{"id":"https://openalex.org/W2091304058","doi":"https://doi.org/10.1109/nems.2014.6908790","title":"Design of a digital closed control loop for the sense mode of a mode-matching MEMS vibratory gyroscope","display_name":"Design of a digital closed control loop for the sense mode of a mode-matching MEMS vibratory gyroscope","publication_year":2014,"publication_date":"2014-04-01","ids":{"openalex":"https://openalex.org/W2091304058","doi":"https://doi.org/10.1109/nems.2014.6908790","mag":"2091304058"},"language":"en","primary_location":{"id":"doi:10.1109/nems.2014.6908790","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2014.6908790","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5066833978","display_name":"Y. X. Liu","orcid":null},"institutions":[{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]},{"id":"https://openalex.org/I4210119392","display_name":"Institute of Microelectronics","ror":"https://ror.org/02s6gs133","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Y. X. Liu","raw_affiliation_strings":["National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Peking University, Beijing, P. R., China","National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University, Beijing, 100871, P. R. China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Peking University, Beijing, P. R., China","institution_ids":["https://openalex.org/I20231570"]},{"raw_affiliation_string":"National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University, Beijing, 100871, P. R. China","institution_ids":["https://openalex.org/I20231570","https://openalex.org/I4210119392"]}]},{"author_position":"middle","author":{"id":null,"display_name":"W. L. Feng","orcid":null},"institutions":[{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]},{"id":"https://openalex.org/I4210119392","display_name":"Institute of Microelectronics","ror":"https://ror.org/02s6gs133","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"W. L. Feng","raw_affiliation_strings":["National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Peking University, Beijing, P. R., China","National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University, Beijing, 100871, P. R. China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Peking University, Beijing, P. R., China","institution_ids":["https://openalex.org/I20231570"]},{"raw_affiliation_string":"National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University, Beijing, 100871, P. R. China","institution_ids":["https://openalex.org/I20231570","https://openalex.org/I4210119392"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5041313721","display_name":"Chunhua He","orcid":"https://orcid.org/0000-0003-0826-3596"},"institutions":[{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]},{"id":"https://openalex.org/I4210119392","display_name":"Institute of Microelectronics","ror":"https://ror.org/02s6gs133","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"C. H. He","raw_affiliation_strings":["National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Peking University, Beijing, P. R., China","National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University, Beijing, 100871, P. R. China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Peking University, Beijing, P. R., China","institution_ids":["https://openalex.org/I20231570"]},{"raw_affiliation_string":"National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University, Beijing, 100871, P. R. China","institution_ids":["https://openalex.org/I20231570","https://openalex.org/I4210119392"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100447536","display_name":"Long Wang","orcid":"https://orcid.org/0000-0001-5600-8157"},"institutions":[{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]},{"id":"https://openalex.org/I4210119392","display_name":"Institute of Microelectronics","ror":"https://ror.org/02s6gs133","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"L. Wang","raw_affiliation_strings":["National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Peking University, Beijing, P. R., China","National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University, Beijing, 100871, P. R. China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Peking University, Beijing, P. R., China","institution_ids":["https://openalex.org/I20231570"]},{"raw_affiliation_string":"National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University, Beijing, 100871, P. R. China","institution_ids":["https://openalex.org/I20231570","https://openalex.org/I4210119392"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5032520969","display_name":"Liguo Dong","orcid":null},"institutions":[{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]},{"id":"https://openalex.org/I4210119392","display_name":"Institute of Microelectronics","ror":"https://ror.org/02s6gs133","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"L. G. Dong","raw_affiliation_strings":["National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Peking University, Beijing, P. R., China","National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University, Beijing, 