{"id":"https://openalex.org/W2087416360","doi":"https://doi.org/10.1109/nems.2012.6196835","title":"Analysis on 3-Dimensional spatial electric field of AFM based anodic oxidation","display_name":"Analysis on 3-Dimensional spatial electric field of AFM based anodic oxidation","publication_year":2012,"publication_date":"2012-03-01","ids":{"openalex":"https://openalex.org/W2087416360","doi":"https://doi.org/10.1109/nems.2012.6196835","mag":"2087416360"},"language":"en","primary_location":{"id":"doi:10.1109/nems.2012.6196835","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2012.6196835","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5016759323","display_name":"Zenglei Liu","orcid":"https://orcid.org/0000-0003-2770-4115"},"institutions":[{"id":"https://openalex.org/I142078773","display_name":"Shenyang Institute of Automation","ror":"https://ror.org/00ft6nj33","country_code":"CN","type":"facility","lineage":["https://openalex.org/I142078773","https://openalex.org/I19820366"]},{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"funder","lineage":["https://openalex.org/I19820366"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Zenglei Liu","raw_affiliation_strings":["Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang, China","[Shenyang Institute of Automation, Chinese Academy of Sciences, China]"],"affiliations":[{"raw_affiliation_string":"Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang, China","institution_ids":["https://openalex.org/I142078773","https://openalex.org/I19820366"]},{"raw_affiliation_string":"[Shenyang Institute of Automation, Chinese Academy of Sciences, China]","institution_ids":["https://openalex.org/I19820366"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5057438361","display_name":"Niandong Jiao","orcid":"https://orcid.org/0000-0002-3828-5262"},"institutions":[{"id":"https://openalex.org/I142078773","display_name":"Shenyang Institute of Automation","ror":"https://ror.org/00ft6nj33","country_code":"CN","type":"facility","lineage":["https://openalex.org/I142078773","https://openalex.org/I19820366"]},{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"funder","lineage":["https://openalex.org/I19820366"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Niandong Jiao","raw_affiliation_strings":["Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang, China","[Shenyang Institute of Automation, Chinese Academy of Sciences, China]"],"affiliations":[{"raw_affiliation_string":"Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang, China","institution_ids":["https://openalex.org/I142078773","https://openalex.org/I19820366"]},{"raw_affiliation_string":"[Shenyang Institute of Automation, Chinese Academy of Sciences, China]","institution_ids":["https://openalex.org/I19820366"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100756467","display_name":"Zhidong Wang","orcid":"https://orcid.org/0000-0001-7136-3341"},"institutions":[{"id":"https://openalex.org/I142078773","display_name":"Shenyang Institute of Automation","ror":"https://ror.org/00ft6nj33","country_code":"CN","type":"facility","lineage":["https://openalex.org/I142078773","https://openalex.org/I19820366"]},{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"funder","lineage":["https://openalex.org/I19820366"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zhidong Wang","raw_affiliation_strings":["Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang, China","[Shenyang Institute of Automation, Chinese Academy of Sciences, China]"],"affiliations":[{"raw_affiliation_string":"Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang, China","institution_ids":["https://openalex.org/I142078773","https://openalex.org/I19820366"]},{"raw_affiliation_string":"[Shenyang Institute of Automation, Chinese Academy of Sciences, China]","institution_ids":["https://openalex.org/I19820366"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5109102616","display_name":"Zaili Dong","orcid":null},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"funder","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I142078773","display_name":"Shenyang Institute of Automation","ror":"https://ror.org/00ft6nj33","country_code":"CN","type":"facility","lineage":["https://openalex.org/I142078773","https://openalex.org/I19820366"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zaili Dong","raw_affiliation_strings":["Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang, China","[Shenyang Institute of Automation, Chinese Academy of Sciences, China]"],"affiliations":[{"raw_affiliation_string":"Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang, China","institution_ids":["https://openalex.org/I142078773","https://openalex.org/I19820366"]},{"raw_affiliation_string":"[Shenyang Institute of Automation, Chinese Academy of Sciences, China]","institution_ids":["https://openalex.org/I19820366"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":["https://openalex.org/A5016759323"],"corresponding_institution_ids":["https://openalex.org/I142078773","https://openalex.org/I19820366"],"apc_list":null,"apc_paid":null,"fwci":0.2121,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.57801222,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":94},"biblio":{"volume":"8","issue":null,"first_page":"547","last_page":"552"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12466","display_name":"Near-Field Optical Microscopy","score":0.9984999895095825,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T14117","display_name":"Integrated Circuits and Semiconductor Failure Analysis","score":0.9977999925613403,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/electric-field","display_name":"Electric