hangzhou, P.R., China","institution_ids":["https://openalex.org/I76130692"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5041236599","display_name":"Zhonghe Jin","orcid":"https://orcid.org/0000-0002-2039-1390"},"institutions":[{"id":"https://openalex.org/I76130692","display_name":"Zhejiang University","ror":"https://ror.org/00a2xv884","country_code":"CN","type":"education","lineage":["https://openalex.org/I76130692"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zhonghe Jin","raw_affiliation_strings":["Micro-Satellite Research Center, Zhejiang University, Hangzhou, P.R., China"],"affiliations":[{"raw_affiliation_string":"Micro-Satellite Research Center, Zhejiang University, Hangzhou, P.R., China","institution_ids":["https://openalex.org/I76130692"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":5,"corresponding_author_ids":["https://openalex.org/A5053297903"],"corresponding_institution_ids":["https://openalex.org/I76130692"],"apc_list":null,"apc_paid":null,"fwci":0.5734,"has_fulltext":false,"cited_by_count":16,"citation_normalized_percentile":{"value":0.69797987,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":98},"biblio":{"volume":null,"issue":null,"first_page":"214","last_page":"217"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10299","display_name":"Photonic and Optical Devices","score":0.9987000226974487,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/accelerometer","display_name":"Accelerometer","score":0.8012617826461792},{"id":"https://openalex.org/keywords/allan-variance","display_name":"Allan variance","score":0.7362976670265198},{"id":"https://openalex.org/keywords/capacitive-sensing","display_name":"Capacitive sensing","score":0.664909303188324},{"id":"https://openalex.org/keywords/frequency-drift","display_name":"Frequency drift","score":0.6170669794082642},{"id":"https://openalex.org/keywords/control-theory","display_name":"Control theory (sociology)","score":0.5625806450843811},{"id":"https://openalex.org/keywords/compensation","display_name":"Compensation (psychology)","score":0.5619180202484131},{"id":"https://openalex.org/keywords/phase-locked-loop","display_name":"Phase-locked loop","score":0.5431565046310425},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.516916036605835},{"id":"https://openalex.org/keywords/offset","display_name":"Offset (computer science)","score":0.4581143260002136},{"id":"https://openalex.org/keywords/temperature-coefficient","display_name":"Temperature coefficient","score":0.44859611988067627},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.37667083740234375},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.36122193932533264},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.3310369551181793},{"id":"https://openalex.org/keywords/phase","display_name":"Phase (matter)","score":0.2806021571159363},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.23236170411109924},{"id":"https://openalex.org/keywords/standard-deviation","display_name":"Standard deviation","score":0.20841765403747559},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.18639513850212097},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.1760454773902893},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.16381466388702393},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.16055652499198914}],"concepts":[{"id":"https://openalex.org/C89805583","wikidata":"https://www.wikidata.org/wiki/Q192940","display_name":"Accelerometer","level":2,"score":0.8012617826461792},{"id":"https://openalex.org/C5722023","wikidata":"https://www.wikidata.org/wiki/Q1440227","display_name":"Allan variance","level":3,"score":0.7362976670265198},{"id":"https://openalex.org/C206755178","wikidata":"https://www.wikidata.org/wiki/Q1131271","display_name":"Capacitive sensing","level":2,"score":0.664909303188324},{"id":"https://openalex.org/C122348159","wikidata":"https://www.wikidata.org/wiki/Q5502869","display_name":"Frequency drift","level":4,"score":0.6170669794082642},{"id":"https://openalex.org/C47446073","wikidata":"https://www.wikidata.org/wiki/Q5165890","display_name":"Control theory (sociology)","level":3,"score":0.5625806450843811},{"id":"https://openalex.org/C2780023022","wikidata":"https://www.wikidata.org/wiki/Q1338171","display_name":"Compensation (psychology)","level":2,"score":0.5619180202484131},{"id":"https://openalex.org/C12707504","wikidata":"https://www.wikidata.org/wiki/Q52637","display_name":"Phase-locked loop","level":3,"score":0.5431565046310425},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.516916036605835},{"id":"https://openalex.org/C175291020","wikidata":"https://www.wikidata.org/wiki/Q1156822","display_name":"Offset (computer