{"id":"https://openalex.org/W2001176239","doi":"https://doi.org/10.1109/nems.2013.6559908","title":"Development of flexible neural probes using SU-8/parylene","display_name":"Development of flexible neural probes using SU-8/parylene","publication_year":2013,"publication_date":"2013-04-01","ids":{"openalex":"https://openalex.org/W2001176239","doi":"https://doi.org/10.1109/nems.2013.6559908","mag":"2001176239"},"language":"en","primary_location":{"id":"doi:10.1109/nems.2013.6559908","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2013.6559908","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5044486444","display_name":"Zhuolin Xiang","orcid":null},"institutions":[{"id":"https://openalex.org/I165932596","display_name":"National University of Singapore","ror":"https://ror.org/01tgyzw49","country_code":"SG","type":"education","lineage":["https://openalex.org/I165932596"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"Zhuolin Xiang","raw_affiliation_strings":["Department of Electrical & Computer Engineering, Singapore Institute for Neurotechnology (SINAPSE), National University of Singapore, Singapore"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical & Computer Engineering, Singapore Institute for Neurotechnology (SINAPSE), National University of Singapore, Singapore","institution_ids":["https://openalex.org/I165932596"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100662422","display_name":"Hao Wang","orcid":"https://orcid.org/0000-0001-5388-6691"},"institutions":[{"id":"https://openalex.org/I165932596","display_name":"National University of Singapore","ror":"https://ror.org/01tgyzw49","country_code":"SG","type":"education","lineage":["https://openalex.org/I165932596"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"Hao Wang","raw_affiliation_strings":["Department of Electrical & Computer Engineering, Singapore Institute for Neurotechnology (SINAPSE), National University of Singapore, Singapore"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical & Computer Engineering, Singapore Institute for Neurotechnology (SINAPSE), National University of Singapore, Singapore","institution_ids":["https://openalex.org/I165932596"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5077967364","display_name":"Songsong Zhang","orcid":"https://orcid.org/0000-0001-5598-7891"},"institutions":[{"id":"https://openalex.org/I115228651","display_name":"Agency for Science, Technology and Research","ror":"https://ror.org/036wvzt09","country_code":"SG","type":"government","lineage":["https://openalex.org/I115228651"]},{"id":"https://openalex.org/I165932596","display_name":"National University of Singapore","ror":"https://ror.org/01tgyzw49","country_code":"SG","type":"education","lineage":["https://openalex.org/I165932596"]},{"id":"https://openalex.org/I4210090209","display_name":"Institute of Microelectronics","ror":"https://ror.org/009rw8n36","country_code":"SG","type":"facility","lineage":["https://openalex.org/I115228651","https://openalex.org/I4210090209","https://openalex.org/I91275662"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"Songsong Zhang","raw_affiliation_strings":["Department of Electrical & Computer Engineering, National University of Singapore, Singapore","Institute of Microelectronics, Agency for Science, Technology and Research, Singapore"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical & Computer Engineering, National University of Singapore, Singapore","institution_ids":["https://openalex.org/I165932596"]},{"raw_affiliation_string":"Institute of Microelectronics, Agency for Science, Technology and Research, Singapore","institution_ids":["https://openalex.org/I115228651","https://openalex.org/I4210090209"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5040456855","display_name":"Shih\u2010Cheng Yen","orcid":"https://orcid.org/0000-0001-7723-0072"},"institutions":[{"id":"https://openalex.org/I165932596","display_name":"National University of Singapore","ror":"https://ror.org/01tgyzw49","country_code":"SG","type":"education","lineage":["https://openalex.org/I165932596"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"Shih-Cheng Yen","raw_affiliation_strings":["Department of Electrical & Computer Engineering, Singapore Institute for Neurotechnology (SINAPSE), National University of Singapore, Singapore"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical & Computer Engineering, Singapore Institute for Neurotechnology (SINAPSE), National University of Singapore, Singapore","institution_ids":["https://openalex.org/I165932596"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5023245534","display_name":"Minkyu Je","orcid":"https://orcid.org/0000-0003-4580-2771"},"institutions":[{"id":"https://openalex.org/I115228651","display_name":"Agency for Science, Technology and Research","ror":"https://ror.org/036wvzt09","country_code":"SG","type":"government","lineage":["https://openalex.org/I115228651"]},{"id":"https://openalex.org/I4210090209","display_name":"Institute of Microelectronics","ror":"https://ror.org/009rw8n36","country_code":"SG","type":"facility","lineage":["https://openalex.org/I115228651","https://openalex.org/I4210090209","https://openalex.org/I91275662"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"Minkyu Je","raw_affiliation_strings":["Institute of Microelectronics, Agency for Science, Technology and Research, Singapore"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Microelectronics, Agency for Science, Technology and Research, Singapore","institution_ids":["https://openalex.org/I115228651","https://openalex.org/I4210090209"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5108398958","display_name":"Wei Mong