{"id":"https://openalex.org/W2048436352","doi":"https://doi.org/10.1109/nems.2013.6559938","title":"Mechanical durability of micro-nano structures surface of black silicon produced by femtosecond laser","display_name":"Mechanical durability of micro-nano structures surface of black silicon produced by femtosecond laser","publication_year":2013,"publication_date":"2013-04-01","ids":{"openalex":"https://openalex.org/W2048436352","doi":"https://doi.org/10.1109/nems.2013.6559938","mag":"2048436352"},"language":"en","primary_location":{"id":"doi:10.1109/nems.2013.6559938","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2013.6559938","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5011839485","display_name":"Xiaobao Guo","orcid":null},"institutions":[{"id":"https://openalex.org/I4210153482","display_name":"Changzhou University","ror":"https://ror.org/04ymgwq66","country_code":"CN","type":"education","lineage":["https://openalex.org/I4210153482"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"X.B. Guo","raw_affiliation_strings":["Center for low-dimensional materials, micro-nano devices and system, Changzhou University, Changzhou, China","Center for Low-Dimensional Mater., Micro-Nano Devices & Syst., Changzhou Univ., Changzhou, China"],"affiliations":[{"raw_affiliation_string":"Center for low-dimensional materials, micro-nano devices and system, Changzhou University, Changzhou, China","institution_ids":["https://openalex.org/I4210153482"]},{"raw_affiliation_string":"Center for Low-Dimensional Mater., Micro-Nano Devices & Syst., Changzhou Univ., Changzhou, China","institution_ids":["https://openalex.org/I4210153482"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5001191710","display_name":"Jianning Ding","orcid":"https://orcid.org/0000-0003-3606-9627"},"institutions":[{"id":"https://openalex.org/I4210153482","display_name":"Changzhou University","ror":"https://ror.org/04ymgwq66","country_code":"CN","type":"education","lineage":["https://openalex.org/I4210153482"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"J.N. Ding","raw_affiliation_strings":["Center for low-dimensional materials, micro-nano devices and system, Changzhou University, Changzhou, China","Center for Low-Dimensional Mater., Micro-Nano Devices & Syst., Changzhou Univ., Changzhou, China"],"affiliations":[{"raw_affiliation_string":"Center for low-dimensional materials, micro-nano devices and system, Changzhou University, Changzhou, China","institution_ids":["https://openalex.org/I4210153482"]},{"raw_affiliation_string":"Center for Low-Dimensional Mater., Micro-Nano Devices & Syst., Changzhou Univ., Changzhou, China","institution_ids":["https://openalex.org/I4210153482"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5081041156","display_name":"S.Y. Wang","orcid":null},"institutions":[{"id":"https://openalex.org/I4210153482","display_name":"Changzhou University","ror":"https://ror.org/04ymgwq66","country_code":"CN","type":"education","lineage":["https://openalex.org/I4210153482"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"S.Y. Wang","raw_affiliation_strings":["Center for low-dimensional materials, micro-nano devices and system, Changzhou University, Changzhou, China","Center for Low-Dimensional Mater., Micro-Nano Devices & Syst., Changzhou Univ., Changzhou, China"],"affiliations":[{"raw_affiliation_string":"Center for low-dimensional materials, micro-nano devices and system, Changzhou University, Changzhou, China","institution_ids":["https://openalex.org/I4210153482"]},{"raw_affiliation_string":"Center for Low-Dimensional Mater., Micro-Nano Devices & Syst., Changzhou Univ., Changzhou, China","institution_ids":["https://openalex.org/I4210153482"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5017643940","display_name":"Jingjiang Qiu","orcid":"https://orcid.org/0000-0002-9225-8273"},"institutions":[{"id":"https://openalex.org/I4210153482","display_name":"Changzhou University","ror":"https://ror.org/04ymgwq66","country_code":"CN","type":"education","lineage":["https://openalex.org/I4210153482"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"J.H. Qiu","raw_affiliation_strings":["Center for low-dimensional materials, micro-nano devices and system, Changzhou University, Changzhou, China","Center for Low-Dimensional Mater., Micro-Nano Devices & Syst., Changzhou Univ., Changzhou, China"],"affiliations":[{"raw_affiliation_string":"Center for low-dimensional