{"id":"https://openalex.org/W1995204128","doi":"https://doi.org/10.1109/nems.2013.6559821","title":"Design, simulation and fabrication of a micromachined cantilever-based flow sensor","display_name":"Design, simulation and fabrication of a micromachined cantilever-based flow sensor","publication_year":2013,"publication_date":"2013-04-01","ids":{"openalex":"https://openalex.org/W1995204128","doi":"https://doi.org/10.1109/nems.2013.6559821","mag":"1995204128"},"language":"en","primary_location":{"id":"doi:10.1109/nems.2013.6559821","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2013.6559821","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5111340628","display_name":"Pei Chen","orcid":"https://orcid.org/0009-0003-4652-9030"},"institutions":[{"id":"https://openalex.org/I87445476","display_name":"Xi'an Jiaotong University","ror":"https://ror.org/017zhmm22","country_code":"CN","type":"education","lineage":["https://openalex.org/I87445476"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Pei Chen","raw_affiliation_strings":["State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xian, China","State Key Lab. for Manuf. Syst. Eng., Xi'an Jiaotong Univ., Xi'an, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xian, China","institution_ids":["https://openalex.org/I87445476"]},{"raw_affiliation_string":"State Key Lab. for Manuf. Syst. Eng., Xi'an Jiaotong Univ., Xi'an, China","institution_ids":["https://openalex.org/I87445476"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100769637","display_name":"Yulong Zhao","orcid":"https://orcid.org/0000-0003-0751-1068"},"institutions":[{"id":"https://openalex.org/I87445476","display_name":"Xi'an Jiaotong University","ror":"https://ror.org/017zhmm22","country_code":"CN","type":"education","lineage":["https://openalex.org/I87445476"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yulong Zhao","raw_affiliation_strings":["State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xian, China","State Key Lab. for Manuf. Syst. Eng., Xi'an Jiaotong Univ., Xi'an, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xian, China","institution_ids":["https://openalex.org/I87445476"]},{"raw_affiliation_string":"State Key Lab. for Manuf. Syst. Eng., Xi'an Jiaotong Univ., Xi'an, China","institution_ids":["https://openalex.org/I87445476"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5103255833","display_name":"Yiyao Li","orcid":"https://orcid.org/0000-0002-3754-9860"},"institutions":[{"id":"https://openalex.org/I87445476","display_name":"Xi'an Jiaotong University","ror":"https://ror.org/017zhmm22","country_code":"CN","type":"education","lineage":["https://openalex.org/I87445476"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yiyao Li","raw_affiliation_strings":["State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xian, China","State Key Lab. for Manuf. Syst. Eng., Xi'an Jiaotong Univ., Xi'an, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xian, China","institution_ids":["https://openalex.org/I87445476"]},{"raw_affiliation_string":"State Key Lab. for Manuf. Syst. Eng., Xi'an Jiaotong Univ., Xi'an, China","institution_ids":["https://openalex.org/I87445476"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I87445476"],"apc_list":null,"apc_paid":null,"fwci":1.886,"has_fulltext":false,"cited_by_count":8,"citation_normalized_percentile":{"value":0.83027826,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":97},"biblio":{"volume":null,"issue":null,"first_page":"681","last_page":"684"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10412","display_name":"Microfluidic and Capillary Electrophoresis Applications","score":0.9959999918937683,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10412","display_name":"Microfluidic and Capillary Electrophoresis Applications","score":0.9959999918937683,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11255","display_name":"Microfluidic and Bio-sensing Technologies","score":0.9886000156402588,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.986299991607666,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/cantilever","display_name":"Cantilever","score":0.9361081123352051},{"id":"https://openalex.org/keywords/finite-element-method","display_name":"Finite element method","score":0.7634198665618896},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.5847739577293396},{"id":"https://openalex.org/keywords/deflection","display_name":"Deflection (physics)","score":0.5814613699913025},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.5239418148994446},{"id":"https://openalex.org/keywords/structural-engineering","display_name":"Structural engineering","score":0.44005516171455383},{"id":"https://openalex.org/keywords/surface-micromachining","display_name":"Surface micromachining","score":0.42611193656921387},{"id":"https://openalex.org/keywords/flow","display_name":"Flow (mathematics)","score":0.42455506324768066},{"id":"https://openalex.org/keywords/fluent","display_name":"Fluent","score":0.4240800440311432},{"id":"https://openalex.org/keywords/surface-stress","display_name":"Surface stress","score":0.41705724596977234},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.3230663537979126},{"id":"https://openalex.org/keywords/computer-simulation","display_name":"Computer