{"id":"https://openalex.org/W2001689471","doi":"https://doi.org/10.1109/nems.2013.6559939","title":"Mechanical property of nanoscale ZnO/Al&lt;inf&gt;2&lt;/inf&gt;O&lt;inf&gt;3&lt;/inf&gt; multilayers: An investigation by nano-indentation","display_name":"Mechanical property of nanoscale ZnO/Al&lt;inf&gt;2&lt;/inf&gt;O&lt;inf&gt;3&lt;/inf&gt; multilayers: An investigation by nano-indentation","publication_year":2013,"publication_date":"2013-04-01","ids":{"openalex":"https://openalex.org/W2001689471","doi":"https://doi.org/10.1109/nems.2013.6559939","mag":"2001689471"},"language":"en","primary_location":{"id":"doi:10.1109/nems.2013.6559939","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2013.6559939","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5047047385","display_name":"X. Q. Wang","orcid":null},"institutions":[{"id":"https://openalex.org/I115592961","display_name":"Jiangsu University","ror":"https://ror.org/03jc41j30","country_code":"CN","type":"education","lineage":["https://openalex.org/I115592961"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"X.Q. Wang","raw_affiliation_strings":["Center for Micro/Nano Science and Technology, Jiangsu University, Zhenjiang, China"],"affiliations":[{"raw_affiliation_string":"Center for Micro/Nano Science and Technology, Jiangsu University, Zhenjiang, China","institution_ids":["https://openalex.org/I115592961"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5001191710","display_name":"Jianning Ding","orcid":"https://orcid.org/0000-0003-3606-9627"},"institutions":[{"id":"https://openalex.org/I115592961","display_name":"Jiangsu University","ror":"https://ror.org/03jc41j30","country_code":"CN","type":"education","lineage":["https://openalex.org/I115592961"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"J.N. Ding","raw_affiliation_strings":["Center for Micro/Nano Science and Technology, Jiangsu University, Zhenjiang, China"],"affiliations":[{"raw_affiliation_string":"Center for Micro/Nano Science and Technology, Jiangsu University, Zhenjiang, China","institution_ids":["https://openalex.org/I115592961"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101804964","display_name":"Nannan Yuan","orcid":"https://orcid.org/0000-0002-7821-7969"},"institutions":[{"id":"https://openalex.org/I4210153482","display_name":"Changzhou University","ror":"https://ror.org/04ymgwq66","country_code":"CN","type":"education","lineage":["https://openalex.org/I4210153482"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"N.Y. Yuan","raw_affiliation_strings":["Center for low-dimensional materials, micro-nano devices and system, Changzhou University, Changzhou, China","Center for low-dimensional Mater., Changzhou Univ., Changzhou, China"],"affiliations":[{"raw_affiliation_string":"Center for low-dimensional materials, micro-nano devices and system, Changzhou University, Changzhou, China","institution_ids":["https://openalex.org/I4210153482"]},{"raw_affiliation_string":"Center for low-dimensional Mater., Changzhou Univ., Changzhou, China","institution_ids":["https://openalex.org/I4210153482"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5076667064","display_name":"Guanggui Cheng","orcid":"https://orcid.org/0000-0001-7327-4836"},"institutions":[{"id":"https://openalex.org/I115592961","display_name":"Jiangsu University","ror":"https://ror.org/03jc41j30","country_code":"CN","type":"education","lineage":["https://openalex.org/I115592961"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"G.G. Cheng","raw_affiliation_strings":["Center for Micro/Nano Science and Technology, Jiangsu University, Zhenjiang, China"],"affiliations":[{"raw_affiliation_string":"Center for Micro/Nano Science and Technology, Jiangsu University, Zhenjiang, China","institution_ids":["https://openalex.org/I115592961"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5001318644","display_name":"Yuanyuan Zhu","orcid":"https://orcid.org/0000-0002-7780-3800"},"institutions":[{"id":"https://openalex.org/I4210153482","display_name":"Changzhou University","ror":"https://ror.org/04ymgwq66","country_code":"CN","type":"education","lineage":["https://openalex.org/I4210153482"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Y.Y. Zhu","raw_affiliation_strings":["Center