{"id":"https://openalex.org/W2030694996","doi":"https://doi.org/10.1109/nems.2013.6559793","title":"A bi-stable silicon nanofin nanoelectromechanical switch based on van der Waals force for non-volatile memory applications","display_name":"A bi-stable silicon nanofin nanoelectromechanical switch based on van der Waals force for non-volatile memory applications","publication_year":2013,"publication_date":"2013-04-01","ids":{"openalex":"https://openalex.org/W2030694996","doi":"https://doi.org/10.1109/nems.2013.6559793","mag":"2030694996"},"language":"en","primary_location":{"id":"doi:10.1109/nems.2013.6559793","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2013.6559793","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5009799742","display_name":"Bo Woon Soon","orcid":null},"institutions":[{"id":"https://openalex.org/I4210090209","display_name":"Institute of Microelectronics","ror":"https://ror.org/009rw8n36","country_code":"SG","type":"facility","lineage":["https://openalex.org/I115228651","https://openalex.org/I4210090209","https://openalex.org/I91275662"]},{"id":"https://openalex.org/I115228651","display_name":"Agency for Science, Technology and Research","ror":"https://ror.org/036wvzt09","country_code":"SG","type":"government","lineage":["https://openalex.org/I115228651"]},{"id":"https://openalex.org/I165932596","display_name":"National University of Singapore","ror":"https://ror.org/01tgyzw49","country_code":"SG","type":"education","lineage":["https://openalex.org/I165932596"]}],"countries":["SG"],"is_corresponding":true,"raw_author_name":"Bo Woon Soon","raw_affiliation_strings":["Department of Electrical and Computer Engineering, National University of Singapore, Singapore","Institute of Microelectronics, Agency for Science, Technology and Research, Singapore"],"affiliations":[{"raw_affiliation_string":"Department of Electrical and Computer Engineering, National University of Singapore, Singapore","institution_ids":["https://openalex.org/I165932596"]},{"raw_affiliation_string":"Institute of Microelectronics, Agency for Science, Technology and Research, Singapore","institution_ids":["https://openalex.org/I115228651","https://openalex.org/I4210090209"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5009428572","display_name":"Navab Singh","orcid":"https://orcid.org/0000-0003-3299-9093"},"institutions":[{"id":"https://openalex.org/I4210090209","display_name":"Institute of Microelectronics","ror":"https://ror.org/009rw8n36","country_code":"SG","type":"facility","lineage":["https://openalex.org/I115228651","https://openalex.org/I4210090209","https://openalex.org/I91275662"]},{"id":"https://openalex.org/I115228651","display_name":"Agency for Science, Technology and Research","ror":"https://ror.org/036wvzt09","country_code":"SG","type":"government","lineage":["https://openalex.org/I115228651"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"Navab Singh","raw_affiliation_strings":["Institute of Microelectronics, Agency for Science, Technology and Research, Singapore"],"affiliations":[{"raw_affiliation_string":"Institute of Microelectronics, Agency for Science, Technology and Research, Singapore","institution_ids":["https://openalex.org/I115228651","https://openalex.org/I4210090209"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5110192759","display_name":"J. M. Tsai","orcid":null},"institutions":[{"id":"https://openalex.org/I115228651","display_name":"Agency for Science, Technology and Research","ror":"https://ror.org/036wvzt09","country_code":"SG","type":"government","lineage":["https://openalex.org/I115228651"]},{"id":"https://openalex.org/I4210090209","display_name":"Institute of Microelectronics","ror":"https://ror.org/009rw8n36","country_code":"SG","type":"facility","lineage":["https://openalex.org/I115228651","https://openalex.org/I4210090209","https://openalex.org/I91275662"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"Julius Minglin Tsai","raw_affiliation_strings":["Institute of Microelectronics, Agency for Science, Technology and Research, Singapore"],"affiliations":[{"raw_affiliation_string":"Institute of Microelectronics, Agency for Science, Technology and Research, Singapore","institution_ids":["https://openalex.org/I115228651","https://openalex.org/I4210090209"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5084452777","display_name":"Chengkuo Lee","orcid":"https://orcid.org/0000-0002-8886-3649"},"institutions":[{"id":"https://openalex.org/I165932596","display_name":"National University of Singapore","ror":"https://ror.org/01tgyzw49","country_code":"SG","type":"education","lineage":["https://openalex.org/I165932596"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"Chengkuo Lee","raw_affiliation_strings":["Department of Electrical and Computer Engineering, National University of Singapore, Singapore"],"affiliations":[{"raw_affiliation_string":"Department of Electrical and Computer Engineering, National University of Singapore, Singapore","institution_ids":["https://openalex.org/I165932596"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":["https://openalex.org/A5009799742"],"corresponding_institution_ids":["https://openalex.org/I115228651","https://openalex.org/I165932596","https://openalex.org/I4210090209"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":{"value":0.07919223,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":95},"biblio":{"volume":null,"issue":null,"first_page":"562","last_page":"565"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":1.0,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":1.0,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/van-der-waals-force","display_name":"van der Waals force","score":0.8391253352165222},{"id":"https://openalex.org/keywords/hysteresis","display_name":"Hysteresis","score":0.6667121052742004},{"id":"https://openalex.org/keywords/non-volatile-memory","display_name":"Non-volatile