{"id":"https://openalex.org/W1999827193","doi":"https://doi.org/10.1109/nems.2013.6559899","title":"Controllable formation and optical characterization of silicon nanocone-forest using SF6/C4F8 in cyclic etching-passivation process","display_name":"Controllable formation and optical characterization of silicon nanocone-forest using SF6/C4F8 in cyclic etching-passivation process","publication_year":2013,"publication_date":"2013-04-01","ids":{"openalex":"https://openalex.org/W1999827193","doi":"https://doi.org/10.1109/nems.2013.6559899","mag":"1999827193"},"language":"en","primary_location":{"id":"doi:10.1109/nems.2013.6559899","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2013.6559899","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5025734504","display_name":"Fu-Yun Zhu","orcid":null},"institutions":[{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Fu-Yun Zhu","raw_affiliation_strings":["Science and Technology on Micro, Nano Fabrication Lab, Peking University, Beijing, China","Science and Technology on Micro/Nano Fabrication Lab, Peking University,Beijing,China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Science and Technology on Micro, Nano Fabrication Lab, Peking University, Beijing, China","institution_ids":["https://openalex.org/I20231570"]},{"raw_affiliation_string":"Science and Technology on Micro/Nano Fabrication Lab, Peking University,Beijing,China","institution_ids":["https://openalex.org/I20231570"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5001048120","display_name":"Xiaosheng Zhang","orcid":"https://orcid.org/0000-0001-9719-0573"},"institutions":[{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xiao-Sheng Zhang","raw_affiliation_strings":["Science and Technology on Micro, Nano Fabrication Lab, Peking University, Beijing, China","Science and Technology on Micro/Nano Fabrication Lab, Peking University,Beijing,China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Science and Technology on Micro, Nano Fabrication Lab, Peking University, Beijing, China","institution_ids":["https://openalex.org/I20231570"]},{"raw_affiliation_string":"Science and Technology on Micro/Nano Fabrication Lab, Peking University,Beijing,China","institution_ids":["https://openalex.org/I20231570"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5077498823","display_name":"Wei Hu","orcid":"https://orcid.org/0000-0002-4809-7601"},"institutions":[{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Wei Hu","raw_affiliation_strings":["Science and Technology on Micro, Nano Fabrication Lab, Peking University, Beijing, China","Science and Technology on Micro/Nano Fabrication Lab, Peking University,Beijing,China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Science and Technology on Micro, Nano Fabrication Lab, Peking University, Beijing, China","institution_ids":["https://openalex.org/I20231570"]},{"raw_affiliation_string":"Science and Technology on Micro/Nano Fabrication Lab, Peking University,Beijing,China","institution_ids":["https://openalex.org/I20231570"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5100375644","display_name":"Haixia Zhang","orcid":"https://orcid.org/0000-0003-4565-4123"},"institutions":[{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Hai-Xia Zhang","raw_affiliation_strings":["Science and Technology on Micro, Nano Fabrication Lab, Peking University, Beijing, China","Science and Technology on Micro/Nano Fabrication Lab, Peking University,Beijing,China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Science and Technology on Micro, Nano Fabrication Lab, Peking University, Beijing, China","institution_ids":["https://openalex.org/I20231570"]},{"raw_affiliation_string":"Science and Technology on Micro/Nano Fabrication Lab, Peking University,Beijing,China","institution_ids":["https://openalex.org/I20231570"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I20231570"],"apc_list":null,"apc_paid":null,"fwci":1.2419,"has_fulltext":false,"cited_by_count":3,"citation_normalized_percentile":{"value":0.752118,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":96},"biblio":{"volume":"19","issue":null,"first_page":"1034","last_page":"1037"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11272","display_name":"Nanowire Synthesis and Applications","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11272","display_name":"Nanowire Synthesis and Applications","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10623","display_name":"Thin-Film Transistor Technologies","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11169","display_name":"Silicon Nanostructures and Photoluminescence","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/passivation","display_name":"Passivation","score":0.7368108034133911},{"id":"https://openalex.org/keywords/etching","display_name":"Etching (microfabrication)","score":0.7052649259567261},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.5992089509963989},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.5560252666473389},{"id":"https://openalex.org/keywords/nanostructure","display_name":"Nanostructure","score":0.5421624183654785},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.4423946440219879},{"id":"https://openalex.org/keywords/analytical-chemistry","display_name":"Analytical Chemistry (journal)","score":0.3686298429965973},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.2883911728858948},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.22776323556900024},{"id":"https://openalex.org/keywords/layer","display_name":"Layer (electronics)","score":0.10060697793960571},{"id":"https://openalex.org/keywords/chromatography","display_name":"Chromatography","score":0.09584596753120422}],"concepts":[{"id":"https://openalex.org/C33574316","wikidata":"https://www.wikidata.org/wiki/Q917260","display_name":"Passivation","level":3,"score":0.7368108034133911},{"id":"https://openalex.org/C100460472","wikidata":"https://www.wikidata.org/wiki/Q2368605","display_name":"Etching (microfabrication)","level":3,"score":0.7052649259567261},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.5992089509963989},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5560252666473389},{"id":"https://openalex.org/C186187911","wikidata":"https://www.wikidata.org/wiki/Q1093894","display_name":"Nanostructure","level":2,"score":0.5421624183654785},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.4423946440219879},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.3686298429965973},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.2883911728858948},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.22776323556900024},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.10060697793960571},{"id":"https://openalex.org/C43617362","wikidata":"https://www.wikidata.org/wiki/Q170050","display_name":"Chromatography","level":1,"score":0.09584596753120422}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems.2013.6559899","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2013.6559899","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Life in Land","id":"https://metadata.un.org/sdg/15","score":0.6700000166893005}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":8,"referenced_works":["https://openalex.org/W1968176106","https://openalex.org/W2020613856","https://openalex.org/W2030063561","https://openalex.org/W2044042384","https://openalex.org/W2046489548","https://openalex.org/W2118790260","https://openalex.org/W2138593161","https://openalex.org/W2168756522"],"related_works":["https://openalex.org/W2893117232","https://openalex.org/W2368982584","https://openalex.org/W957405543","https://openalex.org/W2100154643","https://openalex.org/W81629128","https://openalex.org/W2326159057","https://openalex.org/W1965743066","https://openalex.org/W1979157137","https://openalex.org/W2949086270","https://openalex.org/W1968447035"],"abstract_inverted_index":{"This":[0],"paper":[1],"reports":[2],"a":[3],"nanocone-forest":[4,78],"silicon":[5,32,66],"surface":[6,33,39,42],"fabricated":[7],"by":[8,37,46],"an":[9,80],"improved":[10],"DRIE":[11],"process":[12,47,52,59,76],"using":[13],"SF6/C4F8in":[14],"cyclic":[15],"etching-passivation":[16],"process,":[17],"which":[18],"is":[19,34,44],"maskless,":[20],"controllable,":[21],"effective":[22],"and":[23,41,64,70,89,113,135],"large-size.":[24],"As":[25],"well":[26],"known,":[27],"optical":[28,103,124],"property":[29],"of":[30,83,87,91,99,116,126,137],"textured":[31],"determined":[35,45],"mainly":[36],"its":[38],"structure,":[40],"structure":[43],"conditions.":[48],"In":[49],"this":[50],"work,":[51],"conditions":[53],"during":[54],"the":[55,97,138],"experiment,":[56],"like":[57],"etching":[58],"parameters,":[60],"pretreatment,":[61],"uniformity":[62],"control":[63],"patterned":[65],"etching,":[67],"are":[68],"tested":[69],"discussed.":[71],"Based":[72],"on":[73,102],"these":[74],"controllable":[75],"conditions,":[77],"with":[79],"average":[81],"height":[82,115],"0.4~5\u03bcm,":[84],"aspect":[85,109],"ratio":[86],"1~8":[88],"density":[90,112],"3~30":[92],"per":[93],"4\u03bcm2formed.":[94],"By":[95],"analyzing":[96],"influences":[98],"nanostructure":[100,117],"parameters":[101],"property,":[104],"it's":[105],"concluded":[106],"that":[107],"high":[108,111],"ratio,":[110],"small":[114],"could":[118],"result":[119],"in":[120],"ultra-low":[121],"reflectance.":[122],"The":[123],"reflectance":[125],"two":[127],"samples":[128],"has":[129],"been":[130],"reduced":[131],"to":[132],"below":[133],"0.22%":[134],"0.16%":[136],"solar":[139],"spectrum,":[140],"respectively.":[141]},"counts_by_year":[{"year":2022,"cited_by_count":1},{"year":2015,"cited_by_count":2}],"updated_date":"2026-08-21T09:56:20.448147","created_date":"2025-10-10T00:00:00"}