{"id":"https://openalex.org/W2567717127","doi":"https://doi.org/10.1109/nems.2016.7758232","title":"CMOS MEMS infrared source based on black silicon","display_name":"CMOS MEMS infrared source based on black silicon","publication_year":2016,"publication_date":"2016-04-01","ids":{"openalex":"https://openalex.org/W2567717127","doi":"https://doi.org/10.1109/nems.2016.7758232","mag":"2567717127"},"language":"en","primary_location":{"id":"doi:10.1109/nems.2016.7758232","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2016.7758232","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5017178573","display_name":"Weibing Liu","orcid":"https://orcid.org/0000-0003-4885-1675"},"institutions":[{"id":"https://openalex.org/I135714990","display_name":"North University of China","ror":"https://ror.org/047bp1713","country_code":"CN","type":"education","lineage":["https://openalex.org/I135714990"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Weibing Liu","raw_affiliation_strings":["National Key Laboratory for Electronic Measurement Technology, North University of China, Taiyuan, People's Republic of China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Key Laboratory for Electronic Measurement Technology, North University of China, Taiyuan, People's Republic of China","institution_ids":["https://openalex.org/I135714990"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5020362768","display_name":"Anjie Ming","orcid":"https://orcid.org/0000-0001-8061-1570"},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"funder","lineage":["https://openalex.org/I19820366"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Anjie Ming","raw_affiliation_strings":["Institute of Microelectronics Chinese Academy of Sciences, Beijing, CN"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Microelectronics Chinese Academy of Sciences, Beijing, CN","institution_ids":["https://openalex.org/I19820366"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5031254872","display_name":"Yaohui Ren","orcid":null},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"funder","lineage":["https://openalex.org/I19820366"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yaohui Ren","raw_affiliation_strings":["Smart Sensing R&D Center, Chinese Academy of Sciences, Beijing, People's Republic of China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Smart Sensing R&D Center, Chinese Academy of Sciences, Beijing, People's Republic of China","institution_ids":["https://openalex.org/I19820366"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5002509281","display_name":"Qiulin Tan","orcid":"https://orcid.org/0000-0001-7877-9278"},"institutions":[{"id":"https://openalex.org/I135714990","display_name":"North University of China","ror":"https://ror.org/047bp1713","country_code":"CN","type":"education","lineage":["https://openalex.org/I135714990"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Qiulin Tan","raw_affiliation_strings":["National Key Laboratory for Electronic Measurement Technology, North University of China, Taiyuan, People's Republic of China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Key Laboratory for Electronic Measurement Technology, North University of China, Taiyuan, People's Republic of China","institution_ids":["https://openalex.org/I135714990"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5112241650","display_name":"Wen Ou","orcid":"https://orcid.org/0009-0001-0818-3388"},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"funder","lineage":["https://openalex.org/I19820366"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Wen Ou","raw_affiliation_strings":["Smart Sensing R&D Center, Chinese Academy of Sciences, Beijing, People's Republic of China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Smart Sensing R&D Center, Chinese Academy of Sciences, Beijing, People's Republic of China","institution_ids":["https://openalex.org/I19820366"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5109171564","display_name":"Xilong Sun","orcid":null},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Xilong Sun","raw_affiliation_strings":["Smart Sensor Engineering Center, Jiangsu R&D Center for Internet of Things, Wuxi, People's Republic of China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Smart Sensor Engineering Center, Jiangsu R&D Center for Internet of Things, Wuxi, People's Republic of China","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5112462500","display_name":"Weibing Wang","orcid":null},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"funder","lineage":["https://openalex.org/I19820366"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Weibing Wang","raw_affiliation_strings":["Smart Sensing R&D Center, Chinese Academy of Sciences, Beijing, People's Republic of China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Smart Sensing R&D Center, Chinese Academy of Sciences, Beijing, People's Republic of China","institution_ids":["https://openalex.org/I19820366"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100723405","display_name":"Dapeng Chen","orcid":"https://orcid.org/0000-0002-0494-2391"},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"funder","lineage":["https://openalex.org/I19820366"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Dapeng Chen","raw_affiliation_strings":["Smart Sensing R&D Center, Chinese Academy of Sciences, Beijing, People's Republic of China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Smart Sensing R&D Center, Chinese Academy of Sciences, Beijing, People's Republic of China","institution_ids":["https://openalex.org/I19820366"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5054341902","display_name":"Jijun Xiong","orcid":"https://orcid.org/0000-0003-1560-9858"},"institutions":[{"id":"https://openalex.org/I135714990","display_name":"North University of China","ror":"https://ror.org/047bp1713","country_code":"CN","type":"education","lineage":["https://openalex.org/I135714990"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jijun Xiong","raw_affiliation_strings":["National Key Laboratory for Electronic Measurement Technology, North University of China, Taiyuan, People's Republic of