{"id":"https://openalex.org/W2752081649","doi":"https://doi.org/10.1109/nems.2017.8016963","title":"Nanoelectromechanical resonator for logic operations","display_name":"Nanoelectromechanical resonator for logic operations","publication_year":2017,"publication_date":"2017-04-01","ids":{"openalex":"https://openalex.org/W2752081649","doi":"https://doi.org/10.1109/nems.2017.8016963","mag":"2752081649"},"language":"en","primary_location":{"id":"doi:10.1109/nems.2017.8016963","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2017.8016963","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5031018633","display_name":"Syed N. R. Kazmi","orcid":"https://orcid.org/0000-0001-8145-9435"},"institutions":[{"id":"https://openalex.org/I71920554","display_name":"King Abdullah University of Science and Technology","ror":"https://ror.org/01q3tbs38","country_code":"SA","type":"education","lineage":["https://openalex.org/I71920554"]}],"countries":["SA"],"is_corresponding":true,"raw_author_name":"Syed N. R. Kazmi","raw_affiliation_strings":["Nano/Micro Mechanics and Motion Laboratory, King Abdullah University of Science and Technology, Thuwal, SA"],"affiliations":[{"raw_affiliation_string":"Nano/Micro Mechanics and Motion Laboratory, King Abdullah University of Science and Technology, Thuwal, SA","institution_ids":["https://openalex.org/I71920554"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5033838458","display_name":"Md Abdullah Al Hafiz","orcid":"https://orcid.org/0000-0002-1257-5093"},"institutions":[{"id":"https://openalex.org/I71920554","display_name":"King Abdullah University of Science and Technology","ror":"https://ror.org/01q3tbs38","country_code":"SA","type":"education","lineage":["https://openalex.org/I71920554"]}],"countries":["SA"],"is_corresponding":false,"raw_author_name":"Md A. Al Hafiz","raw_affiliation_strings":["Integrated Circuits and Systems Group, King Abdullah University of Science and Technology, Thuwal, SA"],"affiliations":[{"raw_affiliation_string":"Integrated Circuits and Systems Group, King Abdullah University of Science and Technology, Thuwal, SA","institution_ids":["https://openalex.org/I71920554"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5007303912","display_name":"Karumbaiah N. Chappanda","orcid":"https://orcid.org/0000-0003-0467-6764"},"institutions":[{"id":"https://openalex.org/I71920554","display_name":"King Abdullah University of Science and Technology","ror":"https://ror.org/01q3tbs38","country_code":"SA","type":"education","lineage":["https://openalex.org/I71920554"]}],"countries":["SA"],"is_corresponding":false,"raw_author_name":"Karumbaiah N. Chappanda","raw_affiliation_strings":["Nano/Micro Mechanics and Motion Laboratory, King Abdullah University of Science and Technology"],"affiliations":[{"raw_affiliation_string":"Nano/Micro Mechanics and Motion Laboratory, King Abdullah University of Science and Technology","institution_ids":["https://openalex.org/I71920554"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5043213156","display_name":"Saad Ilyas","orcid":"https://orcid.org/0000-0002-9389-9718"},"institutions":[{"id":"https://openalex.org/I71920554","display_name":"King Abdullah University of Science and Technology","ror":"https://ror.org/01q3tbs38","country_code":"SA","type":"education","lineage":["https://openalex.org/I71920554"]}],"countries":["SA"],"is_corresponding":false,"raw_author_name":"Saad Ilyas","raw_affiliation_strings":["Nano/Micro Mechanics and Motion Laboratory, King Abdullah University of Science and Technology"],"affiliations":[{"raw_affiliation_string":"Nano/Micro Mechanics and Motion Laboratory, King Abdullah University of Science and Technology","institution_ids":["https://openalex.org/I71920554"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5091912066","display_name":"Jorge A. Holgu\u00edn\u2010Lerma","orcid":"https://orcid.org/0000-0003-0138-9073"},"institutions":[{"id":"https://openalex.org/I71920554","display_name":"King Abdullah University of Science and Technology","ror":"https://ror.org/01q3tbs38","country_code":"SA","type":"education","lineage":["https://openalex.org/I71920554"]}],"countries":["SA"],"is_corresponding":false,"raw_author_name":"Jorge Holguin","raw_affiliation_strings":["Laboratory for Carbon Nanostructures, King Abdullah University of Science and Technology, Thuwal, Kingdom of Saudi Arabia"],"affiliations":[{"raw_affiliation_string":"Laboratory for Carbon Nanostructures, King Abdullah University of Science and Technology, Thuwal, Kingdom of Saudi Arabia","institution_ids":["https://openalex.org/I71920554"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5027445410","display_name":"Pedro M. F. J. Costa","orcid":"https://orcid.org/0000-0002-1993-6701"},"institutions":[{"id":"https://openalex.org/I71920554","display_name":"King Abdullah University of Science and Technology","ror":"https://ror.org/01q3tbs38","country_code":"SA","type":"education","lineage":["https://openalex.org/I71920554"]}],"countries":["SA"],"is_corresponding":false,"raw_author_name":"Pedro