{"id":"https://openalex.org/W2164026725","doi":"https://doi.org/10.1109/nems.2012.6196872","title":"Design and simulation of fully-symmetrical resonant pressure sensor","display_name":"Design and simulation of fully-symmetrical resonant pressure sensor","publication_year":2012,"publication_date":"2012-03-01","ids":{"openalex":"https://openalex.org/W2164026725","doi":"https://doi.org/10.1109/nems.2012.6196872","mag":"2164026725"},"language":"en","primary_location":{"id":"doi:10.1109/nems.2012.6196872","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2012.6196872","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5038508054","display_name":"Yi-Wen Jiang","orcid":"https://orcid.org/0000-0003-0315-8180"},"institutions":[{"id":"https://openalex.org/I191208505","display_name":"Xiamen University","ror":"https://ror.org/00mcjh785","country_code":"CN","type":"education","lineage":["https://openalex.org/I191208505"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Yiwen Jiang","raw_affiliation_strings":["Department of Mechanical and Electrical Engineering, Xiamen University, China"],"affiliations":[{"raw_affiliation_string":"Department of Mechanical and Electrical Engineering, Xiamen University, China","institution_ids":["https://openalex.org/I191208505"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101473242","display_name":"Xiaohui Du","orcid":"https://orcid.org/0000-0002-0847-0432"},"institutions":[{"id":"https://openalex.org/I191208505","display_name":"Xiamen University","ror":"https://ror.org/00mcjh785","country_code":"CN","type":"education","lineage":["https://openalex.org/I191208505"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xiaohui Du","raw_affiliation_strings":["Department of Mechanical and Electrical Engineering, Xiamen University, China"],"affiliations":[{"raw_affiliation_string":"Department of Mechanical and Electrical Engineering, Xiamen University, China","institution_ids":["https://openalex.org/I191208505"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5028241570","display_name":"Zhan Zhan","orcid":null},"institutions":[{"id":"https://openalex.org/I191208505","display_name":"Xiamen University","ror":"https://ror.org/00mcjh785","country_code":"CN","type":"education","lineage":["https://openalex.org/I191208505"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zhan Zhan","raw_affiliation_strings":["Department of Mechanical and Electrical Engineering, Xiamen University, China"],"affiliations":[{"raw_affiliation_string":"Department of Mechanical and Electrical Engineering, Xiamen University, China","institution_ids":["https://openalex.org/I191208505"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5034145277","display_name":"Bulei Xu","orcid":null},"institutions":[{"id":"https://openalex.org/I191208505","display_name":"Xiamen University","ror":"https://ror.org/00mcjh785","country_code":"CN","type":"education","lineage":["https://openalex.org/I191208505"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Bulei Xu","raw_affiliation_strings":["Department of Mechanical and Electrical Engineering, Xiamen University, China"],"affiliations":[{"raw_affiliation_string":"Department of Mechanical and Electrical Engineering, Xiamen University, China","institution_ids":["https://openalex.org/I191208505"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5112892769","display_name":"Wenlong Lv","orcid":null},"institutions":[{"id":"https://openalex.org/I191208505","display_name":"Xiamen University","ror":"https://ror.org/00mcjh785","country_code":"CN","type":"education","lineage":["https://openalex.org/I191208505"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Wenlong Lv","raw_affiliation_strings":["Department of Mechanical and Electrical Engineering, Xiamen University, China"],"affiliations":[{"raw_affiliation_string":"Department of Mechanical and Electrical Engineering, Xiamen University, China","institution_ids":["https://openalex.org/I191208505"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100608322","display_name":"Lingyun Wang","orcid":"https://orcid.org/0000-0002-3786-3905"},"institutions":[{"id":"https://openalex.org/I191208505","display_name":"Xiamen University","ror":"https://ror.org/00mcjh785","country_code":"CN","type":"education","lineage":["https://openalex.org/I191208505"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Lingyun Wang","raw_affiliation_strings":["Department of Mechanical and Electrical Engineering, Xiamen University, China"],"affiliations":[{"raw_affiliation_string":"Department of Mechanical and Electrical Engineering, Xiamen University, China","institution_ids":["https://openalex.org/I191208505"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5113664117","display_name":"Daoheng Sun","orcid":null},"institutions":[{"id":"https://openalex.org/I191208505","display_name":"Xiamen University","ror":"https://ror.org/00mcjh785","country_code":"CN","type":"education","lineage":["https://openalex.org/I191208505"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Daoheng Sun","raw_affiliation_strings":["Department of Mechanical