materials, micro-nano devices and system, Changzhou University, Changzhou, China","institution_ids":["https://openalex.org/I4210153482"]},{"raw_affiliation_string":"Center for Low-Dimensional Mater., Micro-Nano Devices & Syst., Changzhou Univ., Changzhou, China","institution_ids":["https://openalex.org/I4210153482"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5114244543","display_name":"B. Kan","orcid":null},"institutions":[{"id":"https://openalex.org/I4210153482","display_name":"Changzhou University","ror":"https://ror.org/04ymgwq66","country_code":"CN","type":"education","lineage":["https://openalex.org/I4210153482"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"B. Kan","raw_affiliation_strings":["Center for low-dimensional materials, micro-nano devices and system, Changzhou University, Changzhou, China","Center for Low-Dimensional Mater., Micro-Nano Devices & Syst., Changzhou Univ., Changzhou, China"],"affiliations":[{"raw_affiliation_string":"Center for low-dimensional materials, micro-nano devices and system, Changzhou University, Changzhou, China","institution_ids":["https://openalex.org/I4210153482"]},{"raw_affiliation_string":"Center for Low-Dimensional Mater., Micro-Nano Devices & Syst., Changzhou Univ., Changzhou, China","institution_ids":["https://openalex.org/I4210153482"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5010044928","display_name":"Ningyi Yuan","orcid":"https://orcid.org/0000-0002-8780-8517"},"institutions":[{"id":"https://openalex.org/I4210153482","display_name":"Changzhou University","ror":"https://ror.org/04ymgwq66","country_code":"CN","type":"education","lineage":["https://openalex.org/I4210153482"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"N.Y. Yuan","raw_affiliation_strings":["Center for low-dimensional materials, micro-nano devices and system, Changzhou University, Changzhou, China","Center for Low-Dimensional Mater., Micro-Nano Devices & Syst., Changzhou Univ., Changzhou, China"],"affiliations":[{"raw_affiliation_string":"Center for low-dimensional materials, micro-nano devices and system, Changzhou University, Changzhou, China","institution_ids":["https://openalex.org/I4210153482"]},{"raw_affiliation_string":"Center for Low-Dimensional Mater., Micro-Nano Devices & Syst., Changzhou Univ., Changzhou, China","institution_ids":["https://openalex.org/I4210153482"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":6,"corresponding_author_ids":["https://openalex.org/A5011839485"],"corresponding_institution_ids":["https://openalex.org/I4210153482"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.10846321,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"37","issue":null,"first_page":"1218","last_page":"1221"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10732","display_name":"Laser Material Processing Techniques","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2206","display_name":"Computational Mechanics"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10732","display_name":"Laser Material Processing Techniques","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2206","display_name":"Computational Mechanics"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10478","display_name":"Diamond and Carbon-based Materials Research","score":0.9994000196456909,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13232","display_name":"Laser-Ablation Synthesis of Nanoparticles","score":0.9979000091552734,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/durability","display_name":"Durability","score":0.883293867111206},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.8434759378433228},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.8055044412612915},{"id":"https://openalex.org/keywords/femtosecond","display_name":"Femtosecond","score":0.7998461723327637},{"id":"https://openalex.org/keywords/nano","display_name":"Nano-","score":0.6982690095901489},{"id":"https://openalex.org/keywords/laser","display_name":"Laser","score":0.6548541784286499},{"id":"https://openalex.org/keywords/black-silicon","display_name":"Black