{"id":"https://openalex.org/W2261551378","doi":"https://doi.org/10.1109/nems.2015.7147420","title":"A novel scheme design of a high-g optical NEMS accelerometer based on a single chip grating with proper sensitivity and large bandwidth","display_name":"A novel scheme design of a high-g optical NEMS accelerometer based on a single chip grating with proper sensitivity and large bandwidth","publication_year":2015,"publication_date":"2015-04-01","ids":{"openalex":"https://openalex.org/W2261551378","doi":"https://doi.org/10.1109/nems.2015.7147420","mag":"2261551378"},"language":"en","primary_location":{"id":"doi:10.1109/nems.2015.7147420","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2015.7147420","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5066978921","display_name":"Qianbo Lu","orcid":"https://orcid.org/0000-0003-4195-7602"},"institutions":[{"id":"https://openalex.org/I4391767668","display_name":"State Key Laboratory of Modern Optical Instruments","ror":"https://ror.org/018fpas51","country_code":null,"type":"facility","lineage":["https://openalex.org/I4391767668","https://openalex.org/I76130692"]},{"id":"https://openalex.org/I76130692","display_name":"Zhejiang University","ror":"https://ror.org/00a2xv884","country_code":"CN","type":"education","lineage":["https://openalex.org/I76130692"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Qianbo Lu","raw_affiliation_strings":["Zhejiang University, State Key Laboratory of Modern Optical Instrumentation, Hangzhou, China"],"affiliations":[{"raw_affiliation_string":"Zhejiang University, State Key Laboratory of Modern Optical Instrumentation, Hangzhou, China","institution_ids":["https://openalex.org/I76130692","https://openalex.org/I4391767668"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100773961","display_name":"Jian Bai","orcid":"https://orcid.org/0000-0002-5128-2146"},"institutions":[{"id":"https://openalex.org/I76130692","display_name":"Zhejiang University","ror":"https://ror.org/00a2xv884","country_code":"CN","type":"education","lineage":["https://openalex.org/I76130692"]},{"id":"https://openalex.org/I4391767668","display_name":"State Key Laboratory of Modern Optical Instruments","ror":"https://ror.org/018fpas51","country_code":null,"type":"facility","lineage":["https://openalex.org/I4391767668","https://openalex.org/I76130692"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jian Bai","raw_affiliation_strings":["Zhejiang University, State Key Laboratory of Modern Optical Instrumentation, Hangzhou, China"],"affiliations":[{"raw_affiliation_string":"Zhejiang University, State Key Laboratory of Modern Optical Instrumentation, Hangzhou, China","institution_ids":["https://openalex.org/I76130692","https://openalex.org/I4391767668"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5028689104","display_name":"Wenxiu Lian","orcid":null},"institutions":[{"id":"https://openalex.org/I4391767668","display_name":"State Key Laboratory of Modern Optical Instruments","ror":"https://ror.org/018fpas51","country_code":null,"type":"facility","lineage":["https://openalex.org/I4391767668","https://openalex.org/I76130692"]},{"id":"https://openalex.org/I76130692","display_name":"Zhejiang University","ror":"https://ror.org/00a2xv884","country_code":"CN","type":"education","lineage":["https://openalex.org/I76130692"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Wenxiu Lian","raw_affiliation_strings":["Zhejiang University, State Key Laboratory of Modern Optical Instrumentation, Hangzhou, China"],"affiliations":[{"raw_affiliation_string":"Zhejiang University, State Key Laboratory of Modern Optical Instrumentation, Hangzhou, China","institution_ids":["https://openalex.org/I76130692","https://openalex.org/I4391767668"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5080385387","display_name":"Shuqi Lou","orcid":null},"institutions":[{"id":"https://openalex.org/I4391767668","display_name":"State Key Laboratory of Modern Optical Instruments","ror":"https://ror.org/018fpas51","country_code":null,"type":"facility","lineage":["https://openalex.org/I4391767668","https://openalex.org/I76130692"]},{"id":"https://openalex.org/I76130692","display_name":"Zhejiang University","ror":"https://ror.org/00a2xv884","country_code":"CN","type":"education","lineage":["https://openalex.org/I76130692"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Shuqi Lou","raw_affiliation_strings":["Zhejiang University, State Key Laboratory of Modern Optical Instrumentation, Hangzhou, China"],"affiliations":[{"raw_affiliation_string":"Zhejiang University, State Key Laboratory of Modern Optical Instrumentation, Hangzhou, China","institution_ids":["https://openalex.org/I76130692","https://openalex.org/I4391767668"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":["https://openalex.org/A5066978921"],"corresponding_institution_ids":["https://openalex.org/I4391767668","https://openalex.org/I76130692"],"apc_list":null,"apc_paid":null,"fwci":0.5919,"has_fulltext":false,"cited_by_count":6,"citation_normalized_percentile":{"value":0.73440045,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":96},"biblio":{"volume":"50","issue":null,"first_page":"248","last_page":"253"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10299","display_name":"Photonic and Optical Devices","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/accelerometer","display_name":"Accelerometer","score":0.7073857188224792},{"id":"https://openalex.org/keywords/silicon-on-insulator","display_name":"Silicon on insulator","score":0.6403908133506775},{"id":"https://openalex.org/keywords/grating","display_name":"Grating","score":0.6122313141822815},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.6065553426742554},{"id":"https://openalex.org/keywords/nanoelectromechanical-systems","display_name":"Nanoelectromechanical systems","score":0.5611103177070618},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.5468938946723938},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.49721410870552063},{"id":"https://openalex.org/keywords/chip","display_name":"Chip","score":0.4526124894618988},{"id":"https://openalex.org/keywords/bandwidth","display_name":"Bandwidth (computing)","score":0.4523636996746063},{"id":"https://openalex.org/keywords/acceleration","display_name":"Acceleration","score":0.4301328659057617},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.3452633023262024},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.3307783007621765},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.2192366123199463},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.21330693364143372},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.19596180319786072},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.18980354070663452},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.12535995244979858},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.0934489369392395},{"id":"https://openalex.org/keywords/telecommunications","display_name":"Telecommunications","score":0.07966050505638123}],"concepts":[{"id":"https://openalex.org/C89805583","wikidata":"https://www.wikidata.org/wiki/Q192940","display_name":"Accelerometer","level":2,"score":0.7073857188224792},{"id":"https://openalex.org/C53143962","wikidata":"https://www.wikidata.org/wiki/Q1478788","display_name":"Silicon on insulator","level":3,"score":0.6403908133506775},{"id":"https://openalex.org/C2777813233","wikidata":"https://www.wikidata.org/wiki/Q1527816","display_name":"Grating","level":2,"score":0.6122313141822815},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6065553426742554},{"id":"https://openalex.org/C173409883","wikidata":"https://www.wikidata.org/wiki/Q175593","display_name":"Nanoelectromechanical systems","level":4,"score":0.5611103177070618},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.5468938946723938},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.49721410870552063},{"id":"https://openalex.org/C165005293","wikidata":"https://www.wikidata.org/wiki/Q1074500","display_name":"Chip","level":2,"score":0.4526124894618988},{"id":"https://openalex.org/C2776257435","wikidata":"https://www.wikidata.org/wiki/Q1576430","display_name":"Bandwidth (computing)","level":2,"score":0.4523636996746063},{"id":"https://openalex.org/C117896860","wikidata":"https://www.wikidata.org/wiki/Q11376","display_name":"Acceleration","level":2,"score":0.4301328659057617},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.3452633023262024},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.3307783007621765},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.2192366123199463},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.21330693364143372},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.19596180319786072},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.18980354070663452},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.12535995244979858},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.0934489369392395},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.07966050505638123},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C15083742","wikidata":"https://www.wikidata.org/wiki/Q261659","display_name":"Nanomedicine","level":3,"score":0.0},{"id":"https://openalex.org/C155672457","wikidata":"https://www.wikidata.org/wiki/Q61231","display_name":"Nanoparticle","level":2,"score":0.0},{"id":"https://openalex.org/C74650414","wikidata":"https://www.wikidata.org/wiki/Q11397","display_name":"Classical mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems.2015.7147420","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2015.7147420","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy","score":0.6000000238418579}],"awards":[],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":16,"referenced_works":["https://openalex.org/W1966519343","https://openalex.org/W1974418224","https://openalex.org/W1985487629","https://openalex.org/W1987911181","https://openalex.org/W2016580240","https://openalex.org/W2021559722","https://openalex.org/W2030667803","https://openalex.org/W2034414386","https://openalex.org/W2037566188","https://openalex.org/W2092445640","https://openalex.org/W2149128480","https://openalex.org/W2165032565","https://openalex.org/W2173503218","https://openalex.org/W2563505887","https://openalex.org/W2895480274","https://openalex.org/W3103439949"],"related_works":["https://openalex.org/W4285099144","https://openalex.org/W2294335124","https://openalex.org/W4317346967","https://openalex.org/W1514561573","https://openalex.org/W1527636689","https://openalex.org/W3161496874","https://openalex.org/W2026330382","https://openalex.org/W2915680872","https://openalex.org/W1852323362","https://openalex.org/W1559034281"],"abstract_inverted_index":{"In":[0,93],"this":[1,69,103],"paper,":[2],"an":[3,8],"innovative":[4],"scheme":[5],"design":[6],"of":[7,42,73,91,112,118],"optical":[9,38,61,83],"NEMS":[10],"accelerometer":[11,104],"based":[12],"on":[13],"a":[14,29,43,55,95],"grating":[15,44],"with":[16,51],"proper":[17],"sensitivity":[18,57,132],"and":[19,33,45,82,133],"dynamic":[20],"range":[21],"is":[22,65,100,122],"proposed,":[23],"which":[24,75,127],"can":[25,128],"be":[26],"fabricated":[27],"by":[28,124],"single":[30],"SOI":[31],"chip":[32],"IC":[34],"integration":[35],"technique.":[36],"An":[37],"micro":[39],"cavity":[40],"composed":[41],"the":[46,79,89,107,110,113,119,125],"bottom":[47],"bulk":[48],"silicon":[49],"coated":[50],"argentum":[52],"serves":[53],"as":[54,77],"high":[56,130],"displacement":[58,62,111],"sensor.":[59],"The":[60,71,116],"detecting":[63],"principle":[64],"specifically":[66],"discussed":[67],"in":[68],"paper.":[70],"parameter":[72],"grating,":[74],"acts":[76],"both":[78],"inertial":[80,114],"mass":[81],"element,":[84],"has":[85],"been":[86],"designed":[87],"through":[88],"optimization":[90],"FDTD.":[92],"addition,":[94],"quad":[96],"serpentine":[97],"beam":[98],"structure":[99,121],"introduced":[101],"to":[102,105,109],"transfer":[106],"acceleration":[108],"mass.":[115],"performance":[117],"mechanical":[120,131],"optimized":[123],"ANSYS,":[126],"acquire":[129],"extremely":[134],"low":[135],"crosstalk":[136],"between":[137],"different":[138],"sensitive":[139],"axes.":[140]},"counts_by_year":[{"year":2024,"cited_by_count":1},{"year":2021,"cited_by_count":1},{"year":2019,"cited_by_count":1},{"year":2017,"cited_by_count":2},{"year":2016,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}