{"id":"https://openalex.org/W1977466593","doi":"https://doi.org/10.1109/nems.2013.6559695","title":"Simulation and design of micro pressure sensors applied to measure the intracranial pressure","display_name":"Simulation and design of micro pressure sensors applied to measure the intracranial pressure","publication_year":2013,"publication_date":"2013-04-01","ids":{"openalex":"https://openalex.org/W1977466593","doi":"https://doi.org/10.1109/nems.2013.6559695","mag":"1977466593"},"language":"en","primary_location":{"id":"doi:10.1109/nems.2013.6559695","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2013.6559695","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5101787706","display_name":"Bo Pang","orcid":"https://orcid.org/0000-0002-8519-7214"},"institutions":[{"id":"https://openalex.org/I99065089","display_name":"Tsinghua University","ror":"https://ror.org/03cve4549","country_code":"CN","type":"education","lineage":["https://openalex.org/I99065089"]},{"id":"https://openalex.org/I4210119392","display_name":"Institute of Microelectronics","ror":"https://ror.org/02s6gs133","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Pang Bo","raw_affiliation_strings":["Institute of Microelectronics, Tsinghua University, China","Inst. of Microelectron., Tsinghua Univ., Beijing, China"],"affiliations":[{"raw_affiliation_string":"Institute of Microelectronics, Tsinghua University, China","institution_ids":["https://openalex.org/I99065089","https://openalex.org/I4210119392"]},{"raw_affiliation_string":"Inst. of Microelectron., Tsinghua Univ., Beijing, China","institution_ids":["https://openalex.org/I99065089"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5056332750","display_name":"Zhaohua Zhang","orcid":"https://orcid.org/0000-0002-3141-3268"},"institutions":[{"id":"https://openalex.org/I4210119392","display_name":"Institute of Microelectronics","ror":"https://ror.org/02s6gs133","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]},{"id":"https://openalex.org/I99065089","display_name":"Tsinghua University","ror":"https://ror.org/03cve4549","country_code":"CN","type":"education","lineage":["https://openalex.org/I99065089"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zhang Zhao-Hua","raw_affiliation_strings":["Institute of Microelectronics, Tsinghua University, China","Inst. of Microelectron., Tsinghua Univ., Beijing, China"],"affiliations":[{"raw_affiliation_string":"Institute of Microelectronics, Tsinghua University, China","institution_ids":["https://openalex.org/I99065089","https://openalex.org/I4210119392"]},{"raw_affiliation_string":"Inst. of Microelectron., Tsinghua Univ., Beijing, China","institution_ids":["https://openalex.org/I99065089"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5103472052","display_name":"Ren Tian-Ling","orcid":null},"institutions":[{"id":"https://openalex.org/I99065089","display_name":"Tsinghua University","ror":"https://ror.org/03cve4549","country_code":"CN","type":"education","lineage":["https://openalex.org/I99065089"]},{"id":"https://openalex.org/I4210119392","display_name":"Institute of Microelectronics","ror":"https://ror.org/02s6gs133","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Ren Tian-Ling","raw_affiliation_strings":["Institute of Microelectronics, Tsinghua University, China","Inst. of Microelectron., Tsinghua Univ., Beijing, China"],"affiliations":[{"raw_affiliation_string":"Institute of Microelectronics, Tsinghua University, China","institution_ids":["https://openalex.org/I99065089","https://openalex.org/I4210119392"]},{"raw_affiliation_string":"Inst. of Microelectron., Tsinghua Univ., Beijing, China","institution_ids":["https://openalex.org/I99065089"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":["https://openalex.org/A5101787706"],"corresponding_institution_ids":["https://openalex.org/I4210119392","https://openalex.org/I99065089"],"apc_list":null,"apc_paid":null,"fwci":0.5509,"has_fulltext":false,"cited_by_count":11,"citation_normalized_percentile":{"value":0.6012932,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":96},"biblio":{"volume":null,"issue":null,"first_page":"120","last_page":"123"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11406","display_name":"Cerebrospinal fluid and hydrocephalus","score":0.9990000128746033,"subfield":{"id":"https://openalex.org/subfields/2804","display_name":"Cellular and Molecular Neuroscience"},"field":{"id":"https://openalex.org/fields/28","display_name":"Neuroscience"},"domain":{"id":"https://openalex.org/domains/1","display_name":"Life Sciences"}},"topics":[{"id":"https://openalex.org/T11406","display_name":"Cerebrospinal fluid and hydrocephalus","score":0.9990000128746033,"subfield":{"id":"https://openalex.org/subfields/2804","display_name":"Cellular and Molecular Neuroscience"},"field":{"id":"https://openalex.org/fields/28","display_name":"Neuroscience"},"domain":{"id":"https://openalex.org/domains/1","display_name":"Life Sciences"}},{"id":"https://openalex.org/T10706","display_name":"Traumatic Brain Injury and Neurovascular Disturbances","score":0.9865000247955322,"subfield":{"id":"https://openalex.org/subfields/2728","display_name":"Neurology"},"field":{"id":"https://openalex.org/fields/27","display_name":"Medicine"},"domain":{"id":"https://openalex.org/domains/4","display_name":"Health Sciences"}},{"id":"https://openalex.org/T11579","display_name":"Cardiovascular and Diving-Related Complications","score":0.9735000133514404,"subfield":{"id":"https://openalex.org/subfields/2740","display_name":"Pulmonary and Respiratory Medicine"},"field":{"id":"https://openalex.org/fields/27","display_name":"Medicine"},"domain":{"id":"https://openalex.org/domains/4","display_name":"Health Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/piezoresistive-effect","display_name":"Piezoresistive