{"id":"https://openalex.org/W2064147140","doi":"https://doi.org/10.1109/nems.2012.6196852","title":"High-Q maintenance of microcavity by using a sealed and packaged structure","display_name":"High-Q maintenance of microcavity by using a sealed and packaged structure","publication_year":2012,"publication_date":"2012-03-01","ids":{"openalex":"https://openalex.org/W2064147140","doi":"https://doi.org/10.1109/nems.2012.6196852","mag":"2064147140"},"language":"en","primary_location":{"id":"doi:10.1109/nems.2012.6196852","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2012.6196852","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5015010396","display_name":"Shubin Yan","orcid":"https://orcid.org/0000-0002-7588-3616"},"institutions":[{"id":"https://openalex.org/I135714990","display_name":"North University of China","ror":"https://ror.org/047bp1713","country_code":"CN","type":"education","lineage":["https://openalex.org/I135714990"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Shu-Bin Yan","raw_affiliation_strings":["Key Laboratory of Instrumentation Science & Dynamic Measuremen, North university of China, Taiyuan, China","[Key Laboratory of Instrumentation Science & Dynamic Measuremen, North university of China, Taiyuan, China]"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Key Laboratory of Instrumentation Science & Dynamic Measuremen, North university of China, Taiyuan, China","institution_ids":["https://openalex.org/I135714990"]},{"raw_affiliation_string":"[Key Laboratory of Instrumentation Science & Dynamic Measuremen, North university of China, Taiyuan, China]","institution_ids":["https://openalex.org/I135714990"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5102097372","display_name":"Yingzhan Yan","orcid":null},"institutions":[{"id":"https://openalex.org/I135714990","display_name":"North University of China","ror":"https://ror.org/047bp1713","country_code":"CN","type":"education","lineage":["https://openalex.org/I135714990"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Ying-Zhan Yan","raw_affiliation_strings":["Science and Technology on Electronic Test & Measurement Laboratory, North university of China, Taiyuan, China","Science and Technology on Electronic Test &Measurement Laboratory, North university of China, Taiyuan, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Science and Technology on Electronic Test & Measurement Laboratory, North university of China, Taiyuan, China","institution_ids":["https://openalex.org/I135714990"]},{"raw_affiliation_string":"Science and Technology on Electronic Test &Measurement Laboratory, North university of China, Taiyuan, China","institution_ids":["https://openalex.org/I135714990"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101418277","display_name":"Yuguang Zhang","orcid":"https://orcid.org/0000-0001-7596-2114"},"institutions":[{"id":"https://openalex.org/I135714990","display_name":"North University of China","ror":"https://ror.org/047bp1713","country_code":"CN","type":"education","lineage":["https://openalex.org/I135714990"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yu-Guang Zhang","raw_affiliation_strings":["Science and Technology on Electronic Test & Measurement Laboratory, North university of China, Taiyuan, China","Science and Technology on Electronic Test &Measurement Laboratory, North university of China, Taiyuan, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Science and Technology on Electronic Test & Measurement Laboratory, North university of China, Taiyuan, China","institution_ids":["https://openalex.org/I135714990"]},{"raw_affiliation_string":"Science and Technology on Electronic Test &Measurement Laboratory, North university of China, Taiyuan, China","institution_ids":["https://openalex.org/I135714990"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5097202360","display_name":"Li-Wang","orcid":null},"institutions":[{"id":"https://openalex.org/I135714990","display_name":"North University of China","ror":"https://ror.org/047bp1713","country_code":"CN","type":"education","lineage":["https://openalex.org/I135714990"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Li-Wang","raw_affiliation_strings":["Key Laboratory of Instrumentation Science & Dynamic Measuremen, North university of China, Taiyuan, China","[Key Laboratory of Instrumentation Science & Dynamic Measuremen, North university of China, Taiyuan, China]"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Key Laboratory of Instrumentation Science & Dynamic Measuremen, North