{"id":"https://openalex.org/W2105716014","doi":"https://doi.org/10.1109/nems.2014.6908791","title":"A low-noise CMOS interface circuit for resonant pressure sensor","display_name":"A low-noise CMOS interface circuit for resonant pressure sensor","publication_year":2014,"publication_date":"2014-04-01","ids":{"openalex":"https://openalex.org/W2105716014","doi":"https://doi.org/10.1109/nems.2014.6908791","mag":"2105716014"},"language":"en","primary_location":{"id":"doi:10.1109/nems.2014.6908791","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2014.6908791","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5100782363","display_name":"Xiaodong Sun","orcid":"https://orcid.org/0000-0002-9451-3311"},"institutions":[{"id":"https://openalex.org/I17145004","display_name":"Northwestern Polytechnical University","ror":"https://ror.org/01y0j0j86","country_code":"CN","type":"education","lineage":["https://openalex.org/I17145004"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Xiaodong Sun","raw_affiliation_strings":["Key laboratory of Micro/Nano Systems for Aerospace, Northwestern Polytechnical University, Xi'an, China","[Key Laboratory of Micro/Nano Systems for Aerospace, Northwestern Polytechnical University, Xi'an, China]"],"affiliations":[{"raw_affiliation_string":"Key laboratory of Micro/Nano Systems for Aerospace, Northwestern Polytechnical University, Xi'an, China","institution_ids":["https://openalex.org/I17145004"]},{"raw_affiliation_string":"[Key Laboratory of Micro/Nano Systems for Aerospace, Northwestern Polytechnical University, Xi'an, China]","institution_ids":["https://openalex.org/I17145004"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5105840489","display_name":"Weizheng Yuan","orcid":null},"institutions":[{"id":"https://openalex.org/I17145004","display_name":"Northwestern Polytechnical University","ror":"https://ror.org/01y0j0j86","country_code":"CN","type":"education","lineage":["https://openalex.org/I17145004"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Weizheng Yuan","raw_affiliation_strings":["Key laboratory of Micro/Nano Systems for Aerospace, Northwestern Polytechnical University, Xi'an, China","[Key Laboratory of Micro/Nano Systems for Aerospace, Northwestern Polytechnical University, Xi'an, China]"],"affiliations":[{"raw_affiliation_string":"Key laboratory of Micro/Nano Systems for Aerospace, Northwestern Polytechnical University, Xi'an, China","institution_ids":["https://openalex.org/I17145004"]},{"raw_affiliation_string":"[Key Laboratory of Micro/Nano Systems for Aerospace, Northwestern Polytechnical University, Xi'an, China]","institution_ids":["https://openalex.org/I17145004"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5017201768","display_name":"Sen Ren","orcid":null},"institutions":[{"id":"https://openalex.org/I17145004","display_name":"Northwestern Polytechnical University","ror":"https://ror.org/01y0j0j86","country_code":"CN","type":"education","lineage":["https://openalex.org/I17145004"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Sen Ren","raw_affiliation_strings":["Key laboratory of Micro/Nano Systems for Aerospace, Northwestern Polytechnical University, Xi'an, China","[Key Laboratory of Micro/Nano Systems for Aerospace, Northwestern Polytechnical University, Xi'an, China]"],"affiliations":[{"raw_affiliation_string":"Key laboratory of Micro/Nano Systems for Aerospace, Northwestern Polytechnical University, Xi'an, China","institution_ids":["https://openalex.org/I17145004"]},{"raw_affiliation_string":"[Key Laboratory of Micro/Nano Systems for Aerospace, Northwestern Polytechnical University, Xi'an, China]","institution_ids":["https://openalex.org/I17145004"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5068224407","display_name":"Jinjun Deng","orcid":"https://orcid.org/0000-0003-3247-1985"},"institutions":[{"id":"https://openalex.org/I17145004","display_name":"Northwestern Polytechnical University","ror":"https://ror.org/01y0j0j86","country_code":"CN","type":"education","lineage":["https://openalex.org/I17145004"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jinjun Deng","raw_affiliation_strings":["Key laboratory of Micro/Nano Systems for Aerospace, Northwestern Polytechnical University, Xi'an, China","[Key Laboratory of Micro/Nano Systems for Aerospace, Northwestern Polytechnical University, Xi'an, China]"],"affiliations":[{"raw_affiliation_string":"Key laboratory of Micro/Nano Systems for Aerospace, Northwestern Polytechnical University, Xi'an, China","institution_ids":["https://openalex.org/I17145004"]},{"raw_affiliation_string":"[Key Laboratory of Micro/Nano Systems for Aerospace, Northwestern Polytechnical University, Xi'an, China]","institution_ids":["https://openalex.org/I17145004"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5065179368","display_name":"Chengyu Jiang","orcid":"https://orcid.org/0000-0003-0570-2709"},"institutions":[{"id":"https://openalex.org/I17145004","display_name":"Northwestern Polytechnical University","ror":"https://ror.org/01y0j0j86","country_code":"CN","type":"education","lineage":["https://openalex.org/I17145004"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Chengyu Jiang","raw_affiliation_strings":["Key laboratory of Micro/Nano Systems for Aerospace, Northwestern Polytechnical University, Xi'an, China","[Key Laboratory of Micro/Nano Systems for Aerospace, Northwestern Polytechnical University, Xi'an, China]"],"affiliations":[{"raw_affiliation_string":"Key laboratory of Micro/Nano Systems for Aerospace, Northwestern Polytechnical University, Xi'an, China","institution_ids":["https://openalex.org/I17145004"]},{"raw_affiliation_string":"[Key Laboratory of Micro/Nano Systems for Aerospace, Northwestern Polytechnical