{"id":"https://openalex.org/W2032819407","doi":"https://doi.org/10.1109/nems.2012.6196790","title":"A study of nano-structured manganese dioxides and their composites as electrode materials for micro supercapacitors","display_name":"A study of nano-structured manganese dioxides and their composites as electrode materials for micro supercapacitors","publication_year":2012,"publication_date":"2012-03-01","ids":{"openalex":"https://openalex.org/W2032819407","doi":"https://doi.org/10.1109/nems.2012.6196790","mag":"2032819407"},"language":"en","primary_location":{"id":"doi:10.1109/nems.2012.6196790","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2012.6196790","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5100733086","display_name":"Siwei Li","orcid":"https://orcid.org/0000-0002-1593-6317"},"institutions":[{"id":"https://openalex.org/I4210119392","display_name":"Institute of Microelectronics","ror":"https://ror.org/02s6gs133","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]},{"id":"https://openalex.org/I99065089","display_name":"Tsinghua University","ror":"https://ror.org/03cve4549","country_code":"CN","type":"education","lineage":["https://openalex.org/I99065089"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Siwei Li","raw_affiliation_strings":["Institute of Microelectronics, Tsinghua University, China","Tsinzhua National Laboratory for Information Science and Technology"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Microelectronics, Tsinghua University, China","institution_ids":["https://openalex.org/I99065089","https://openalex.org/I4210119392"]},{"raw_affiliation_string":"Tsinzhua National Laboratory for Information Science and Technology","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100455475","display_name":"Xiaohong Wang","orcid":"https://orcid.org/0000-0003-4569-7537"},"institutions":[{"id":"https://openalex.org/I4210119392","display_name":"Institute of Microelectronics","ror":"https://ror.org/02s6gs133","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]},{"id":"https://openalex.org/I99065089","display_name":"Tsinghua University","ror":"https://ror.org/03cve4549","country_code":"CN","type":"education","lineage":["https://openalex.org/I99065089"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xiaohong Wang","raw_affiliation_strings":["Institute of Microelectronics, Tsinghua University, China","Tsinzhua National Laboratory for Information Science and Technology"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Microelectronics, Tsinghua University, China","institution_ids":["https://openalex.org/I99065089","https://openalex.org/I4210119392"]},{"raw_affiliation_string":"Tsinzhua National Laboratory for Information Science and Technology","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5005134232","display_name":"Caiwei Shen","orcid":"https://orcid.org/0000-0002-3231-2477"},"institutions":[{"id":"https://openalex.org/I4210119392","display_name":"Institute of Microelectronics","ror":"https://ror.org/02s6gs133","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]},{"id":"https://openalex.org/I99065089","display_name":"Tsinghua University","ror":"https://ror.org/03cve4549","country_code":"CN","type":"education","lineage":["https://openalex.org/I99065089"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Caiwei Shen","raw_affiliation_strings":["Institute of Microelectronics, Tsinghua University, China","Tsinzhua National Laboratory for Information Science and Technology"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Microelectronics, Tsinghua University, China","institution_ids":["https://openalex.org/I99065089","https://openalex.org/I4210119392"]},{"raw_affiliation_string":"Tsinzhua National Laboratory for Information Science and Technology","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5073984659","display_name":"Jian'gan Wang","orcid":null},"institutions":[{"id":"https://openalex.org/I99065089","display_name":"Tsinghua University","ror":"https://ror.org/03cve4549","country_code":"CN","type":"education","lineage":["https://openalex.org/I99065089"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jian'gan Wang","raw_affiliation_strings":["Department of Materials Science and Engineering, Tsinghua University, China","Tsinzhua National Laboratory for Information Science and Technology"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Materials Science and Engineering, Tsinghua University, China","institution_ids":["https://openalex.org/I99065089"]},{"raw_affiliation_string":"Tsinzhua National Laboratory for Information Science and Technology","institution_ids":[]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5050944748","display_name":"Feiyu Kang","orcid":"https://orcid.org/0000-0002-3704-4379"},"institutions":[{"id":"https://openalex.org/I99065089","display_name":"Tsinghua University","ror":"https://ror.org/03cve4549","country_code":"CN","type":"education","lineage":["https://openalex.org/I99065089"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Feiyu Kang","raw_affiliation_strings":["Department of Materials Science and Engineering, Tsinghua University, China","Tsinzhua National Laboratory for Information Science and Technology"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Materials Science and Engineering, Tsinghua University, China","institution_ids":["https://openalex.org/I99065089"]},{"raw_affiliation_string":"Tsinzhua National Laboratory for Information Science and Technology","institution_ids":[]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":null,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":null,"cited_by_percentile_year":null,"biblio":{"volume":"88","issue":null,"first_page":"347","last_page":"350"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10179","display_name":"Supercapacitor Materials and