and Electrical Engineering, Xiamen University, China"],"affiliations":[{"raw_affiliation_string":"Department of Mechanical and Electrical Engineering, Xiamen University, China","institution_ids":["https://openalex.org/I191208505"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":7,"corresponding_author_ids":["https://openalex.org/A5038508054"],"corresponding_institution_ids":["https://openalex.org/I191208505"],"apc_list":null,"apc_paid":null,"fwci":0.2455,"has_fulltext":false,"cited_by_count":4,"citation_normalized_percentile":{"value":0.62647148,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":95},"biblio":{"volume":"73","issue":null,"first_page":"702","last_page":"707"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9993000030517578,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9993000030517578,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9993000030517578,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9991999864578247,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/sensitivity","display_name":"Sensitivity (control systems)","score":0.7333351373672485},{"id":"https://openalex.org/keywords/capacitance","display_name":"Capacitance","score":0.6920914649963379},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.680010974407196},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.6152054667472839},{"id":"https://openalex.org/keywords/compensation","display_name":"Compensation (psychology)","score":0.5644928812980652},{"id":"https://openalex.org/keywords/diaphragm","display_name":"Diaphragm (acoustics)","score":0.557249128818512},{"id":"https://openalex.org/keywords/stress","display_name":"Stress (linguistics)","score":0.5197013020515442},{"id":"https://openalex.org/keywords/pressure-sensor","display_name":"Pressure sensor","score":0.514171838760376},{"id":"https://openalex.org/keywords/parasitic-capacitance","display_name":"Parasitic capacitance","score":0.47385337948799133},{"id":"https://openalex.org/keywords/interference","display_name":"Interference (communication)","score":0.44686099886894226},{"id":"https://openalex.org/keywords/pressure-measurement","display_name":"Pressure measurement","score":0.44313934445381165},{"id":"https://openalex.org/keywords/finite-element-method","display_name":"Finite element method","score":0.4263085424900055},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.3650142550468445},{"id":"https://openalex.org/keywords/vibration","display_name":"Vibration","score":0.2999606132507324},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.2537441551685333},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.2172124683856964},{"id":"https://openalex.org/keywords/electrode","display_name":"Electrode","score":0.18287542462348938},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.17838475108146667},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.13549280166625977},{"id":"https://openalex.org/keywords/structural-engineering","display_name":"Structural engineering","score":0.12946945428848267},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.11659356951713562}],"concepts":[{"id":"https://openalex.org/C21200559","wikidata":"https://www.wikidata.org/wiki/Q7451068","display_name":"Sensitivity (control systems)","level":2,"score":0.7333351373672485},{"id":"https://openalex.org/C30066665","wikidata":"https://www.wikidata.org/wiki/Q164399","display_name":"Capacitance","level":3,"score":0.6920914649963379},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.680010974407196},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.6152054667472839},{"id":"https://openalex.org/C2780023022","wikidata":"https://www.wikidata.org/wiki/Q1338171","display_name":"Compensation (psychology)","level":2,"score":0.5644928812980652},{"id":"https://openalex.org/C164292776","wikidata":"https://www.wikidata.org/wiki/Q5271779","display_name":"Diaphragm (acoustics)","level":3,"score":0.557249128818512},{"id":"https://openalex.org/C21036866","wikidata":"https://www.wikidata.org/wiki/Q181767","display_name":"Stress (linguistics)","level":2,"score":0.5197013020515442},{"id":"https://openalex.org/C41325743","wikidata":"https://www.wikidata.org/wiki/Q1261040","display_name":"Pressure sensor","level":2,"score":0.514171838760376},{"id":"https://openalex.org/C154318817","wikidata":"https://www.wikidata.org/wiki/Q2157249","display_name":"Parasitic capacitance","level":4,"score":0.47385337948799133},{"id":"https://openalex.org/C32022120","wikidata":"https://www.wikidata.org/wiki/Q797225","display_name":"Interference (communication)","level":3,"score":0.44686099886894226},{"id":"https://openalex.org/C80264047","wikidata":"https://www.wikidata.org/wiki/Q7424019","display_name":"Pressure measurement","level":2,"score":0.44313934445381165},{"id":"https://openalex.org/C135628077","wikidata":"https://www.wikidata.org/wiki/Q220184","display_name":"Finite element