university of China, Taiyuan, China","institution_ids":["https://openalex.org/I135714990"]},{"raw_affiliation_string":"[Key Laboratory of Instrumentation Science & Dynamic Measuremen, North university of China, Taiyuan, China]","institution_ids":["https://openalex.org/I135714990"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100408559","display_name":"Chenyang Xue","orcid":"https://orcid.org/0000-0003-0770-3975"},"institutions":[{"id":"https://openalex.org/I135714990","display_name":"North University of China","ror":"https://ror.org/047bp1713","country_code":"CN","type":"education","lineage":["https://openalex.org/I135714990"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Chen-Yang Xue","raw_affiliation_strings":["Key Laboratory of Instrumentation Science & Dynamic Measuremen, North university of China, Taiyuan, China","[Key Laboratory of Instrumentation Science & Dynamic Measuremen, North university of China, Taiyuan, China]"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Key Laboratory of Instrumentation Science & Dynamic Measuremen, North university of China, Taiyuan, China","institution_ids":["https://openalex.org/I135714990"]},{"raw_affiliation_string":"[Key Laboratory of Instrumentation Science & Dynamic Measuremen, North university of China, Taiyuan, China]","institution_ids":["https://openalex.org/I135714990"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5113935052","display_name":"Jun Liu","orcid":"https://orcid.org/0009-0004-5419-3060"},"institutions":[{"id":"https://openalex.org/I135714990","display_name":"North University of China","ror":"https://ror.org/047bp1713","country_code":"CN","type":"education","lineage":["https://openalex.org/I135714990"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jun Liu","raw_affiliation_strings":["Science and Technology on Electronic Test & Measurement Laboratory, North university of China, Taiyuan, China","Science and Technology on Electronic Test &Measurement Laboratory, North university of China, Taiyuan, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Science and Technology on Electronic Test & Measurement Laboratory, North university of China, Taiyuan, China","institution_ids":["https://openalex.org/I135714990"]},{"raw_affiliation_string":"Science and Technology on Electronic Test &Measurement Laboratory, North university of China, Taiyuan, China","institution_ids":["https://openalex.org/I135714990"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100739058","display_name":"Wendong Zhang","orcid":"https://orcid.org/0000-0003-1762-9246"},"institutions":[{"id":"https://openalex.org/I135714990","display_name":"North University of China","ror":"https://ror.org/047bp1713","country_code":"CN","type":"education","lineage":["https://openalex.org/I135714990"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Wen-Dong Zhang","raw_affiliation_strings":["Key Laboratory of Instrumentation Science & Dynamic Measuremen, North university of China, Taiyuan, China","[Key Laboratory of Instrumentation Science & Dynamic Measuremen, North university of China, Taiyuan, China]"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Key Laboratory of Instrumentation Science & Dynamic Measuremen, North university of China, Taiyuan, China","institution_ids":["https://openalex.org/I135714990"]},{"raw_affiliation_string":"[Key Laboratory of Instrumentation Science & Dynamic Measuremen, North university of China, Taiyuan, China]","institution_ids":["https://openalex.org/I135714990"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5054341902","display_name":"Jijun Xiong","orcid":"https://orcid.org/0000-0003-1560-9858"},"institutions":[{"id":"https://openalex.org/I135714990","display_name":"North University of China","ror":"https://ror.org/047bp1713","country_code":"CN","type":"education","lineage":["https://openalex.org/I135714990"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Ji-Jun Xiong","raw_affiliation_strings":["Science and Technology on Electronic Test & Measurement Laboratory, North university of China, Taiyuan, China","[Key Laboratory of Instrumentation Science & Dynamic Measuremen, North university of China, Taiyuan, China]"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Science and Technology on Electronic Test & Measurement Laboratory, North university of China, Taiyuan, China","institution_ids":["https://openalex.org/I135714990"]},{"raw_affiliation_string":"[Key Laboratory of Instrumentation Science & Dynamic Measuremen, North university of