{"id":"https://openalex.org/W1971501488","doi":"https://doi.org/10.1109/nems.2013.6559917","title":"Piezoresistive probes for (biomolecular) force sensing","display_name":"Piezoresistive probes for (biomolecular) force sensing","publication_year":2013,"publication_date":"2013-04-01","ids":{"openalex":"https://openalex.org/W1971501488","doi":"https://doi.org/10.1109/nems.2013.6559917","mag":"1971501488"},"language":"en","primary_location":{"id":"doi:10.1109/nems.2013.6559917","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2013.6559917","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5063351329","display_name":"Joan Bausells","orcid":"https://orcid.org/0000-0003-3706-4975"},"institutions":[{"id":"https://openalex.org/I4210160312","display_name":"Institut de Microelectr\u00f2nica de Barcelona","ror":"https://ror.org/04pnym676","country_code":"ES","type":"facility","lineage":["https://openalex.org/I134820265","https://openalex.org/I4210147934","https://openalex.org/I4210160312"]}],"countries":["ES"],"is_corresponding":false,"raw_author_name":"Joan Bausells","raw_affiliation_strings":["Barcelona Microelectronics Institute, IMB-CNM, CSIC, Bellaterra, Spain","Barcelona Microelectron. Inst. (IMB), CNM, Bellaterra, Spain"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Barcelona Microelectronics Institute, IMB-CNM, CSIC, Bellaterra, Spain","institution_ids":["https://openalex.org/I4210160312"]},{"raw_affiliation_string":"Barcelona Microelectron. Inst. (IMB), CNM, Bellaterra, Spain","institution_ids":["https://openalex.org/I4210160312"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5068208064","display_name":"Giordano Tosolini","orcid":null},"institutions":[{"id":"https://openalex.org/I4210160312","display_name":"Institut de Microelectr\u00f2nica de Barcelona","ror":"https://ror.org/04pnym676","country_code":"ES","type":"facility","lineage":["https://openalex.org/I134820265","https://openalex.org/I4210147934","https://openalex.org/I4210160312"]}],"countries":["ES"],"is_corresponding":false,"raw_author_name":"Giordano Tosolini","raw_affiliation_strings":["Barcelona Microelectronics Institute, IMB-CNM, CSIC, Bellaterra, Spain","Barcelona Microelectron. Inst. (IMB), CNM, Bellaterra, Spain"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Barcelona Microelectronics Institute, IMB-CNM, CSIC, Bellaterra, Spain","institution_ids":["https://openalex.org/I4210160312"]},{"raw_affiliation_string":"Barcelona Microelectron. Inst. (IMB), CNM, Bellaterra, Spain","institution_ids":["https://openalex.org/I4210160312"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5053906483","display_name":"Yigezu Mulugeta Birhane","orcid":null},"institutions":[{"id":"https://openalex.org/I4210160312","display_name":"Institut de Microelectr\u00f2nica de Barcelona","ror":"https://ror.org/04pnym676","country_code":"ES","type":"facility","lineage":["https://openalex.org/I134820265","https://openalex.org/I4210147934","https://openalex.org/I4210160312"]}],"countries":["ES"],"is_corresponding":false,"raw_author_name":"Yigezu M. Birhane","raw_affiliation_strings":["Barcelona Microelectronics Institute, IMB-CNM, CSIC, Bellaterra, Spain","Barcelona Microelectron. Inst. (IMB), CNM, Bellaterra, Spain"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Barcelona Microelectronics Institute, IMB-CNM, CSIC, Bellaterra, Spain","institution_ids":["https://openalex.org/I4210160312"]},{"raw_affiliation_string":"Barcelona Microelectron. Inst. (IMB), CNM, Bellaterra, Spain","institution_ids":["https://openalex.org/I4210160312"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5014958430","display_name":"Francesc P\u00e9rez\u2010Murano","orcid":"https://orcid.org/0000-0002-4647-8558"},"institutions":[{"id":"https://openalex.org/I4210160312","display_name":"Institut de Microelectr\u00f2nica de Barcelona","ror":"https://ror.org/04pnym676","country_code":"ES","type":"facility","lineage":["https://openalex.org/I134820265","https://openalex.org/I4210147934","https://openalex.org/I4210160312"]}],"countries":["ES"],"is_corresponding":false,"raw_author_name":"Francesc Perez-Murano","raw_affiliation_strings":["Barcelona Microelectronics Institute, IMB-CNM, CSIC, Bellaterra, Spain","Barcelona Microelectron. Inst. (IMB), CNM, Bellaterra, Spain"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Barcelona Microelectronics Institute, IMB-CNM, CSIC, Bellaterra, Spain","institution_ids":["https://openalex.org/I4210160312"]},{"raw_affiliation_string":"Barcelona Microelectron. Inst. (IMB), CNM, Bellaterra, Spain","institution_ids":["https://openalex.org/I4210160312"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.03701815,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"1112","last_page":"1115"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":1.0,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":1.0,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":1.0,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9991000294685364,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/piezoresistive-effect","display_name":"Piezoresistive effect","score":0.9576587677001953},{"id":"https://openalex.org/keywords/cantilever","display_name":"Cantilever","score":0.9200601577758789},{"id":"https://openalex.org/keywords/force-spectroscopy","display_name":"Force spectroscopy","score":0.8185911178588867},{"id":"https://openalex.org/keywords/biomolecule","display_name":"Biomolecule","score":0.6743223667144775},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.6580712199211121},{"id":"https://openalex.org/keywords/wafer","display_name":"Wafer","score":0.6174085140228271},{"id":"https://openalex.org/keywords/spring","display_name":"Spring (device)","score":0.573128342628479},{"id":"https://openalex.org/keywords/sensitivity","display_name":"Sensitivity (control systems)","score":0.5609104037284851},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.5336896181106567},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.5335930585861206},{"id":"https://openalex.org/keywords/nanosensor","display_name":"Nanosensor","score":0.463024765253067},{"id":"https://openalex.org/keywords/noise","display_name":"Noise (video)","score":0.44764068722724915},{"id":"https://openalex.org/keywords/atomic-force-microscopy","display_name":"Atomic force microscopy","score":0.2732604742050171},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.18886145949363708},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.14252254366874695},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.1389327347278595},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.1265665590763092}],"concepts":[{"id":"https://openalex.org/C198490522","wikidata":"https://www.wikidata.org/wiki/Q1932915","display_name":"Piezoresistive effect","level":2,"score":0.9576587677001953},{"id":"https://openalex.org/C141354745","wikidata":"https://www.wikidata.org/wiki/Q17227","display_name":"Cantilever","level":2,"score":0.9200601577758789},{"id":"https://openalex.org/C119473381","wikidata":"https://www.wikidata.org/wiki/Q49298","display_name":"Force spectroscopy","level":3,"score":0.8185911178588867},{"id":"https://openalex.org/C49853544","wikidata":"https://www.wikidata.org/wiki/Q206229","display_name":"Biomolecule","level":2,"score":0.6743223667144775},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6580712199211121},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.6174085140228271},{"id":"https://openalex.org/C2778712887","wikidata":"https://www.wikidata.org/wiki/Q102836","display_name":"Spring (device)","level":2,"score":0.573128342628479},{"id":"https://openalex.org/C21200559","wikidata":"https://www.wikidata.org/wiki/Q7451068","display_name":"Sensitivity (control systems)","level":2,"score":0.5609104037284851},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.5336896181106567},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.5335930585861206},{"id":"https://openalex.org/C41858301","wikidata":"https://www.wikidata.org/wiki/Q2327870","display_name":"Nanosensor","level":2,"score":0.463024765253067},{"id":"https://openalex.org/C99498987","wikidata":"https://www.wikidata.org/wiki/Q2210247","display_name":"Noise (video)","level":3,"score":0.44764068722724915},{"id":"https://openalex.org/C102951782","wikidata":"https://www.wikidata.org/wiki/Q49295","display_name":"Atomic force microscopy","level":2,"score":0.2732604742050171},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.18886145949363708},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.14252254366874695},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.1389327347278595},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.1265665590763092},{"id":"https://openalex.org/C97355855","wikidata":"https://www.wikidata.org/wiki/Q11473","display_name":"Thermodynamics","level":1,"score":0.0},{"id":"https://openalex.org/C115961682","wikidata":"https://www.wikidata.org/wiki/Q860623","display_name":"Image (mathematics)","level":2,"score":0.0},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems.2013.6559917","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2013.6559917","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":16,"referenced_works":["https://openalex.org/W1557027816","https://openalex.org/W1968274791","https://openalex.org/W1969292155","https://openalex.org/W2000535515","https://openalex.org/W2002609766","https://openalex.org/W2007206169","https://openalex.org/W2015667791","https://openalex.org/W2016059623","https://openalex.org/W2032282517","https://openalex.org/W2061543408","https://openalex.org/W2068935998","https://openalex.org/W2089154372","https://openalex.org/W2115489808","https://openalex.org/W2158208080","https://openalex.org/W2166372815","https://openalex.org/W4232120383"],"related_works":["https://openalex.org/W2150004397","https://openalex.org/W1973407535","https://openalex.org/W2540685717","https://openalex.org/W2025294681","https://openalex.org/W2105225674","https://openalex.org/W2122612554","https://openalex.org/W2045503801","https://openalex.org/W2474799934","https://openalex.org/W3040115070","https://openalex.org/W2121972528"],"abstract_inverted_index":{"We":[0,61],"have":[1,38,62],"developed":[2],"self-sensing":[3],"piezoresistive":[4],"microcantilevers":[5],"optimized":[6],"for":[7],"the":[8,58,65,69,79,83,87,102,105,108],"measurement":[9],"of":[10,32,68,86,107,115],"(biomolecular)":[11],"forces.":[12],"Typical":[13],"dimensions":[14],"are":[15,89],"250":[16],"\u03bcm":[17,21],"in":[18,22,27,49,71,98,110],"length,":[19],"8-20":[20],"width":[23],"and":[24,44,53,74,82],"450":[25],"nm":[26],"thickness,":[28],"with":[29,95],"spring":[30],"constants":[31],"about":[33],"1":[34],"mN/m.":[35],"The":[36],"devices":[37,88],"been":[39],"electromechanically":[40],"tested":[41,64],"on":[42,57],"wafer":[43],"show":[45,76],"good":[46],"force":[47,80,113],"resolutions":[48],"air":[50],"between":[51],"35":[52],"130":[54],"pN":[55],"depending":[56],"cantilever":[59],"dimensions.":[60],"also":[63],"electromechanical":[66],"behavior":[67],"cantilevers":[70,109],"liquid":[72],"environment":[73],"we":[75],"that":[77],"both":[78],"sensitivity":[81],"noise":[84],"characteristics":[85],"not":[90],"noticeably":[91],"degraded":[92],"as":[93],"compared":[94],"their":[96],"response":[97],"air.":[99],"This":[100],"opens":[101],"way":[103],"to":[104],"use":[106],"single":[111],"molecule":[112],"spectroscopy":[114],"biomolecules.":[116]},"counts_by_year":[],"updated_date":"2026-06-11T09:08:48.828518","created_date":"2025-10-10T00:00:00"}