100871, P. R. China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Peking University, Beijing, P. R., China","institution_ids":["https://openalex.org/I20231570"]},{"raw_affiliation_string":"National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University, Beijing, 100871, P. R. China","institution_ids":["https://openalex.org/I20231570","https://openalex.org/I4210119392"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5103762689","display_name":"Qi Zhao","orcid":null},"institutions":[{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]},{"id":"https://openalex.org/I4210119392","display_name":"Institute of Microelectronics","ror":"https://ror.org/02s6gs133","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Q. C. Zhao","raw_affiliation_strings":["National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Peking University, Beijing, P. R., China","National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University, Beijing, 100871, P. R. China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Peking University, Beijing, P. R., China","institution_ids":["https://openalex.org/I20231570"]},{"raw_affiliation_string":"National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University, Beijing, 100871, P. R. China","institution_ids":["https://openalex.org/I20231570","https://openalex.org/I4210119392"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101911130","display_name":"Zhitao Yang","orcid":"https://orcid.org/0000-0001-9823-8663"},"institutions":[{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]},{"id":"https://openalex.org/I4210119392","display_name":"Institute of Microelectronics","ror":"https://ror.org/02s6gs133","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Z. C. Yang","raw_affiliation_strings":["National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Peking University, Beijing, P. R., China","National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University, Beijing, 100871, P. R. China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Peking University, Beijing, P. R., China","institution_ids":["https://openalex.org/I20231570"]},{"raw_affiliation_string":"National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University, Beijing, 100871, P. R. China","institution_ids":["https://openalex.org/I20231570","https://openalex.org/I4210119392"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5070820811","display_name":"G.Z. Yan","orcid":"https://orcid.org/0000-0003-2765-682X"},"institutions":[{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]},{"id":"https://openalex.org/I4210119392","display_name":"Institute of Microelectronics","ror":"https://ror.org/02s6gs133","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"G. Z. Yan","raw_affiliation_strings":["National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Peking University, Beijing, P. R., China","National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University, Beijing, 100871, P. R. China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Peking University, Beijing, P. R., China","institution_ids":["https://openalex.org/I20231570"]},{"raw_affiliation_string":"National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University, Beijing, 100871, P. R. China","institution_ids":["https://openalex.org/I20231570","https://openalex.org/I4210119392"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":8,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.6388,"has_fulltext":false,"cited_by_count":16,"citation_normalized_percentile":{"value":0.74743798,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":97},"biblio":{"volume":null,"issue":null,"first_page":null,"last_page":null},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/vibrating-structure-gyroscope","display_name":"Vibrating structure gyroscope","score":0.8894413709640503},{"id":"https://openalex.org/keywords/gyroscope","display_name":"Gyroscope","score":0.8753256797790527},{"id":"https://openalex.org/keywords/control-theory","display_name":"Control theory (sociology)","score":0.793272852897644},{"id":"https://openalex.org/keywords/sense","display_name":"Sense (electronics)","score":0.665962815284729},{"id":"https://openalex.org/keywords/mode","display_name":"Mode (computer interface)","score":0.5569601655006409},{"id":"https://openalex.org/keywords/rate-integrating-gyroscope","display_name":"Rate integrating gyroscope","score":0.4823736250400543},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.440498411655426},{"id":"https://openalex.org/keywords/digital-control","display_name":"Digital control","score":0.43310344219207764},{"id":"https://openalex.org/keywords/filter","display_name":"Filter (signal processing)","score":0.4315575361251831},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.38155505061149597},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.3127843737602234},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.3097880780696869},{"id":"https://openalex.org/keywords/control","display_name":"Control (management)","score":0.150351881980896},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.11842191219329834},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.07560995221138}],"concepts":[{"id":"https://openalex.org/C72768775","wikidata":"https://www.wikidata.org/wiki/Q844456","display_name":"Vibrating structure gyroscope","level":3,"score":0.8894413709640503},{"id":"https://openalex.org/C158488048","wikidata":"https://www.wikidata.org/wiki/Q483400","display_name":"Gyroscope","level":2,"score":0.8753256797790527},{"id":"https://openalex.org/C47446073","wikidata":"https://www.wikidata.org/wiki/Q5165890","display_name":"Control theory (sociology)","level":3,"score":0.793272852897644},{"id":"https://openalex.org/C143141573","wikidata":"https://www.wikidata.org/wiki/Q7450971","display_name":"Sense (electronics)","level":2,"score":0.665962815284729},{"id":"https://openalex.org/C48677424","wikidata":"https://www.wikidata.org/wiki/Q6888088","display_name":"Mode (computer interface)","level":2,"score":0.5569601655006409},{"id":"https://openalex.org/C46724921","wikidata":"https://www.wikidata.org/wiki/Q7295536","display_name":"Rate integrating gyroscope","level":4,"score":0.4823736250400543},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.440498411655426},{"id":"https://openalex.org/C158411068","wikidata":"https://www.wikidata.org/wiki/Q2720568","display_name":"Digital control","level":2,"score":0.43310344219207764},{"id":"https://openalex.org/C106131492","wikidata":"https://www.wikidata.org/wiki/Q3072260","display_name":"Filter (signal processing)","level":2,"score":0.4315575361251831},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.38155505061149597},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.3127843737602234},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.3097880780696869},{"id":"https://openalex.org/C2775924081","wikidata":"https://www.wikidata.org/wiki/Q55608371","display_name":"Control (management)","level":2,"score":0.150351881980896},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.11842191219329834},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.07560995221138},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C146978453","wikidata":"https://www.wikidata.org/wiki/Q3798668","display_name":"Aerospace engineering","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems.2014.6908790","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2014.6908790","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.4000000059604645,"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy"}],"awards":[],"funders":[{"id":"https://openalex.org/F4320327019","display_name":"National Key Laboratory of Science and Technology on Micro/Nano Fabrication","ror":null}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":13,"referenced_works":["https://openalex.org/W1977477381","https://openalex.org/W2000693077","https://openalex.org/W2017316327","https://openalex.org/W2018363058","https://openalex.org/W2070293648","https://openalex.org/W2087952287","https://openalex.org/W2100757036","https://openalex.org/W2132952463","https://openalex.org/W2149128480","https://openalex.org/W2158429553","https://openalex.org/W2160417780","https://openalex.org/W2263666314","https://openalex.org/W6654919805"],"related_works":["https://openalex.org/W2138812454","https://openalex.org/W2030928067","https://openalex.org/W2049901089","https://openalex.org/W2116681061","https://openalex.org/W2328178686","https://openalex.org/W1969906513","https://openalex.org/W2343017148","https://openalex.org/W3201539581","https://openalex.org/W2358178096","https://openalex.org/W3133870695"],"abstract_inverted_index":{"This":[0],"paper":[1],"presents":[2],"a":[3,14,44,60,72,90,96,101],"digital":[4],"closed":[5,21],"loop":[6,22],"control":[7,49],"method":[8],"for":[9],"the":[10,36,54,66,70,86],"sense":[11,20],"mode":[12],"of":[13,38,56,69,75,93,98,104],"mode-matching":[15,57],"MEMS":[16],"vibratory":[17],"gyroscope.":[18],"The":[19],"system":[23,50],"reported":[24],"in":[25],"our":[26],"previous":[27],"work":[28],"is":[29,51,80],"relatively":[30],"complex":[31],"and":[32,47,100],"unreliable":[33],"due":[34],"to":[35],"existence":[37],"notch":[39],"filter.":[40],"In":[41],"this":[42],"work,":[43],"more":[45],"simple":[46],"robust":[48],"realized":[52],"with":[53,95],"help":[55],"control.":[58],"With":[59],"tuning":[61,67],"voltage":[62],"automatically":[63],"applied":[64],"on":[65],"combs":[68],"gyroscope,":[71],"frequency":[73],"split":[74],"less":[76],"than":[77],"0.3":[78],"Hz":[79],"achieved.":[81],"Experimental":[82],"results":[83],"show":[84],"that":[85],"mode-matched":[87],"gyroscope":[88],"achieves":[89],"scale":[91],"factor":[92],"18.5mV/deg/s":[94],"nonlinearity":[97],"0.088%":[99],"bias":[102],"instability":[103],"2.7deg/h.":[105]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2024,"cited_by_count":2},{"year":2023,"cited_by_count":2},{"year":2022,"cited_by_count":1},{"year":2021,"cited_by_count":1},{"year":2020,"cited_by_count":1},{"year":2019,"cited_by_count":2},{"year":2018,"cited_by_count":3},{"year":2017,"cited_by_count":3}],"updated_date":"2026-06-11T09:08:48.828518","created_date":"2025-10-10T00:00:00"}