{"id":"https://openalex.org/W2256749539","doi":"https://doi.org/10.1109/nems.2015.7147418","title":"Broadband piezoelectric micromachined ultrasonic transducer (pMUT) using mode-merged design","display_name":"Broadband piezoelectric micromachined ultrasonic transducer (pMUT) using mode-merged design","publication_year":2015,"publication_date":"2015-04-01","ids":{"openalex":"https://openalex.org/W2256749539","doi":"https://doi.org/10.1109/nems.2015.7147418","mag":"2256749539"},"language":"en","primary_location":{"id":"doi:10.1109/nems.2015.7147418","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2015.7147418","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5100453536","display_name":"Tao Wang","orcid":"https://orcid.org/0000-0002-4821-5620"},"institutions":[{"id":"https://openalex.org/I4210125878","display_name":"Suzhou Research Institute","ror":"https://ror.org/03ebk0c60","country_code":"CN","type":"facility","lineage":["https://openalex.org/I4210125878"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Tao Wang","raw_affiliation_strings":["Department of Electrical and Computer Engineering, NUS (Suzhou) Research Institute, Suzhou, China"],"affiliations":[{"raw_affiliation_string":"Department of Electrical and Computer Engineering, NUS (Suzhou) Research Institute, Suzhou, China","institution_ids":["https://openalex.org/I4210125878"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5102827234","display_name":"Takeshi Kobayashi","orcid":"https://orcid.org/0000-0003-4029-6363"},"institutions":[{"id":"https://openalex.org/I4210125878","display_name":"Suzhou Research Institute","ror":"https://ror.org/03ebk0c60","country_code":"CN","type":"facility","lineage":["https://openalex.org/I4210125878"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Takeshi Kobayashi","raw_affiliation_strings":["Department of Electrical and Computer Engineering, NUS (Suzhou) Research Institute, Suzhou, China"],"affiliations":[{"raw_affiliation_string":"Department of Electrical and Computer Engineering, NUS (Suzhou) Research Institute, Suzhou, China","institution_ids":["https://openalex.org/I4210125878"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5084452777","display_name":"Chengkuo Lee","orcid":"https://orcid.org/0000-0002-8886-3649"},"institutions":[{"id":"https://openalex.org/I73613424","display_name":"National Institute of Advanced Industrial Science and Technology","ror":"https://ror.org/01703db54","country_code":"JP","type":"government","lineage":["https://openalex.org/I73613424"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Chengkuo Lee","raw_affiliation_strings":["National Institute of Advance Industrial Science and Technology (AIST), Tsukuba, Japan"],"affiliations":[{"raw_affiliation_string":"National Institute of Advance Industrial Science and Technology (AIST), Tsukuba, Japan","institution_ids":["https://openalex.org/I73613424"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":3,"corresponding_author_ids":["https://openalex.org/A5100453536"],"corresponding_institution_ids":["https://openalex.org/I4210125878"],"apc_list":null,"apc_paid":null,"fwci":0.3508,"has_fulltext":false,"cited_by_count":16,"citation_normalized_percentile":{"value":0.64514808,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":99},"biblio":{"volume":null,"issue":null,"first_page":"238","last_page":"242"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10662","display_name":"Ultrasonics and Acoustic Wave Propagation","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10662","display_name":"Ultrasonics and Acoustic Wave Propagation","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10727","display_name":"Ultrasound Imaging and Elastography","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/2741","display_name":"Radiology, Nuclear Medicine and Imaging"},"field":{"id":"https://openalex.org/fields/27","display_name":"Medicine"},"domain":{"id":"https://openalex.org/domains/4","display_name":"Health Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9994000196456909,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/pmut","display_name":"PMUT","score":0.8741793632507324},{"id":"https://openalex.org/keywords/ultrasonic-sensor","display_name":"Ultrasonic sensor","score":0.837239682674408},{"id":"https://openalex.org/keywords/transducer","display_name":"Transducer","score":0.7147013545036316},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.7074962854385376},{"id":"https://openalex.org/keywords/capacitive-micromachined-ultrasonic-transducers","display_name":"Capacitive micromachined ultrasonic transducers","score":0.6978759765625},{"id":"https://openalex.org/keywords/bandwidth","display_name":"Bandwidth (computing)","score":0.6898276209831238},{"id":"https://openalex.org/keywords/piezoelectricity","display_name":"Piezoelectricity","score":0.6756214499473572},{"id":"https://openalex.org/keywords/broadband","display_name":"Broadband","score":0.6174106001853943},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.5889644026756287},{"id":"https://openalex.org/keywords/center-frequency","display_name":"Center frequency","score":0.5298866033554077},{"id":"https://openalex.org/keywords/ultrasound","display_name":"Ultrasound","score":0.44172993302345276},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.2946367859840393},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.23981726169586182},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.1911066174507141},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.15740516781806946},{"id":"https://openalex.org/keywords/band-pass-filter","display_name":"Band-pass