{"id":"https://openalex.org/W2056040496","doi":"https://doi.org/10.1109/nems.2012.6196767","title":"Fabrication of high-aspect-ratio PZT structure by nanocomposite sol-gel method for laterally-driven piezoelectric MEMS switch","display_name":"Fabrication of high-aspect-ratio PZT structure by nanocomposite sol-gel method for laterally-driven piezoelectric MEMS switch","publication_year":2012,"publication_date":"2012-03-01","ids":{"openalex":"https://openalex.org/W2056040496","doi":"https://doi.org/10.1109/nems.2012.6196767","mag":"2056040496"},"language":"en","primary_location":{"id":"doi:10.1109/nems.2012.6196767","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2012.6196767","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5100332765","display_name":"Nan Wang","orcid":"https://orcid.org/0000-0002-7609-5419"},"institutions":[{"id":"https://openalex.org/I201537933","display_name":"Tohoku University","ror":"https://ror.org/01dq60k83","country_code":"JP","type":"education","lineage":["https://openalex.org/I201537933"]}],"countries":["JP"],"is_corresponding":true,"raw_author_name":"Nan Wang","raw_affiliation_strings":["Graduate School of Engineering, University of Tohoku, Japan","Graduate School of Engineering, Tohoku University, , , Japan"],"affiliations":[{"raw_affiliation_string":"Graduate School of Engineering, University of Tohoku, Japan","institution_ids":["https://openalex.org/I201537933"]},{"raw_affiliation_string":"Graduate School of Engineering, Tohoku University, , , Japan","institution_ids":["https://openalex.org/I201537933"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5102712335","display_name":"Shinya Yoshida","orcid":"https://orcid.org/0000-0002-8767-1557"},"institutions":[{"id":"https://openalex.org/I201537933","display_name":"Tohoku University","ror":"https://ror.org/01dq60k83","country_code":"JP","type":"education","lineage":["https://openalex.org/I201537933"]},{"id":"https://openalex.org/I103605164","display_name":"Tohoku Institute of Technology","ror":"https://ror.org/01phqre83","country_code":"JP","type":"education","lineage":["https://openalex.org/I103605164"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Shinya Yoshida","raw_affiliation_strings":["Tohoku Daigaku, Sendai, Miyagi, JP","Tohoku University, Japan"],"affiliations":[{"raw_affiliation_string":"Tohoku Daigaku, Sendai, Miyagi, JP","institution_ids":["https://openalex.org/I103605164"]},{"raw_affiliation_string":"Tohoku University, Japan","institution_ids":["https://openalex.org/I201537933"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5004363105","display_name":"Masafumi Kumano","orcid":null},"institutions":[{"id":"https://openalex.org/I201537933","display_name":"Tohoku University","ror":"https://ror.org/01dq60k83","country_code":"JP","type":"education","lineage":["https://openalex.org/I201537933"]},{"id":"https://openalex.org/I103605164","display_name":"Tohoku Institute of Technology","ror":"https://ror.org/01phqre83","country_code":"JP","type":"education","lineage":["https://openalex.org/I103605164"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Masafumi Kumano","raw_affiliation_strings":["Tohoku Daigaku, Sendai, Miyagi, JP","Tohoku University, Japan"],"affiliations":[{"raw_affiliation_string":"Tohoku Daigaku, Sendai, Miyagi, JP","institution_ids":["https://openalex.org/I103605164"]},{"raw_affiliation_string":"Tohoku University, Japan","institution_ids":["https://openalex.org/I201537933"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5074229201","display_name":"Yusuke Kawai","orcid":"https://orcid.org/0000-0001-8238-0729"},"institutions":[{"id":"https://openalex.org/I201537933","display_name":"Tohoku University","ror":"https://ror.org/01dq60k83","country_code":"JP","type":"education","lineage":["https://openalex.org/I201537933"]},{"id":"https://openalex.org/I103605164","display_name":"Tohoku Institute of Technology","ror":"https://ror.org/01phqre83","country_code":"JP","type":"education","lineage":["https://openalex.org/I103605164"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Yusuke Kawai","raw_affiliation_strings":["Tohoku Daigaku, Sendai, Miyagi, JP","Tohoku University, Japan"],"affiliations":[{"raw_affiliation_string":"Tohoku Daigaku, Sendai, Miyagi, JP","institution_ids":["https://openalex.org/I103605164"]},{"raw_affiliation_string":"Tohoku University, Japan","institution_ids":["https://openalex.org/I201537933"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5055348625","display_name":"Masayoshi Esashi","orcid":"https://orcid.org/0000-0001-8779-4306"},"institutions":[{"id":"https://openalex.org/I103605164","display_name":"Tohoku Institute of Technology","ror":"https://ror.org/01phqre83","country_code":"JP","type":"education","lineage":["https://openalex.org/I103605164"]},{"id":"https://openalex.org/I201537933","display_name":"Tohoku University","ror":"https://ror.org/01dq60k83","country_code":"JP","type":"education","lineage":["https://openalex.org/I201537933"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Masayoshi Esashi","raw_affiliation_strings":["Tohoku Daigaku, Sendai, Miyagi, JP","Tohoku University, Japan"],"affiliations":[{"raw_affiliation_string":"Tohoku Daigaku, Sendai, Miyagi, JP","institution_ids":["https://openalex.org/I103605164"]},{"raw_affiliation_string":"Tohoku