{"id":"https://openalex.org/W2071684461","doi":"https://doi.org/10.1109/nems.2012.6196864","title":"Fast self-resonant startup procedure for digital MEMS gyroscope system","display_name":"Fast self-resonant startup procedure for digital MEMS gyroscope system","publication_year":2012,"publication_date":"2012-03-01","ids":{"openalex":"https://openalex.org/W2071684461","doi":"https://doi.org/10.1109/nems.2012.6196864","mag":"2071684461"},"language":"en","primary_location":{"id":"doi:10.1109/nems.2012.6196864","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2012.6196864","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5107306469","display_name":"Fei Ge","orcid":"https://orcid.org/0000-0002-9478-3696"},"institutions":[{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Fei Ge","raw_affiliation_strings":["Peking University, Beijing, Beijing, CN","Peking Univ, (China)"],"affiliations":[{"raw_affiliation_string":"Peking University, Beijing, Beijing, CN","institution_ids":["https://openalex.org/I20231570"]},{"raw_affiliation_string":"Peking Univ, (China)","institution_ids":["https://openalex.org/I20231570"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5051618213","display_name":"Dachuan Liu","orcid":"https://orcid.org/0000-0003-3232-4707"},"institutions":[{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Dachuan Liu","raw_affiliation_strings":["Peking University, Beijing, Beijing, CN","Peking Univ, (China)"],"affiliations":[{"raw_affiliation_string":"Peking University, Beijing, Beijing, CN","institution_ids":["https://openalex.org/I20231570"]},{"raw_affiliation_string":"Peking Univ, (China)","institution_ids":["https://openalex.org/I20231570"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5103388257","display_name":"Longtao Lin","orcid":null},"institutions":[{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Longtao Lin","raw_affiliation_strings":["Peking University, Beijing, Beijing, CN","Peking Univ, (China)"],"affiliations":[{"raw_affiliation_string":"Peking University, Beijing, Beijing, CN","institution_ids":["https://openalex.org/I20231570"]},{"raw_affiliation_string":"Peking Univ, (China)","institution_ids":["https://openalex.org/I20231570"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101579502","display_name":"Zhenchuan Yang","orcid":"https://orcid.org/0000-0002-8926-2319"},"institutions":[{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zhenchuan Yang","raw_affiliation_strings":["Peking University, Beijing, Beijing, CN","Peking Univ, (China)"],"affiliations":[{"raw_affiliation_string":"Peking University, Beijing, Beijing, CN","institution_ids":["https://openalex.org/I20231570"]},{"raw_affiliation_string":"Peking Univ, (China)","institution_ids":["https://openalex.org/I20231570"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5108451030","display_name":"Guizhen Yan","orcid":null},"institutions":[{"id":"https://openalex.org/I4210119392","display_name":"Institute of Microelectronics","ror":"https://ror.org/02s6gs133","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]},{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Guizhen Yan","raw_affiliation_strings":["Institute of Microelectronics, Peking University, China","Institute of Microelectronics, Peking University, China#TAB#"],"affiliations":[{"raw_affiliation_string":"Institute of Microelectronics, Peking University, China","institution_ids":["https://openalex.org/I20231570","https://openalex.org/I4210119392"]},{"raw_affiliation_string":"Institute of Microelectronics, Peking University, China#TAB#","institution_ids":["https://openalex.org/I20231570"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":5,"corresponding_author_ids":["https://openalex.org/A5107306469"],"corresponding_institution_ids":["https://openalex.org/I20231570"],"apc_list":null,"apc_paid":null,"fwci":0.491,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":{"value":0.69312731,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":94},"biblio":{"volume":null,"issue":null,"first_page":"669","last_page":"672"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9991999864578247,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/gyroscope","display_name":"Gyroscope","score":0.9562876224517822},{"id":"https://openalex.org/keywords/vibrating-structure-gyroscope","display_name":"Vibrating structure gyroscope","score":0.8726162314414978},{"id":"https://openalex.org/keywords/rate-integrating-gyroscope","display_name":"Rate integrating gyroscope","score":0.7060750722885132},{"id":"https://openalex.org/keywords/demodulation","display_name":"Demodulation","score":0.6393113136291504},{"id":"https://openalex.org/keywords/signal","display_name":"SIGNAL (programming language)","score":0.6145837306976318},{"id":"https://openalex.org/keywords/vibration","display_name":"Vibration","score":0.5412118434906006},{"id":"https://openalex.org/keywords/control-theory","display_name":"Control theory (sociology)","score":0.5064009428024292},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.45561110973358154},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.3908458948135376},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.3859325349330902},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.36017143726348877},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.33676183223724365},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.3285633325576782},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.2413083016872406},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.0751294493675232}],"concepts":[{"id":"https://openalex.org/C158488048","wikidata":"https://www.wikidata.org/wiki/Q483400","display_name":"Gyroscope","level":2,"score":0.9562876224517822},{"id":"https://openalex.org/C72768775","wikidata":"https://www.wikidata.org/wiki/Q844456","display_name":"Vibrating structure gyroscope","level":3,"score":0.8726162314414978},{"id":"https://openalex.org/C46724921","wikidata":"https://www.wikidata.org/wiki/Q7295536","display_name":"Rate integrating gyroscope","level":4,"score":0.7060750722885132},{"id":"https://openalex.org/C195251586","wikidata":"https://www.wikidata.org/wiki/Q1185939","display_name":"Demodulation","level":3,"score":0.6393113136291504},{"id":"https://openalex.org/C2779843651","wikidata":"https://www.wikidata.org/wiki/Q7390335","display_name":"SIGNAL (programming language)","level":2,"score":0.6145837306976318},{"id":"https://openalex.org/C198394728","wikidata":"https://www.wikidata.org/wiki/Q3695508","display_name":"Vibration","level":2,"score":0.5412118434906006},{"id":"https://openalex.org/C47446073","wikidata":"https://www.wikidata.org/wiki/Q5165890","display_name":"Control theory (sociology)","level":3,"score":0.5064009428024292},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.45561110973358154},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.3908458948135376},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.3859325349330902},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.36017143726348877},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.33676183223724365},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.3285633325576782},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.2413083016872406},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.0751294493675232},{"id":"https://openalex.org/C127162648","wikidata":"https://www.wikidata.org/wiki/Q16858953","display_name":"Channel (broadcasting)","level":2,"score":0.0},{"id":"https://openalex.org/C199360897","wikidata":"https://www.wikidata.org/wiki/Q9143","display_name":"Programming language","level":1,"score":0.0},{"id":"https://openalex.org/C146978453","wikidata":"https://www.wikidata.org/wiki/Q3798668","display_name":"Aerospace engineering","level":1,"score":0.0},{"id":"https://openalex.org/C2775924081","wikidata":"https://www.wikidata.org/wiki/Q55608371","display_name":"Control (management)","level":2,"score":0.0},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems.2012.6196864","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2012.6196864","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320327019","display_name":"National Key Laboratory of Science and Technology on Micro/Nano Fabrication","ror":null}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":6,"referenced_works":["https://openalex.org/W1977477381","https://openalex.org/W2116517220","https://openalex.org/W2123954101","https://openalex.org/W2147831754","https://openalex.org/W2149128480","https://openalex.org/W2535617449"],"related_works":["https://openalex.org/W2138812454","https://openalex.org/W2030928067","https://openalex.org/W2049901089","https://openalex.org/W2116681061","https://openalex.org/W2328178686","https://openalex.org/W1969906513","https://openalex.org/W2343017148","https://openalex.org/W3201539581","https://openalex.org/W2358178096","https://openalex.org/W2071684461"],"abstract_inverted_index":{"This":[0],"paper":[1],"describes":[2],"a":[3,10,47,72,92,101],"control":[4],"procedure":[5,53,104],"for":[6,75,86,105],"the":[7,16,22,33,40,54,60,64,76,96,106],"startup":[8,103],"of":[9,32,63,95,98],"digital":[11],"MEMS":[12],"gyroscope":[13,23,34,65],"system.":[14,107],"Unlike":[15],"normal":[17],"operating":[18],"mode":[19],"in":[20],"which":[21,80],"is":[24,35,58],"actuated":[25],"by":[26,37],"synthesized":[27],"sinusoidal":[28,77],"drive":[29,49],"signal,":[30],"self-resonance":[31],"stimulated":[36],"feeding":[38],"back":[39],"drive-sense":[41],"signal":[42],"and":[43,69,88],"converting":[44],"it":[45],"to":[46],"square-wave":[48],"signal.":[50],"During":[51],"this":[52],"resonant":[55],"frequency":[56,62],"that":[57],"near":[59],"natural":[61],"can":[66],"be":[67],"calculated,":[68],"then":[70],"provides":[71],"key":[73],"parameter":[74],"wave":[78],"synthesizer,":[79],"will":[81],"generate":[82],"high-quality":[83],"reference":[84],"signals":[85],"driving":[87],"demodulation.":[89],"Experiment":[90],"shows":[91],"rapid":[93],"rising":[94],"magnitude":[97],"vibration,":[99],"resulting":[100],"faster":[102]},"counts_by_year":[{"year":2015,"cited_by_count":1},{"year":2014,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}