Tsang","orcid":null},"institutions":[{"id":"https://openalex.org/I115228651","display_name":"Agency for Science, Technology and Research","ror":"https://ror.org/036wvzt09","country_code":"SG","type":"government","lineage":["https://openalex.org/I115228651"]},{"id":"https://openalex.org/I4210090209","display_name":"Institute of Microelectronics","ror":"https://ror.org/009rw8n36","country_code":"SG","type":"facility","lineage":["https://openalex.org/I115228651","https://openalex.org/I4210090209","https://openalex.org/I91275662"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"Wei Mong Tsang","raw_affiliation_strings":["Institute of Microelectronics, Agency for Science, Technology and Research, Singapore"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Microelectronics, Agency for Science, Technology and Research, Singapore","institution_ids":["https://openalex.org/I115228651","https://openalex.org/I4210090209"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5103284700","display_name":"Yong Ping Xu","orcid":"https://orcid.org/0000-0003-3941-190X"},"institutions":[{"id":"https://openalex.org/I165932596","display_name":"National University of Singapore","ror":"https://ror.org/01tgyzw49","country_code":"SG","type":"education","lineage":["https://openalex.org/I165932596"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"Yong-Ping Xu","raw_affiliation_strings":["Department of Electrical & Computer Engineering, National University of Singapore, Singapore"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical & Computer Engineering, National University of Singapore, Singapore","institution_ids":["https://openalex.org/I165932596"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5088964967","display_name":"Nitish V. Thakor","orcid":"https://orcid.org/0000-0002-9981-9395"},"institutions":[{"id":"https://openalex.org/I165932596","display_name":"National University of Singapore","ror":"https://ror.org/01tgyzw49","country_code":"SG","type":"education","lineage":["https://openalex.org/I165932596"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"Nitish V. Thakor","raw_affiliation_strings":["Singapore Institute for Neurotechnology (SINAPSE), National University of Singapore, Singapore"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Singapore Institute for Neurotechnology (SINAPSE), National University of Singapore, Singapore","institution_ids":["https://openalex.org/I165932596"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5107430060","display_name":"Dim\u2010Lee Kwong","orcid":null},"institutions":[{"id":"https://openalex.org/I115228651","display_name":"Agency for Science, Technology and Research","ror":"https://ror.org/036wvzt09","country_code":"SG","type":"government","lineage":["https://openalex.org/I115228651"]},{"id":"https://openalex.org/I4210090209","display_name":"Institute of Microelectronics","ror":"https://ror.org/009rw8n36","country_code":"SG","type":"facility","lineage":["https://openalex.org/I115228651","https://openalex.org/I4210090209","https://openalex.org/I91275662"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"Dim-Lee Kwong","raw_affiliation_strings":["Institute of Microelectronics, Agency for Science, Technology and Research, Singapore"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Microelectronics, Agency for Science, Technology and Research, Singapore","institution_ids":["https://openalex.org/I115228651","https://openalex.org/I4210090209"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5084452777","display_name":"Chengkuo Lee","orcid":"https://orcid.org/0000-0002-8886-3649"},"institutions":[{"id":"https://openalex.org/I165932596","display_name":"National University of Singapore","ror":"https://ror.org/01tgyzw49","country_code":"SG","type":"education","lineage":["https://openalex.org/I165932596"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"Chengkuo Lee","raw_affiliation_strings":["Department of Electrical & Computer Engineering, Singapore Institute for Neurotechnology (SINAPSE), National University of Singapore, Singapore"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical & Computer Engineering, Singapore Institute for Neurotechnology (SINAPSE), National University of Singapore, Singapore","institution_ids":["https://openalex.org/I165932596"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":null,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":null,"cited_by_percentile_year":null,"biblio":{"volume":"19","issue":null,"first_page":"1076","last_page":"1079"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11601","display_name":"Neuroscience and Neural Engineering","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2804","display_name":"Cellular and Molecular Neuroscience"},"field":{"id":"https://openalex.org/fields/28","display_name":"Neuroscience"},"domain":{"id":"https://openalex.org/domains/1","display_name":"Life Sciences"}},"topics":[{"id":"https://openalex.org/T11601","display_name":"Neuroscience and Neural Engineering","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2804","display_name":"Cellular and Molecular Neuroscience"},"field":{"id":"https://openalex.org/fields/28","display_name":"Neuroscience"},"domain":{"id":"https://openalex.org/domains/1","display_name":"Life Sciences"}},{"id":"https://openalex.org/T10429","display_name":"EEG and Brain-Computer Interfaces","score":0.9980999827384949,"subfield":{"id":"https://openalex.org/subfields/2805","display_name":"Cognitive Neuroscience"},"field":{"id":"https://openalex.org/fields/28","display_name":"Neuroscience"},"domain":{"id":"https://openalex.org/domains/1","display_name":"Life Sciences"}},{"id":"https://openalex.org/T10502","display_name":"Advanced Memory and Neural