{"id":"https://openalex.org/W1998207255","doi":"https://doi.org/10.1109/nems.2013.6559860","title":"Contactless RF MEMS switch using PZT actuation","display_name":"Contactless RF MEMS switch using PZT actuation","publication_year":2013,"publication_date":"2013-04-01","ids":{"openalex":"https://openalex.org/W1998207255","doi":"https://doi.org/10.1109/nems.2013.6559860","mag":"1998207255"},"language":"en","primary_location":{"id":"doi:10.1109/nems.2013.6559860","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2013.6559860","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5038902203","display_name":"Tim Giffney","orcid":"https://orcid.org/0000-0003-4858-9582"},"institutions":[{"id":"https://openalex.org/I154130895","display_name":"University of Auckland","ror":"https://ror.org/03b94tp07","country_code":"NZ","type":"education","lineage":["https://openalex.org/I154130895"]}],"countries":["NZ"],"is_corresponding":false,"raw_author_name":"Tim Giffney","raw_affiliation_strings":["Department of Mechanical Engineering, University of Auckland, New Zealand","Dept. of Mech. Eng., Univ. of Auckland, Auckland, New Zealand"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering, University of Auckland, New Zealand","institution_ids":["https://openalex.org/I154130895"]},{"raw_affiliation_string":"Dept. of Mech. Eng., Univ. of Auckland, Auckland, New Zealand","institution_ids":["https://openalex.org/I154130895"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5043847050","display_name":"Miao Yu","orcid":"https://orcid.org/0000-0002-2943-2179"},"institutions":[{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]},{"id":"https://openalex.org/I4210119392","display_name":"Institute of Microelectronics","ror":"https://ror.org/02s6gs133","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Miao Yu","raw_affiliation_strings":["Institute of Microelectronics, Peking University, China","Inst. of Microelectron. Peking Univ., Beijing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Microelectronics, Peking University, China","institution_ids":["https://openalex.org/I20231570","https://openalex.org/I4210119392"]},{"raw_affiliation_string":"Inst. of Microelectron. Peking Univ., Beijing, China","institution_ids":["https://openalex.org/I20231570"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5081816543","display_name":"Kean C. Aw","orcid":"https://orcid.org/0000-0001-9308-508X"},"institutions":[{"id":"https://openalex.org/I154130895","display_name":"University of Auckland","ror":"https://ror.org/03b94tp07","country_code":"NZ","type":"education","lineage":["https://openalex.org/I154130895"]}],"countries":["NZ"],"is_corresponding":false,"raw_author_name":"K.C. Aw","raw_affiliation_strings":["Department of Mechanical Engineering, University of Auckland, New Zealand","Dept. of Mech. Eng., Univ. of Auckland, Auckland, New Zealand"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering, University of Auckland, New Zealand","institution_ids":["https://openalex.org/I154130895"]},{"raw_affiliation_string":"Dept. of Mech. Eng., Univ. of Auckland, Auckland, New Zealand","institution_ids":["https://openalex.org/I154130895"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5100375644","display_name":"Haixia Zhang","orcid":"https://orcid.org/0000-0003-4565-4123"},"institutions":[{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]},{"id":"https://openalex.org/I4210119392","display_name":"Institute of Microelectronics","ror":"https://ror.org/02s6gs133","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Haixia Zhang","raw_affiliation_strings":["Institute of Microelectronics, Peking University, China","Inst. of Microelectron. Peking Univ., Beijing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Microelectronics, Peking University, China","institution_ids":["https://openalex.org/I20231570","https://openalex.org/I4210119392"]},{"raw_affiliation_string":"Inst. of Microelectron. Peking Univ., Beijing, China","institution_ids":["https://openalex.org/I20231570"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":4,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.24,"has_fulltext":false,"cited_by_count":3,"citation_normalized_percentile":{"value":0.5936502,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":94},"biblio":{"volume":null,"issue":null,"first_page":"861","last_page":"864"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10299","display_name":"Photonic and Optical Devices","score":0.9976000189781189,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.8291665315628052},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.7566537857055664},{"id":"https://openalex.org/keywords/capacitance","display_name":"Capacitance","score":0.68895423412323},{"id":"https://openalex.org/keywords/lead-zirconate-titanate","display_name":"Lead zirconate titanate","score":0.6460566520690918},{"id":"https://openalex.org/keywords/microwave","display_name":"Microwave","score":0.5574764013290405},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.503126323223114},{"id":"https://openalex.org/keywords/actuator","display_name":"Actuator","score":0.48642563819885254},{"id":"https://openalex.org/keywords/radio-frequency","display_name":"Radio frequency","score":0.47721558809280396},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.43012911081314087},{"id":"https://openalex.org/keywords/piezoelectricity","display_name":"Piezoelectricity","score":0.42283207178115845},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.34718558192253113},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.344596803188324},{"id":"https://openalex.org/keywords/electrode","display_name":"Electrode","score":0.19810158014297485},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.16354680061340332},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.1605493724346161},{"id":"https://openalex.org/keywords/ferroelectricity","display_name":"Ferroelectricity","score":0.12710919976234436},{"id":"https://openalex.org/keywords/dielectric","display_name":"Dielectric","score":0.09561607241630554}],"concepts":[{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.8291665315628052},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7566537857055664},{"id":"https://openalex.org/C30066665","wikidata":"https://www.wikidata.org/wiki/Q164399","display_name":"Capacitance","level":3,"score":0.68895423412323},{"id":"https://openalex.org/C2781128178","wikidata":"https://www.wikidata.org/wiki/Q883484","display_name":"Lead