simulation","score":0.29252129793167114},{"id":"https://openalex.org/keywords/mechanics","display_name":"Mechanics","score":0.278480589389801},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.23776859045028687},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.18712672591209412},{"id":"https://openalex.org/keywords/simulation","display_name":"Simulation","score":0.14737018942832947},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.1195492148399353},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.09301599860191345}],"concepts":[{"id":"https://openalex.org/C141354745","wikidata":"https://www.wikidata.org/wiki/Q17227","display_name":"Cantilever","level":2,"score":0.9361081123352051},{"id":"https://openalex.org/C135628077","wikidata":"https://www.wikidata.org/wiki/Q220184","display_name":"Finite element method","level":2,"score":0.7634198665618896},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5847739577293396},{"id":"https://openalex.org/C2781355719","wikidata":"https://www.wikidata.org/wiki/Q2080698","display_name":"Deflection (physics)","level":2,"score":0.5814613699913025},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.5239418148994446},{"id":"https://openalex.org/C66938386","wikidata":"https://www.wikidata.org/wiki/Q633538","display_name":"Structural engineering","level":1,"score":0.44005516171455383},{"id":"https://openalex.org/C145667562","wikidata":"https://www.wikidata.org/wiki/Q7646003","display_name":"Surface micromachining","level":4,"score":0.42611193656921387},{"id":"https://openalex.org/C38349280","wikidata":"https://www.wikidata.org/wiki/Q1434290","display_name":"Flow (mathematics)","level":2,"score":0.42455506324768066},{"id":"https://openalex.org/C2780411076","wikidata":"https://www.wikidata.org/wiki/Q5462653","display_name":"Fluent","level":3,"score":0.4240800440311432},{"id":"https://openalex.org/C72939318","wikidata":"https://www.wikidata.org/wiki/Q7646023","display_name":"Surface stress","level":3,"score":0.41705724596977234},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.3230663537979126},{"id":"https://openalex.org/C500300565","wikidata":"https://www.wikidata.org/wiki/Q925667","display_name":"Computer simulation","level":2,"score":0.29252129793167114},{"id":"https://openalex.org/C57879066","wikidata":"https://www.wikidata.org/wiki/Q41217","display_name":"Mechanics","level":1,"score":0.278480589389801},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.23776859045028687},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.18712672591209412},{"id":"https://openalex.org/C44154836","wikidata":"https://www.wikidata.org/wiki/Q45045","display_name":"Simulation","level":1,"score":0.14737018942832947},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.1195492148399353},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.09301599860191345},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems.2013.6559821","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2013.6559821","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":5,"referenced_works":["https://openalex.org/W1975631503","https://openalex.org/W2073866636","https://openalex.org/W2134695392","https://openalex.org/W2142804985","https://openalex.org/W2365852465"],"related_works":["https://openalex.org/W2113391978","https://openalex.org/W4366570393","https://openalex.org/W4294739349","https://openalex.org/W2372176723","https://openalex.org/W2896071905","https://openalex.org/W1987040379","https://openalex.org/W2041823074","https://openalex.org/W2069806223","https://openalex.org/W2085951355","https://openalex.org/W2128879161"],"abstract_inverted_index":{"A":[0],"micromachined":[1],"cantilever-based":[2],"flow":[3,25,36,47,91],"sensor":[4,48,92,133],"is":[5,31,49,56,69],"designed,":[6],"depending":[7],"on":[8,14],"the":[9,15,19,23,27,35,42,46,52,60,67,73,77,83,90,114,121,124,126,132],"detection":[10],"of":[11,29,41,102,116,123,131],"surface":[12],"strain":[13,43],"cantilever":[16,30],"caused":[17],"by":[18],"mass":[20],"flow.":[21],"In":[22],"continuous":[24],"mode,":[26],"deflection":[28],"directly":[32],"proportional":[33],"to":[34,58,71,82,104],"rate.":[37],"The":[38],"working":[39],"mechanism":[40],"beam":[44],"in":[45],"analyzed,":[50],"and":[51,63,66,79,87,106,129],"finite":[53],"element":[54],"method(FEM)":[55],"used":[57,70],"investigate":[59],"structural":[61,96],"deformation":[62],"stress":[64,85],"distribution,":[65],"FLUENT":[68],"analysis":[72,86],"coupling":[74],"characteristics":[75,111],"between":[76],"fluid":[78],"solid.":[80],"According":[81],"simplified":[84],"simulation":[88],"results,":[89],"has":[93],"a":[94],"sufficient":[95],"strength":[97],"within":[98],"its":[99],"measure":[100],"range":[101,128],"10":[103],"200ml/min,":[105],"will":[107],"achieve":[108],"ideal":[109],"static":[110],"that":[112],"meet":[113],"requirements":[115],"practical":[117],"applications.":[118],"By":[119],"varying":[120],"design":[122],"cantilever,":[125],"measurement":[127],"sensitivity":[130],"can":[134],"be":[135],"changed.":[136]},"counts_by_year":[{"year":2022,"cited_by_count":1},{"year":2019,"cited_by_count":1},{"year":2018,"cited_by_count":2},{"year":2017,"cited_by_count":1},{"year":2014,"cited_by_count":3}],"updated_date":"2026-07-29T14:22:42.915294","created_date":"2025-10-10T00:00:00"}