{"id":"https://openalex.org/W1977669226","doi":"https://doi.org/10.1109/nems.2012.6196850","title":"Fabrication and analysis of integrated MEMS pyramidal horn antenna for terahertz applications","display_name":"Fabrication and analysis of integrated MEMS pyramidal horn antenna for terahertz applications","publication_year":2012,"publication_date":"2012-03-01","ids":{"openalex":"https://openalex.org/W1977669226","doi":"https://doi.org/10.1109/nems.2012.6196850","mag":"1977669226"},"language":"en","primary_location":{"id":"doi:10.1109/nems.2012.6196850","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2012.6196850","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5100334065","display_name":"Can Li","orcid":"https://orcid.org/0000-0003-3795-2008"},"institutions":[{"id":"https://openalex.org/I4210119392","display_name":"Institute of Microelectronics","ror":"https://ror.org/02s6gs133","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]},{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]},{"id":"https://openalex.org/I4210089056","display_name":"Beijing Microelectronics Technology Institute","ror":"https://ror.org/007y7ej30","country_code":"CN","type":"other","lineage":["https://openalex.org/I4210089056"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"C. Li","raw_affiliation_strings":["National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University, Beijing, CHINA","National Key Laboratory of Science and Technology on Micro/Nano Fabrication,#R#Institute of Microelectronics, Peking University, Beijing 100871, China"],"affiliations":[{"raw_affiliation_string":"National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University, Beijing, CHINA","institution_ids":["https://openalex.org/I4210119392","https://openalex.org/I4210089056"]},{"raw_affiliation_string":"National Key Laboratory of Science and Technology on Micro/Nano Fabrication,#R#Institute of Microelectronics, Peking University, Beijing 100871, China","institution_ids":["https://openalex.org/I20231570"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5082647345","display_name":"Li Guo","orcid":"https://orcid.org/0000-0002-3786-158X"},"institutions":[{"id":"https://openalex.org/I76569877","display_name":"Southeast University","ror":"https://ror.org/04ct4d772","country_code":"CN","type":"education","lineage":["https://openalex.org/I76569877"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"L. Guo","raw_affiliation_strings":["Institute of RF- & OE-ICs, Southeast University, Nanjing, CHINA","Institute of RF- & OE-ICs, National Mobile Communications Research Laboratory, Southeast University, No.2 Sipailou, Nanjing 210096, China"],"affiliations":[{"raw_affiliation_string":"Institute of RF- & OE-ICs, Southeast University, Nanjing, CHINA","institution_ids":["https://openalex.org/I76569877"]},{"raw_affiliation_string":"Institute of RF- & OE-ICs, National Mobile Communications Research Laboratory, Southeast University, No.2 Sipailou, Nanjing 210096, China","institution_ids":["https://openalex.org/I76569877"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5103533586","display_name":"Wei Gang Wu","orcid":null},"institutions":[{"id":"https://openalex.org/I4210119392","display_name":"Institute of Microelectronics","ror":"https://ror.org/02s6gs133","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]},{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]},{"id":"https://openalex.org/I4210089056","display_name":"Beijing Microelectronics Technology Institute","ror":"https://ror.org/007y7ej30","country_code":"CN","type":"other","lineage":["https://openalex.org/I4210089056"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"W.G. Wu","raw_affiliation_strings":["National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University, Beijing, CHINA","National Key Laboratory of Science and Technology on Micro/Nano Fabrication,#R#Institute of Microelectronics, Peking University, Beijing 100871, China"],"affiliations":[{"raw_affiliation_string":"National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University, Beijing, CHINA","institution_ids":["https://openalex.org/I4210119392","https://openalex.org/I4210089056"]},{"raw_affiliation_string":"National Key Laboratory of Science and Technology on Micro/Nano Fabrication,#R#Institute of Microelectronics, Peking University, Beijing 100871, China","institution_ids":["https://openalex.org/I20231570"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5065170520","display_name":"Xu Tang","orcid":null},"institutions":[{"id":"https://openalex.org/I76569877","display_name":"Southeast