{"id":"https://openalex.org/W2265425845","doi":"https://doi.org/10.1109/nems.2015.7147383","title":"Research on slide-film damping effect to achieve a high-performance resonant pressure senor","display_name":"Research on slide-film damping effect to achieve a high-performance resonant pressure senor","publication_year":2015,"publication_date":"2015-04-01","ids":{"openalex":"https://openalex.org/W2265425845","doi":"https://doi.org/10.1109/nems.2015.7147383","mag":"2265425845"},"language":"en","primary_location":{"id":"doi:10.1109/nems.2015.7147383","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2015.7147383","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5053231831","display_name":"Rongjun Cheng","orcid":"https://orcid.org/0000-0001-9492-7998"},"institutions":[{"id":"https://openalex.org/I87445476","display_name":"Xi'an Jiaotong University","ror":"https://ror.org/017zhmm22","country_code":"CN","type":"education","lineage":["https://openalex.org/I87445476"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Rongjun Cheng","raw_affiliation_strings":["State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, China"],"affiliations":[{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, China","institution_ids":["https://openalex.org/I87445476"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5056618863","display_name":"Yulong Zhao","orcid":"https://orcid.org/0000-0003-2922-1037"},"institutions":[{"id":"https://openalex.org/I87445476","display_name":"Xi'an Jiaotong University","ror":"https://ror.org/017zhmm22","country_code":"CN","type":"education","lineage":["https://openalex.org/I87445476"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yulong Zhao","raw_affiliation_strings":["State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, China"],"affiliations":[{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, China","institution_ids":["https://openalex.org/I87445476"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100680366","display_name":"Cun Li","orcid":"https://orcid.org/0000-0003-2897-6219"},"institutions":[{"id":"https://openalex.org/I87445476","display_name":"Xi'an Jiaotong University","ror":"https://ror.org/017zhmm22","country_code":"CN","type":"education","lineage":["https://openalex.org/I87445476"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Cun Li","raw_affiliation_strings":["State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, China"],"affiliations":[{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, China","institution_ids":["https://openalex.org/I87445476"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5085821286","display_name":"Bian Tian","orcid":"https://orcid.org/0000-0001-5484-8363"},"institutions":[{"id":"https://openalex.org/I87445476","display_name":"Xi'an Jiaotong University","ror":"https://ror.org/017zhmm22","country_code":"CN","type":"education","lineage":["https://openalex.org/I87445476"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Bian Tian","raw_affiliation_strings":["State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, China"],"affiliations":[{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, China","institution_ids":["https://openalex.org/I87445476"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5100374381","display_name":"Bo Li","orcid":"https://orcid.org/0000-0001-9407-9503"},"institutions":[{"id":"https://openalex.org/I87445476","display_name":"Xi'an Jiaotong University","ror":"https://ror.org/017zhmm22","country_code":"CN","type":"education","lineage":["https://openalex.org/I87445476"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Bo Li","raw_affiliation_strings":["State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, China"],"affiliations":[{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, China","institution_ids":["https://openalex.org/I87445476"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":5,"corresponding_author_ids":["https://openalex.org/A5053231831"],"corresponding_institution_ids":["https://openalex.org/I87445476"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":4,"citation_normalized_percentile":{"value":0.12195934,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":96},"biblio":{"volume":"8","issue":null,"first_page":"99","last_page":"102"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10205","display_name":"Advanced Fiber Optic Sensors","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/tuning-fork","display_name":"Tuning fork","score":0.711966872215271},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.6295560002326965},{"id":"https://openalex.org/keywords/atmospheric-pressure","display_name":"Atmospheric pressure","score":0.5736300945281982},{"id":"https://openalex.org/keywords/sensitivity","display_name":"Sensitivity (control systems)","score":0.5635386109352112},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.5486645102500916},{"id":"https://openalex.org/keywords/resonance","display_name":"Resonance (particle physics)","score":0.5478215217590332},{"id":"https://openalex.org/keywords/linearity","display_name":"Linearity","score":0.5078094601631165},{"id":"https://openalex.org/keywords/surface-micromachining","display_name":"Surface micromachining","score":0.4756590723991394},{"id":"https://openalex.org/keywords/harmonic","display_name":"Harmonic","score":0.4657168388366699},{"id":"https://openalex.org/keywords/q-factor","display_name":"Q factor","score":0.46408531069755554},{"id":"https://openalex.org/keywords/calibration","display_name":"Calibration","score":0.42346084117889404},{"id":"https://openalex.org/keywords/excitation","display_name":"Excitation","score":0.4137623608112335},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.3699050545692444},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.3161645233631134},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.28579050302505493},{"id":"https://openalex.org/keywords/vibration","display_name":"Vibration","score":0.27570679783821106},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.2747390866279602},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.1622682511806488},{"id":"https://openalex.org/keywords/resonator","display_name":"Resonator","score":0.15794819593429565}],"concepts":[{"id":"https://openalex.org/C107677527","wikidata":"https://www.wikidata.org/wiki/Q201898","display_name":"Tuning