{"id":"https://openalex.org/W1988858929","doi":"https://doi.org/10.1109/nems.2013.6559778","title":"Fabrication and characterization of a novel multi-annular type backscattered electron detector for SEM","display_name":"Fabrication and characterization of a novel multi-annular type backscattered electron detector for SEM","publication_year":2013,"publication_date":"2013-04-01","ids":{"openalex":"https://openalex.org/W1988858929","doi":"https://doi.org/10.1109/nems.2013.6559778","mag":"1988858929"},"language":"en","primary_location":{"id":"doi:10.1109/nems.2013.6559778","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2013.6559778","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5074294652","display_name":"Yun-Ju Chuang","orcid":"https://orcid.org/0000-0002-4922-6946"},"institutions":[{"id":"https://openalex.org/I192703390","display_name":"Ming Chuan University","ror":"https://ror.org/02pgvzy25","country_code":"TW","type":"education","lineage":["https://openalex.org/I192703390"]}],"countries":["TW"],"is_corresponding":true,"raw_author_name":"Yun-Ju Chuang","raw_affiliation_strings":["Department of Biomedical Engineering, Ming Chuan University, Taoyuan, Taiwan","Dept. of Biomed. Eng., Ming-Chuan Univ., Taoyuan, Taiwan"],"affiliations":[{"raw_affiliation_string":"Department of Biomedical Engineering, Ming Chuan University, Taoyuan, Taiwan","institution_ids":["https://openalex.org/I192703390"]},{"raw_affiliation_string":"Dept. of Biomed. Eng., Ming-Chuan Univ., Taoyuan, Taiwan","institution_ids":["https://openalex.org/I192703390"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5021184312","display_name":"Pei-Ru Chen","orcid":null},"institutions":[{"id":"https://openalex.org/I192703390","display_name":"Ming Chuan University","ror":"https://ror.org/02pgvzy25","country_code":"TW","type":"education","lineage":["https://openalex.org/I192703390"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Pei-Ru Chen","raw_affiliation_strings":["Department of Biomedical Engineering, Ming Chuan University, Taoyuan, Taiwan","Dept. of Biomed. Eng., Ming-Chuan Univ., Taoyuan, Taiwan"],"affiliations":[{"raw_affiliation_string":"Department of Biomedical Engineering, Ming Chuan University, Taoyuan, Taiwan","institution_ids":["https://openalex.org/I192703390"]},{"raw_affiliation_string":"Dept. of Biomed. Eng., Ming-Chuan Univ., Taoyuan, Taiwan","institution_ids":["https://openalex.org/I192703390"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5109968549","display_name":"Wei-Rui Lin","orcid":null},"institutions":[{"id":"https://openalex.org/I25846049","display_name":"National Tsing Hua University","ror":"https://ror.org/00zdnkx70","country_code":"TW","type":"education","lineage":["https://openalex.org/I25846049"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Wei-Rui Lin","raw_affiliation_strings":["Department of Engineering and System Science, National Tsing Hua University, Hsinchu, Taiwan","Dept. of Eng. & Syst. Sci., Nat. Tsing Hua Univ., Hsinchu, Taiwan"],"affiliations":[{"raw_affiliation_string":"Department of Engineering and System Science, National Tsing Hua University, Hsinchu, Taiwan","institution_ids":["https://openalex.org/I25846049"]},{"raw_affiliation_string":"Dept. of Eng. & Syst. Sci., Nat. Tsing Hua Univ., Hsinchu, Taiwan","institution_ids":["https://openalex.org/I25846049"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5048997744","display_name":"Fu\u2010Rong Chen","orcid":"https://orcid.org/0000-0003-4707-6590"},"institutions":[{"id":"https://openalex.org/I25846049","display_name":"National Tsing Hua University","ror":"https://ror.org/00zdnkx70","country_code":"TW","type":"education","lineage":["https://openalex.org/I25846049"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Fu-Ron Chen","raw_affiliation_strings":["Department of Engineering and System Science, National Tsing Hua University, Hsinchu, Taiwan","Dept. of Eng. & Syst. Sci., Nat. Tsing Hua Univ., Hsinchu, Taiwan"],"affiliations":[{"raw_affiliation_string":"Department of Engineering and System Science, National Tsing Hua University, Hsinchu, Taiwan","institution_ids":["https://openalex.org/I25846049"]},{"raw_affiliation_string":"Dept. of Eng. & Syst. Sci., Nat. Tsing Hua Univ., Hsinchu, Taiwan","institution_ids":["https://openalex.org/I25846049"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":["https://openalex.org/A5074294652"],"corresponding_institution_ids":["https://openalex.org/I192703390"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.05637158,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"16","issue":null,"first_page":"494","last_page":"497"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12039","display_name":"Electron and X-Ray Spectroscopy Techniques","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12039","display_name":"Electron and X-Ray Spectroscopy Techniques","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10461","display_name":"Gas Sensing Nanomaterials and