for low-dimensional materials, micro-nano devices and system, Changzhou University, Changzhou, China","Center for low-dimensional Mater., Changzhou Univ., Changzhou, China"],"affiliations":[{"raw_affiliation_string":"Center for low-dimensional materials, micro-nano devices and system, Changzhou University, Changzhou, China","institution_ids":["https://openalex.org/I4210153482"]},{"raw_affiliation_string":"Center for low-dimensional Mater., Changzhou Univ., Changzhou, China","institution_ids":["https://openalex.org/I4210153482"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5114244543","display_name":"B. Kan","orcid":null},"institutions":[{"id":"https://openalex.org/I4210153482","display_name":"Changzhou University","ror":"https://ror.org/04ymgwq66","country_code":"CN","type":"education","lineage":["https://openalex.org/I4210153482"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"B. Kan","raw_affiliation_strings":["Center for low-dimensional materials, micro-nano devices and system, Changzhou University, Changzhou, China","Center for low-dimensional Mater., Changzhou Univ., Changzhou, China"],"affiliations":[{"raw_affiliation_string":"Center for low-dimensional materials, micro-nano devices and system, Changzhou University, Changzhou, China","institution_ids":["https://openalex.org/I4210153482"]},{"raw_affiliation_string":"Center for low-dimensional Mater., Changzhou Univ., Changzhou, China","institution_ids":["https://openalex.org/I4210153482"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":6,"corresponding_author_ids":["https://openalex.org/A5047047385"],"corresponding_institution_ids":["https://openalex.org/I115592961"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.0978087,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":94},"biblio":{"volume":"86 87","issue":null,"first_page":"1222","last_page":"1225"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10377","display_name":"Metal and Thin Film Mechanics","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10377","display_name":"Metal and Thin Film Mechanics","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10090","display_name":"ZnO doping and properties","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/bilayer","display_name":"Bilayer","score":0.7178347110748291},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.6600660085678101},{"id":"https://openalex.org/keywords/crystallite","display_name":"Crystallite","score":0.6068898439407349},{"id":"https://openalex.org/keywords/nanoscopic-scale","display_name":"Nanoscopic scale","score":0.5874201655387878},{"id":"https://openalex.org/keywords/amorphous-solid","display_name":"Amorphous solid","score":0.5840696096420288},{"id":"https://openalex.org/keywords/nanoindentation","display_name":"Nanoindentation","score":0.44875583052635193},{"id":"https://openalex.org/keywords/elastic-modulus","display_name":"Elastic modulus","score":0.4131518006324768},{"id":"https://openalex.org/keywords/indentation","display_name":"Indentation","score":0.41097259521484375},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.3859664499759674},{"id":"https://openalex.org/keywords/analytical-chemistry","display_name":"Analytical Chemistry (journal)","score":0.3479461669921875},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.32643646001815796},{"id":"https://openalex.org/keywords/crystallography","display_name":"Crystallography","score":0.295502245426178},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.18392404913902283},{"id":"https://openalex.org/keywords/organic-chemistry","display_name":"Organic chemistry","score":0.15148472785949707},{"id":"https://openalex.org/keywords/metallurgy","display_name":"Metallurgy","score":0.11486497521400452},{"id":"https://openalex.org/keywords/membrane","display_name":"Membrane","score":0.09088534116744995}],"concepts":[{"id":"https://openalex.org/C192157962","wikidata":"https://www.wikidata.org/wiki/Q4087243","display_name":"Bilayer","level":3,"score":0.7178347110748291},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6600660085678101},{"id":"https://openalex.org/C137637335","wikidata":"https://www.wikidata.org/wiki/Q899604","display_name":"Crystallite","level":2,"score":0.6068898439407349},{"id":"https://openalex.org/C45206210","wikidata":"https://www.wikidata.org/wiki/Q2415817","display_name":"Nanoscopic