{"id":"https://openalex.org/W2074700544","doi":"https://doi.org/10.1109/nems.2013.6559911","title":"Undercut edges for robust capillary self-alignment in hybrid microassembly","display_name":"Undercut edges for robust capillary self-alignment in hybrid microassembly","publication_year":2013,"publication_date":"2013-04-01","ids":{"openalex":"https://openalex.org/W2074700544","doi":"https://doi.org/10.1109/nems.2013.6559911","mag":"2074700544"},"language":"en","primary_location":{"id":"doi:10.1109/nems.2013.6559911","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2013.6559911","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5009766877","display_name":"Ville Liimatainen","orcid":"https://orcid.org/0000-0002-0358-9805"},"institutions":[{"id":"https://openalex.org/I9927081","display_name":"Aalto University","ror":"https://ror.org/020hwjq30","country_code":"FI","type":"education","lineage":["https://openalex.org/I9927081"]}],"countries":["FI"],"is_corresponding":true,"raw_author_name":"Ville Liimatainen","raw_affiliation_strings":["Department of Automation and Systems Technology, School of Electrical Engineering, Aalto University, Finland","Department of Automation and Systems Technology, Aalto University, Aalto, Finland"],"affiliations":[{"raw_affiliation_string":"Department of Automation and Systems Technology, School of Electrical Engineering, Aalto University, Finland","institution_ids":["https://openalex.org/I9927081"]},{"raw_affiliation_string":"Department of Automation and Systems Technology, Aalto University, Aalto, Finland","institution_ids":["https://openalex.org/I9927081"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5019272044","display_name":"Veikko Sariola","orcid":"https://orcid.org/0000-0001-8307-6120"},"institutions":[{"id":"https://openalex.org/I9927081","display_name":"Aalto University","ror":"https://ror.org/020hwjq30","country_code":"FI","type":"education","lineage":["https://openalex.org/I9927081"]}],"countries":["FI"],"is_corresponding":false,"raw_author_name":"Veikko Sariola","raw_affiliation_strings":["Department of Automation and Systems Technology, School of Electrical Engineering, Aalto University, Finland","Department of Automation and Systems Technology, Aalto University, Aalto, Finland"],"affiliations":[{"raw_affiliation_string":"Department of Automation and Systems Technology, School of Electrical Engineering, Aalto University, Finland","institution_ids":["https://openalex.org/I9927081"]},{"raw_affiliation_string":"Department of Automation and Systems Technology, Aalto University, Aalto, Finland","institution_ids":["https://openalex.org/I9927081"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5100356471","display_name":"Quan Zhou","orcid":"https://orcid.org/0000-0002-3819-3878"},"institutions":[{"id":"https://openalex.org/I9927081","display_name":"Aalto University","ror":"https://ror.org/020hwjq30","country_code":"FI","type":"education","lineage":["https://openalex.org/I9927081"]}],"countries":["FI"],"is_corresponding":false,"raw_author_name":"Quan Zhou","raw_affiliation_strings":["Department of Automation and Systems Technology, School of Electrical Engineering, Aalto University, Finland","Department of Automation and Systems Technology, Aalto University, Aalto, Finland"],"affiliations":[{"raw_affiliation_string":"Department of Automation and Systems Technology, School of Electrical Engineering, Aalto University, Finland","institution_ids":["https://openalex.org/I9927081"]},{"raw_affiliation_string":"Department of Automation and Systems Technology, Aalto University, Aalto, Finland","institution_ids":["https://openalex.org/I9927081"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":["https://openalex.org/A5009766877"],"corresponding_institution_ids":["https://openalex.org/I9927081"],"apc_list":null,"apc_paid":null,"fwci":0.3235,"has_fulltext":false,"cited_by_count":3,"citation_normalized_percentile":{"value":0.61241233,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":96},"biblio":{"volume":null,"issue":null,"first_page":"1088","last_page":"1091"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10313","display_name":"Surface Modification and Superhydrophobicity","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10313","display_name":"Surface Modification and Superhydrophobicity","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12784","display_name":"Modular Robots and Swarm Intelligence","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11799","display_name":"Adhesion, Friction, and Surface Interactions","score":0.9986000061035156,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/undercut","display_name":"Undercut","score":0.9596923589706421},{"id":"https://openalex.org/keywords/surface-tension","display_name":"Surface tension","score":0.7274903655052185},{"id":"https://openalex.org/keywords/capillary-action","display_name":"Capillary action","score":0.7227307558059692},{"id":"https://openalex.org/keywords/scanning-electron-microscope","display_name":"Scanning electron microscope","score":0.6470852494239807},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.6286919713020325},{"id":"https://openalex.org/keywords/adhesive","display_name":"Adhesive","score":0.5594846606254578},{"id":"https://openalex.org/keywords/enhanced-data-rates-for-gsm-evolution","display_name":"Enhanced