filter","score":0.12234306335449219},{"id":"https://openalex.org/keywords/telecommunications","display_name":"Telecommunications","score":0.09321382641792297},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.09312498569488525}],"concepts":[{"id":"https://openalex.org/C57693265","wikidata":"https://www.wikidata.org/wiki/Q17105295","display_name":"PMUT","level":3,"score":0.8741793632507324},{"id":"https://openalex.org/C81288441","wikidata":"https://www.wikidata.org/wiki/Q20736125","display_name":"Ultrasonic sensor","level":2,"score":0.837239682674408},{"id":"https://openalex.org/C56318395","wikidata":"https://www.wikidata.org/wiki/Q215928","display_name":"Transducer","level":2,"score":0.7147013545036316},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.7074962854385376},{"id":"https://openalex.org/C58772458","wikidata":"https://www.wikidata.org/wiki/Q5034480","display_name":"Capacitive micromachined ultrasonic transducers","level":3,"score":0.6978759765625},{"id":"https://openalex.org/C2776257435","wikidata":"https://www.wikidata.org/wiki/Q1576430","display_name":"Bandwidth (computing)","level":2,"score":0.6898276209831238},{"id":"https://openalex.org/C100082104","wikidata":"https://www.wikidata.org/wiki/Q183759","display_name":"Piezoelectricity","level":2,"score":0.6756214499473572},{"id":"https://openalex.org/C509933004","wikidata":"https://www.wikidata.org/wiki/Q194163","display_name":"Broadband","level":2,"score":0.6174106001853943},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5889644026756287},{"id":"https://openalex.org/C7054721","wikidata":"https://www.wikidata.org/wiki/Q1940572","display_name":"Center frequency","level":3,"score":0.5298866033554077},{"id":"https://openalex.org/C143753070","wikidata":"https://www.wikidata.org/wiki/Q162564","display_name":"Ultrasound","level":2,"score":0.44172993302345276},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.2946367859840393},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.23981726169586182},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.1911066174507141},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.15740516781806946},{"id":"https://openalex.org/C147788027","wikidata":"https://www.wikidata.org/wiki/Q2718101","display_name":"Band-pass filter","level":2,"score":0.12234306335449219},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.09321382641792297},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.09312498569488525}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems.2015.7147418","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2015.7147418","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Clean water and sanitation","score":0.49000000953674316,"id":"https://metadata.un.org/sdg/6"}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":17,"referenced_works":["https://openalex.org/W228085258","https://openalex.org/W1560133025","https://openalex.org/W1983698097","https://openalex.org/W2006491141","https://openalex.org/W2006878182","https://openalex.org/W2009413526","https://openalex.org/W2009438874","https://openalex.org/W2011096988","https://openalex.org/W2023325937","https://openalex.org/W2092950681","https://openalex.org/W2113944300","https://openalex.org/W2124726994","https://openalex.org/W2138568329","https://openalex.org/W2145602502","https://openalex.org/W2150266890","https://openalex.org/W2154468315","https://openalex.org/W4298036988"],"related_works":["https://openalex.org/W47979711","https://openalex.org/W3189577114","https://openalex.org/W2028126761","https://openalex.org/W2766757780","https://openalex.org/W4295916899","https://openalex.org/W2249803141","https://openalex.org/W4390293826","https://openalex.org/W1978089044","https://openalex.org/W2379895680","https://openalex.org/W2003422171"],"abstract_inverted_index":{"Broadband":[0],"ultrasonic":[1,18,35,41,154],"transducer":[2,36,42],"is":[3,44,54,105,117,136,148],"always":[4],"preferred":[5],"for":[6,109,156],"diagnostic":[7,157],"ultrasound":[8,158],"imaging,":[9,159],"because":[10],"wide":[11],"frequency":[12,27,80,129,140],"bandwidth":[13,28,101],"can":[14,163],"reduce":[15],"duration":[16,132],"of":[17,29,72,102,122,133,141],"pulse":[19,131],"and":[20,37],"enhance":[21],"the":[22,110,152,160,169],"axial":[23,161],"imaging":[24],"resolution.":[25],"However,":[26],"both":[30],"bulk":[31],"piezoelectric":[32,39],"ceramics":[33],"based":[34],"conventional":[38,123,153],"micromachined":[40],"(pMUT)":[43],"quite":[45],"limited.":[46],"To":[47],"overcome":[48],"this":[49,57,83,145],"limitation,":[50],"a":[51,61,78],"mode-merging":[52],"pMUT":[53,84,112,147],"presented":[55],"in":[56,86,107],"paper.":[58],"By":[59],"using":[60],"rectangular":[62],"membrane":[63],"with":[64],"large":[65],"length":[66],"/":[67],"width":[68],"aspect":[69],"ratio,":[70],"numbers":[71],"resonant":[73],"modes":[74,91],"are":[75,92],"excited":[76,90],"within":[77],"narrow":[79],"range.":[81,171],"When":[82],"works":[85],"largely":[87],"damped":[88],"medium,":[89],"merged":[93],"together,":[94],"forming":[95],"an":[96],"ultra-wide":[97,128],"bandwidth.":[98],"A":[99],"-6dB":[100],"over":[103],"94%":[104],"measured":[106],"water":[108],"proposed":[111],"without":[113,167],"matching":[114],"layer,":[115],"which":[116],"significantly":[118,165],"broader":[119],"than":[120],"that":[121],"pMUT.":[124],"Benefited":[125],"from":[126],"such":[127],"bandwidth,":[130],"1":[134],"\u03bcs":[135],"achieved":[137],"at":[138],"central":[139],"1.24":[142],"MHz.":[143],"If":[144],"broadband":[146],"utilized":[149],"to":[150],"replace":[151],"transducers":[155],"resolution":[162],"be":[164],"enhanced":[166],"compromising":[168],"sensing":[170]},"counts_by_year":[{"year":2026,"cited_by_count":2},{"year":2025,"cited_by_count":4},{"year":2024,"cited_by_count":2},{"year":2022,"cited_by_count":4},{"year":2021,"cited_by_count":1},{"year":2020,"cited_by_count":2},{"year":2016,"cited_by_count":1}],"updated_date":"2026-03-13T16:22:10.518609","created_date":"2025-10-10T00:00:00"}