{"id":"https://openalex.org/W2006286296","doi":"https://doi.org/10.1109/nems.2014.6908802","title":"Low-temperature compatible electrostatic comb-drive actuators with integrated graphene","display_name":"Low-temperature compatible electrostatic comb-drive actuators with integrated graphene","publication_year":2014,"publication_date":"2014-04-01","ids":{"openalex":"https://openalex.org/W2006286296","doi":"https://doi.org/10.1109/nems.2014.6908802","mag":"2006286296"},"language":"en","primary_location":{"id":"doi:10.1109/nems.2014.6908802","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2014.6908802","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5036665435","display_name":"Matthias Goldsche","orcid":null},"institutions":[{"id":"https://openalex.org/I171892758","display_name":"Forschungszentrum J\u00fclich","ror":"https://ror.org/02nv7yv05","country_code":"DE","type":"facility","lineage":["https://openalex.org/I1305996414","https://openalex.org/I171892758"]}],"countries":["DE"],"is_corresponding":true,"raw_author_name":"Matthias Goldsche","raw_affiliation_strings":["Forschungszentrum J\u00fclich, Peter Gr\u00fcnberg Institute (PGI-8/9), J\u00fclich, EU, Germany","Institute of Physics A, EU, Aachen, Germany"],"affiliations":[{"raw_affiliation_string":"Forschungszentrum J\u00fclich, Peter Gr\u00fcnberg Institute (PGI-8/9), J\u00fclich, EU, Germany","institution_ids":["https://openalex.org/I171892758"]},{"raw_affiliation_string":"Institute of Physics A, EU, Aachen, Germany","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5078413206","display_name":"Tymofiy Khodkov","orcid":"https://orcid.org/0000-0001-7573-4832"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Tymofiy Khodkov","raw_affiliation_strings":["Institute of Physics A, EU, Aachen, Germany"],"affiliations":[{"raw_affiliation_string":"Institute of Physics A, EU, Aachen, Germany","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5040243832","display_name":"Pascal Kaienburg","orcid":"https://orcid.org/0000-0003-3887-3395"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Pascal Kaienburg","raw_affiliation_strings":["Institute of Physics A, EU, Aachen, Germany"],"affiliations":[{"raw_affiliation_string":"Institute of Physics A, EU, Aachen, Germany","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5016630899","display_name":"Christoph Neumann","orcid":null},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Christoph Neumann","raw_affiliation_strings":["Institute of Physics A, EU, Aachen, Germany"],"affiliations":[{"raw_affiliation_string":"Institute of Physics A, EU, Aachen, Germany","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5001060363","display_name":"Christoph Stampfer","orcid":"https://orcid.org/0000-0002-4958-7362"},"institutions":[{"id":"https://openalex.org/I171892758","display_name":"Forschungszentrum J\u00fclich","ror":"https://ror.org/02nv7yv05","country_code":"DE","type":"facility","lineage":["https://openalex.org/I1305996414","https://openalex.org/I171892758"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Christoph Stampfer","raw_affiliation_strings":["Forschungszentrum J\u00fclich, Peter Gr\u00fcnberg Institute (PGI-8/9), J\u00fclich, EU, Germany","Institute of Physics A, EU, Aachen, Germany"],"affiliations":[{"raw_affiliation_string":"Forschungszentrum J\u00fclich, Peter Gr\u00fcnberg Institute (PGI-8/9), J\u00fclich, EU, Germany","institution_ids":["https://openalex.org/I171892758"]},{"raw_affiliation_string":"Institute of Physics A, EU, Aachen, Germany","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5036665435","display_name":"Matthias Goldsche","orcid":null},"institutions":[{"id":"https://openalex.org/I171892758","display_name":"Forschungszentrum J\u00fclich","ror":"https://ror.org/02nv7yv05","country_code":"DE","type":"facility","lineage":["https://openalex.org/I1305996414","https://openalex.org/I171892758"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Matthias Goldsche","raw_affiliation_strings":["Forschungszentrum J\u00fclich, Peter Gr\u00fcnberg Institute (PGI-8/9), J\u00fclich, EU, Germany","Institute of Physics A, EU, Aachen, Germany"],"affiliations":[{"raw_affiliation_string":"Forschungszentrum J\u00fclich, Peter Gr\u00fcnberg Institute (PGI-8/9), J\u00fclich, EU, Germany","institution_ids":["https://openalex.org/I171892758"]},{"raw_affiliation_string":"Institute of Physics A, EU, Aachen, Germany","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5089760121","display_name":"Stefan Trellenkamp","orcid":"https://orcid.org/0000-0003-1049-4414"},"institutions":[{"id":"https://openalex.org/I171892758","display_name":"Forschungszentrum