zirconate titanate","level":4,"score":0.6460566520690918},{"id":"https://openalex.org/C44838205","wikidata":"https://www.wikidata.org/wiki/Q127995","display_name":"Microwave","level":2,"score":0.5574764013290405},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.503126323223114},{"id":"https://openalex.org/C172707124","wikidata":"https://www.wikidata.org/wiki/Q423488","display_name":"Actuator","level":2,"score":0.48642563819885254},{"id":"https://openalex.org/C74064498","wikidata":"https://www.wikidata.org/wiki/Q3396184","display_name":"Radio frequency","level":2,"score":0.47721558809280396},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.43012911081314087},{"id":"https://openalex.org/C100082104","wikidata":"https://www.wikidata.org/wiki/Q183759","display_name":"Piezoelectricity","level":2,"score":0.42283207178115845},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.34718558192253113},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.344596803188324},{"id":"https://openalex.org/C17525397","wikidata":"https://www.wikidata.org/wiki/Q176140","display_name":"Electrode","level":2,"score":0.19810158014297485},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.16354680061340332},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.1605493724346161},{"id":"https://openalex.org/C79090758","wikidata":"https://www.wikidata.org/wiki/Q1045739","display_name":"Ferroelectricity","level":3,"score":0.12710919976234436},{"id":"https://openalex.org/C133386390","wikidata":"https://www.wikidata.org/wiki/Q184996","display_name":"Dielectric","level":2,"score":0.09561607241630554},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.0},{"id":"https://openalex.org/C147789679","wikidata":"https://www.wikidata.org/wiki/Q11372","display_name":"Physical chemistry","level":1,"score":0.0},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/nems.2013.6559860","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2013.6559860","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"},{"id":"pmh:oai:researchspace.auckland.ac.nz:2292/33051","is_oa":false,"landing_page_url":"https://hdl.handle.net/2292/33051","pdf_url":null,"source":{"id":"https://openalex.org/S7407055463","display_name":"ResearchSpace (University of Auckland)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I154130895","host_organization_name":"University of Auckland","host_organization_lineage":["https://openalex.org/I154130895"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"Conference Item"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Affordable and clean energy","score":0.800000011920929,"id":"https://metadata.un.org/sdg/7"}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":13,"referenced_works":["https://openalex.org/W1956376366","https://openalex.org/W2014860612","https://openalex.org/W2036522559","https://openalex.org/W2042580735","https://openalex.org/W2045884887","https://openalex.org/W2080212264","https://openalex.org/W2093301057","https://openalex.org/W2100415451","https://openalex.org/W2105369142","https://openalex.org/W2114689113","https://openalex.org/W2138761435","https://openalex.org/W2169410009","https://openalex.org/W2946723398"],"related_works":["https://openalex.org/W2272290532","https://openalex.org/W1967406975","https://openalex.org/W120386264","https://openalex.org/W2147060379","https://openalex.org/W2752812248","https://openalex.org/W4210541942","https://openalex.org/W4242358325","https://openalex.org/W2057950700","https://openalex.org/W2047743713","https://openalex.org/W3147236441"],"abstract_inverted_index":{"RF":[0,19,31],"MEMS":[1,20,32,56],"devices":[2,21,115],"are":[3,58],"competitive":[4],"for":[5],"handling":[6],"high":[7,141],"frequency":[8,103],"microwave":[9],"signals.":[10],"In":[11],"comparison":[12],"to":[13,40,79,107,128],"semiconductor":[14],"devices,":[15],"the":[16,41,51,81,102,117,137],"performance":[17],"of":[18,43],"is":[22,62],"highly":[23],"linear,":[24],"minimizing":[25],"signal":[26],"distortion.":[27],"A":[28],"contactless":[29,45],"piezoelectric":[30],"switch":[33],"has":[34,76],"been":[35,77],"designed":[36],"and":[37],"simulated.":[38],"Due":[39],"use":[42],"a":[44,66],"design":[46],"based":[47],"on":[48,113],"variable":[49],"capacitance":[50,91],"reliability":[52],"issues":[53],"affecting":[54],"contacting-type":[55],"switches":[57],"avoided.":[59],"The":[60],"structure":[61],"piezoelectrically":[63],"actuated":[64],"using":[65],"sputtered":[67],"lead":[68],"zirconate":[69],"titanate":[70],"(PZT)":[71],"layer.":[72],"Finite":[73],"element":[74],"simulation":[75,84],"conducted":[78],"optimize":[80],"structure.":[82],"Electrical":[83],"predicts":[85],"that,":[86],"by":[87,136],"achieving":[88],"an":[89],"on-off":[90],"ratio":[92],"greater":[93],"than":[94],"10,":[95],"isolation":[96,111,123,132],"will":[97],"exceed":[98],"15":[99,108,144],"dB":[100,122],"over":[101],"range":[104],"from":[105],"4":[106,125],"GHz.":[109,145],"Preliminary":[110],"measurements":[112],"fabricated":[114],"without":[116],"actuating":[118],"layer":[119],"showed":[120],"26":[121],"at":[124,140],"GHz,":[126],"similar":[127],"that":[129],"modeled,":[130],"although":[131],"did":[133],"not":[134],"decrease":[135],"modeled":[138],"trend":[139],"frequencies":[142],"approaching":[143]},"counts_by_year":[{"year":2018,"cited_by_count":1},{"year":2017,"cited_by_count":1},{"year":2014,"cited_by_count":1}],"updated_date":"2026-06-11T09:08:48.828518","created_date":"2025-10-10T00:00:00"}