University, Xi'an, China]","institution_ids":["https://openalex.org/I17145004"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":5,"corresponding_author_ids":["https://openalex.org/A5100782363"],"corresponding_institution_ids":["https://openalex.org/I17145004"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.13283584,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":94},"biblio":{"volume":"31","issue":null,"first_page":"204","last_page":"207"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/resonator","display_name":"Resonator","score":0.6230180859565735},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.6114078164100647},{"id":"https://openalex.org/keywords/cmos","display_name":"CMOS","score":0.5852539539337158},{"id":"https://openalex.org/keywords/signal","display_name":"SIGNAL (programming language)","score":0.48252126574516296},{"id":"https://openalex.org/keywords/capacitive-coupling","display_name":"Capacitive coupling","score":0.46997565031051636},{"id":"https://openalex.org/keywords/noise","display_name":"Noise (video)","score":0.4621577560901642},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.445970356464386},{"id":"https://openalex.org/keywords/chip","display_name":"Chip","score":0.42917728424072266},{"id":"https://openalex.org/keywords/capacitor","display_name":"Capacitor","score":0.42709800601005554},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.422419011592865},{"id":"https://openalex.org/keywords/capacitive-sensing","display_name":"Capacitive sensing","score":0.41308358311653137},{"id":"https://openalex.org/keywords/pressure-sensor","display_name":"Pressure sensor","score":0.41177666187286377},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.40380629897117615},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.267059326171875},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.24097007513046265},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.151754230260849}],"concepts":[{"id":"https://openalex.org/C97126364","wikidata":"https://www.wikidata.org/wiki/Q349669","display_name":"Resonator","level":2,"score":0.6230180859565735},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6114078164100647},{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.5852539539337158},{"id":"https://openalex.org/C2779843651","wikidata":"https://www.wikidata.org/wiki/Q7390335","display_name":"SIGNAL (programming language)","level":2,"score":0.48252126574516296},{"id":"https://openalex.org/C68278764","wikidata":"https://www.wikidata.org/wiki/Q444167","display_name":"Capacitive coupling","level":3,"score":0.46997565031051636},{"id":"https://openalex.org/C99498987","wikidata":"https://www.wikidata.org/wiki/Q2210247","display_name":"Noise (video)","level":3,"score":0.4621577560901642},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.445970356464386},{"id":"https://openalex.org/C165005293","wikidata":"https://www.wikidata.org/wiki/Q1074500","display_name":"Chip","level":2,"score":0.42917728424072266},{"id":"https://openalex.org/C52192207","wikidata":"https://www.wikidata.org/wiki/Q5322","display_name":"Capacitor","level":3,"score":0.42709800601005554},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.422419011592865},{"id":"https://openalex.org/C206755178","wikidata":"https://www.wikidata.org/wiki/Q1131271","display_name":"Capacitive sensing","level":2,"score":0.41308358311653137},{"id":"https://openalex.org/C41325743","wikidata":"https://www.wikidata.org/wiki/Q1261040","display_name":"Pressure sensor","level":2,"score":0.41177666187286377},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.40380629897117615},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.267059326171875},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.24097007513046265},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.151754230260849},{"id":"https://openalex.org/C115961682","wikidata":"https://www.wikidata.org/wiki/Q860623","display_name":"Image (mathematics)","level":2,"score":0.0},{"id":"https://openalex.org/C199360897","wikidata":"https://www.wikidata.org/wiki/Q9143","display_name":"Programming language","level":1,"score":0.0},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.0},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems.2014.6908791","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2014.6908791","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy","score":0.8600000143051147}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":6,"referenced_works":["https://openalex.org/W1982902668","https://openalex.org/W2046499943","https://openalex.org/W2077610274","https://openalex.org/W2134456655","https://openalex.org/W2172213800","https://openalex.org/W6680256870"],"related_works":["https://openalex.org/W2291633415","https://openalex.org/W2768092448","https://openalex.org/W2895758062","https://openalex.org/W2048683560","https://openalex.org/W2044770004","https://openalex.org/W1966070768","https://openalex.org/W3015749751","https://openalex.org/W4387713458","https://openalex.org/W1994341348","https://openalex.org/W2372430764"],"abstract_inverted_index":{"This":[0],"paper":[1],"presents":[2],"a":[3,70,82,97,101,107],"low-noise":[4],"CMOS":[5,73],"interface":[6,51],"circuit":[7,36],"of":[8,24,57,99,104,110],"the":[9,20,25,29,50,54,58,61,76,92],"resonant":[10,93],"pressure":[11,94],"sensor.":[12],"A":[13,33],"high-frequency":[14],"carrier":[15],"is":[16,37,46,67,79],"employed":[17],"to":[18,39],"extract":[19],"small":[21],"vibration":[22],"signal":[23],"resonator":[26,59],"and":[27,60,75,106],"suppress":[28,40],"low-frequency":[30],"coupling":[31,55],"signal.":[32],"differential":[34],"detection":[35],"implemented":[38],"common":[41],"mode":[42],"noise.":[43],"Sensor":[44],"chip":[45,78],"packaged":[47],"together":[48],"with":[49],"ASIC,":[52],"reducing":[53],"capacitor":[56],"sensing":[62],"electrode.":[63],"The":[64,87],"AS":[65],"IC":[66],"fabricated":[68,80],"in":[69],"0.18":[71],"um":[72],"process":[74],"sensor":[77,95],"using":[81],"commercially":[83],"available":[84],"silicon-on-insulator":[85],"wafer.":[86],"test":[88],"result":[89],"shows":[90],"that":[91],"has":[96],"nonlinearity":[98],"0.045%FS,":[100],"hysteresis":[102],"error":[103,109],"0.14%FS,":[105],"repeatability":[108],"0.18%FS.":[111]},"counts_by_year":[{"year":2018,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}