{"id":"https://openalex.org/W2097086497","doi":"https://doi.org/10.1109/nems.2013.6559787","title":"Controllable elastocapillary folding of silicon nitride 3D structures by through-wafer filling","display_name":"Controllable elastocapillary folding of silicon nitride 3D structures by through-wafer filling","publication_year":2013,"publication_date":"2013-04-01","ids":{"openalex":"https://openalex.org/W2097086497","doi":"https://doi.org/10.1109/nems.2013.6559787","mag":"2097086497"},"language":"en","primary_location":{"id":"doi:10.1109/nems.2013.6559787","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2013.6559787","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5110228487","display_name":"A. Legrain","orcid":null},"institutions":[{"id":"https://openalex.org/I94624287","display_name":"University of Twente","ror":"https://ror.org/006hf6230","country_code":"NL","type":"education","lineage":["https://openalex.org/I94624287"]}],"countries":["NL"],"is_corresponding":true,"raw_author_name":"A. Legrain","raw_affiliation_strings":["MESA Institute for Nanotechnology, University of Twente, Netherlands","Mesa Inst. for Nanotechnol., Univ. of Twente, Enschede, Netherlands"],"affiliations":[{"raw_affiliation_string":"MESA Institute for Nanotechnology, University of Twente, Netherlands","institution_ids":["https://openalex.org/I94624287"]},{"raw_affiliation_string":"Mesa Inst. for Nanotechnol., Univ. of Twente, Enschede, Netherlands","institution_ids":["https://openalex.org/I94624287"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5027018080","display_name":"T. G. Janson","orcid":null},"institutions":[{"id":"https://openalex.org/I94624287","display_name":"University of Twente","ror":"https://ror.org/006hf6230","country_code":"NL","type":"education","lineage":["https://openalex.org/I94624287"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"T.G. Janson","raw_affiliation_strings":["MESA Institute for Nanotechnology, University of Twente, Netherlands","Mesa Inst. for Nanotechnol., Univ. of Twente, Enschede, Netherlands"],"affiliations":[{"raw_affiliation_string":"MESA Institute for Nanotechnology, University of Twente, Netherlands","institution_ids":["https://openalex.org/I94624287"]},{"raw_affiliation_string":"Mesa Inst. for Nanotechnol., Univ. of Twente, Enschede, Netherlands","institution_ids":["https://openalex.org/I94624287"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5039709252","display_name":"Erwin Berenschot","orcid":"https://orcid.org/0000-0002-4721-2997"},"institutions":[{"id":"https://openalex.org/I94624287","display_name":"University of Twente","ror":"https://ror.org/006hf6230","country_code":"NL","type":"education","lineage":["https://openalex.org/I94624287"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"J.W. Berenschot","raw_affiliation_strings":["MESA Institute for Nanotechnology, University of Twente, Netherlands","Mesa Inst. for Nanotechnol., Univ. of Twente, Enschede, Netherlands"],"affiliations":[{"raw_affiliation_string":"MESA Institute for Nanotechnology, University of Twente, Netherlands","institution_ids":["https://openalex.org/I94624287"]},{"raw_affiliation_string":"Mesa Inst. for Nanotechnol., Univ. of Twente, Enschede, Netherlands","institution_ids":["https://openalex.org/I94624287"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5086832223","display_name":"Gijs Krijnen","orcid":"https://orcid.org/0000-0001-9537-7123"},"institutions":[{"id":"https://openalex.org/I94624287","display_name":"University of Twente","ror":"https://ror.org/006hf6230","country_code":"NL","type":"education","lineage":["https://openalex.org/I94624287"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"G.J.M. Krijnen","raw_affiliation_strings":["MESA Institute for Nanotechnology, University of Twente, Netherlands","Mesa Inst. for Nanotechnol., Univ. of Twente, Enschede, Netherlands"],"affiliations":[{"raw_affiliation_string":"MESA Institute for Nanotechnology, University of Twente, Netherlands","institution_ids":["https://openalex.org/I94624287"]},{"raw_affiliation_string":"Mesa Inst. for Nanotechnol., Univ. of Twente, Enschede, Netherlands","institution_ids":["https://openalex.org/I94624287"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5043830254","display_name":"L\u00e9on Abelmann","orcid":"https://orcid.org/0000-0002-9733-1230"},"institutions":[{"id":"https://openalex.org/I94624287","display_name":"University of Twente","ror":"https://ror.org/006hf6230","country_code":"NL","type":"education","lineage":["https://openalex.org/I94624287"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"L. Abelmann","raw_affiliation_strings":["MESA Institute for Nanotechnology, University of Twente, Netherlands","Mesa Inst. for Nanotechnol., Univ. of Twente, Enschede, Netherlands"],"affiliations":[{"raw_affiliation_string":"MESA Institute for Nanotechnology, University of Twente, Netherlands","institution_ids":["https://openalex.org/I94624287"]},{"raw_affiliation_string":"Mesa Inst. for Nanotechnol., Univ. of Twente, Enschede, Netherlands","institution_ids":["https://openalex.org/I94624287"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5006143543","display_name":"Niels R. Tas","orcid":"https://orcid.org/0000-0001-7541-4345"},"institutions":[{"id":"https://openalex.org/I94624287","display_name":"University of Twente","ror":"https://ror.org/006hf6230","country_code":"NL","type":"education","lineage":["https://openalex.org/I94624287"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"N.R. Tas","raw_affiliation_strings":["MESA Institute for Nanotechnology, University of Twente, Netherlands","Mesa Inst. for Nanotechnol., Univ. of Twente, Enschede, Netherlands"],"affiliations":[{"raw_affiliation_string":"MESA Institute for Nanotechnology, University of Twente, Netherlands","institution_ids":["https://openalex.org/I94624287"]},{"raw_affiliation_string":"Mesa Inst. for Nanotechnol., Univ. of Twente, Enschede, Netherlands","institution_ids":["https://openalex.org/I94624287"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":6,"corresponding_author_ids":["https://openalex.org/A5110228487"],"corresponding_institution_ids":["https://openalex.org/I94624287"],"apc_list":null,"apc_paid":null,"fwci":0.4054,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.6927845,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":94},"biblio":{"volume":null,"issue":null,"first_page":"538","last_page":"541"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11737","display_name":"Advanced