{"id":"https://openalex.org/W2240998893","doi":"https://doi.org/10.1109/nems.2015.7147488","title":"A MEMS accelerometer for spindle monitoring system","display_name":"A MEMS accelerometer for spindle monitoring system","publication_year":2015,"publication_date":"2015-04-01","ids":{"openalex":"https://openalex.org/W2240998893","doi":"https://doi.org/10.1109/nems.2015.7147488","mag":"2240998893"},"language":"en","primary_location":{"id":"doi:10.1109/nems.2015.7147488","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2015.7147488","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5043351160","display_name":"Peng Wang","orcid":"https://orcid.org/0000-0002-0610-4754"},"institutions":[{"id":"https://openalex.org/I87445476","display_name":"Xi'an Jiaotong University","ror":"https://ror.org/017zhmm22","country_code":"CN","type":"education","lineage":["https://openalex.org/I87445476"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Peng Wang","raw_affiliation_strings":["State Key Laboratory for Mechanical Manufacturing Systems Egineering Xi 'an Jiaotong University Xi 'an Shaanxi Province, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory for Mechanical Manufacturing Systems Egineering Xi 'an Jiaotong University Xi 'an Shaanxi Province, China","institution_ids":["https://openalex.org/I87445476"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5056618863","display_name":"Yulong Zhao","orcid":"https://orcid.org/0000-0001-9186-3204"},"institutions":[{"id":"https://openalex.org/I87445476","display_name":"Xi'an Jiaotong University","ror":"https://ror.org/017zhmm22","country_code":"CN","type":"education","lineage":["https://openalex.org/I87445476"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yulong Zhao","raw_affiliation_strings":["State Key Laboratory for Mechanical Manufacturing Systems Egineering Xi 'an Jiaotong University Xi 'an Shaanxi Province, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory for Mechanical Manufacturing Systems Egineering Xi 'an Jiaotong University Xi 'an Shaanxi Province, China","institution_ids":["https://openalex.org/I87445476"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5049048876","display_name":"Bian Tian","orcid":"https://orcid.org/0000-0003-3845-5484"},"institutions":[{"id":"https://openalex.org/I87445476","display_name":"Xi'an Jiaotong University","ror":"https://ror.org/017zhmm22","country_code":"CN","type":"education","lineage":["https://openalex.org/I87445476"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Bian Tian","raw_affiliation_strings":["State Key Laboratory for Mechanical Manufacturing Systems Egineering Xi 'an Jiaotong University Xi 'an Shaanxi Province, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory for Mechanical Manufacturing Systems Egineering Xi 'an Jiaotong University Xi 'an Shaanxi Province, China","institution_ids":["https://openalex.org/I87445476"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101492286","display_name":"Yingxue Li","orcid":"https://orcid.org/0000-0002-1709-810X"},"institutions":[{"id":"https://openalex.org/I87445476","display_name":"Xi'an Jiaotong University","ror":"https://ror.org/017zhmm22","country_code":"CN","type":"education","lineage":["https://openalex.org/I87445476"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yingxue Li","raw_affiliation_strings":["State Key Laboratory for Mechanical Manufacturing Systems Egineering Xi 'an Jiaotong University Xi 'an Shaanxi Province, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory for Mechanical Manufacturing Systems Egineering Xi 'an Jiaotong University Xi 'an Shaanxi Province, China","institution_ids":["https://openalex.org/I87445476"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5100712262","display_name":"Yan Liu","orcid":"https://orcid.org/0000-0003-4580-8831"},"institutions":[{"id":"https://openalex.org/I149594827","display_name":"Xidian University","ror":"https://ror.org/05s92vm98","country_code":"CN","type":"education","lineage":["https://openalex.org/I149594827"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yan Liu","raw_affiliation_strings":["School of Electro-Mechanical Engineering Xidian University Xi 'an Shaanxi Province, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Electro-Mechanical Engineering Xidian University Xi 'an Shaanxi Province, China","institution_ids":["https://openalex.org/I149594827"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":5,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.4017,"has_fulltext":false,"cited_by_count":5,"citation_normalized_percentile":{"value":0.68698631,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":94},"biblio":{"volume":null,"issue":null,"first_page":"545","last_page":"549"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10205","display_name":"Advanced Fiber Optic Sensors","score":0.9983000159263611,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9983000159263611,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/accelerometer","display_name":"Accelerometer","score":0.940936803817749},{"id":"https://openalex.org/keywords/vibration","display_name":"Vibration","score":0.7345911264419556},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.7242594957351685},{"id":"https://openalex.org/keywords/acceleration","display_name":"Acceleration","score":0.7235180139541626},{"id":"https://openalex.org/keywords/cantilever","display_name":"Cantilever","score":0.7002426385879517},{"id":"https://openalex.org/keywords/sensitivity","display_name":"Sensitivity (control systems)","score":0.5832650065422058},{"id":"https://openalex.org/keywords/signal","display_name":"SIGNAL (programming language)","score":0.5815778970718384},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.4591810405254364},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.38799917697906494},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.3865501880645752},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.27839452028274536},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.27573686838150024},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.17440080642700195},{"id":"https://openalex.org/keywords/structural-engineering","display_name":"Structural engineering","score":0.11200544238090515},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.06440973281860352}],"concepts":[{"id":"https://openalex.org/C89805583","wikidata":"https://www.wikidata.org/wiki/Q192940","display_name":"Accelerometer","level":2,"score":0.940936803817749},{"id":"https://openalex.org/C198394728","wikidata":"https://www.wikidata.org/wiki/Q3695508","display_name":"Vibration","level":2,"score":0.7345911264419556},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.7242594957351685},{"id":"https://openalex.org/C117896860","wikidata":"https://www.wikidata.org/wiki/Q11376","display_name":"Acceleration","level":2,"score":0.7235180139541626},{"id":"https://openalex.org/C141354745","wikidata":"https://www.wikidata.org/wiki/Q17227","display_name":"Cantilever","level":2,"score":0.7002426385879517},{"id":"https://openalex.org/C21200559","wikidata":"https://www.wikidata.org/wiki/Q7451068","display_name":"Sensitivity (control systems)","level":2,"score":0.5832650065422058},{"id":"https://openalex.org/C2779843651","wikidata":"https://www.wikidata.org/wiki/Q7390335","display_name":"SIGNAL (programming language)","level":2,"score":0.5815778970718384},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.4591810405254364},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.38799917697906494},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.3865501880645752},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.27839452028274536},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.27573686838150024},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.17440080642700195},{"id":"https://openalex.org/C66938386","wikidata":"https://www.wikidata.org/wiki/Q633538","display_name":"Structural engineering","level":1,"score":0.11200544238090515},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.06440973281860352},{"id":"https://openalex.org/C74650414","wikidata":"https://www.wikidata.org/wiki/Q11397","display_name":"Classical mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C199360897","wikidata":"https://www.wikidata.org/wiki/Q9143","display_name":"Programming language","level":1,"score":0.0},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems.2015.7147488","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2015.7147488","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7","score":0.7799999713897705}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":10,"referenced_works":["https://openalex.org/W1987780641","https://openalex.org/W2022991117","https://openalex.org/W2041403103","https://openalex.org/W2044081167","https://openalex.org/W2072793009","https://openalex.org/W2094353369","https://openalex.org/W2134351095","https://openalex.org/W2149128480","https://openalex.org/W2168828246","https://openalex.org/W2621919695"],"related_works":["https://openalex.org/W4384517610","https://openalex.org/W3161496874","https://openalex.org/W2048171849","https://openalex.org/W4288389100","https://openalex.org/W2026330382","https://openalex.org/W2915680872","https://openalex.org/W1902800522","https://openalex.org/W2339469482","https://openalex.org/W2359831757","https://openalex.org/W2241383474"],"abstract_inverted_index":{"Vibration":[0],"acceleration":[1,48],"detection":[2],"of":[3,29,49,73,87],"spindle":[4,40,53,81,88],"monitoring":[5,82,89,114],"requires":[6],"that":[7,34,70,100],"the":[8,19,39,46,50,55,58,71,74,80,84,101,109,113],"accelerometer":[9,33,56],"has":[10],"an":[11],"adequate":[12],"measurement":[13],"sensitivity":[14],"and":[15],"response":[16],"frequency":[17],"above":[18],"interested":[20],"range.":[21],"This":[22],"paper":[23],"aims":[24],"at":[25,93],"design":[26,72],"a":[27],"kind":[28],"micro-electro-mechanical":[30],"system":[31,90],"(MEMS)":[32],"can":[35,76],"be":[36,77],"used":[37,78],"in":[38,79,112],"component's":[41],"vibration":[42,47,85,110],"detection.":[43],"To":[44],"measure":[45],"high":[51],"speed":[52],"accurately,":[54],"uses":[57],"cantilever":[59],"beam-membrane":[60],"(CBM)":[61],"structure":[62],"as":[63],"sensing":[64],"structure.":[65],"In":[66],"order":[67],"to":[68,106],"verify":[69],"sensor":[75,103],"system,":[83],"signal":[86],"were":[91],"tested":[92],"different":[94],"rotational":[95],"speed.":[96],"Experimental":[97],"results":[98],"show":[99],"developed":[102],"is":[104],"able":[105],"accurately":[107],"identify":[108],"signals":[111],"system.":[115]},"counts_by_year":[{"year":2024,"cited_by_count":1},{"year":2020,"cited_by_count":1},{"year":2019,"cited_by_count":1},{"year":2018,"cited_by_count":1},{"year":2017,"cited_by_count":1}],"updated_date":"2026-06-11T09:08:48.828518","created_date":"2025-10-10T00:00:00"}