China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Key Laboratory for Electronic Measurement Technology, North University of China, Taiyuan, People's Republic of China","institution_ids":["https://openalex.org/I135714990"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":9,"corresponding_author_ids":["https://openalex.org/A5017178573"],"corresponding_institution_ids":["https://openalex.org/I135714990"],"apc_list":null,"apc_paid":null,"fwci":0.5579,"has_fulltext":false,"cited_by_count":6,"citation_normalized_percentile":{"value":0.72948712,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":98},"biblio":{"volume":null,"issue":null,"first_page":"200","last_page":"204"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10299","display_name":"Photonic and Optical Devices","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10299","display_name":"Photonic and Optical Devices","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11111","display_name":"Spectroscopy and Laser Applications","score":0.996999979019165,"subfield":{"id":"https://openalex.org/subfields/1607","display_name":"Spectroscopy"},"field":{"id":"https://openalex.org/fields/16","display_name":"Chemistry"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10205","display_name":"Advanced Fiber Optic Sensors","score":0.9962000250816345,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.6620317101478577},{"id":"https://openalex.org/keywords/emissivity","display_name":"Emissivity","score":0.6252323389053345},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.5471261739730835},{"id":"https://openalex.org/keywords/infrared","display_name":"Infrared","score":0.5380693078041077},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.5294902920722961},{"id":"https://openalex.org/keywords/cmos","display_name":"CMOS","score":0.4739168584346771},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.45931461453437805},{"id":"https://openalex.org/keywords/black-silicon","display_name":"Black silicon","score":0.44548243284225464},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.17827379703521729},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.17537984251976013}],"concepts":[{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.6620317101478577},{"id":"https://openalex.org/C163651212","wikidata":"https://www.wikidata.org/wiki/Q899670","display_name":"Emissivity","level":2,"score":0.6252323389053345},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5471261739730835},{"id":"https://openalex.org/C158355884","wikidata":"https://www.wikidata.org/wiki/Q11388","display_name":"Infrared","level":2,"score":0.5380693078041077},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.5294902920722961},{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.4739168584346771},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.45931461453437805},{"id":"https://openalex.org/C2778166601","wikidata":"https://www.wikidata.org/wiki/Q2254210","display_name":"Black silicon","level":3,"score":0.44548243284225464},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.17827379703521729},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.17537984251976013}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems.2016.7758232","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2016.7758232","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.8700000047683716,"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy"}],"awards":[],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"},{"id":"https://openalex.org/F4320322769","display_name":"Natural Science Foundation of Jiangsu Province","ror":"https://ror.org/01h0zpd94"}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":7,"referenced_works":["https://openalex.org/W1489905572","https://openalex.org/W1976017879","https://openalex.org/W2024376710","https://openalex.org/W2047140367","https://openalex.org/W2054044173","https://openalex.org/W2133031219","https://openalex.org/W2160950462"],"related_works":["https://openalex.org/W2808674559","https://openalex.org/W2560269517","https://openalex.org/W2387660561","https://openalex.org/W2037307975","https://openalex.org/W2955374719","https://openalex.org/W2376228633","https://openalex.org/W144683568","https://openalex.org/W2891121886","https://openalex.org/W2370498850","https://openalex.org/W2351918023"],"abstract_inverted_index":{"In":[0],"this":[1],"work,":[2],"a":[3],"MEMS":[4],"infrared":[5],"source":[6,23,82,98],"applied":[7],"to":[8,18,74],"compact":[9],"Non-Dispersive":[10],"Infrared":[11],"(NDIR)":[12],"gas":[13,122],"sensor":[14],"is":[15,39,53,83],"reported.":[16],"Compared":[17],"other":[19],"related":[20],"things,":[21],"the":[22,34,37,50,66,72,76,81,97,106,117,120],"coats":[24],"integrated":[25],"nanostructure":[26],"black":[27],"silicon":[28],"compatible":[29],"with":[30],"CMOS":[31],"technique":[32],"on":[33],"poly-silicon.":[35],"Hence":[36],"emissivity":[38],"as":[40,42],"high":[41],"98%":[43],"at":[44],"3\u223c5\u00b5m":[45],"wave":[46],"range;":[47],"relat":[48],"ively":[49],"radiation":[51],"efficiency":[52],"increased":[54],"by":[55],"40%":[56],"through":[57],"calculation.":[58],"Suspension":[59],"structure":[60],"and":[61,80],"DRIE":[62],"release":[63],"process":[64],"of":[65,119],"back":[67],"side":[68],"are":[69],"used":[70],"in":[71,102],"design":[73],"reduce":[75],"heat":[77,101],"conduction":[78],"losses,":[79],"only":[84],"sized":[85],"3\u00d73mm":[86],"<sup":[87],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[88],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">2</sup>":[89],"suitable":[90],"for":[91],"mass":[92],"production.":[93],"After":[94],"being":[95],"packed,":[96],"can":[99,109],"rapidly":[100],"20":[103],"ms,":[104],"besides":[105],"modulation":[107],"depth":[108],"reach":[110],"30%":[111],"below":[112],"50Hz,":[113],"which":[114],"all":[115],"meet":[116],"requirements":[118],"NDIR":[121],"sensor.":[123]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2025,"cited_by_count":1},{"year":2021,"cited_by_count":1},{"year":2019,"cited_by_count":1},{"year":2017,"cited_by_count":1},{"year":2016,"cited_by_count":1}],"updated_date":"2026-05-23T08:51:43.019350","created_date":"2025-10-10T00:00:00"}