University","ror":"https://ror.org/04ct4d772","country_code":"CN","type":"education","lineage":["https://openalex.org/I76569877"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"X.S. Tang","raw_affiliation_strings":["Institute of RF- & OE-ICs, Southeast University, Nanjing, CHINA","Institute of RF- & OE-ICs, National Mobile Communications Research Laboratory, Southeast University, No.2 Sipailou, Nanjing 210096, China"],"affiliations":[{"raw_affiliation_string":"Institute of RF- & OE-ICs, Southeast University, Nanjing, CHINA","institution_ids":["https://openalex.org/I76569877"]},{"raw_affiliation_string":"Institute of RF- & OE-ICs, National Mobile Communications Research Laboratory, Southeast University, No.2 Sipailou, Nanjing 210096, China","institution_ids":["https://openalex.org/I76569877"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5104104102","display_name":"Feng Huang","orcid":null},"institutions":[{"id":"https://openalex.org/I76569877","display_name":"Southeast University","ror":"https://ror.org/04ct4d772","country_code":"CN","type":"education","lineage":["https://openalex.org/I76569877"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"F.Y. Huang","raw_affiliation_strings":["Institute of RF- & OE-ICs, Southeast University, Nanjing, CHINA","Institute of RF- & OE-ICs, National Mobile Communications Research Laboratory, Southeast University, No.2 Sipailou, Nanjing 210096, China"],"affiliations":[{"raw_affiliation_string":"Institute of RF- & OE-ICs, Southeast University, Nanjing, CHINA","institution_ids":["https://openalex.org/I76569877"]},{"raw_affiliation_string":"Institute of RF- & OE-ICs, National Mobile Communications Research Laboratory, Southeast University, No.2 Sipailou, Nanjing 210096, China","institution_ids":["https://openalex.org/I76569877"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":5,"corresponding_author_ids":["https://openalex.org/A5100334065"],"corresponding_institution_ids":["https://openalex.org/I20231570","https://openalex.org/I4210089056","https://openalex.org/I4210119392"],"apc_list":null,"apc_paid":null,"fwci":0.7365,"has_fulltext":false,"cited_by_count":4,"citation_normalized_percentile":{"value":0.72678909,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":96},"biblio":{"volume":null,"issue":null,"first_page":"611","last_page":"614"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10752","display_name":"Terahertz technology and applications","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10752","display_name":"Terahertz technology and applications","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10262","display_name":"Microwave Engineering and Waveguides","score":0.9991999864578247,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11803","display_name":"Superconducting and THz Device Technology","score":0.9987000226974487,"subfield":{"id":"https://openalex.org/subfields/3103","display_name":"Astronomy and Astrophysics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/standing-wave-ratio","display_name":"Standing wave ratio","score":0.7881234884262085},{"id":"https://openalex.org/keywords/hfss","display_name":"HFSS","score":0.7561110258102417},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.7375033497810364},{"id":"https://openalex.org/keywords/terahertz-radiation","display_name":"Terahertz radiation","score":0.7252231240272522},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.6309443116188049},{"id":"https://openalex.org/keywords/antenna","display_name":"Antenna (radio)","score":0.5867587327957153},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.5834676027297974},{"id":"https://openalex.org/keywords/french-horn","display_name":"French horn","score":0.5187652111053467},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.48934024572372437},{"id":"https://openalex.org/keywords/lithography","display_name":"Lithography","score":0.45988520979881287},{"id":"https://openalex.org/keywords/horn-antenna","display_name":"Horn antenna","score":0.4125063419342041},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.35307157039642334},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.3517822027206421},{"id":"https://openalex.org/keywords/radiation-pattern","display_name":"Radiation pattern","score":0.3427296280860901},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.3402588963508606},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.26103538274765015},{"id":"https://openalex.org/keywords/microstrip-antenna","display_name":"Microstrip antenna","score":0.24943706393241882},{"id":"https://openalex.org/keywords/slot-antenna","display_name":"Slot antenna","score":0.23161354660987854},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.1560385525226593}],"concepts":[{"id":"https://openalex.org/C163985990","wikidata":"https://www.wikidata.org/wiki/Q188364","display_name":"Standing