{"id":"https://openalex.org/W2081704536","doi":"https://doi.org/10.1109/nems.2013.6559887","title":"High aspect ratio etching of nanopores in PECVD SiC through AAO mask","display_name":"High aspect ratio etching of nanopores in PECVD SiC through AAO mask","publication_year":2013,"publication_date":"2013-04-01","ids":{"openalex":"https://openalex.org/W2081704536","doi":"https://doi.org/10.1109/nems.2013.6559887","mag":"2081704536"},"language":"en","primary_location":{"id":"doi:10.1109/nems.2013.6559887","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2013.6559887","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"green","oa_url":"http://infoscience.epfl.ch/record/195212","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5075877937","display_name":"Songmei Wu","orcid":"https://orcid.org/0000-0002-6720-7984"},"institutions":[{"id":"https://openalex.org/I5124864","display_name":"\u00c9cole Polytechnique F\u00e9d\u00e9rale de Lausanne","ror":"https://ror.org/02s376052","country_code":"CH","type":"education","lineage":["https://openalex.org/I2799323385","https://openalex.org/I5124864"]}],"countries":["CH"],"is_corresponding":true,"raw_author_name":"Songmei Wu","raw_affiliation_strings":["Microsystems laboratory, STI, IMT, LMIS1, EPFL, Switzerland"],"affiliations":[{"raw_affiliation_string":"Microsystems laboratory, STI, IMT, LMIS1, EPFL, Switzerland","institution_ids":["https://openalex.org/I5124864"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5088527250","display_name":"Marc-Oliver Bammatter","orcid":null},"institutions":[{"id":"https://openalex.org/I5124864","display_name":"\u00c9cole Polytechnique F\u00e9d\u00e9rale de Lausanne","ror":"https://ror.org/02s376052","country_code":"CH","type":"education","lineage":["https://openalex.org/I2799323385","https://openalex.org/I5124864"]},{"id":"https://openalex.org/I4210119392","display_name":"Institute of Microelectronics","ror":"https://ror.org/02s6gs133","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]},{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]}],"countries":["CH","CN"],"is_corresponding":false,"raw_author_name":"Marc-Oliver Bammatter","raw_affiliation_strings":["Microsystems laboratory, STI, IMT, LMIS1, EPFL, Switzerland","National Key Laboratory on Micro, Nano Fabrication Technology, Institute of Microelectronics, Peking University, China"],"affiliations":[{"raw_affiliation_string":"Microsystems laboratory, STI, IMT, LMIS1, EPFL, Switzerland","institution_ids":["https://openalex.org/I5124864"]},{"raw_affiliation_string":"National Key Laboratory on Micro, Nano Fabrication Technology, Institute of Microelectronics, Peking University, China","institution_ids":["https://openalex.org/I20231570","https://openalex.org/I4210119392"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5071087797","display_name":"Wei Tang","orcid":"https://orcid.org/0000-0002-9901-4933"},"institutions":[{"id":"https://openalex.org/I4210119392","display_name":"Institute of Microelectronics","ror":"https://ror.org/02s6gs133","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]},{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Wei Tang","raw_affiliation_strings":["National Key Laboratory on Micro, Nano Fabrication Technology, Institute of Microelectronics, Peking University, China"],"affiliations":[{"raw_affiliation_string":"National Key Laboratory on Micro, Nano Fabrication Technology, Institute of Microelectronics, Peking University, China","institution_ids":["https://openalex.org/I20231570","https://openalex.org/I4210119392"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5091629558","display_name":"Vaida Auzelyte","orcid":null},"institutions":[{"id":"https://openalex.org/I5124864","display_name":"\u00c9cole Polytechnique F\u00e9d\u00e9rale de Lausanne","ror":"https://ror.org/02s376052","country_code":"CH","type":"education","lineage":["https://openalex.org/I2799323385","https://openalex.org/I5124864"]}],"countries":["CH"],"is_corresponding":false,"raw_author_name":"Vaida Auzelyte","raw_affiliation_strings":["Microsystems laboratory, STI, IMT, LMIS1, EPFL, Switzerland"],"affiliations":[{"raw_affiliation_string":"Microsystems laboratory, STI, IMT, LMIS1, EPFL, Switzerland","institution_ids":["https://openalex.org/I5124864"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100375644","display_name":"Haixia Zhang","orcid":"https://orcid.org/0000-0003-4565-4123"},"institutions":[{"id":"https://openalex.org/I4210119392","display_name":"Institute of Microelectronics","ror":"https://ror.org/02s6gs133","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]},{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Haixia Zhang","raw_affiliation_strings":["National Key Laboratory on Micro, Nano Fabrication Technology, Institute of Microelectronics, Peking University, China"],"affiliations":[{"raw_affiliation_string":"National Key Laboratory on Micro, Nano Fabrication Technology, Institute of Microelectronics, Peking University, China","institution_ids":["https://openalex.org/I20231570","https://openalex.org/I4210119392"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5107195137","display_name":"Juergen Br\u00fcgger","orcid":"https://orcid.org/0000-0002-7710-5930"},"institutions":[{"id":"https://openalex.org/I5124864","display_name":"\u00c9cole Polytechnique F\u00e9d\u00e9rale de Lausanne","ror":"https://ror.org/02s376052","country_code":"CH","type":"education","lineage":["https://openalex.org/I2799323385","https://openalex.org/I5124864"]}],"countries":["CH"],"is_corresponding":false,"raw_author_name":"Juergen Brugger","raw_affiliation_strings":["Microsystems laboratory, STI, IMT, LMIS1, EPFL, Switzerland"],"affiliations":[{"raw_affiliation_string":"Microsystems