scale","level":2,"score":0.5874201655387878},{"id":"https://openalex.org/C56052488","wikidata":"https://www.wikidata.org/wiki/Q103382","display_name":"Amorphous solid","level":2,"score":0.5840696096420288},{"id":"https://openalex.org/C49326732","wikidata":"https://www.wikidata.org/wiki/Q1549892","display_name":"Nanoindentation","level":2,"score":0.44875583052635193},{"id":"https://openalex.org/C43486711","wikidata":"https://www.wikidata.org/wiki/Q192005","display_name":"Elastic modulus","level":2,"score":0.4131518006324768},{"id":"https://openalex.org/C2780902562","wikidata":"https://www.wikidata.org/wiki/Q1154141","display_name":"Indentation","level":2,"score":0.41097259521484375},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.3859664499759674},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.3479461669921875},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.32643646001815796},{"id":"https://openalex.org/C8010536","wikidata":"https://www.wikidata.org/wiki/Q160398","display_name":"Crystallography","level":1,"score":0.295502245426178},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.18392404913902283},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.15148472785949707},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.11486497521400452},{"id":"https://openalex.org/C41625074","wikidata":"https://www.wikidata.org/wiki/Q176088","display_name":"Membrane","level":2,"score":0.09088534116744995},{"id":"https://openalex.org/C55493867","wikidata":"https://www.wikidata.org/wiki/Q7094","display_name":"Biochemistry","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems.2013.6559939","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2013.6559939","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":13,"referenced_works":["https://openalex.org/W1966800404","https://openalex.org/W1993064234","https://openalex.org/W1997105298","https://openalex.org/W2017366062","https://openalex.org/W2018289939","https://openalex.org/W2041228214","https://openalex.org/W2047103704","https://openalex.org/W2086933933","https://openalex.org/W2122106185","https://openalex.org/W2122271644","https://openalex.org/W2152797800","https://openalex.org/W2158932701","https://openalex.org/W3161879169"],"related_works":["https://openalex.org/W1974147899","https://openalex.org/W2377817240","https://openalex.org/W2127202777","https://openalex.org/W4400116489","https://openalex.org/W2079451325","https://openalex.org/W2893946800","https://openalex.org/W2560993203","https://openalex.org/W4387652114","https://openalex.org/W1972501620","https://openalex.org/W2742508829"],"abstract_inverted_index":{"Nanoscale":[0],"ZnO/Al":[1,39],"<sub":[2,6,40,44],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[3,7,41,45],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">2</sub>":[4,42],"O":[5,43],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">3</sub>":[8,46],"multilayers":[9,47],"were":[10,48],"prepared":[11],"on":[12,32],"Silicon":[13],"substrates":[14],"by":[15],"atomic":[16],"layer":[17],"deposition":[18],"(ALD)":[19],"method":[20],"at":[21],"200\u00b0C.":[22],"To":[23],"understand":[24],"the":[25,34,38,54,63,74,83,108,116,121],"size":[26],"effect":[27],"of":[28,37,65,78,85,101],"ZnO":[29,66,123],"nanoscale":[30],"layers":[31,67],"hardness,":[33],"mechanical":[35],"properties":[36],"investigated":[49],"using":[50],"nano-indentation":[51],"technique.":[52],"As":[53],"bilayer":[55,75,88,109],"period":[56,76,89,110],"decreases":[57],"from":[58,69],"60":[59,79],"to":[60,71,80,92],"2":[61],"nm,":[62,82,115],"micro-structures":[64],"changed":[68],"polycrystalline":[70],"amorphous.":[72],"In":[73],"interval":[77],"6":[81,114],"variation":[84],"hardness":[86,97],"versus":[87],"is":[90,111],"similar":[91],"Hall-Patch":[93],"relation,":[94],"with":[95],"maximum":[96],"and":[98,103],"elastic":[99],"modulus":[100],"~10.69GPa":[102],"~138.1GPa,":[104],"respectively.":[105],"However":[106],"when":[107],"smaller":[112],"than":[113,120],"nanolaminates":[117],"became":[118],"softer":[119],"single":[122],"film.":[124]},"counts_by_year":[{"year":2020,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}