Materials and Mechanics","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11737","display_name":"Advanced Materials and Mechanics","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10338","display_name":"Advanced Sensor and Energy Harvesting Materials","score":0.9988999962806702,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10313","display_name":"Surface Modification and Superhydrophobicity","score":0.9983999729156494,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/wafer","display_name":"Wafer","score":0.8334510326385498},{"id":"https://openalex.org/keywords/capillary-action","display_name":"Capillary action","score":0.776012659072876},{"id":"https://openalex.org/keywords/folding","display_name":"Folding (DSP implementation)","score":0.700802206993103},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.5839554071426392},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.5804783701896667},{"id":"https://openalex.org/keywords/silicon-nitride","display_name":"Silicon nitride","score":0.5752571821212769},{"id":"https://openalex.org/keywords/planar","display_name":"Planar","score":0.5502139329910278},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.5102965831756592},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.4678526520729065},{"id":"https://openalex.org/keywords/microfluidics","display_name":"Microfluidics","score":0.46692582964897156},{"id":"https://openalex.org/keywords/nitride","display_name":"Nitride","score":0.44912293553352356},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.26901155710220337},{"id":"https://openalex.org/keywords/layer","display_name":"Layer (electronics)","score":0.24018079042434692},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.182175874710083},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.16198298335075378},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.10511055588722229}],"concepts":[{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.8334510326385498},{"id":"https://openalex.org/C196806460","wikidata":"https://www.wikidata.org/wiki/Q188603","display_name":"Capillary action","level":2,"score":0.776012659072876},{"id":"https://openalex.org/C2776545253","wikidata":"https://www.wikidata.org/wiki/Q5464292","display_name":"Folding (DSP implementation)","level":2,"score":0.700802206993103},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5839554071426392},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.5804783701896667},{"id":"https://openalex.org/C2777431650","wikidata":"https://www.wikidata.org/wiki/Q413828","display_name":"Silicon nitride","level":3,"score":0.5752571821212769},{"id":"https://openalex.org/C134786449","wikidata":"https://www.wikidata.org/wiki/Q3391255","display_name":"Planar","level":2,"score":0.5502139329910278},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.5102965831756592},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.4678526520729065},{"id":"https://openalex.org/C8673954","wikidata":"https://www.wikidata.org/wiki/Q138845","display_name":"Microfluidics","level":2,"score":0.46692582964897156},{"id":"https://openalex.org/C194760766","wikidata":"https://www.wikidata.org/wiki/Q410851","display_name":"Nitride","level":3,"score":0.44912293553352356},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.26901155710220337},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.24018079042434692},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.182175874710083},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.16198298335075378},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.10511055588722229},{"id":"https://openalex.org/C121684516","wikidata":"https://www.wikidata.org/wiki/Q7600677","display_name":"Computer graphics (images)","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/nems.2013.6559787","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2013.6559787","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"},{"id":"pmh:oai:ris.utwente.nl:openaire_cris_publications/66c0aeae-013d-47b3-82ea-0abc6bd954e8","is_oa":false,"landing_page_url":"https://research.utwente.nl/en/publications/66c0aeae-013d-47b3-82ea-0abc6bd954e8","pdf_url":null,"source":{"id":"https://openalex.org/S4406922991","display_name":"University of Twente Research Information","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Legrain, A B H, Janson, T G, Berenschot, J W, Krijnen, G J M, Abelmann, L & Tas, N R 2013, Controllable elastocapillary folding of silicon nitride 3D structures by through-wafer filling. in 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013. IEEE, Los Alamitos, CA, USA, pp. 538-541, 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2013, Suzhou, China, 7/04/13. https://doi.org/10.1109/NEMS.2013.6559787","raw_type":"info:eu-repo/semantics/publishedVersion"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/6","score":0.5099999904632568,"display_name":"Clean water and sanitation"}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":8,"referenced_works":["https://openalex.org/W1986851170","https://openalex.org/W2063043221","https://openalex.org/W2065993008","https://openalex.org/W2078360419","https://openalex.org/W2080270235","https://openalex.org/W2096401227","https://openalex.org/W2116393753","https://openalex.org/W2120541599"],"related_works":["https://openalex.org/W3103016203","https://openalex.org/W2106238498","https://openalex.org/W2463681241","https://openalex.org/W4200355601","https://openalex.org/W97203997","https://openalex.org/W1969140645","https://openalex.org/W3208765426","https://openalex.org/W1984222787","https://openalex.org/W2952701050","https://openalex.org/W2006846697"],"abstract_inverted_index":{"We":[0,20],"present":[1],"the":[2,23],"controllable":[3],"capillary":[4,30],"folding":[5],"of":[6,16,29,37],"planar":[7],"silicon":[8],"nitride":[9],"templates":[10],"into":[11],"3D":[12],"micro-structures":[13],"by":[14],"means":[15],"through-wafer":[17],"liquid":[18],"application.":[19],"demonstrate":[21],"for":[22],"first":[24],"time":[25],"hydro-mechanical,":[26],"repeatable,":[27],"actuation":[28],"folded":[31],"structures":[32],"via":[33],"addition":[34],"or":[35],"retraction":[36],"water":[38],"on":[39],"demand.":[40]},"counts_by_year":[{"year":2014,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}