wave ratio","level":4,"score":0.7881234884262085},{"id":"https://openalex.org/C2776844852","wikidata":"https://www.wikidata.org/wiki/Q106872782","display_name":"HFSS","level":4,"score":0.7561110258102417},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.7375033497810364},{"id":"https://openalex.org/C107816215","wikidata":"https://www.wikidata.org/wiki/Q647887","display_name":"Terahertz radiation","level":2,"score":0.7252231240272522},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.6309443116188049},{"id":"https://openalex.org/C21822782","wikidata":"https://www.wikidata.org/wiki/Q131214","display_name":"Antenna (radio)","level":2,"score":0.5867587327957153},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5834676027297974},{"id":"https://openalex.org/C152076505","wikidata":"https://www.wikidata.org/wiki/Q1126540","display_name":"French horn","level":2,"score":0.5187652111053467},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.48934024572372437},{"id":"https://openalex.org/C204223013","wikidata":"https://www.wikidata.org/wiki/Q133036","display_name":"Lithography","level":2,"score":0.45988520979881287},{"id":"https://openalex.org/C182810700","wikidata":"https://www.wikidata.org/wiki/Q759117","display_name":"Horn antenna","level":5,"score":0.4125063419342041},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.35307157039642334},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.3517822027206421},{"id":"https://openalex.org/C151764478","wikidata":"https://www.wikidata.org/wiki/Q571921","display_name":"Radiation pattern","level":3,"score":0.3427296280860901},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.3402588963508606},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.26103538274765015},{"id":"https://openalex.org/C170349913","wikidata":"https://www.wikidata.org/wiki/Q13402882","display_name":"Microstrip antenna","level":3,"score":0.24943706393241882},{"id":"https://openalex.org/C109026120","wikidata":"https://www.wikidata.org/wiki/Q2369099","display_name":"Slot antenna","level":4,"score":0.23161354660987854},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.1560385525226593},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems.2012.6196850","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2012.6196850","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":9,"referenced_works":["https://openalex.org/W1972094144","https://openalex.org/W2004986322","https://openalex.org/W2015588682","https://openalex.org/W2067342228","https://openalex.org/W2071401164","https://openalex.org/W2090091273","https://openalex.org/W2135066378","https://openalex.org/W2135653230","https://openalex.org/W4246992484"],"related_works":["https://openalex.org/W3175944978","https://openalex.org/W2367404484","https://openalex.org/W1984288224","https://openalex.org/W2052349607","https://openalex.org/W1851332188","https://openalex.org/W2144297476","https://openalex.org/W2053095335","https://openalex.org/W310633659","https://openalex.org/W1819784453","https://openalex.org/W1502743137"],"abstract_inverted_index":{"This":[0,26],"paper":[1],"reports":[2],"the":[3,50,92,109],"fabrication":[4],"and":[5,66,70,98],"analysis":[6],"of":[7,44,67,74,112],"a":[8],"back-to-back":[9],"pyramidal":[10],"horn":[11],"antenna":[12,32,76,93],"based":[13],"on":[14],"Micro-electromechanical":[15],"Systems":[16],"(MEMS)":[17],"technology,":[18],"which":[19,53],"is":[20,28,47,64,104],"used":[21],"in":[22,38,108],"terahertz":[23],"(THz)":[24],"applications.":[25],"method":[27],"able":[29],"to":[30,58],"manufacture":[31],"with":[33],"various":[34],"geometrical":[35],"configuration":[36],"embedded":[37],"Si":[39],"substrates.":[40],"The":[41,72,88],"dimensional":[42],"tolerance":[43],"this":[45,62],"technique":[46,63],"determined":[48],"by":[49,80],"lithography":[51],"process,":[52],"could":[54],"be":[55],"controlled":[56],"down":[57],"tens":[59],"nm.":[60],"Therefore,":[61],"controllable":[65],"high":[68],"precision":[69],"quality.":[71],"performance":[73],"fabricated":[75],"device":[77],"was":[78],"verified":[79],"Ansoft":[81],"High":[82],"Frequency":[83],"Structure":[84],"Simulator":[85],"(HFSS)":[86],"simulation.":[87],"result":[89],"shows":[90],"that":[91],"gain":[94],"ranges":[95],"from":[96],"10-15dB,":[97],"voltage":[99],"standing":[100],"wave":[101],"ratio":[102],"(VSWR)":[103],"less":[105],"than":[106],"2":[107],"frequency":[110],"band":[111],"3.25-3.55THz.":[113]},"counts_by_year":[{"year":2023,"cited_by_count":1},{"year":2015,"cited_by_count":2},{"year":2013,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}