{"id":"https://openalex.org/W2254742977","doi":"https://doi.org/10.1109/nems.2015.7147395","title":"A micro scale oxidation film generated by gas discharge plasma at atmosphere","display_name":"A micro scale oxidation film generated by gas discharge plasma at atmosphere","publication_year":2015,"publication_date":"2015-04-01","ids":{"openalex":"https://openalex.org/W2254742977","doi":"https://doi.org/10.1109/nems.2015.7147395","mag":"2254742977"},"language":"en","primary_location":{"id":"doi:10.1109/nems.2015.7147395","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2015.7147395","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5025012835","display_name":"Wei Dai","orcid":"https://orcid.org/0000-0002-0760-5139"},"institutions":[{"id":"https://openalex.org/I47720641","display_name":"Huazhong University of Science and Technology","ror":"https://ror.org/00p991c53","country_code":"CN","type":"education","lineage":["https://openalex.org/I47720641"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Wei Dai","raw_affiliation_strings":["College of Materials Science and Engineering, Huazhong University of Science and Technology, Wuhan, China"],"affiliations":[{"raw_affiliation_string":"College of Materials Science and Engineering, Huazhong University of Science and Technology, Wuhan, China","institution_ids":["https://openalex.org/I47720641"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100404125","display_name":"Jianjun Li","orcid":"https://orcid.org/0000-0002-6891-1324"},"institutions":[{"id":"https://openalex.org/I47720641","display_name":"Huazhong University of Science and Technology","ror":"https://ror.org/00p991c53","country_code":"CN","type":"education","lineage":["https://openalex.org/I47720641"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jianjun Li","raw_affiliation_strings":["College of Materials Science and Engineering, Huazhong University of Science and Technology, Wuhan, China"],"affiliations":[{"raw_affiliation_string":"College of Materials Science and Engineering, Huazhong University of Science and Technology, Wuhan, China","institution_ids":["https://openalex.org/I47720641"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5103947507","display_name":"Zhizhen Zheng","orcid":null},"institutions":[{"id":"https://openalex.org/I47720641","display_name":"Huazhong University of Science and Technology","ror":"https://ror.org/00p991c53","country_code":"CN","type":"education","lineage":["https://openalex.org/I47720641"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zhizhen Zheng","raw_affiliation_strings":["College of Materials Science and Engineering, Huazhong University of Science and Technology, Wuhan, China"],"affiliations":[{"raw_affiliation_string":"College of Materials Science and Engineering, Huazhong University of Science and Technology, Wuhan, China","institution_ids":["https://openalex.org/I47720641"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5102643147","display_name":"Qiwen Huang","orcid":"https://orcid.org/0009-0002-4181-1072"},"institutions":[{"id":"https://openalex.org/I47720641","display_name":"Huazhong University of Science and Technology","ror":"https://ror.org/00p991c53","country_code":"CN","type":"education","lineage":["https://openalex.org/I47720641"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Qiwen Huang","raw_affiliation_strings":["College of Materials Science and Engineering, Huazhong University of Science and Technology, Wuhan, China"],"affiliations":[{"raw_affiliation_string":"College of Materials Science and Engineering, Huazhong University of Science and Technology, Wuhan, China","institution_ids":["https://openalex.org/I47720641"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":["https://openalex.org/A5025012835"],"corresponding_institution_ids":["https://openalex.org/I47720641"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.14478514,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"143","last_page":"144"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10642","display_name":"Plasma Applications and Diagnostics","score":0.9861000180244446,"subfield":{"id":"https://openalex.org/subfields/2741","display_name":"Radiology, Nuclear Medicine and Imaging"},"field":{"id":"https://openalex.org/fields/27","display_name":"Medicine"},"domain":{"id":"https://openalex.org/domains/4","display_name":"Health Sciences"}},"topics":[{"id":"https://openalex.org/T10642","display_name":"Plasma Applications and Diagnostics","score":0.9861000180244446,"subfield":{"id":"https://openalex.org/subfields/2741","display_name":"Radiology, Nuclear Medicine and Imaging"},"field":{"id":"https://openalex.org/fields/27","display_name":"Medicine"},"domain":{"id":"https://openalex.org/domains/4","display_name":"Health Sciences"}},{"id":"https://openalex.org/T10781","display_name":"Plasma Diagnostics and