{"id":"https://openalex.org/W2095184797","doi":"https://doi.org/10.1109/nems.2012.6196774","title":"Precise width control of single crystalline silicon nano-wall structure based on wet etching process on (111) wafer","display_name":"Precise width control of single crystalline silicon nano-wall structure based on wet etching process on (111) wafer","publication_year":2012,"publication_date":"2012-03-01","ids":{"openalex":"https://openalex.org/W2095184797","doi":"https://doi.org/10.1109/nems.2012.6196774","mag":"2095184797"},"language":"en","primary_location":{"id":"doi:10.1109/nems.2012.6196774","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2012.6196774","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5067104355","display_name":"Yu Xiao","orcid":"https://orcid.org/0000-0003-2518-9594"},"institutions":[{"id":"https://openalex.org/I4210147322","display_name":"Shanghai Institute of Microsystem and Information Technology","ror":"https://ror.org/04nytyj38","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210147322"]},{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"funder","lineage":["https://openalex.org/I19820366"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Xiao Yu","raw_affiliation_strings":["Chinese Academy of Sciences, Shanghai Institute of Microsystem and Information Technology, Shanghai, CHINA","State Key Laboratories of Transducer Technology & Science and Technology on Microsystem Laboratory, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, CHINA"],"affiliations":[{"raw_affiliation_string":"Chinese Academy of Sciences, Shanghai Institute of Microsystem and Information Technology, Shanghai, CHINA","institution_ids":["https://openalex.org/I4210147322"]},{"raw_affiliation_string":"State Key Laboratories of Transducer Technology & Science and Technology on Microsystem Laboratory, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, CHINA","institution_ids":["https://openalex.org/I19820366"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5103598151","display_name":"Qinhua Jin","orcid":null},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"funder","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210147322","display_name":"Shanghai Institute of Microsystem and Information Technology","ror":"https://ror.org/04nytyj38","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210147322"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Qinhua Jin","raw_affiliation_strings":["Chinese Academy of Sciences, Shanghai Institute of Microsystem and Information Technology, Shanghai, CHINA","State Key Laboratories of Transducer Technology & Science and Technology on Microsystem Laboratory, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, CHINA"],"affiliations":[{"raw_affiliation_string":"Chinese Academy of Sciences, Shanghai Institute of Microsystem and Information Technology, Shanghai, CHINA","institution_ids":["https://openalex.org/I4210147322"]},{"raw_affiliation_string":"State Key Laboratories of Transducer Technology & Science and Technology on Microsystem Laboratory, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, CHINA","institution_ids":["https://openalex.org/I19820366"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100754630","display_name":"Tie Li","orcid":"https://orcid.org/0000-0001-9907-0188"},"institutions":[{"id":"https://openalex.org/I4210147322","display_name":"Shanghai Institute of Microsystem and Information Technology","ror":"https://ror.org/04nytyj38","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210147322"]},{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"funder","lineage":["https://openalex.org/I19820366"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Tie Li","raw_affiliation_strings":["Chinese Academy of Sciences, Shanghai Institute of Microsystem and Information Technology, Shanghai, CHINA","State Key Laboratories of Transducer Technology & Science and Technology on Microsystem Laboratory, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, CHINA"],"affiliations":[{"raw_affiliation_string":"Chinese Academy of Sciences, Shanghai Institute of Microsystem and Information Technology, Shanghai, CHINA","institution_ids":["https://openalex.org/I4210147322"]},{"raw_affiliation_string":"State Key Laboratories of Transducer Technology & Science and Technology on Microsystem Laboratory, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, CHINA","institution_ids":["https://openalex.org/I19820366"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5101759741","display_name":"Yuelin Wang","orcid":"https://orcid.org/0000-0001-9360-5903"},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"funder","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210147322","display_name":"Shanghai Institute of Microsystem and Information Technology","ror":"https://ror.org/04nytyj38","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210147322"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yuelin Wang","raw_affiliation_strings":["Chinese Academy of Sciences, Shanghai Institute of Microsystem and Information Technology, Shanghai, CHINA","State Key Laboratories of Transducer Technology & Science and Technology on Microsystem Laboratory, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, CHINA"],"affiliations":[{"raw_affiliation_string":"Chinese Academy of Sciences, Shanghai Institute of Microsystem and Information Technology, Shanghai, CHINA","institution_ids":["https://openalex.org/I4210147322"]},{"raw_affiliation_string":"State Key Laboratories of Transducer Technology & Science and Technology on Microsystem