field","score":0.9122729301452637},{"id":"https://openalex.org/keywords/nanolithography","display_name":"Nanolithography","score":0.7789828181266785},{"id":"https://openalex.org/keywords/substrate","display_name":"Substrate (aquarium)","score":0.6597925424575806},{"id":"https://openalex.org/keywords/field","display_name":"Field (mathematics)","score":0.5896316766738892},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.5854453444480896},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.5275951027870178},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.5193106532096863},{"id":"https://openalex.org/keywords/anodic-oxidation","display_name":"Anodic oxidation","score":0.4924081563949585},{"id":"https://openalex.org/keywords/anode","display_name":"Anode","score":0.4313390254974365},{"id":"https://openalex.org/keywords/atomic-force-microscopy","display_name":"Atomic force microscopy","score":0.4223082661628723},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.36823397874832153},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.18034395575523376},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.1414242386817932},{"id":"https://openalex.org/keywords/electrode","display_name":"Electrode","score":0.10724565386772156}],"concepts":[{"id":"https://openalex.org/C60799052","wikidata":"https://www.wikidata.org/wiki/Q46221","display_name":"Electric field","level":2,"score":0.9122729301452637},{"id":"https://openalex.org/C162117346","wikidata":"https://www.wikidata.org/wiki/Q1106386","display_name":"Nanolithography","level":4,"score":0.7789828181266785},{"id":"https://openalex.org/C2777289219","wikidata":"https://www.wikidata.org/wiki/Q7632154","display_name":"Substrate (aquarium)","level":2,"score":0.6597925424575806},{"id":"https://openalex.org/C9652623","wikidata":"https://www.wikidata.org/wiki/Q190109","display_name":"Field (mathematics)","level":2,"score":0.5896316766738892},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5854453444480896},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.5275951027870178},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.5193106532096863},{"id":"https://openalex.org/C2988028921","wikidata":"https://www.wikidata.org/wiki/Q2608426","display_name":"Anodic oxidation","level":4,"score":0.4924081563949585},{"id":"https://openalex.org/C89395315","wikidata":"https://www.wikidata.org/wiki/Q181232","display_name":"Anode","level":3,"score":0.4313390254974365},{"id":"https://openalex.org/C102951782","wikidata":"https://www.wikidata.org/wiki/Q49295","display_name":"Atomic force microscopy","level":2,"score":0.4223082661628723},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.36823397874832153},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.18034395575523376},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.1414242386817932},{"id":"https://openalex.org/C17525397","wikidata":"https://www.wikidata.org/wiki/Q176140","display_name":"Electrode","level":2,"score":0.10724565386772156},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C127313418","wikidata":"https://www.wikidata.org/wiki/Q1069","display_name":"Geology","level":0,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.0},{"id":"https://openalex.org/C147789679","wikidata":"https://www.wikidata.org/wiki/Q11372","display_name":"Physical chemistry","level":1,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C202444582","wikidata":"https://www.wikidata.org/wiki/Q837863","display_name":"Pure mathematics","level":1,"score":0.0},{"id":"https://openalex.org/C111368507","wikidata":"https://www.wikidata.org/wiki/Q43518","display_name":"Oceanography","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems.2012.6196835","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2012.6196835","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":9,"referenced_works":["https://openalex.org/W1964744472","https://openalex.org/W1994768752","https://openalex.org/W1998068769","https://openalex.org/W2010132176","https://openalex.org/W2047122715","https://openalex.org/W2048036398","https://openalex.org/W2070763803","https://openalex.org/W2084742543","https://openalex.org/W2361851223"],"related_works":["https://openalex.org/W2374930937","https://openalex.org/W2602150962","https://openalex.org/W2328053366","https://openalex.org/W3003741000","https://openalex.org/W4249028082","https://openalex.org/W2074707023","https://openalex.org/W3106365267","https://openalex.org/W2407751474","https://openalex.org/W2743157761","https://openalex.org/W2049792659"],"abstract_inverted_index":{"Atomic":[0],"force":[1],"microscope":[2],"(AFM)":[3],"based":[4],"anodic":[5],"oxidation":[6],"is":[7,42],"an":[8],"important":[9],"method":[10],"to":[11,43],"fabricate":[12],"nano-structures":[13],"and":[14,25,53,60,75,83],"nano-devices.":[15],"To":[16],"realize":[17],"precise":[18,30,33],"fabrication,":[19],"electric":[20,37,51,58,73,81,97],"field":[21,52,59,74,82,98],"between":[22,56,79],"AFM":[23],"tip":[24],"substrate":[26],"should":[27],"be":[28],"under":[29],"control.":[31],"For":[32],"control":[34],"of":[35,48,70],"the":[36,46,49,54,57,67,71,77,80],"field,":[38],"a":[39],"necessary":[40],"topic":[41],"find":[44],"out":[45],"distribution":[47,69],"spatial":[50,68],"relationship":[55,78],"parameters.":[61],"By":[62],"theoretical":[63],"analysis":[64],"we":[65],"simulated":[66],"tip/substrate":[72],"analyzed":[76],"parameters,":[84],"which":[85],"were":[86],"verified":[87],"by":[88],"experiments.":[89],"Our":[90],"work":[91],"can":[92],"provide":[93],"theoretic":[94],"support":[95],"for":[96],"assisted":[99],"nanofabrication.":[100]},"counts_by_year":[{"year":2015,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}