silicon","score":0.6461554169654846},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.5473043322563171},{"id":"https://openalex.org/keywords/lubrication","display_name":"Lubrication","score":0.47958341240882874},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.38988223671913147},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.3768914043903351}],"concepts":[{"id":"https://openalex.org/C104304963","wikidata":"https://www.wikidata.org/wiki/Q5316114","display_name":"Durability","level":2,"score":0.883293867111206},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.8434759378433228},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.8055044412612915},{"id":"https://openalex.org/C167735695","wikidata":"https://www.wikidata.org/wiki/Q1777507","display_name":"Femtosecond","level":3,"score":0.7998461723327637},{"id":"https://openalex.org/C2780357685","wikidata":"https://www.wikidata.org/wiki/Q154357","display_name":"Nano-","level":2,"score":0.6982690095901489},{"id":"https://openalex.org/C520434653","wikidata":"https://www.wikidata.org/wiki/Q38867","display_name":"Laser","level":2,"score":0.6548541784286499},{"id":"https://openalex.org/C2778166601","wikidata":"https://www.wikidata.org/wiki/Q2254210","display_name":"Black silicon","level":3,"score":0.6461554169654846},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.5473043322563171},{"id":"https://openalex.org/C184608416","wikidata":"https://www.wikidata.org/wiki/Q1455803","display_name":"Lubrication","level":2,"score":0.47958341240882874},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.38988223671913147},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.3768914043903351},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems.2013.6559938","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2013.6559938","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Clean water and sanitation","id":"https://metadata.un.org/sdg/6","score":0.47999998927116394}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":44,"referenced_works":["https://openalex.org/W1974330456","https://openalex.org/W1982797377","https://openalex.org/W1986010802","https://openalex.org/W1990814792","https://openalex.org/W1991529018","https://openalex.org/W1994452667","https://openalex.org/W1994957972","https://openalex.org/W1995035098","https://openalex.org/W2008962320","https://openalex.org/W2011669140","https://openalex.org/W2019573483","https://openalex.org/W2023597614","https://openalex.org/W2026989252","https://openalex.org/W2028453434","https://openalex.org/W2028947090","https://openalex.org/W2029655181","https://openalex.org/W2031586517","https://openalex.org/W2032087133","https://openalex.org/W2034796464","https://openalex.org/W2047062558","https://openalex.org/W2053828574","https://openalex.org/W2054714698","https://openalex.org/W2056534012","https://openalex.org/W2060224467","https://openalex.org/W2062959644","https://openalex.org/W2064304593","https://openalex.org/W2065080751","https://openalex.org/W2065552676","https://openalex.org/W2067011941","https://openalex.org/W2068745873","https://openalex.org/W2072568192","https://openalex.org/W2080536864","https://openalex.org/W2084927401","https://openalex.org/W2089486068","https://openalex.org/W2092454316","https://openalex.org/W2094828479","https://openalex.org/W2119264022","https://openalex.org/W2125573123","https://openalex.org/W2128133001","https://openalex.org/W2129235898","https://openalex.org/W2146529751","https://openalex.org/W2160508043","https://openalex.org/W2165587758","https://openalex.org/W2324567999"],"related_works":["https://openalex.org/W2352180411","https://openalex.org/W2380892508","https://openalex.org/W2386194254","https://openalex.org/W1567463853","https://openalex.org/W159888992","https://openalex.org/W1458806294","https://openalex.org/W2366942712","https://openalex.org/W2161251670","https://openalex.org/W2977253075","https://openalex.org/W1971467895"],"abstract_inverted_index":{"Hierarchical":[0],"micro-nano":[1,34],"structure":[2,35],"surface":[3,36,53],"on":[4],"silicon":[5,21],"is":[6,41,45],"directly":[7],"produced":[8],"by":[9],"femtosecond":[10],"laser":[11,15],"in":[12,23],"air.":[13],"The":[14],"processing":[16],"reduces":[17],"the":[18,24,33],"reflectance":[19],"of":[20,32],"significantly":[22,46],"studied":[25],"wavelength":[26],"range":[27],"(0.25-1.1":[28],"\u03bcm).":[29],"Mechanical":[30],"durability":[31],"has":[37],"been":[38],"studied.":[39],"It":[40],"indicated":[42],"that":[43],"wear":[44],"reduced":[47],"under":[48],"water":[49],"saturation":[50],"lubrication.":[51],"Moreover":[52],"modification":[54],"with":[55],"Perfluoropolyether":[56],"improves":[57],"its":[58],"mechanical":[59],"durability.":[60]},"counts_by_year":[],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}