M. F. J. Costa","raw_affiliation_strings":["Laboratory for Carbon Nanostructures, King Abdullah University of Science and Technology, Thuwal, Kingdom of Saudi Arabia"],"affiliations":[{"raw_affiliation_string":"Laboratory for Carbon Nanostructures, King Abdullah University of Science and Technology, Thuwal, Kingdom of Saudi Arabia","institution_ids":["https://openalex.org/I71920554"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5035564926","display_name":"Mohammad I. Younis","orcid":"https://orcid.org/0000-0002-9491-1838"},"institutions":[{"id":"https://openalex.org/I71920554","display_name":"King Abdullah University of Science and Technology","ror":"https://ror.org/01q3tbs38","country_code":"SA","type":"education","lineage":["https://openalex.org/I71920554"]}],"countries":["SA"],"is_corresponding":false,"raw_author_name":"Mohammad I. Younis","raw_affiliation_strings":["Nano/Micro Mechanics and Motion Laboratory, King Abdullah University of Science and Technology, Saudi Arabia"],"affiliations":[{"raw_affiliation_string":"Nano/Micro Mechanics and Motion Laboratory, King Abdullah University of Science and Technology, Saudi Arabia","institution_ids":["https://openalex.org/I71920554"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":7,"corresponding_author_ids":["https://openalex.org/A5031018633"],"corresponding_institution_ids":["https://openalex.org/I71920554"],"apc_list":null,"apc_paid":null,"fwci":0.3643,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":{"value":0.64138559,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":94},"biblio":{"volume":"4","issue":null,"first_page":"11","last_page":"15"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":1.0,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":1.0,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10299","display_name":"Photonic and Optical Devices","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/nanoelectromechanical-systems","display_name":"Nanoelectromechanical systems","score":0.7818795442581177},{"id":"https://openalex.org/keywords/resonator","display_name":"Resonator","score":0.7766480445861816},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.6751196384429932},{"id":"https://openalex.org/keywords/silicon-on-insulator","display_name":"Silicon on insulator","score":0.6543166637420654},{"id":"https://openalex.org/keywords/xnor-gate","display_name":"XNOR gate","score":0.6331783533096313},{"id":"https://openalex.org/keywords/wafer","display_name":"Wafer","score":0.6113613247871399},{"id":"https://openalex.org/keywords/logic-gate","display_name":"Logic gate","score":0.5954394936561584},{"id":"https://openalex.org/keywords/lithography","display_name":"Lithography","score":0.5558423399925232},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.5076178312301636},{"id":"https://openalex.org/keywords/electron-beam-lithography","display_name":"Electron-beam lithography","score":0.5030729174613953},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.4612103998661041},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.38229480385780334},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.37257274985313416},{"id":"https://openalex.org/keywords/layer","display_name":"Layer (electronics)","score":0.1981629729270935},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.1965998411178589},{"id":"https://openalex.org/keywords/resist","display_name":"Resist","score":0.17112192511558533}],"concepts":[{"id":"https://openalex.org/C173409883","wikidata":"https://www.wikidata.org/wiki/Q175593","display_name":"Nanoelectromechanical systems","level":4,"score":0.7818795442581177},{"id":"https://openalex.org/C97126364","wikidata":"https://www.wikidata.org/wiki/Q349669","display_name":"Resonator","level":2,"score":0.7766480445861816},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6751196384429932},{"id":"https://openalex.org/C53143962","wikidata":"https://www.wikidata.org/wiki/Q1478788","display_name":"Silicon on insulator","level":3,"score":0.6543166637420654},{"id":"https://openalex.org/C57684291","wikidata":"https://www.wikidata.org/wiki/Q1336142","display_name":"XNOR gate","level":4,"score":0.6331783533096313},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.6113613247871399},{"id":"https://openalex.org/C131017901","wikidata":"https://www.wikidata.org/wiki/Q170451","display_name":"Logic gate","level":2,"score":0.5954394936561584},{"id":"https://openalex.org/C204223013","wikidata":"https://www.wikidata.org/wiki/Q133036","display_name":"Lithography","level":2,"score":0.5558423399925232},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.5076178312301636},{"id":"https://openalex.org/C200274948","wikidata":"https://www.wikidata.org/wiki/Q256845","display_name":"Electron-beam