Computing","score":0.9950000047683716,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/parylene","display_name":"Parylene","score":0.7816404104232788},{"id":"https://openalex.org/keywords/fluidics","display_name":"Fluidics","score":0.7676742076873779},{"id":"https://openalex.org/keywords/electrode","display_name":"Electrode","score":0.7232416868209839},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.6535776853561401},{"id":"https://openalex.org/keywords/signal","display_name":"SIGNAL (programming language)","score":0.51125168800354},{"id":"https://openalex.org/keywords/thin-film","display_name":"Thin film","score":0.5079272389411926},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.4511531591415405},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.3759816288948059},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.37288403511047363},{"id":"https://openalex.org/keywords/biomedical-engineering","display_name":"Biomedical engineering","score":0.356661319732666},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.32462817430496216},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.22218352556228638},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.16896283626556396},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.1395207643508911},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.09907051920890808},{"id":"https://openalex.org/keywords/polymer","display_name":"Polymer","score":0.06574967503547668}],"concepts":[{"id":"https://openalex.org/C2777385008","wikidata":"https://www.wikidata.org/wiki/Q448540","display_name":"Parylene","level":3,"score":0.7816404104232788},{"id":"https://openalex.org/C132651336","wikidata":"https://www.wikidata.org/wiki/Q185571","display_name":"Fluidics","level":2,"score":0.7676742076873779},{"id":"https://openalex.org/C17525397","wikidata":"https://www.wikidata.org/wiki/Q176140","display_name":"Electrode","level":2,"score":0.7232416868209839},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6535776853561401},{"id":"https://openalex.org/C2779843651","wikidata":"https://www.wikidata.org/wiki/Q7390335","display_name":"SIGNAL (programming language)","level":2,"score":0.51125168800354},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.5079272389411926},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.4511531591415405},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.3759816288948059},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.37288403511047363},{"id":"https://openalex.org/C136229726","wikidata":"https://www.wikidata.org/wiki/Q327092","display_name":"Biomedical engineering","level":1,"score":0.356661319732666},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.32462817430496216},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.22218352556228638},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.16896283626556396},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.1395207643508911},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.09907051920890808},{"id":"https://openalex.org/C521977710","wikidata":"https://www.wikidata.org/wiki/Q81163","display_name":"Polymer","level":2,"score":0.06574967503547668},{"id":"https://openalex.org/C147789679","wikidata":"https://www.wikidata.org/wiki/Q11372","display_name":"Physical chemistry","level":1,"score":0.0},{"id":"https://openalex.org/C199360897","wikidata":"https://www.wikidata.org/wiki/Q9143","display_name":"Programming language","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/nems.2013.6559908","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2013.6559908","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"},{"id":"pmh:oai:scholarbank.nus.edu.sg:10635/69919","is_oa":false,"landing_page_url":"http://scholarbank.nus.edu.sg/handle/10635/69919","pdf_url":null,"source":{"id":"https://openalex.org/S7407052290","display_name":"National University of Singapore","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Scopus","raw_type":"Conference Paper"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":4,"referenced_works":["https://openalex.org/W1972864823","https://openalex.org/W2057424736","https://openalex.org/W2075973007","https://openalex.org/W2156872789"],"related_works":["https://openalex.org/W1560559825","https://openalex.org/W2110237947","https://openalex.org/W2793630621","https://openalex.org/W2393581274","https://openalex.org/W3127323628","https://openalex.org/W2962998417","https://openalex.org/W3082423849","https://openalex.org/W2162067601","https://openalex.org/W2135084539","https://openalex.org/W2940521613","https://openalex.org/W2750215131","https://openalex.org/W2066178591","https://openalex.org/W317989795","https://openalex.org/W2147179585","https://openalex.org/W2151857012","https://openalex.org/W1518993168","https://openalex.org/W2944382413","https://openalex.org/W2034882689","https://openalex.org/W3188460841","https://openalex.org/W1782624030"],"abstract_inverted_index":{"A":[0],"new":[1],"process":[2],"for":[3],"making":[4],"SU-8":[5,20],"neural":[6,37,47],"probe":[7],"with":[8],"fluidic":[9],"channels":[10],"and":[11,19,36,52],"gold":[12],"electrodes":[13],"based":[14],"on":[15],"multilayered":[16],"thin":[17,29,40],"parylene":[18],"is":[21],"presented":[22],"here.":[23],"This":[24],"approach":[25],"can":[26],"realize":[27],"a":[28],"15":[30],"\u03bcm":[31],"gap":[32,41],"between":[33],"electrode":[34],"surface":[35],"cells.":[38],"The":[39],"will":[42],"help":[43],"to":[44,57],"enhance":[45],"the":[46,59],"signal":[48],"acquisition.":[49],"Fluidic":[50],"testing":[51,54],"mechanical":[53],"are":[55],"conducted":[56],"ensure":[58],"device":[60],"reliability.":[61]},"counts_by_year":[{"year":2022,"cited_by_count":1},{"year":2015,"cited_by_count":1}],"updated_date":"2026-07-14T23:27:15.235271","created_date":"2025-10-10T00:00:00"}