science)","level":2,"score":0.4581143260002136},{"id":"https://openalex.org/C16643434","wikidata":"https://www.wikidata.org/wiki/Q898642","display_name":"Temperature coefficient","level":2,"score":0.44859611988067627},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.37667083740234375},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.36122193932533264},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.3310369551181793},{"id":"https://openalex.org/C44280652","wikidata":"https://www.wikidata.org/wiki/Q104837","display_name":"Phase (matter)","level":2,"score":0.2806021571159363},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.23236170411109924},{"id":"https://openalex.org/C22679943","wikidata":"https://www.wikidata.org/wiki/Q159375","display_name":"Standard deviation","level":2,"score":0.20841765403747559},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.18639513850212097},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.1760454773902893},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.16381466388702393},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.16055652499198914},{"id":"https://openalex.org/C11171543","wikidata":"https://www.wikidata.org/wiki/Q41630","display_name":"Psychoanalysis","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C199360897","wikidata":"https://www.wikidata.org/wiki/Q9143","display_name":"Programming language","level":1,"score":0.0},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.0},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.0},{"id":"https://openalex.org/C15744967","wikidata":"https://www.wikidata.org/wiki/Q9418","display_name":"Psychology","level":0,"score":0.0},{"id":"https://openalex.org/C2775924081","wikidata":"https://www.wikidata.org/wiki/Q55608371","display_name":"Control (management)","level":2,"score":0.0},{"id":"https://openalex.org/C105795698","wikidata":"https://www.wikidata.org/wiki/Q12483","display_name":"Statistics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems.2017.8017009","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2017.8017009","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.7599999904632568,"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7"}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":5,"referenced_works":["https://openalex.org/W2012060173","https://openalex.org/W2087623600","https://openalex.org/W2134546517","https://openalex.org/W2287530299","https://openalex.org/W2305315853"],"related_works":["https://openalex.org/W2160325238","https://openalex.org/W3201436172","https://openalex.org/W2740701609","https://openalex.org/W1965527644","https://openalex.org/W3216002962","https://openalex.org/W3015470757","https://openalex.org/W2041625964","https://openalex.org/W3194231231","https://openalex.org/W2913766791","https://openalex.org/W2374188021"],"abstract_inverted_index":{"This":[0],"paper":[1],"presents":[2],"a":[3,9,35,85],"real-time":[4,47],"temperature":[5,22,69,87],"compensation":[6],"algorithm":[7],"for":[8,59],"force-rebalanced":[10,55],"MEMS":[11],"capacitive":[12],"accelerometer":[13,41,83],"which":[14,92,140],"relies":[15],"on":[16],"the":[17,21,40,46,53,60,67,72,82,102,111,115,136,142,145],"linear":[18],"relationship":[19],"between":[20],"and":[23,44],"its":[24],"dynamical":[25],"resonant":[26,48,73],"frequency.":[27],"A":[28],"phase-locked":[29],"loop":[30,56],"(PLL),":[31],"where":[32],"we":[33],"inject":[34],"drive":[36],"signal":[37],"to":[38,52,57,96,132],"excite":[39],"into":[42],"resonance":[43],"track":[45],"frequency,":[49],"is":[50,75,93,121],"added":[51],"conventional":[54],"compensate":[58],"temperature-induced":[61],"output":[62],"drifts.":[63],"Experiments":[64],"demonstrate":[65],"that":[66],"first-order":[68,86],"dependence":[70],"of":[71,81,89,106,118,127,144],"frequency":[74],"-0.1308":[76],"Hz/\u00b0C.":[77],"The":[78],"bias":[79,104],"offset":[80],"has":[84],"coefficient":[88],"3.54":[90],"mg/\u00b0C,":[91],"significantly":[94],"reduced":[95],"0.05":[97],"mg/\u00b0C":[98],"after":[99,109],"compensation.":[100],"Besides":[101],"improved":[103],"instability":[105],"1.6":[107],"\u03bcg":[108,131],"compensation,":[110],"long-term":[112],"drift":[113],"at":[114],"integration":[116],"time":[117],"100":[119],"s":[120],"suppressed":[122],"more":[123],"than":[124],"one":[125],"order":[126],"magnitude,":[128],"from":[129],"35":[130],"2.4":[133],"\u03bcg,":[134],"in":[135],"Allan":[137],"deviation":[138],"plot,":[139],"reveals":[141],"inhibition":[143],"temperature-related":[146],"performance":[147],"deterioration.":[148]},"counts_by_year":[{"year":2024,"cited_by_count":2},{"year":2023,"cited_by_count":5},{"year":2022,"cited_by_count":3},{"year":2021,"cited_by_count":2},{"year":2020,"cited_by_count":3},{"year":2019,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}