fork","level":3,"score":0.711966872215271},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.6295560002326965},{"id":"https://openalex.org/C200239111","wikidata":"https://www.wikidata.org/wiki/Q81809","display_name":"Atmospheric pressure","level":2,"score":0.5736300945281982},{"id":"https://openalex.org/C21200559","wikidata":"https://www.wikidata.org/wiki/Q7451068","display_name":"Sensitivity (control systems)","level":2,"score":0.5635386109352112},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5486645102500916},{"id":"https://openalex.org/C139210041","wikidata":"https://www.wikidata.org/wiki/Q2145840","display_name":"Resonance (particle physics)","level":2,"score":0.5478215217590332},{"id":"https://openalex.org/C77170095","wikidata":"https://www.wikidata.org/wiki/Q1753188","display_name":"Linearity","level":2,"score":0.5078094601631165},{"id":"https://openalex.org/C145667562","wikidata":"https://www.wikidata.org/wiki/Q7646003","display_name":"Surface micromachining","level":4,"score":0.4756590723991394},{"id":"https://openalex.org/C127934551","wikidata":"https://www.wikidata.org/wiki/Q1148098","display_name":"Harmonic","level":2,"score":0.4657168388366699},{"id":"https://openalex.org/C187725362","wikidata":"https://www.wikidata.org/wiki/Q830521","display_name":"Q factor","level":3,"score":0.46408531069755554},{"id":"https://openalex.org/C165838908","wikidata":"https://www.wikidata.org/wiki/Q736777","display_name":"Calibration","level":2,"score":0.42346084117889404},{"id":"https://openalex.org/C83581075","wikidata":"https://www.wikidata.org/wiki/Q1361503","display_name":"Excitation","level":2,"score":0.4137623608112335},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.3699050545692444},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.3161645233631134},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.28579050302505493},{"id":"https://openalex.org/C198394728","wikidata":"https://www.wikidata.org/wiki/Q3695508","display_name":"Vibration","level":2,"score":0.27570679783821106},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.2747390866279602},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.1622682511806488},{"id":"https://openalex.org/C97126364","wikidata":"https://www.wikidata.org/wiki/Q349669","display_name":"Resonator","level":2,"score":0.15794819593429565},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C109214941","wikidata":"https://www.wikidata.org/wiki/Q18334","display_name":"Particle physics","level":1,"score":0.0},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.0},{"id":"https://openalex.org/C153294291","wikidata":"https://www.wikidata.org/wiki/Q25261","display_name":"Meteorology","level":1,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems.2015.7147383","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2015.7147383","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.6299999952316284,"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy"}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":14,"referenced_works":["https://openalex.org/W564810687","https://openalex.org/W1972723652","https://openalex.org/W1975457067","https://openalex.org/W1975695964","https://openalex.org/W1998881781","https://openalex.org/W2020529526","https://openalex.org/W2029199258","https://openalex.org/W2035394251","https://openalex.org/W2055930971","https://openalex.org/W2068018094","https://openalex.org/W2076755257","https://openalex.org/W2077610274","https://openalex.org/W2089073173","https://openalex.org/W2132268826"],"related_works":["https://openalex.org/W2106108809","https://openalex.org/W2041829828","https://openalex.org/W2388462551","https://openalex.org/W2325798029","https://openalex.org/W2743757498","https://openalex.org/W2054124615","https://openalex.org/W1997450548","https://openalex.org/W2799048710","https://openalex.org/W2161426467","https://openalex.org/W2333029211"],"abstract_inverted_index":{"The":[0,129,145],"purpose":[1],"of":[2,11,21,38,64,80,92,99,107],"this":[3],"study":[4,168],"is":[5,43,67,71,87,120,124,131,158,164],"to":[6,25,53,133],"investigate":[7],"the":[8,19,36,55,62,78,84,97,114,156,162,170],"resonance":[9],"characteristic":[10],"a":[12,27,40,90,109,139,142],"double-ended":[13],"quartz":[14],"tuning":[15],"fork":[16],"(DEQTF)":[17],"under":[18],"effect":[20],"slide-film":[22],"air":[23,56],"damping":[24,57],"achieve":[26],"high-performance":[28,101],"resonant":[29,102,110,176],"sensor":[30,112],"for":[31,173],"low":[32],"pressure":[33,103,111],"measurement.":[34],"For":[35],"convenience":[37],"analysis,":[39],"simplified":[41],"model":[42],"established.":[44],"Theoretical":[45],"and":[46,161],"simulation":[47,85],"methods":[48],"have":[49],"been":[50],"carried":[51],"out":[52],"research":[54],"mechanism.":[58],"Through":[59],"theoretical":[60],"calculation,":[61],"value":[63,86],"quality":[65],"factor":[66],"7315.":[68],"This":[69,167],"result":[70],"validated":[72],"by":[73,126,141],"harmonic":[74],"response":[75],"analysis":[76],"with":[77,89,113],"utilization":[79],"ANSYS":[81],"software,":[82],"where":[83],"6770":[88],"deviation":[91],"7.45%.":[93],"These":[94],"results":[95,153],"reveal":[96],"feasibility":[98],"designing":[100],"sensors.":[104],"In":[105],"view":[106],"this,":[108],"DEQTF":[115,130],"sealed":[116],"in":[117,135,138,178],"standard":[118],"atmosphere":[119],"proposed.":[121],"Sensor":[122],"prototype":[123],"accomplished":[125],"micromachining":[127],"technologies.":[128],"excited":[132],"vibrate":[134],"anti-phase":[136],"mode":[137],"plane":[140],"self-excitation":[143],"circuit.":[144],"digital":[146],"output":[147],"exhibits":[148],"steady":[149],"square":[150],"signals.":[151],"Testing":[152],"demonstrate":[154],"that":[155],"sensitivity":[157],"99":[159],"Hz/kPa":[160],"non-linearity":[163],"0.031%":[165],"FS.":[166],"shows":[169],"potential":[171],"values":[172],"achieving":[174],"high-accuracy":[175],"sensors":[177],"atmospheric":[179],"packaging.":[180]},"counts_by_year":[{"year":2023,"cited_by_count":1},{"year":2022,"cited_by_count":2},{"year":2021,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}