Sensors","score":0.9973999857902527,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.9968000054359436,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/detector","display_name":"Detector","score":0.8004389405250549},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.6692214608192444},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.6465312242507935},{"id":"https://openalex.org/keywords/electron","display_name":"Electron","score":0.6427441835403442},{"id":"https://openalex.org/keywords/diode","display_name":"Diode","score":0.631012499332428},{"id":"https://openalex.org/keywords/characterization","display_name":"Characterization (materials science)","score":0.6230537295341492},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.5892845392227173},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.5841997861862183},{"id":"https://openalex.org/keywords/scanning-electron-microscope","display_name":"Scanning electron microscope","score":0.4925447404384613},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.45402035117149353},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.29752737283706665},{"id":"https://openalex.org/keywords/nuclear-physics","display_name":"Nuclear physics","score":0.06206941604614258}],"concepts":[{"id":"https://openalex.org/C94915269","wikidata":"https://www.wikidata.org/wiki/Q1834857","display_name":"Detector","level":2,"score":0.8004389405250549},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.6692214608192444},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6465312242507935},{"id":"https://openalex.org/C147120987","wikidata":"https://www.wikidata.org/wiki/Q2225","display_name":"Electron","level":2,"score":0.6427441835403442},{"id":"https://openalex.org/C78434282","wikidata":"https://www.wikidata.org/wiki/Q11656","display_name":"Diode","level":2,"score":0.631012499332428},{"id":"https://openalex.org/C2780841128","wikidata":"https://www.wikidata.org/wiki/Q5073781","display_name":"Characterization (materials science)","level":2,"score":0.6230537295341492},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.5892845392227173},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.5841997861862183},{"id":"https://openalex.org/C26771246","wikidata":"https://www.wikidata.org/wiki/Q321095","display_name":"Scanning electron microscope","level":2,"score":0.4925447404384613},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.45402035117149353},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.29752737283706665},{"id":"https://openalex.org/C185544564","wikidata":"https://www.wikidata.org/wiki/Q81197","display_name":"Nuclear physics","level":1,"score":0.06206941604614258},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems.2013.6559778","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2013.6559778","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.5899999737739563,"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7"}],"awards":[],"funders":[{"id":"https://openalex.org/F4320321040","display_name":"National Science Council","ror":"https://ror.org/02kv4zf79"}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":13,"referenced_works":["https://openalex.org/W1984095464","https://openalex.org/W2003113118","https://openalex.org/W2019226401","https://openalex.org/W2059848640","https://openalex.org/W2070029622","https://openalex.org/W2119177940","https://openalex.org/W2129023951","https://openalex.org/W3010447366","https://openalex.org/W3036060212","https://openalex.org/W4233838103","https://openalex.org/W6677710488","https://openalex.org/W6779900866","https://openalex.org/W7034400630"],"related_works":["https://openalex.org/W3107994849","https://openalex.org/W2082914599","https://openalex.org/W2756570351","https://openalex.org/W4247143848","https://openalex.org/W2009883749","https://openalex.org/W2735573198","https://openalex.org/W2606427896","https://openalex.org/W29442446","https://openalex.org/W2007805353","https://openalex.org/W2132500134"],"abstract_inverted_index":{"A":[0],"novel":[1],"silicon":[2],"p-i-n":[3],"diodes":[4],"for":[5,91],"detecting":[6],"backscattering":[7],"electrons":[8],"in":[9,93],"SEM":[10,94],"was":[11],"proposed":[12],"and":[13,71],"fabricated.":[14],"The":[15],"multi-annular":[16,37,61,85],"configuration":[17],"enables":[18],"to":[19,77],"provide":[20,43],"better":[21],"surface":[22,44],"topography":[23,45],"contrast":[24,46],"of":[25,47,68],"BSE":[26,86],"image":[27],"compared":[28,55],"with":[29,56],"traditional":[30],"quadratic":[31],"configuration.":[32],"In":[33],"this":[34],"study,":[35],"the":[36,60,84],"backscattered":[38],"electron":[39],"detector":[40,62,87],"(BSED)":[41],"can":[42],"82.11":[48],"nA/\u03bcm,":[49],"which":[50],"is":[51,81,88],"105%":[52],"increase":[53],"as":[54],"commercial":[57],"BSED.":[58],"Besides,":[59],"has":[63],"lower":[64],"threshold":[65],"detective":[66,73],"energy":[67],"1.28":[69],"keV":[70],"wide":[72],"dynamic":[74],"range":[75],"(up":[76],"30":[78],"keV).":[79],"It":[80],"demonstrated":[82],"that":[83],"well":[89],"suited":[90],"imaging":[92],"system.":[95]},"counts_by_year":[],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}