J\u00fclich","ror":"https://ror.org/02nv7yv05","country_code":"DE","type":"facility","lineage":["https://openalex.org/I1305996414","https://openalex.org/I171892758"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Stefan Trellenkamp","raw_affiliation_strings":["Forschungszentrum J\u00fclich, Peter Gr\u00fcnberg Institute (PGI-8/9), J\u00fclich, EU, Germany"],"affiliations":[{"raw_affiliation_string":"Forschungszentrum J\u00fclich, Peter Gr\u00fcnberg Institute (PGI-8/9), J\u00fclich, EU, Germany","institution_ids":["https://openalex.org/I171892758"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5025840578","display_name":"Gregor Mu\u00dfler","orcid":"https://orcid.org/0000-0001-7230-0756"},"institutions":[{"id":"https://openalex.org/I171892758","display_name":"Forschungszentrum J\u00fclich","ror":"https://ror.org/02nv7yv05","country_code":"DE","type":"facility","lineage":["https://openalex.org/I1305996414","https://openalex.org/I171892758"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Gregor Mussler","raw_affiliation_strings":["Forschungszentrum J\u00fclich, Peter Gr\u00fcnberg Institute (PGI-8/9), J\u00fclich, EU, Germany"],"affiliations":[{"raw_affiliation_string":"Forschungszentrum J\u00fclich, Peter Gr\u00fcnberg Institute (PGI-8/9), J\u00fclich, EU, Germany","institution_ids":["https://openalex.org/I171892758"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5001060363","display_name":"Christoph Stampfer","orcid":"https://orcid.org/0000-0002-4958-7362"},"institutions":[{"id":"https://openalex.org/I171892758","display_name":"Forschungszentrum J\u00fclich","ror":"https://ror.org/02nv7yv05","country_code":"DE","type":"facility","lineage":["https://openalex.org/I1305996414","https://openalex.org/I171892758"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Christoph Stampfer","raw_affiliation_strings":["Forschungszentrum J\u00fclich, Peter Gr\u00fcnberg Institute (PGI-8/9), J\u00fclich, EU, Germany","Institute of Physics A, EU, Aachen, Germany"],"affiliations":[{"raw_affiliation_string":"Forschungszentrum J\u00fclich, Peter Gr\u00fcnberg Institute (PGI-8/9), J\u00fclich, EU, Germany","institution_ids":["https://openalex.org/I171892758"]},{"raw_affiliation_string":"Institute of Physics A, EU, Aachen, Germany","institution_ids":[]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":9,"corresponding_author_ids":["https://openalex.org/A5036665435"],"corresponding_institution_ids":["https://openalex.org/I171892758"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":3,"citation_normalized_percentile":{"value":0.05555215,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":96},"biblio":{"volume":"5","issue":null,"first_page":"251","last_page":"255"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10083","display_name":"Graphene research and applications","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10083","display_name":"Graphene research and applications","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9988999962806702,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11272","display_name":"Nanowire Synthesis and Applications","score":0.9983000159263611,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/graphene","display_name":"Graphene","score":0.9034168720245361},{"id":"https://openalex.org/keywords/comb-drive","display_name":"Comb drive","score":0.8557854890823364},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.7997444868087769},{"id":"https://openalex.org/keywords/actuator","display_name":"Actuator","score":0.7530428171157837},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.7281030416488647},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.5487391352653503},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.5078559517860413},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.48209717869758606},{"id":"https://openalex.org/keywords/etching","display_name":"Etching (microfabrication)","score":0.4315774142742157},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.41713374853134155},{"id":"https://openalex.org/keywords/characterization","display_name":"Characterization (materials science)","score":0.4100003242492676},{"id":"https://openalex.org/keywords/layer","display_name":"Layer (electronics)","score":0.17901602387428284},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.14477398991584778}],"concepts":[{"id":"https://openalex.org/C30080830","wikidata":"https://www.wikidata.org/wiki/Q169917","display_name":"Graphene","level":2,"score":0.9034168720245361},{"id":"https://openalex.org/C155840801","wikidata":"https://www.wikidata.org/wiki/Q5150581","display_name":"Comb