University, Japan","institution_ids":["https://openalex.org/I201537933"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":5,"corresponding_author_ids":["https://openalex.org/A5100332765"],"corresponding_institution_ids":["https://openalex.org/I201537933"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.11765551,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"42","issue":null,"first_page":"247","last_page":"252"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10338","display_name":"Advanced Sensor and Energy Harvesting Materials","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10338","display_name":"Advanced Sensor and Energy Harvesting Materials","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10107","display_name":"Ferroelectric and Piezoelectric Materials","score":0.9993000030517578,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9988999962806702,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.7351655960083008},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.5873082876205444},{"id":"https://openalex.org/keywords/piezoelectricity","display_name":"Piezoelectricity","score":0.5038222670555115},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.4711393713951111},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.3435901403427124},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.3224830627441406}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7351655960083008},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.5873082876205444},{"id":"https://openalex.org/C100082104","wikidata":"https://www.wikidata.org/wiki/Q183759","display_name":"Piezoelectricity","level":2,"score":0.5038222670555115},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.4711393713951111},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.3435901403427124},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.3224830627441406},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems.2012.6196767","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2012.6196767","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320334764","display_name":"Japan Society for the Promotion of Science","ror":"https://ror.org/00hhkn466"}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":14,"referenced_works":["https://openalex.org/W1653346437","https://openalex.org/W1970509152","https://openalex.org/W1977617144","https://openalex.org/W1987833615","https://openalex.org/W1996639903","https://openalex.org/W2003284049","https://openalex.org/W2054366302","https://openalex.org/W2072941799","https://openalex.org/W2075878778","https://openalex.org/W2076634533","https://openalex.org/W2129091583","https://openalex.org/W2323561283","https://openalex.org/W2328375608","https://openalex.org/W6700963868"],"related_works":["https://openalex.org/W2272290532","https://openalex.org/W2082914599","https://openalex.org/W2756570351","https://openalex.org/W120386264","https://openalex.org/W2120483398","https://openalex.org/W1530711136","https://openalex.org/W2319192085","https://openalex.org/W1763916368","https://openalex.org/W2369514825","https://openalex.org/W4309764133"],"abstract_inverted_index":{"In":[0,130],"this":[1],"study,":[2],"we":[3],"have":[4],"proposed":[5],"a":[6,17,49,57,71,83,89,169],"novel":[7],"laterally":[8,58,208],"driven":[9,59,209],"piezoelectric":[10,149,210],"MEMS":[11,211],"(MicroElectro":[12],"Mechanical":[13],"Systems)":[14],"switch":[15],"using":[16],"high-aspect-ratio":[18],"(AR)":[19],"PZT":[20,41,45,60,110,119,143,171,200],"(Pb[Zr":[21],"<sub":[22,26,30,74,78,155,164],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[23,27,31,75,79,156,165,178],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">x</sub>":[24],"Ti":[25],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">1-x</sub>":[28],"]O":[29],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">3</sub>":[32,80],")":[33,158,167],"structure.":[34],"Then,":[35,101],"the":[36,40,64,67,93,96,106,118,123,136,141,160,185,194,198,203,207],"fabrication":[37,195],"process":[38,47,65,121,196],"of":[39,66,168,187,197],"structure":[42,111,201],"based":[43],"on":[44],"filling":[46,120],"in":[48,122],"deep":[50],"Si":[51,68,124],"trench":[52,69,125],"is":[53,98,103,133,191],"developed":[54],"to":[55,205],"realize":[56,206],"microactuator.":[61],"At":[62],"first,":[63],"with":[70,88,112],"thin":[72],"Al":[73],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">2</sub>":[76],"O":[77],"layer":[81,86],"as":[82,92],"Pb-diffusion":[84],"barrier":[85],"and":[87,108,148,159,180],"Pt":[90],"film":[91,173],"electrode":[94],"for":[95],"actuator":[97],"successfully":[99],"developed.":[100],"it":[102,132,190],"demonstrated":[104,192],"that":[105,140,193],"dense":[107],"crack-free":[109],"high-AR":[113,199],"can":[114],"be":[115],"fabricated":[116],"by":[117,126],"nanocomposite":[127,170],"sol-gel":[128],"method.":[129],"addition,":[131],"speculated":[134],"from":[135],"X-ray":[137],"diffraction":[138],"pattern":[139],"composite":[142],"has":[144,202],"pure":[145],"perovskite":[146],"phase":[147],"property.":[150],"The":[151],"remnant":[152],"polarization":[153],"(P":[154],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">r</sub>":[157],"coercive":[161],"field":[162],"(E":[163],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">c</sub>":[166],"thick":[172],"measured":[174],"11.7":[175],"\u03bcC/cm":[176],"<sup":[177],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">2</sup>":[179],"71.2":[181],"kV/cm,":[182],"respectively.":[183],"As":[184],"result":[186],"these":[188],"experiments,":[189],"potential":[204],"switch.":[212]},"counts_by_year":[],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}