{"id":"https://openalex.org/W1973716346","doi":"https://doi.org/10.1109/nems.2013.6559926","title":"Parylene-based fold-and-bond wireless pressure sensor","display_name":"Parylene-based fold-and-bond wireless pressure sensor","publication_year":2013,"publication_date":"2013-04-01","ids":{"openalex":"https://openalex.org/W1973716346","doi":"https://doi.org/10.1109/nems.2013.6559926","mag":"1973716346"},"language":"en","primary_location":{"id":"doi:10.1109/nems.2013.6559926","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2013.6559926","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5087477048","display_name":"Brian Park Crum","orcid":null},"institutions":[{"id":"https://openalex.org/I87216513","display_name":"Michigan State University","ror":"https://ror.org/05hs6h993","country_code":"US","type":"education","lineage":["https://openalex.org/I87216513"]}],"countries":["US"],"is_corresponding":true,"raw_author_name":"Brian Crum","raw_affiliation_strings":["Department of Electrical and Computer Engineering, Michigan State University, USA","Dept. of Electr. & Comput. Eng., Michigan State Univ., East Lansing, MI, USA#TAB#"],"affiliations":[{"raw_affiliation_string":"Department of Electrical and Computer Engineering, Michigan State University, USA","institution_ids":["https://openalex.org/I87216513"]},{"raw_affiliation_string":"Dept. of Electr. & Comput. Eng., Michigan State Univ., East Lansing, MI, USA#TAB#","institution_ids":["https://openalex.org/I87216513"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5100320306","display_name":"Wen Li","orcid":"https://orcid.org/0000-0002-6862-8561"},"institutions":[{"id":"https://openalex.org/I87216513","display_name":"Michigan State University","ror":"https://ror.org/05hs6h993","country_code":"US","type":"education","lineage":["https://openalex.org/I87216513"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Wen Li","raw_affiliation_strings":["Department of Electrical and Computer Engineering, Michigan State University, USA","Dept. of Electr. & Comput. Eng., Michigan State Univ., East Lansing, MI, USA#TAB#"],"affiliations":[{"raw_affiliation_string":"Department of Electrical and Computer Engineering, Michigan State University, USA","institution_ids":["https://openalex.org/I87216513"]},{"raw_affiliation_string":"Dept. of Electr. & Comput. Eng., Michigan State Univ., East Lansing, MI, USA#TAB#","institution_ids":["https://openalex.org/I87216513"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":["https://openalex.org/A5087477048"],"corresponding_institution_ids":["https://openalex.org/I87216513"],"apc_list":null,"apc_paid":null,"fwci":0.62351963,"has_fulltext":false,"cited_by_count":11,"citation_normalized_percentile":{"value":0.69967864,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":97},"biblio":{"volume":null,"issue":null,"first_page":"1155","last_page":"1158"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11472","display_name":"Analytical Chemistry and Sensors","score":0.9959999918937683,"subfield":{"id":"https://openalex.org/subfields/1502","display_name":"Bioengineering"},"field":{"id":"https://openalex.org/fields/15","display_name":"Chemical Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11472","display_name":"Analytical Chemistry and Sensors","score":0.9959999918937683,"subfield":{"id":"https://openalex.org/subfields/1502","display_name":"Bioengineering"},"field":{"id":"https://openalex.org/fields/15","display_name":"Chemical Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11601","display_name":"Neuroscience and Neural Engineering","score":0.9940000176429749,"subfield":{"id":"https://openalex.org/subfields/2804","display_name":"Cellular and Molecular Neuroscience"},"field":{"id":"https://openalex.org/fields/28","display_name":"Neuroscience"},"domain":{"id":"https://openalex.org/domains/1","display_name":"Life Sciences"}},{"id":"https://openalex.org/T11429","display_name":"Semiconductor Lasers and Optical Devices","score":0.9872000217437744,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.838464081287384},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.6930468678474426},{"id":"https://openalex.org/keywords/pressure-sensor","display_name":"Pressure sensor","score":0.6784014105796814},{"id":"https://openalex.org/keywords/parylene","display_name":"Parylene","score":0.6741671562194824},{"id":"https://openalex.org/keywords/planar","display_name":"Planar","score":0.6394977569580078},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.617917537689209},{"id":"https://openalex.org/keywords/capacitor","display_name":"Capacitor","score":0.5442590117454529},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.46662792563438416},{"id":"https://openalex.org/keywords/electromagnetic-coil","display_name":"Electromagnetic coil","score":0.46155381202697754},{"id":"https://openalex.org/keywords/biocompatibility","display_name":"Biocompatibility","score":0.428935706615448},{"id":"https://openalex.org/keywords/flexibility","display_name":"Flexibility (engineering)","score":0.4103763997554779},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.35364028811454773},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.32819777727127075},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.29926538467407227},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.2556614875793457},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.21915221214294434},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.18456819653511047},{"id":"https://openalex.org/keywords/polymer","display_name":"Polymer","score":0.1750611960887909},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.16500771045684814}],"concepts":[{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.838464081287384},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6930468678474426},{"id":"https://openalex.org/C41325743","wikidata":"https://www.wikidata.org/wiki/Q1261040","display_name":"Pressure sensor","level":2,"score":0.6784014105796814},{"id":"https://openalex.org/C2777385008","wikidata":"https://www.wikidata.org/wiki/Q448540","display_name":"Parylene","level":3,"score":0.6741671562194824},{"id":"https://openalex.org/C134786449","wikidata":"https://www.wikidata.org/wiki/Q3391255","display_name":"Planar","level":2,"score":0.6394977569580078},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.617917537689209},{"id":"https://openalex.org/C52192207","wikidata":"https://www.wikidata.org/wiki/Q5322","display_name":"Capacitor","level":3,"score":0.5442590117454529},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.46662792563438416},{"id":"https://openalex.org/C30403606","wikidata":"https://www.wikidata.org/wiki/Q2981904","display_name":"Electromagnetic coil","level":2,"score":0.46155381202697754},{"id":"https://openalex.org/C2777230088","wikidata":"https://www.wikidata.org/wiki/Q864426","display_name":"Biocompatibility","level":2,"score":0.428935706615448},{"id":"https://openalex.org/C2780598303","wikidata":"https://www.wikidata.org/wiki/Q65921492","display_name":"Flexibility (engineering)","level":2,"score":0.4103763997554779},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.35364028811454773},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.32819777727127075},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.29926538467407227},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.2556614875793457},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.21915221214294434},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.18456819653511047},{"id":"https://openalex.org/C521977710","wikidata":"https://www.wikidata.org/wiki/Q81163","display_name":"Polymer","level":2,"score":0.1750611960887909},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.16500771045684814},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C121684516","wikidata":"https://www.wikidata.org/wiki/Q7600677","display_name":"Computer graphics (images)","level":1,"score":0.0},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.0},{"id":"https://openalex.org/C105795698","wikidata":"https://www.wikidata.org/wiki/Q12483","display_name":"Statistics","level":1,"score":0.0},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems.2013.6559926","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2013.6559926","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/6","display_name":"Clean water and sanitation","score":0.4300000071525574},{"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy","score":0.4099999964237213}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":4,"referenced_works":["https://openalex.org/W2010689540","https://openalex.org/W2129444923","https://openalex.org/W2148732466","https://openalex.org/W2155547503"],"related_works":["https://openalex.org/W2393655250","https://openalex.org/W2393417063","https://openalex.org/W2561756220","https://openalex.org/W2365560514","https://openalex.org/W2414282704","https://openalex.org/W4240340530","https://openalex.org/W4386774075","https://openalex.org/W4220955032","https://openalex.org/W4386127536","https://openalex.org/W4211078944"],"abstract_inverted_index":{"This":[0],"paper":[1],"describes":[2],"the":[3,29,49,56,61],"design,":[4],"fabrication,":[5],"and":[6,28,42,51,58,69,78],"characterization":[7],"of":[8,60,75,83],"a":[9,35,79],"wireless,":[10],"flexible,":[11],"passive":[12],"pressure":[13,21,73],"sensor":[14],"that":[15],"is":[16],"suitable":[17],"for":[18],"long-term":[19],"intraocular":[20],"monitoring.":[22],"The":[23],"integrated":[24],"planar":[25],"MEMS":[26],"coil":[27],"variable":[30],"capacitor":[31],"were":[32,64,86],"constructed":[33],"using":[34],"fold-and-bond":[36],"technique,":[37],"which":[38,54],"avoids":[39],"multilayer":[40],"processes":[41],"thus":[43],"reduces":[44],"fabrication":[45],"complications.":[46],"Parylene-C":[47],"was":[48],"structural":[50],"packaging":[52],"material,":[53],"ensures":[55],"flexibility":[57],"biocompatibility":[59],"sensor.":[62],"Devices":[63],"characterized":[65],"in":[66,88],"both":[67],"air":[68],"liquid":[70],"environments.":[71],"A":[72],"sensitivity":[74],"156":[76],"kHz/mmHg":[77],"maximum":[80],"detectable":[81],"range":[82],"28":[84],"mm":[85],"achieved":[87],"water.":[89]},"counts_by_year":[{"year":2024,"cited_by_count":1},{"year":2023,"cited_by_count":1},{"year":2021,"cited_by_count":1},{"year":2020,"cited_by_count":1},{"year":2019,"cited_by_count":2},{"year":2018,"cited_by_count":3},{"year":2015,"cited_by_count":2}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}