{"id":"https://openalex.org/W2051619536","doi":"https://doi.org/10.1109/nems.2013.6559693","title":"Graphene films synthesized on electroplated Cu by chemical vapor deposition","display_name":"Graphene films synthesized on electroplated Cu by chemical vapor deposition","publication_year":2013,"publication_date":"2013-04-01","ids":{"openalex":"https://openalex.org/W2051619536","doi":"https://doi.org/10.1109/nems.2013.6559693","mag":"2051619536"},"language":"en","primary_location":{"id":"doi:10.1109/nems.2013.6559693","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2013.6559693","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5010657910","display_name":"Wenrong Wang","orcid":null},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"funder","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210147322","display_name":"Shanghai Institute of Microsystem and Information Technology","ror":"https://ror.org/04nytyj38","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210147322"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Wenrong Wang","raw_affiliation_strings":["Graduate School of Chinese Academy of Sciences, Beijing, China","State Key Laboratories of Transducer Technology on Microsystem Laboratory, Science and Technology on Microsystem Laboratory, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, China"],"affiliations":[{"raw_affiliation_string":"Graduate School of Chinese Academy of Sciences, Beijing, China","institution_ids":["https://openalex.org/I19820366"]},{"raw_affiliation_string":"State Key Laboratories of Transducer Technology on Microsystem Laboratory, Science and Technology on Microsystem Laboratory, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, China","institution_ids":["https://openalex.org/I4210147322"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5103482857","display_name":"Chen Liang","orcid":null},"institutions":[{"id":"https://openalex.org/I4210147322","display_name":"Shanghai Institute of Microsystem and Information Technology","ror":"https://ror.org/04nytyj38","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210147322"]},{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"funder","lineage":["https://openalex.org/I19820366"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Chen Liang","raw_affiliation_strings":["Graduate School of Chinese Academy of Sciences, Beijing, China","State Key Laboratories of Transducer Technology on Microsystem Laboratory, Science and Technology on Microsystem Laboratory, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, China"],"affiliations":[{"raw_affiliation_string":"Graduate School of Chinese Academy of Sciences, Beijing, China","institution_ids":["https://openalex.org/I19820366"]},{"raw_affiliation_string":"State Key Laboratories of Transducer Technology on Microsystem Laboratory, Science and Technology on Microsystem Laboratory, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, China","institution_ids":["https://openalex.org/I4210147322"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100754636","display_name":"Tie Li","orcid":"https://orcid.org/0000-0003-2795-9724"},"institutions":[{"id":"https://openalex.org/I4210147322","display_name":"Shanghai Institute of Microsystem and Information Technology","ror":"https://ror.org/04nytyj38","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210147322"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Tie Li","raw_affiliation_strings":["State Key Laboratories of Transducer Technology on Microsystem Laboratory, Science and Technology on Microsystem Laboratory, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, China"],"affiliations":[{"raw_affiliation_string":"State Key Laboratories of Transducer Technology on Microsystem Laboratory, Science and Technology on Microsystem Laboratory, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, China","institution_ids":["https://openalex.org/I4210147322"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5029677059","display_name":"Heng Yang","orcid":"https://orcid.org/0000-0003-0728-124X"},"institutions":[{"id":"https://openalex.org/I4210147322","display_name":"Shanghai Institute of Microsystem and Information Technology","ror":"https://ror.org/04nytyj38","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210147322"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Heng Yang","raw_affiliation_strings":["State Key Laboratories of Transducer Technology on Microsystem Laboratory, Science and Technology on Microsystem Laboratory, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, China"],"affiliations":[{"raw_affiliation_string":"State Key Laboratories of Transducer Technology on Microsystem Laboratory, Science and Technology on Microsystem Laboratory, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, China","institution_ids":["https://openalex.org/I4210147322"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5068365695","display_name":"Na Lu","orcid":"https://orcid.org/0000-0003-1026-9524"},"institutions":[{"id":"https://openalex.org/I4210147322","display_name":"Shanghai Institute of Microsystem and Information Technology","ror":"https://ror.org/04nytyj38","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210147322"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Na Lu","raw_affiliation_strings":["State Key Laboratories of Transducer Technology on Microsystem Laboratory, Science and Technology on Microsystem Laboratory, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, China"],"affiliations":[{"raw_affiliation_string":"State Key Laboratories of Transducer Technology on Microsystem Laboratory, Science and Technology on Microsystem Laboratory, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, China","institution_ids":["https://openalex.org/I4210147322"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5072148963","display_name":"Yuelin Wang","orcid":"https://orcid.org/0009-0008-4393-4109"},"institutions":[{"id":"https://openalex.org/I4210147322","display_name":"Shanghai Institute of Microsystem and Information Technology","ror":"https://ror.org/04nytyj38","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210147322"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yuelin Wang","raw_affiliation_strings":["State Key Laboratories of Transducer Technology on Microsystem Laboratory, Science