memory","score":0.6374630928039551},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.6096049547195435},{"id":"https://openalex.org/keywords/electrode","display_name":"Electrode","score":0.5187901854515076},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.49931788444519043},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.46540695428848267},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.46125328540802},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.4271154999732971},{"id":"https://openalex.org/keywords/topology","display_name":"Topology (electrical circuits)","score":0.36864227056503296},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.341378778219223},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.3063195049762726},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.2993921637535095},{"id":"https://openalex.org/keywords/condensed-matter-physics","display_name":"Condensed matter physics","score":0.23603248596191406},{"id":"https://openalex.org/keywords/physical-chemistry","display_name":"Physical chemistry","score":0.12182506918907166},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.1156751811504364},{"id":"https://openalex.org/keywords/molecule","display_name":"Molecule","score":0.11565124988555908},{"id":"https://openalex.org/keywords/quantum-mechanics","display_name":"Quantum mechanics","score":0.0967562198638916}],"concepts":[{"id":"https://openalex.org/C126061179","wikidata":"https://www.wikidata.org/wiki/Q189627","display_name":"van der Waals force","level":3,"score":0.8391253352165222},{"id":"https://openalex.org/C123299182","wikidata":"https://www.wikidata.org/wiki/Q190837","display_name":"Hysteresis","level":2,"score":0.6667121052742004},{"id":"https://openalex.org/C177950962","wikidata":"https://www.wikidata.org/wiki/Q10997658","display_name":"Non-volatile memory","level":2,"score":0.6374630928039551},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.6096049547195435},{"id":"https://openalex.org/C17525397","wikidata":"https://www.wikidata.org/wiki/Q176140","display_name":"Electrode","level":2,"score":0.5187901854515076},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.49931788444519043},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.46540695428848267},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.46125328540802},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.4271154999732971},{"id":"https://openalex.org/C184720557","wikidata":"https://www.wikidata.org/wiki/Q7825049","display_name":"Topology (electrical circuits)","level":2,"score":0.36864227056503296},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.341378778219223},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.3063195049762726},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.2993921637535095},{"id":"https://openalex.org/C26873012","wikidata":"https://www.wikidata.org/wiki/Q214781","display_name":"Condensed matter physics","level":1,"score":0.23603248596191406},{"id":"https://openalex.org/C147789679","wikidata":"https://www.wikidata.org/wiki/Q11372","display_name":"Physical chemistry","level":1,"score":0.12182506918907166},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.1156751811504364},{"id":"https://openalex.org/C32909587","wikidata":"https://www.wikidata.org/wiki/Q11369","display_name":"Molecule","level":2,"score":0.11565124988555908},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0967562198638916}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/nems.2013.6559793","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2013.6559793","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"},{"id":"pmh:oai:scholarbank.nus.edu.sg:10635/83334","is_oa":false,"landing_page_url":"http://scholarbank.nus.edu.sg/handle/10635/83334","pdf_url":null,"source":{"id":"https://openalex.org/S7407052290","display_name":"National University of Singapore","issn_l":null,"issn":[],"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Scopus","raw_type":"Conference Paper"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy","score":0.7200000286102295}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":13,"referenced_works":["https://openalex.org/W1964381031","https://openalex.org/W1965907798","https://openalex.org/W1998885047","https://openalex.org/W2009608485","https://openalex.org/W2026249950","https://openalex.org/W2038368309","https://openalex.org/W2053828888","https://openalex.org/W2058448241","https://openalex.org/W2117356296","https://openalex.org/W2143914153","https://openalex.org/W2147548177","https://openalex.org/W2147864633","https://openalex.org/W4239175426"],"related_works":["https://openalex.org/W2016023420","https://openalex.org/W1969178306","https://openalex.org/W4229082226","https://openalex.org/W2150857911","https://openalex.org/W4241994605","https://openalex.org/W2067605632","https://openalex.org/W2007624894","https://openalex.org/W2080303242","https://openalex.org/W2130151591","https://openalex.org/W1992043237"],"abstract_inverted_index":{"We":[0],"present":[1],"a":[2,44],"silicon":[3],"nanofin":[4],"(Si-NF)":[5],"which":[6],"can":[7,67,84],"be":[8,68,85],"actuated":[9],"bi-directionally":[10],"by":[11,70],"electrostatic":[12],"force":[13,31],"between":[14,78],"two":[15,79],"contact":[16,25],"surfaces.":[17],"The":[18,48],"switch":[19,66,76],"is":[20,58],"able":[21],"to":[22,36],"maintain":[23],"its":[24],"leveraging":[26],"on":[27],"van":[28],"der":[29],"Waals":[30],"that":[32,64],"holds":[33],"the":[34,65,71,75],"Si-NF":[35],"either":[37],"terminal":[38],"without":[39],"on-hold":[40],"bias,":[41],"thus":[42],"showing":[43],"bi-stable":[45],"hysteresis":[46],"behavior.":[47],"measured":[49],"pull-in":[50],"voltage":[51],"V":[52],"<sub":[53],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[54],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">PI</sub>":[55],"and":[56,60],"VRESET":[57],"10V":[59],"-12V":[61],"respectively,":[62],"confirming":[63],"reset":[69],"opposite":[72],"electrode.":[73],"Since":[74],"toggles":[77],"stable":[80],"states,":[81],"therefore":[82],"it":[83],"an":[86],"ideal":[87],"device":[88],"for":[89],"non-volatile":[90],"memory":[91],"(NVM)":[92],"application.":[93]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2018,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}