drive","level":4,"score":0.8557854890823364},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7997444868087769},{"id":"https://openalex.org/C172707124","wikidata":"https://www.wikidata.org/wiki/Q423488","display_name":"Actuator","level":2,"score":0.7530428171157837},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.7281030416488647},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.5487391352653503},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.5078559517860413},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.48209717869758606},{"id":"https://openalex.org/C100460472","wikidata":"https://www.wikidata.org/wiki/Q2368605","display_name":"Etching (microfabrication)","level":3,"score":0.4315774142742157},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.41713374853134155},{"id":"https://openalex.org/C2780841128","wikidata":"https://www.wikidata.org/wiki/Q5073781","display_name":"Characterization (materials science)","level":2,"score":0.4100003242492676},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.17901602387428284},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.14477398991584778},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems.2014.6908802","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2014.6908802","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.8899999856948853,"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7"}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":21,"referenced_works":["https://openalex.org/W1935743023","https://openalex.org/W1988846772","https://openalex.org/W1991859775","https://openalex.org/W1992506968","https://openalex.org/W1999201481","https://openalex.org/W2001251685","https://openalex.org/W2010971702","https://openalex.org/W2013360603","https://openalex.org/W2015296483","https://openalex.org/W2046758551","https://openalex.org/W2057936436","https://openalex.org/W2058122340","https://openalex.org/W2069401367","https://openalex.org/W2085347167","https://openalex.org/W2105685140","https://openalex.org/W2138931463","https://openalex.org/W2147199374","https://openalex.org/W2154428279","https://openalex.org/W2170539287","https://openalex.org/W2316172402","https://openalex.org/W4249851359"],"related_works":["https://openalex.org/W2038729374","https://openalex.org/W3037286107","https://openalex.org/W2562941076","https://openalex.org/W2754462113","https://openalex.org/W3039921875","https://openalex.org/W4240308501","https://openalex.org/W2338373854","https://openalex.org/W3166059457","https://openalex.org/W1972422546","https://openalex.org/W2081652089"],"abstract_inverted_index":{"We":[0],"present":[1],"the":[2,61,69,91,111,118,124,164],"fabrication":[3,125],"process":[4],"and":[5,42,126],"characterization":[6,127],"of":[7,47,60,95,128,143,148,163],"silicon-based":[8],"electrostatic":[9],"comb-drive":[10,18,71,130],"actuators":[11,19,131],"with":[12],"integrated":[13,70,165],"single-layer":[14],"graphene.":[15,96,144],"The":[16,45],"micro-machined":[17],"are":[20],"designed":[21],"such":[22,129],"that":[23,107],"they":[24],"can":[25,73],"induce":[26],"significant":[27],"mechanical":[28,41,161],"forces":[29],"to":[30,34,37,109,139,154],"strain":[31,49],"graphene":[32,115,157],"(up":[33],"1%)":[35],"allowing":[36,159],"systematically":[38],"investigating":[39],"its":[40],"electromechanical":[43,93],"properties.":[44],"amount":[46],"induced":[48],"is":[50,100],"controlled":[51],"by":[52,102,116],"an":[53],"applied":[54],"voltage":[55],"between":[56],"capacitively":[57],"coupled":[58],"\"fingers\"":[59],"micromechanical":[62],"actuator.":[63],"By":[64],"using":[65],"highly":[66],"doped":[67],"silicon":[68],"devices":[72],"be":[74],"actuated":[75],"also":[76],"at":[77],"cryogenic":[78],"temperatures,":[79],"where":[80],"a":[81,103,135],"higher":[82],"energy":[83],"resolution":[84],"will":[85],"provide":[86],"potentially":[87],"more":[88],"insights":[89],"into":[90],"fundamental":[92],"properties":[94],"Further":[97],"device":[98],"functionality":[99,162],"introduced":[101],"local":[104],"bottom":[105],"gate":[106],"enables":[108],"control":[110],"carrier":[112],"concentration":[113],"in":[114],"tuning":[117],"Fermi":[119],"level.":[120],"Here,":[121],"we":[122],"show":[123],"as":[132,134],"well":[133],"precise":[136],"transfer":[137],"technique":[138],"integrate":[140],"individual":[141],"sheets":[142],"A":[145],"postprocessing":[146],"step":[147],"direct":[149],"plasma":[150],"etching":[151],"was":[152],"implemented":[153],"structure":[155],"suspended":[156],"flakes":[158],"better":[160],"device.":[166]},"counts_by_year":[{"year":2019,"cited_by_count":1},{"year":2018,"cited_by_count":2}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}