Data Rates for GSM Evolution","score":0.4940991699695587},{"id":"https://openalex.org/keywords/tension","display_name":"Tension (geology)","score":0.44558537006378174},{"id":"https://openalex.org/keywords/capillary-length","display_name":"Capillary length","score":0.4417390823364258},{"id":"https://openalex.org/keywords/curing","display_name":"Curing (chemistry)","score":0.4285636246204376},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.42748260498046875},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.2173789143562317},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.0995824933052063},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.09861135482788086}],"concepts":[{"id":"https://openalex.org/C2779292183","wikidata":"https://www.wikidata.org/wiki/Q1619814","display_name":"Undercut","level":2,"score":0.9596923589706421},{"id":"https://openalex.org/C8892853","wikidata":"https://www.wikidata.org/wiki/Q170749","display_name":"Surface tension","level":2,"score":0.7274903655052185},{"id":"https://openalex.org/C196806460","wikidata":"https://www.wikidata.org/wiki/Q188603","display_name":"Capillary action","level":2,"score":0.7227307558059692},{"id":"https://openalex.org/C26771246","wikidata":"https://www.wikidata.org/wiki/Q321095","display_name":"Scanning electron microscope","level":2,"score":0.6470852494239807},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6286919713020325},{"id":"https://openalex.org/C68928338","wikidata":"https://www.wikidata.org/wiki/Q131790","display_name":"Adhesive","level":3,"score":0.5594846606254578},{"id":"https://openalex.org/C162307627","wikidata":"https://www.wikidata.org/wiki/Q204833","display_name":"Enhanced Data Rates for GSM Evolution","level":2,"score":0.4940991699695587},{"id":"https://openalex.org/C186068551","wikidata":"https://www.wikidata.org/wiki/Q13255585","display_name":"Tension (geology)","level":3,"score":0.44558537006378174},{"id":"https://openalex.org/C204402833","wikidata":"https://www.wikidata.org/wiki/Q3259177","display_name":"Capillary length","level":3,"score":0.4417390823364258},{"id":"https://openalex.org/C132976073","wikidata":"https://www.wikidata.org/wiki/Q2991861","display_name":"Curing (chemistry)","level":2,"score":0.4285636246204376},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.42748260498046875},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.2173789143562317},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0995824933052063},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.09861135482788086},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C112950240","wikidata":"https://www.wikidata.org/wiki/Q76005","display_name":"Ultimate tensile strength","level":2,"score":0.0},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems.2013.6559911","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2013.6559911","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/11","display_name":"Sustainable cities and communities","score":0.47999998927116394}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":17,"referenced_works":["https://openalex.org/W1997218633","https://openalex.org/W2001917473","https://openalex.org/W2016894076","https://openalex.org/W2031258910","https://openalex.org/W2033720272","https://openalex.org/W2050051792","https://openalex.org/W2063735181","https://openalex.org/W2064070003","https://openalex.org/W2080646850","https://openalex.org/W2084961912","https://openalex.org/W2086019689","https://openalex.org/W2106521132","https://openalex.org/W2123971380","https://openalex.org/W2136068774","https://openalex.org/W2148476951","https://openalex.org/W2609489534","https://openalex.org/W6654685271"],"related_works":["https://openalex.org/W2292530180","https://openalex.org/W2892679476","https://openalex.org/W2997866847","https://openalex.org/W1988440246","https://openalex.org/W2148654044","https://openalex.org/W2091753030","https://openalex.org/W2398184825","https://openalex.org/W1504090186","https://openalex.org/W2013487775","https://openalex.org/W4390114862"],"abstract_inverted_index":{"In":[0],"this":[1],"paper,":[2],"we":[3],"report":[4],"capillary":[5,55],"self-alignment":[6,56],"of":[7,35],"200":[8,10],"\u00d7x":[9],"\u03bcm":[11],"square":[12],"parts":[13],"on":[14],"matching":[15],"patterns":[16],"with":[17],"undercut":[18,21],"edges.":[19],"The":[20],"edge":[22],"structure":[23],"is":[24,67],"a":[25,70],"purely":[26],"topographical":[27],"feature":[28],"that":[29],"provides":[30],"ultimate":[31],"pinning":[32],"for":[33,49],"liquids":[34],"any":[36],"surface":[37,51],"tension":[38,52],"without":[39],"chemical":[40],"treatment.":[41],"We":[42],"show":[43],"contact":[44],"angles":[45],"close":[46],"to":[47],"180\u00b0":[48],"low":[50],"liquids,":[53],"and":[54],"using":[57],"thermally":[58],"curable":[59],"adhesive.":[60],"Submicron":[61],"alignment":[62],"accuracy":[63],"after":[64],"adhesive":[65],"curing":[66],"verified":[68],"in":[69],"scanning":[71],"electron":[72],"microscope":[73],"(SEM).":[74]},"counts_by_year":[{"year":2017,"cited_by_count":1},{"year":2014,"cited_by_count":2}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}