lithography","level":4,"score":0.5030729174613953},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.4612103998661041},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.38229480385780334},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.37257274985313416},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.1981629729270935},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.1965998411178589},{"id":"https://openalex.org/C53524968","wikidata":"https://www.wikidata.org/wiki/Q7315582","display_name":"Resist","level":3,"score":0.17112192511558533},{"id":"https://openalex.org/C15083742","wikidata":"https://www.wikidata.org/wiki/Q261659","display_name":"Nanomedicine","level":3,"score":0.0},{"id":"https://openalex.org/C124296912","wikidata":"https://www.wikidata.org/wiki/Q575178","display_name":"NAND gate","level":3,"score":0.0},{"id":"https://openalex.org/C155672457","wikidata":"https://www.wikidata.org/wiki/Q61231","display_name":"Nanoparticle","level":2,"score":0.0}],"mesh":[],"locations_count":3,"locations":[{"id":"doi:10.1109/nems.2017.8016963","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2017.8016963","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"},{"id":"pmh:oai:espace.library.uq.edu.au:UQ:27f63ce","is_oa":false,"landing_page_url":null,"pdf_url":null,"source":{"id":"https://openalex.org/S4306402388","display_name":"Queensland's institutional digital repository (The University of Queensland)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I165143802","host_organization_name":"The University of Queensland","host_organization_lineage":["https://openalex.org/I165143802"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"Conference Paper"},{"id":"pmh:oai:repository.kaust.edu.sa:10754/626004","is_oa":false,"landing_page_url":"http://hdl.handle.net/10754/626004","pdf_url":null,"source":{"id":"https://openalex.org/S4306401596","display_name":"King Abdullah University of Science and Technology Repository (King Abdullah University of Science and Technology)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I71920554","host_organization_name":"King Abdullah University of Science and Technology","host_organization_lineage":["https://openalex.org/I71920554"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"Conference Paper"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.6000000238418579,"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7"}],"awards":[],"funders":[{"id":"https://openalex.org/F4320322320","display_name":"King Abdullah University of Science and Technology","ror":"https://ror.org/01q3tbs38"}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":26,"referenced_works":["https://openalex.org/W647588539","https://openalex.org/W1968800422","https://openalex.org/W1979627478","https://openalex.org/W2000260960","https://openalex.org/W2010354323","https://openalex.org/W2022515348","https://openalex.org/W2041025721","https://openalex.org/W2047129435","https://openalex.org/W2049558367","https://openalex.org/W2049904690","https://openalex.org/W2063566734","https://openalex.org/W2076954674","https://openalex.org/W2097531050","https://openalex.org/W2129922478","https://openalex.org/W2131705086","https://openalex.org/W2132578175","https://openalex.org/W2153551298","https://openalex.org/W2155256776","https://openalex.org/W2166225675","https://openalex.org/W2318015981","https://openalex.org/W2335402702","https://openalex.org/W2950286889","https://openalex.org/W3105071727","https://openalex.org/W3105622120","https://openalex.org/W3120686793","https://openalex.org/W6788982687"],"related_works":["https://openalex.org/W2038378865","https://openalex.org/W4385413421","https://openalex.org/W2905185214","https://openalex.org/W4386414224","https://openalex.org/W2532170798","https://openalex.org/W2963244787","https://openalex.org/W2966758645","https://openalex.org/W2774773774","https://openalex.org/W2785627314","https://openalex.org/W1963739940"],"abstract_inverted_index":{"We":[0],"report":[1],"an":[2],"electro-thermally":[3],"tunable":[4],"in-plane":[5],"doubly-clamped":[6],"nanoelectromechanical":[7],"resonator":[8,26],"capable":[9],"of":[10,36,42,49,70],"dynamically":[11],"performing":[12],"NOR,":[13],"NOT,":[14],"XNOR,":[15],"XOR,":[16],"and":[17,33],"AND":[18],"logic":[19,51,72],"operations.":[20],"Toward":[21],"this,":[22],"a":[23,37,43],"silicon":[24],"based":[25],"is":[27,53],"fabricated":[28],"using":[29],"standard":[30],"e-beam":[31],"lithography":[32],"surface":[34],"nanomachining":[35],"highly":[38],"conductive":[39],"device":[40,52],"layer":[41],"silicon-on-insulator":[44],"(SOI)":[45],"wafer.":[46],"The":[47],"performance":[48],"this":[50],"examined":[54],"at":[55],"elevated":[56],"temperatures,":[57],"ranging":[58],"from":[59],"25":[60],"\u00b0C":[61],"to":[62],"85":[63],"\u00b0C,":[64],"demonstrating":[65],"its":[66],"resilience":[67],"for":[68],"most":[69],"the":[71,76],"operations;":[73],"thereby":[74],"paving":[75],"way":[77],"towards":[78],"nano-elements-based":[79],"mechanical":[80],"computing.":[81]},"counts_by_year":[{"year":2019,"cited_by_count":1},{"year":2018,"cited_by_count":1}],"updated_date":"2026-04-04T16:13:02.066488","created_date":"2025-10-10T00:00:00"}