China, Taiyuan, China]","institution_ids":["https://openalex.org/I135714990"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I135714990"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.1888412,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"5","issue":null,"first_page":"619","last_page":"622"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10299","display_name":"Photonic and Optical Devices","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10299","display_name":"Photonic and Optical Devices","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.998199999332428,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11175","display_name":"Gyrotron and Vacuum Electronics Research","score":0.9923999905586243,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/robustness","display_name":"Robustness (evolution)","score":0.7221532464027405},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.49176982045173645},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.44662150740623474},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.4147844910621643},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.3224349319934845},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.15019962191581726}],"concepts":[{"id":"https://openalex.org/C63479239","wikidata":"https://www.wikidata.org/wiki/Q7353546","display_name":"Robustness (evolution)","level":3,"score":0.7221532464027405},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.49176982045173645},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.44662150740623474},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.4147844910621643},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.3224349319934845},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.15019962191581726},{"id":"https://openalex.org/C104317684","wikidata":"https://www.wikidata.org/wiki/Q7187","display_name":"Gene","level":2,"score":0.0},{"id":"https://openalex.org/C55493867","wikidata":"https://www.wikidata.org/wiki/Q7094","display_name":"Biochemistry","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems.2012.6196852","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2012.6196852","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/6","score":0.6700000166893005,"display_name":"Clean water and sanitation"}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":10,"referenced_works":["https://openalex.org/W1986720319","https://openalex.org/W2015665105","https://openalex.org/W2045184826","https://openalex.org/W2071068497","https://openalex.org/W2146146011","https://openalex.org/W2150153786","https://openalex.org/W2153113428","https://openalex.org/W2155189614","https://openalex.org/W2159737140","https://openalex.org/W4211100070"],"related_works":["https://openalex.org/W4391375266","https://openalex.org/W2748952813","https://openalex.org/W2935759653","https://openalex.org/W3105167352","https://openalex.org/W54078636","https://openalex.org/W2954470139","https://openalex.org/W1501425562","https://openalex.org/W2902782467","https://openalex.org/W3084825885","https://openalex.org/W2298861036"],"abstract_inverted_index":{"The":[0],"high-Q":[1],"maintenance":[2,44],"of":[3,119],"microcavities":[4],"greatly":[5],"challenges":[6],"the":[7,14,23,29,32,35,42,54,57,73,81,89,95,102,106,110,116,120],"microresonator-based":[8],"practical":[9,117],"application.":[10],"In":[11,53],"this":[12],"paper,":[13],"Q":[15,24,43,58,65,83,96],"spoiling":[16,25,97],"factors":[17,98],"are":[18,99],"demonstrated":[19],"experimentally":[20],"to":[21,79],"show":[22],"which":[26],"originated":[27],"from":[28],"water":[30],"and":[31,40,49],"particulate":[33],"in":[34],"surroundings.":[36],"Then":[37],"we":[38],"propose":[39],"realize":[41],"through":[45],"constructing":[46],"a":[47,60,63,85],"sealed":[48,74],"packaged":[50,55],"microcavity":[51],"regime.":[52],"structure":[56,75],"decreases":[59],"little":[61],"but":[62],"high":[64,82],"larger":[66],"than":[67],"106can":[68],"be":[69],"achieved":[70],"continuously.":[71],"Moreover,":[72],"has":[76],"good":[77],"performance":[78],"maintain":[80],"for":[84],"long":[86],"time":[87],"with":[88],"standard":[90],"deviation":[91],"about":[92],"104,":[93],"because":[94],"isolated":[100],"by":[101],"package":[103,107],"layer.":[104],"Additionally,":[105],"also":[108],"enhances":[109],"robustness.":[111],"These":[112],"merits":[113],"can":[114],"promote":[115],"application":[118],"microcavities.":[121]},"counts_by_year":[],"updated_date":"2026-07-29T14:22:42.915294","created_date":"2025-10-10T00:00:00"}