effect","score":0.7938878536224365},{"id":"https://openalex.org/keywords/pressure-sensor","display_name":"Pressure sensor","score":0.7545152902603149},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.7205896973609924},{"id":"https://openalex.org/keywords/finite-element-method","display_name":"Finite element method","score":0.7188268899917603},{"id":"https://openalex.org/keywords/measure","display_name":"Measure (data warehouse)","score":0.660961389541626},{"id":"https://openalex.org/keywords/micrometer","display_name":"Micrometer","score":0.5385940670967102},{"id":"https://openalex.org/keywords/sensitivity","display_name":"Sensitivity (control systems)","score":0.5096793174743652},{"id":"https://openalex.org/keywords/nonlinear-system","display_name":"Nonlinear system","score":0.4619174003601074},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.4487695097923279},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.42377960681915283},{"id":"https://openalex.org/keywords/pressure-measurement","display_name":"Pressure measurement","score":0.4226917326450348},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.38620468974113464},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.38300538063049316},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.3004879355430603},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.2721337378025055},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.1518804430961609},{"id":"https://openalex.org/keywords/structural-engineering","display_name":"Structural engineering","score":0.141360342502594},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.08246269822120667}],"concepts":[{"id":"https://openalex.org/C198490522","wikidata":"https://www.wikidata.org/wiki/Q1932915","display_name":"Piezoresistive effect","level":2,"score":0.7938878536224365},{"id":"https://openalex.org/C41325743","wikidata":"https://www.wikidata.org/wiki/Q1261040","display_name":"Pressure sensor","level":2,"score":0.7545152902603149},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.7205896973609924},{"id":"https://openalex.org/C135628077","wikidata":"https://www.wikidata.org/wiki/Q220184","display_name":"Finite element method","level":2,"score":0.7188268899917603},{"id":"https://openalex.org/C2780009758","wikidata":"https://www.wikidata.org/wiki/Q6804172","display_name":"Measure (data warehouse)","level":2,"score":0.660961389541626},{"id":"https://openalex.org/C171635847","wikidata":"https://www.wikidata.org/wiki/Q406983","display_name":"Micrometer","level":2,"score":0.5385940670967102},{"id":"https://openalex.org/C21200559","wikidata":"https://www.wikidata.org/wiki/Q7451068","display_name":"Sensitivity (control systems)","level":2,"score":0.5096793174743652},{"id":"https://openalex.org/C158622935","wikidata":"https://www.wikidata.org/wiki/Q660848","display_name":"Nonlinear system","level":2,"score":0.4619174003601074},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.4487695097923279},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.42377960681915283},{"id":"https://openalex.org/C80264047","wikidata":"https://www.wikidata.org/wiki/Q7424019","display_name":"Pressure measurement","level":2,"score":0.4226917326450348},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.38620468974113464},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.38300538063049316},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.3004879355430603},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.2721337378025055},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.1518804430961609},{"id":"https://openalex.org/C66938386","wikidata":"https://www.wikidata.org/wiki/Q633538","display_name":"Structural engineering","level":1,"score":0.141360342502594},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.08246269822120667},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C77088390","wikidata":"https://www.wikidata.org/wiki/Q8513","display_name":"Database","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems.2013.6559695","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2013.6559695","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":5,"referenced_works":["https://openalex.org/W1488094335","https://openalex.org/W1601541039","https://openalex.org/W2004950446","https://openalex.org/W2160734413","https://openalex.org/W2169826219"],"related_works":["https://openalex.org/W2070892118","https://openalex.org/W1995646059","https://openalex.org/W2793297822","https://openalex.org/W2145072251","https://openalex.org/W1964986574","https://openalex.org/W2135243415","https://openalex.org/W2327713353","https://openalex.org/W2912682349","https://openalex.org/W2536411258","https://openalex.org/W1977466593"],"abstract_inverted_index":{"This":[0],"paper":[1],"reports":[2],"a":[3],"micrometer":[4],"level":[5],"pressure":[6,12,24],"sensor":[7,15,25,42,51],"to":[8],"measure":[9],"the":[10,19,50,56],"intracranial":[11],"(ICP).":[13],"The":[14,22,41],"is":[16,26,43],"based":[17],"on":[18],"piezoresistive":[20,23],"effect.":[21],"simulated":[27],"and":[28,35],"designed":[29],"by":[30,45],"using":[31],"nonlinear":[32],"programming":[33],"Optimizing":[34],"Finite":[36],"Element":[37],"Analysis":[38],"(FEA)":[39],"tools.":[40],"fabricated":[44],"MEMS":[46],"process.":[47],"From":[48],"tests,":[49],"samples":[52],"performances":[53],"match":[54],"up":[55],"design.":[57]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2024,"cited_by_count":2},{"year":2022,"cited_by_count":2},{"year":2020,"cited_by_count":1},{"year":2018,"cited_by_count":1},{"year":2016,"cited_by_count":2},{"year":2015,"cited_by_count":1},{"year":2014,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}