and Technology on Microsystem Laboratory, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, China"],"affiliations":[{"raw_affiliation_string":"State Key Laboratories of Transducer Technology on Microsystem Laboratory, Science and Technology on Microsystem Laboratory, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, China","institution_ids":["https://openalex.org/I4210147322"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":6,"corresponding_author_ids":["https://openalex.org/A5010657910"],"corresponding_institution_ids":["https://openalex.org/I19820366","https://openalex.org/I4210147322"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.09037875,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"306","issue":null,"first_page":"112","last_page":"115"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10083","display_name":"Graphene research and applications","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10083","display_name":"Graphene research and applications","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12627","display_name":"Graphene and Nanomaterials Applications","score":0.9825000166893005,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10074","display_name":"Carbon Nanotubes in Composites","score":0.972000002861023,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/electroplating","display_name":"Electroplating","score":0.8817499279975891},{"id":"https://openalex.org/keywords/graphene","display_name":"Graphene","score":0.8660017251968384},{"id":"https://openalex.org/keywords/chemical-vapor-deposition","display_name":"Chemical vapor deposition","score":0.8111644983291626},{"id":"https://openalex.org/keywords/annealing","display_name":"Annealing (glass)","score":0.7467436790466309},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.7446527481079102},{"id":"https://openalex.org/keywords/methane","display_name":"Methane","score":0.6533699035644531},{"id":"https://openalex.org/keywords/chemical-engineering","display_name":"Chemical engineering","score":0.5783967971801758},{"id":"https://openalex.org/keywords/argon","display_name":"Argon","score":0.4995546340942383},{"id":"https://openalex.org/keywords/hydrogen","display_name":"Hydrogen","score":0.4497872292995453},{"id":"https://openalex.org/keywords/grain-size","display_name":"Grain size","score":0.438631147146225},{"id":"https://openalex.org/keywords/metallurgy","display_name":"Metallurgy","score":0.3769547939300537},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.3760662376880646},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.13578107953071594},{"id":"https://openalex.org/keywords/layer","display_name":"Layer (electronics)","score":0.07893949747085571},{"id":"https://openalex.org/keywords/organic-chemistry","display_name":"Organic chemistry","score":0.052767932415008545}],"concepts":[{"id":"https://openalex.org/C51807945","wikidata":"https://www.wikidata.org/wiki/Q3503392","display_name":"Electroplating","level":3,"score":0.8817499279975891},{"id":"https://openalex.org/C30080830","wikidata":"https://www.wikidata.org/wiki/Q169917","display_name":"Graphene","level":2,"score":0.8660017251968384},{"id":"https://openalex.org/C57410435","wikidata":"https://www.wikidata.org/wiki/Q505668","display_name":"Chemical vapor deposition","level":2,"score":0.8111644983291626},{"id":"https://openalex.org/C2777855556","wikidata":"https://www.wikidata.org/wiki/Q4339544","display_name":"Annealing (glass)","level":2,"score":0.7467436790466309},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7446527481079102},{"id":"https://openalex.org/C516920438","wikidata":"https://www.wikidata.org/wiki/Q37129","display_name":"Methane","level":2,"score":0.6533699035644531},{"id":"https://openalex.org/C42360764","wikidata":"https://www.wikidata.org/wiki/Q83588","display_name":"Chemical engineering","level":1,"score":0.5783967971801758},{"id":"https://openalex.org/C547737533","wikidata":"https://www.wikidata.org/wiki/Q696","display_name":"Argon","level":2,"score":0.4995546340942383},{"id":"https://openalex.org/C512968161","wikidata":"https://www.wikidata.org/wiki/Q556","display_name":"Hydrogen","level":2,"score":0.4497872292995453},{"id":"https://openalex.org/C192191005","wikidata":"https://www.wikidata.org/wiki/Q466491","display_name":"Grain size","level":2,"score":0.438631147146225},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.3769547939300537},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.3760662376880646},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.13578107953071594},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.07893949747085571},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.052767932415008545},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems.2013.6559693","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2013.6559693","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":7,"referenced_works":["https://openalex.org/W2055413753","https://openalex.org/W2058122340","https://openalex.org/W2082208359","https://openalex.org/W2094137784","https://openalex.org/W2136334331","https://openalex.org/W2318983449","https://openalex.org/W3101026607"],"related_works":["https://openalex.org/W3197368573","https://openalex.org/W2392905164","https://openalex.org/W1975700181","https://openalex.org/W1974776238","https://openalex.org/W3214111312","https://openalex.org/W2127142440","https://openalex.org/W2883973521","https://openalex.org/W2367150687","https://openalex.org/W2147184403","https://openalex.org/W2380184426"],"abstract_inverted_index":{"In":[0],"this":[1],"paper,":[2],"electroplated":[3,28],"Cu":[4,29],"was":[5,34],"used":[6],"as":[7],"substrate":[8],"to":[9],"grow":[10],"graphene":[11],"by":[12],"chemical":[13],"vapor":[14],"deposition":[15],"(CVD)":[16],"with":[17],"a":[18],"mixture":[19],"gas":[20],"of":[21,54],"methane,":[22],"hydrogen":[23],"and":[24,43],"argon.":[25],"The":[26],"different":[27],"grain":[30],"size":[31],"after":[32],"annealing":[33],"studied.":[35],"We":[36],"present":[37],"the":[38,51],"growth":[39,41],"temperature,":[40],"time":[42],"methane":[44],"concentration":[45],"are":[46],"key":[47],"parameters":[48],"that":[49],"affect":[50],"structural":[52],"perfection":[53],"graphene.":[55]},"counts_by_year":[],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}