Fabrication","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10179","display_name":"Supercapacitor Materials and Fabrication","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11690","display_name":"Advanced battery technologies research","score":0.9965000152587891,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10338","display_name":"Advanced Sensor and Energy Harvesting Materials","score":0.9930999875068665,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/supercapacitor","display_name":"Supercapacitor","score":0.8323233127593994},{"id":"https://openalex.org/keywords/capacitance","display_name":"Capacitance","score":0.7917901277542114},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.6514813303947449},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.5896681547164917},{"id":"https://openalex.org/keywords/capacitive-sensing","display_name":"Capacitive sensing","score":0.5300847291946411},{"id":"https://openalex.org/keywords/electrode","display_name":"Electrode","score":0.5112709999084473},{"id":"https://openalex.org/keywords/composite-number","display_name":"Composite number","score":0.5086261034011841},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.38939982652664185},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.28166621923446655},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.19210365414619446},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.18589061498641968},{"id":"https://openalex.org/keywords/physical-chemistry","display_name":"Physical chemistry","score":0.09171831607818604},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.08907341957092285}],"concepts":[{"id":"https://openalex.org/C6585489","wikidata":"https://www.wikidata.org/wiki/Q754523","display_name":"Supercapacitor","level":4,"score":0.8323233127593994},{"id":"https://openalex.org/C30066665","wikidata":"https://www.wikidata.org/wiki/Q164399","display_name":"Capacitance","level":3,"score":0.7917901277542114},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.6514813303947449},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5896681547164917},{"id":"https://openalex.org/C206755178","wikidata":"https://www.wikidata.org/wiki/Q1131271","display_name":"Capacitive sensing","level":2,"score":0.5300847291946411},{"id":"https://openalex.org/C17525397","wikidata":"https://www.wikidata.org/wiki/Q176140","display_name":"Electrode","level":2,"score":0.5112709999084473},{"id":"https://openalex.org/C104779481","wikidata":"https://www.wikidata.org/wiki/Q50707","display_name":"Composite number","level":2,"score":0.5086261034011841},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.38939982652664185},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.28166621923446655},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.19210365414619446},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.18589061498641968},{"id":"https://openalex.org/C147789679","wikidata":"https://www.wikidata.org/wiki/Q11372","display_name":"Physical chemistry","level":1,"score":0.09171831607818604},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.08907341957092285},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems.2012.6196790","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2012.6196790","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Affordable and clean energy","score":0.8399999737739563,"id":"https://metadata.un.org/sdg/7"}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":10,"referenced_works":["https://openalex.org/W1963496313","https://openalex.org/W1980203038","https://openalex.org/W1996843262","https://openalex.org/W2011274846","https://openalex.org/W2022171069","https://openalex.org/W2033647462","https://openalex.org/W2053328406","https://openalex.org/W2103692841","https://openalex.org/W2147768989","https://openalex.org/W4245158813"],"related_works":["https://openalex.org/W2904067906","https://openalex.org/W2913076229","https://openalex.org/W4383498179","https://openalex.org/W1660624877","https://openalex.org/W3176726462","https://openalex.org/W2883906789","https://openalex.org/W2963294885","https://openalex.org/W4379203971","https://openalex.org/W2072449358","https://openalex.org/W2015870000"],"abstract_inverted_index":{"This":[0],"paper":[1],"presents":[2],"the":[3,71,108],"design,":[4],"synthesis":[5],"and":[6,17,55,93],"characterization":[7],"of":[8,99],"nano-structured":[9],"manganese":[10],"dioxides":[11],"(MnO":[12],"<inf":[13,31,46,50],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[14,32,47,51,102],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">2</inf>":[15,33,48],")":[16],"their":[18],"composites":[19],"as":[20,39,41,74],"electrode":[21],"materials":[22],"for":[23,114],"micro":[24,59,64,83],"supercapacitors.":[25],"An":[26],"optimized":[27],"composite":[28,72,109],"containing":[29],"nano-MnO":[30],"powder":[34],"exhibits":[35],"a":[36,63,95,111],"specific":[37,97],"capacitance":[38,98],"high":[40],"160F/g":[42],"in":[43],"0.2M":[44],"K":[45],"SO":[49],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">4</inf>":[52],"aqueous":[53],"solution,":[54],"is":[56,76,110],"compatible":[57],"with":[58,66],"fabrication":[60,80],"process.":[61],"Then":[62],"supercapacitor":[65,84],"3D":[67],"interdigital":[68],"structure":[69],"using":[70],"material":[73,113],"electrodes":[75],"achieved":[77],"by":[78],"MEMS":[79],"technology.":[81],"The":[82],"has":[85,94],"well-performed":[86],"capacitive":[87],"behavior":[88],"under":[89],"various":[90],"scanning":[91],"rates":[92],"large":[96],"30mF/cm":[100],"<sup":[101],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">2</sup>":[103],",":[104],"which":[105],"indicates":[106],"that":[107],"promising":[112],"energy":[115],"storage":[116],"on":[117],"chips.":[118]},"counts_by_year":[],"updated_date":"2026-07-14T23:27:15.235271","created_date":"2025-10-10T00:00:00"}