laboratory, STI, IMT, LMIS1, EPFL, Switzerland","institution_ids":["https://openalex.org/I5124864"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":6,"corresponding_author_ids":["https://openalex.org/A5075877937"],"corresponding_institution_ids":["https://openalex.org/I5124864"],"apc_list":null,"apc_paid":null,"fwci":0.1492,"has_fulltext":false,"cited_by_count":3,"citation_normalized_percentile":{"value":0.49321308,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":95},"biblio":{"volume":null,"issue":null,"first_page":"986","last_page":"989"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12340","display_name":"Anodic Oxide Films and Nanostructures","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12340","display_name":"Anodic Oxide Films and Nanostructures","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.9987999796867371,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11582","display_name":"Nanopore and Nanochannel Transport Studies","score":0.9977999925613403,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.41729050874710083},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.34405916929244995},{"id":"https://openalex.org/keywords/analytical-chemistry","display_name":"Analytical Chemistry (journal)","score":0.32956743240356445},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.22913441061973572},{"id":"https://openalex.org/keywords/organic-chemistry","display_name":"Organic chemistry","score":0.10401758551597595}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.41729050874710083},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.34405916929244995},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.32956743240356445},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.22913441061973572},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.10401758551597595}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/nems.2013.6559887","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2013.6559887","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"},{"id":"pmh:oai:infoscience.epfl.ch:195212","is_oa":true,"landing_page_url":"http://infoscience.epfl.ch/record/195212","pdf_url":null,"source":{"id":"https://openalex.org/S4306400487","display_name":"Infoscience (Ecole Polytechnique F\u00e9d\u00e9rale de Lausanne)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"Text"}],"best_oa_location":{"id":"pmh:oai:infoscience.epfl.ch:195212","is_oa":true,"landing_page_url":"http://infoscience.epfl.ch/record/195212","pdf_url":null,"source":{"id":"https://openalex.org/S4306400487","display_name":"Infoscience (Ecole Polytechnique F\u00e9d\u00e9rale de Lausanne)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"Text"},"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":14,"referenced_works":["https://openalex.org/W1982665123","https://openalex.org/W1988907242","https://openalex.org/W1994462764","https://openalex.org/W2012826411","https://openalex.org/W2024670207","https://openalex.org/W2036078372","https://openalex.org/W2050154189","https://openalex.org/W2076262421","https://openalex.org/W2088818760","https://openalex.org/W2112561141","https://openalex.org/W2115210903","https://openalex.org/W2122783320","https://openalex.org/W2156455875","https://openalex.org/W2157254946"],"related_works":["https://openalex.org/W4246450666","https://openalex.org/W4388998267","https://openalex.org/W2898370298","https://openalex.org/W2137437058","https://openalex.org/W4390401159","https://openalex.org/W2744391499","https://openalex.org/W3120461830","https://openalex.org/W4230250635","https://openalex.org/W3041790586","https://openalex.org/W2018879842"],"abstract_inverted_index":{"We":[0,43],"present":[1],"in":[2,12,151],"this":[3],"work":[4],"the":[5,34,70,106],"fabrication":[6],"of":[7,36],"high":[8],"aspect":[9],"ratio":[10,120],"nanopores":[11,37,159],"500":[13],"nm":[14,31,78,118],"PECVD":[15,157],"SiC":[16,75,158],"films":[17],"through":[18],"AAO":[19,26,107],"(anodic":[20],"aluminum":[21],"oxide)":[22],"mask.":[23],"The":[24],"initial":[25],"thin":[27],"film":[28],"is":[29,38],"180":[30],"thick":[32],"and":[33,59,89,113,153,166],"diameter":[35,104],"33":[39],"\u00b1":[40,110],"7":[41],"nm.":[42],"have":[44],"used":[45],"three":[46],"plasma":[47],"chemistries:":[48],"CF":[49,85,127],"<sub":[50,55,61,65,86,91,128,135,139],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[51,56,62,66,87,92,129,136,140],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">4</sub>":[52,88,130],",":[53],"Cl":[54,90],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">2</sub>":[57,67,93,141],"/Ar,":[58],"SF":[60,134],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">6</sub>":[63,137],"/O":[64,138],"to":[68],"study":[69],"pattern":[71],"transfer":[72],"process":[73],"into":[74],"at":[76],"sub-50":[77],"scale":[79],"by":[80,126],"deep":[81,115],"reactive":[82],"ion":[83],"etching.":[84],"/Ar":[94],"etchings":[95],"show":[96],"highly":[97],"anisotropic":[98],"features.":[99],"Vertical":[100],"pores":[101],"with":[102],"similar":[103],"as":[105,114,116],"mask":[108],"(33":[109],"12":[111],"nm)":[112],"400":[117],"(aspect":[119],">":[121],"10)":[122],"can":[123],"be":[124],"achieved":[125],"reactant.":[131],"As":[132],"comparison,":[133],"chemistry":[142],"generates":[143],"very":[144],"different":[145],"etching":[146],"profiles,":[147],"causing":[148],"trenches":[149],"both":[150],"vertical":[152],"lateral":[154],"directions.":[155],"Our":[156],"are":[160],"promising":[161],"candidates":[162],"for":[163],"robust":[164],"biosensing":[165],"nanofiltration":[167],"applications.":[168]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2020,"cited_by_count":1},{"year":2016,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}