Applications","score":0.9531999826431274,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12092","display_name":"Erosion and Abrasive Machining","score":0.9521999955177307,"subfield":{"id":"https://openalex.org/subfields/2302","display_name":"Ecological Modeling"},"field":{"id":"https://openalex.org/fields/23","display_name":"Environmental Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.7540122270584106},{"id":"https://openalex.org/keywords/plasma","display_name":"Plasma","score":0.6207947134971619},{"id":"https://openalex.org/keywords/metal","display_name":"Metal","score":0.5963084697723389},{"id":"https://openalex.org/keywords/atmosphere","display_name":"Atmosphere (unit)","score":0.4692627787590027},{"id":"https://openalex.org/keywords/irradiation","display_name":"Irradiation","score":0.439873069524765},{"id":"https://openalex.org/keywords/plasma-cleaning","display_name":"Plasma cleaning","score":0.4281010031700134},{"id":"https://openalex.org/keywords/analytical-chemistry","display_name":"Analytical Chemistry (journal)","score":0.4135396182537079},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.3543379306793213},{"id":"https://openalex.org/keywords/metallurgy","display_name":"Metallurgy","score":0.24655142426490784},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.1519630253314972},{"id":"https://openalex.org/keywords/environmental-chemistry","display_name":"Environmental chemistry","score":0.07550722360610962}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7540122270584106},{"id":"https://openalex.org/C82706917","wikidata":"https://www.wikidata.org/wiki/Q10251","display_name":"Plasma","level":2,"score":0.6207947134971619},{"id":"https://openalex.org/C544153396","wikidata":"https://www.wikidata.org/wiki/Q11426","display_name":"Metal","level":2,"score":0.5963084697723389},{"id":"https://openalex.org/C65440619","wikidata":"https://www.wikidata.org/wiki/Q177974","display_name":"Atmosphere (unit)","level":2,"score":0.4692627787590027},{"id":"https://openalex.org/C111337013","wikidata":"https://www.wikidata.org/wiki/Q2737837","display_name":"Irradiation","level":2,"score":0.439873069524765},{"id":"https://openalex.org/C60581705","wikidata":"https://www.wikidata.org/wiki/Q7201768","display_name":"Plasma cleaning","level":3,"score":0.4281010031700134},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.4135396182537079},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.3543379306793213},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.24655142426490784},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.1519630253314972},{"id":"https://openalex.org/C107872376","wikidata":"https://www.wikidata.org/wiki/Q321355","display_name":"Environmental chemistry","level":1,"score":0.07550722360610962},{"id":"https://openalex.org/C185544564","wikidata":"https://www.wikidata.org/wiki/Q81197","display_name":"Nuclear physics","level":1,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C97355855","wikidata":"https://www.wikidata.org/wiki/Q11473","display_name":"Thermodynamics","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems.2015.7147395","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2015.7147395","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":5,"referenced_works":["https://openalex.org/W1978726539","https://openalex.org/W2004032527","https://openalex.org/W2087257151","https://openalex.org/W2093282555","https://openalex.org/W2119916527"],"related_works":["https://openalex.org/W2379158985","https://openalex.org/W2383254935","https://openalex.org/W2359052095","https://openalex.org/W2030004362","https://openalex.org/W2109437137","https://openalex.org/W3014545350","https://openalex.org/W2026586937","https://openalex.org/W2421052071","https://openalex.org/W2024067593","https://openalex.org/W2600700054"],"abstract_inverted_index":{"To":[0],"produce":[1],"the":[2,8,46,50,53,60,81,85,91,103],"micro":[3,36,71],"scale":[4,72],"oxidation":[5,73,82],"film":[6,74,83],"on":[7,52,75,84],"metal":[9,41,54,62,86,92,104],"surface,":[10],"this":[11],"study":[12],"use":[13],"a":[14,22,34,57,98],"radio":[15],"frequency":[16],"(RF)":[17],"electromagnetic":[18],"oscillation":[19],"circuit":[20,27],"and":[21,66],"high":[23],"voltage":[24],"pulse":[25],"discharge":[26,35],"combined":[28],"at":[29],"atmospheric":[30],"pressure,":[31],"which":[32],"generated":[33],"plasma":[37,47],"beam.":[38],"The":[39],"rough":[40,61],"surface":[42,55,63,87,93,105],"is":[43],"irradiated":[44],"by":[45],"directly.":[48],"After":[49],"irradiation":[51],"for":[56],"few":[58],"minutes,":[59],"got":[64],"smooth":[65],"clean":[67],"with":[68],"lots":[69],"of":[70,94],"it.":[76],"Experimental":[77],"results":[78],"showed":[79],"that":[80],"can":[88],"effectively":[89],"improve":[90],"producing":[95],"rust":[96],"in":[97],"long":[99],"time,":[100],"thereby,":[101],"improving":[102],"performance.":[106]},"counts_by_year":[],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}