{"id":"https://openalex.org/W2088575011","doi":"https://doi.org/10.1109/nems.2013.6559884","title":"Tip-tilt-piston piezoelectric micromirror with folded PZT unimorph actuators","display_name":"Tip-tilt-piston piezoelectric micromirror with folded PZT unimorph actuators","publication_year":2013,"publication_date":"2013-04-01","ids":{"openalex":"https://openalex.org/W2088575011","doi":"https://doi.org/10.1109/nems.2013.6559884","mag":"2088575011"},"language":"en","primary_location":{"id":"doi:10.1109/nems.2013.6559884","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2013.6559884","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5083648249","display_name":"Wenjun Liao","orcid":"https://orcid.org/0000-0001-9186-8312"},"institutions":[{"id":"https://openalex.org/I33213144","display_name":"University of Florida","ror":"https://ror.org/02y3ad647","country_code":"US","type":"education","lineage":["https://openalex.org/I33213144"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Wenjun Liao","raw_affiliation_strings":["Department of Electrical and Computer Engineering, University of Florida, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical and Computer Engineering, University of Florida, USA","institution_ids":["https://openalex.org/I33213144"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100378301","display_name":"Wenjing Liu","orcid":"https://orcid.org/0000-0002-9544-3845"},"institutions":[{"id":"https://openalex.org/I33213144","display_name":"University of Florida","ror":"https://ror.org/02y3ad647","country_code":"US","type":"education","lineage":["https://openalex.org/I33213144"]},{"id":"https://openalex.org/I76569877","display_name":"Southeast University","ror":"https://ror.org/04ct4d772","country_code":"CN","type":"education","lineage":["https://openalex.org/I76569877"]}],"countries":["CN","US"],"is_corresponding":false,"raw_author_name":"Wenjing Liu","raw_affiliation_strings":["Department of Electrical and Computer Engineering, University of Florida, USA","School of Electronics Science and Engineering, Southeast University, Nanjing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical and Computer Engineering, University of Florida, USA","institution_ids":["https://openalex.org/I33213144"]},{"raw_affiliation_string":"School of Electronics Science and Engineering, Southeast University, Nanjing, China","institution_ids":["https://openalex.org/I76569877"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5003349316","display_name":"Yongming Tang","orcid":null},"institutions":[{"id":"https://openalex.org/I76569877","display_name":"Southeast University","ror":"https://ror.org/04ct4d772","country_code":"CN","type":"education","lineage":["https://openalex.org/I76569877"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yongming Tang","raw_affiliation_strings":["School of Electronics Science and Engineering, Southeast University, Nanjing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Electronics Science and Engineering, Southeast University, Nanjing, China","institution_ids":["https://openalex.org/I76569877"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5033402618","display_name":"Baobing Wang","orcid":null},"institutions":[{"id":"https://openalex.org/I76569877","display_name":"Southeast University","ror":"https://ror.org/04ct4d772","country_code":"CN","type":"education","lineage":["https://openalex.org/I76569877"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Baobing Wang","raw_affiliation_strings":["School of Electronics Science and Engineering, Southeast University, Nanjing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Electronics Science and Engineering, Southeast University, Nanjing, China","institution_ids":["https://openalex.org/I76569877"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5026793138","display_name":"Huikai Xie","orcid":"https://orcid.org/0000-0002-8393-0021"},"institutions":[{"id":"https://openalex.org/I33213144","display_name":"University of Florida","ror":"https://ror.org/02y3ad647","country_code":"US","type":"education","lineage":["https://openalex.org/I33213144"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Huikai Xie","raw_affiliation_strings":["Department of Electrical and Computer Engineering, University of Florida, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical and Computer Engineering, University of Florida, USA","institution_ids":["https://openalex.org/I33213144"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.8106,"has_fulltext":false,"cited_by_count":9,"citation_normalized_percentile":{"value":0.70126731,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":98},"biblio":{"volume":null,"issue":null,"first_page":null,"last_page":null},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11255","display_name":"Microfluidic and Bio-sensing Technologies","score":0.9986000061035156,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/unimorph","display_name":"Unimorph","score":0.943280816078186},{"id":"https://openalex.org/keywords/piston","display_name":"Piston (optics)","score":0.7952212691307068},{"id":"https://openalex.org/keywords/tilt","display_name":"Tilt (camera)","score":0.7341654300689697},{"id":"https://openalex.org/keywords/actuator","display_name":"Actuator","score":0.6897247433662415},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.6450209617614746},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.6113570332527161},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.5882046222686768},{"id":"https://openalex.org/keywords/piezoelectricity","display_name":"Piezoelectricity","score":0.5054178237915039},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.37415939569473267},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.1713002622127533},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.14051640033721924},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.12213033437728882},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.12137934565544128},{"id":"https://openalex.org/keywords/wavefront","display_name":"Wavefront","score":0.1161518394947052}],"concepts":[{"id":"https://openalex.org/C2779055265","wikidata":"https://www.wikidata.org/wiki/Q7885234","display_name":"Unimorph","level":3,"score":0.943280816078186},{"id":"https://openalex.org/C199524791","wikidata":"https://www.wikidata.org/wiki/Q7198512","display_name":"Piston (optics)","level":3,"score":0.7952212691307068},{"id":"https://openalex.org/C2779844322","wikidata":"https://www.wikidata.org/wiki/Q2919140","display_name":"Tilt (camera)","level":2,"score":0.7341654300689697},{"id":"https://openalex.org/C172707124","wikidata":"https://www.wikidata.org/wiki/Q423488","display_name":"Actuator","level":2,"score":0.6897247433662415},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6450209617614746},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.6113570332527161},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.5882046222686768},{"id":"https://openalex.org/C100082104","wikidata":"https://www.wikidata.org/wiki/Q183759","display_name":"Piezoelectricity","level":2,"score":0.5054178237915039},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.37415939569473267},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.1713002622127533},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.14051640033721924},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.12213033437728882},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.12137934565544128},{"id":"https://openalex.org/C165699331","wikidata":"https://www.wikidata.org/wiki/Q461533","display_name":"Wavefront","level":2,"score":0.1161518394947052},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems.2013.6559884","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2013.6559884","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7","score":0.6299999952316284}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":15,"referenced_works":["https://openalex.org/W1972530730","https://openalex.org/W1978647232","https://openalex.org/W2027484232","https://openalex.org/W2030369739","https://openalex.org/W2099627262","https://openalex.org/W2112726158","https://openalex.org/W2132125949","https://openalex.org/W2146744453","https://openalex.org/W2158395196","https://openalex.org/W2162746661","https://openalex.org/W2164723542","https://openalex.org/W2924194239","https://openalex.org/W4321635563","https://openalex.org/W6658121163","https://openalex.org/W6679624459"],"related_works":["https://openalex.org/W3194811446","https://openalex.org/W2038431281","https://openalex.org/W2155005080","https://openalex.org/W2069264709","https://openalex.org/W2128044771","https://openalex.org/W2529034204","https://openalex.org/W3093842412","https://openalex.org/W2072236921","https://openalex.org/W2502038055","https://openalex.org/W2033125165"],"abstract_inverted_index":{"This":[0],"paper":[1],"presents":[2],"the":[3,46],"design,":[4],"fabrication":[5],"and":[6,63],"characterization":[7],"of":[8,19,45],"a":[9],"novel":[10],"tip-tilt-piston":[11],"(TTP)":[12],"scanning":[13],"micromirror":[14,25,48],"based":[15],"on":[16],"an":[17],"array":[18],"folded":[20],"piezoelectric":[21],"unimorph":[22],"actuators.":[23],"The":[24,41],"can":[26],"perform":[27],"rotational":[28],"scan":[29],"around":[30],"two":[31],"in-plane":[32],"orthogonal":[33],"axes":[34],"as":[35,37],"well":[36],"out-of-plane":[38],"piston":[39],"motion.":[40],"measured":[42],"resonant":[43],"frequencies":[44],"fabricated":[47],"are":[49],"362":[50],"Hz":[51,54,59],"(piston),":[52],"685":[53],"(x":[55],"axis":[56,61,68],"scan),":[57,69],"1250":[58],"(y":[60],"scan)":[62],"19.2":[64],"kHz":[65],"(fast":[66],"y":[67],"respectively.":[70]},"counts_by_year":[{"year":2023,"cited_by_count":1},{"year":2022,"cited_by_count":1},{"year":2019,"cited_by_count":1},{"year":2017,"cited_by_count":4},{"year":2016,"cited_by_count":2}],"updated_date":"2026-07-29T14:22:42.915294","created_date":"2025-10-10T00:00:00"}