method","level":2,"score":0.4263085424900055},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.3650142550468445},{"id":"https://openalex.org/C198394728","wikidata":"https://www.wikidata.org/wiki/Q3695508","display_name":"Vibration","level":2,"score":0.2999606132507324},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.2537441551685333},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.2172124683856964},{"id":"https://openalex.org/C17525397","wikidata":"https://www.wikidata.org/wiki/Q176140","display_name":"Electrode","level":2,"score":0.18287542462348938},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.17838475108146667},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.13549280166625977},{"id":"https://openalex.org/C66938386","wikidata":"https://www.wikidata.org/wiki/Q633538","display_name":"Structural engineering","level":1,"score":0.12946945428848267},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.11659356951713562},{"id":"https://openalex.org/C138885662","wikidata":"https://www.wikidata.org/wiki/Q5891","display_name":"Philosophy","level":0,"score":0.0},{"id":"https://openalex.org/C11171543","wikidata":"https://www.wikidata.org/wiki/Q41630","display_name":"Psychoanalysis","level":1,"score":0.0},{"id":"https://openalex.org/C15744967","wikidata":"https://www.wikidata.org/wiki/Q9418","display_name":"Psychology","level":0,"score":0.0},{"id":"https://openalex.org/C41895202","wikidata":"https://www.wikidata.org/wiki/Q8162","display_name":"Linguistics","level":1,"score":0.0},{"id":"https://openalex.org/C127162648","wikidata":"https://www.wikidata.org/wiki/Q16858953","display_name":"Channel (broadcasting)","level":2,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems.2012.6196872","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2012.6196872","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.8600000143051147,"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7"}],"awards":[],"funders":[{"id":"https://openalex.org/F4320306076","display_name":"National Science Foundation","ror":"https://ror.org/021nxhr62"},{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"},{"id":"https://openalex.org/F4320325434","display_name":"Xiamen University","ror":"https://ror.org/00mcjh785"},{"id":"https://openalex.org/F4320335787","display_name":"Fundamental Research Funds for the Central Universities","ror":null}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":9,"referenced_works":["https://openalex.org/W1968766641","https://openalex.org/W1998065215","https://openalex.org/W2010319114","https://openalex.org/W2013853238","https://openalex.org/W2053581124","https://openalex.org/W2075080571","https://openalex.org/W2076755257","https://openalex.org/W2089073173","https://openalex.org/W2157062341"],"related_works":["https://openalex.org/W2058545256","https://openalex.org/W2394034449","https://openalex.org/W2051045034","https://openalex.org/W2904654231","https://openalex.org/W2999380399","https://openalex.org/W2910612019","https://openalex.org/W4210807885","https://openalex.org/W2248915580","https://openalex.org/W2059163921","https://openalex.org/W4304890870"],"abstract_inverted_index":{"A":[0],"fully-symmetrical":[1],"resonant":[2,27,85,166],"pressure":[3,86,92,111,167],"sensor":[4,87,96,123,149,168],"based":[5],"upon":[6],"lateral":[7],"drive":[8],"is":[9,124],"presented,":[10],"which":[11,66],"can":[12,59],"avoid":[13],"stress":[14],"concentration":[15],"that":[16],"arises":[17],"from":[18],"temperature":[19,117,120,134],"or":[20],"vacuum":[21,164],"packaging.":[22,169],"Unlike":[23],"conventional":[24],"driving":[25,39],"method,":[26],"structure":[28],"with":[29],"laterally":[30],"driven":[31],"comb":[32],"capacitance":[33],"allows":[34],"the":[35,53,57,73,78,81,91,95,119,128,137,145,161],"linear":[36],"characteristic":[37],"of":[38,56,84,94,113,122,130,148,163],"force":[40],"and":[41,144],"also":[42],"obtains":[43],"high":[44],"quality":[45,146],"factor":[46],"for":[47,103,160],"its":[48],"slide-film":[49],"air":[50],"damping.":[51],"Furthermore,":[52],"detection":[54],"sensitivity":[55,93],"device":[58],"be":[60,100],"improved":[61],"by":[62],"using":[63],"differential":[64],"capacitance,":[65],"will":[67],"reduce":[68],"shared-frequency":[69],"interference":[70],"phenomenon":[71],"at":[72],"same":[74],"time.":[75],"According":[76],"to":[77,99],"FEM":[79],"analysis,":[80],"structural":[82],"parameters":[83],"are":[88,154],"optimized.":[89],"Meanwhile,":[90],"has":[97],"designed":[98],"22.602":[101],"Hz/kPa":[102],"a":[104,110],"18":[105],"\u03bcm":[106],"thick":[107],"diaphragm":[108],"over":[109],"range":[112,129],"550":[114],"kPa.":[115],"From":[116],"simulation,":[118],"coefficient":[121],"-1.8233":[125],"Hz/\u00b0C":[126],"in":[127,165],"-20\u00b0C~60\u00b0C":[131],"without":[132],"any":[133],"compensation.":[135],"Finally,":[136],"frequency":[138],"domain":[139],"characteristics":[140],"have":[141],"been":[142],"confirmed":[143],"factors":[147],"under":[150],"different":[151],"damping":[152],"ratios":[153],"identified,":[155],"it":[156],"offers":[157],"reliable":[158],"reference":[159],"choice":[162]},"counts_by_year":[{"year":2021,"cited_by_count":2},{"year":2018,"cited_by_count":1},{"year":2014,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}