Laboratory, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, CHINA","institution_ids":["https://openalex.org/I19820366"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":["https://openalex.org/A5067104355"],"corresponding_institution_ids":["https://openalex.org/I19820366","https://openalex.org/I4210147322"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.1452522,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"18","issue":null,"first_page":"278","last_page":"281"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11272","display_name":"Nanowire Synthesis and Applications","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11272","display_name":"Nanowire Synthesis and Applications","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10558","display_name":"Advancements in Semiconductor Devices and Circuit Design","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11169","display_name":"Silicon Nanostructures and Photoluminescence","score":0.9988999962806702,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/wafer","display_name":"Wafer","score":0.9010797739028931},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.8013142347335815},{"id":"https://openalex.org/keywords/etching","display_name":"Etching (microfabrication)","score":0.7851659059524536},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.7738910913467407},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.6757507920265198},{"id":"https://openalex.org/keywords/nano","display_name":"Nano-","score":0.6706908345222473},{"id":"https://openalex.org/keywords/lithography","display_name":"Lithography","score":0.663708508014679},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.5338830351829529},{"id":"https://openalex.org/keywords/crystalline-silicon","display_name":"Crystalline silicon","score":0.4929518699645996},{"id":"https://openalex.org/keywords/hybrid-silicon-laser","display_name":"Hybrid silicon laser","score":0.4501304030418396},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.4495951235294342},{"id":"https://openalex.org/keywords/isotropic-etching","display_name":"Isotropic etching","score":0.415793240070343},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.1830478012561798}],"concepts":[{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.9010797739028931},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.8013142347335815},{"id":"https://openalex.org/C100460472","wikidata":"https://www.wikidata.org/wiki/Q2368605","display_name":"Etching (microfabrication)","level":3,"score":0.7851659059524536},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7738910913467407},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.6757507920265198},{"id":"https://openalex.org/C2780357685","wikidata":"https://www.wikidata.org/wiki/Q154357","display_name":"Nano-","level":2,"score":0.6706908345222473},{"id":"https://openalex.org/C204223013","wikidata":"https://www.wikidata.org/wiki/Q133036","display_name":"Lithography","level":2,"score":0.663708508014679},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.5338830351829529},{"id":"https://openalex.org/C2779667780","wikidata":"https://www.wikidata.org/wiki/Q18206302","display_name":"Crystalline silicon","level":3,"score":0.4929518699645996},{"id":"https://openalex.org/C139159486","wikidata":"https://www.wikidata.org/wiki/Q5953298","display_name":"Hybrid silicon laser","level":3,"score":0.4501304030418396},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.4495951235294342},{"id":"https://openalex.org/C33220542","wikidata":"https://www.wikidata.org/wiki/Q6086567","display_name":"Isotropic etching","level":4,"score":0.415793240070343},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.1830478012561798},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems.2012.6196774","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2012.6196774","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":8,"referenced_works":["https://openalex.org/W2021821767","https://openalex.org/W2022809564","https://openalex.org/W2067070503","https://openalex.org/W2092423884","https://openalex.org/W2114190446","https://openalex.org/W2147471399","https://openalex.org/W3143188862","https://openalex.org/W7062027249"],"related_works":["https://openalex.org/W2128494206","https://openalex.org/W2148274155","https://openalex.org/W2074502480","https://openalex.org/W2788903434","https://openalex.org/W2606133557","https://openalex.org/W2091008601","https://openalex.org/W3184811876","https://openalex.org/W581292172","https://openalex.org/W2990644426","https://openalex.org/W2150931894"],"abstract_inverted_index":{"This":[0],"paper":[1],"reports":[2],"a":[3,77],"novel":[4],"method":[5],"for":[6],"precise":[7],"width":[8,40,70],"control":[9],"of":[10,48,58,68],"single":[11],"crystalline":[12],"silicon":[13,28,66],"nano-wall":[14,83],"structures":[15,84],"using":[16],"conventional":[17],"top-down":[18],"micro-fabrication":[19],"techniques":[20],"on":[21,30],"(111)":[22],"wafers.":[23],"Nano-scaled":[24],"walls":[25,67],"with":[26,94],"perfect":[27],"lattices":[29],"the":[31,45,53,69],"surface":[32],"were":[33],"fabricated":[34],"by":[35,55,76],"wet":[36],"etching":[37],"process.":[38,97],"The":[39],"can":[41,85],"be":[42,86],"controlled":[43],"at":[44],"highest":[46],"resolution":[47],"80":[49],"nm":[50,75],"when":[51],"rotating":[52],"wafer":[54],"each":[56],"step":[57],"0.5":[59],"degree":[60],"in":[61],"alignment,":[62],"achieving":[63],"to":[64,89],"fabricate":[65,90],"as":[71,73],"low":[72],"134":[74],"micron":[78],"level":[79],"lithography":[80],"mask.":[81],"These":[82],"further":[87],"used":[88],"high-quality":[91],"silicon-nano-wires":[92],"(SiNWs)":[93],"self-limiting":[95],"oxidation":[96]},"counts_by_year":[],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}