{"id":"https://openalex.org/W2117726296","doi":"https://doi.org/10.1109/nems.2012.6196735","title":"Design and fabrication of thin-film aluminum microheater and nickel temperature sensor","display_name":"Design and fabrication of thin-film aluminum microheater and nickel temperature sensor","publication_year":2012,"publication_date":"2012-03-01","ids":{"openalex":"https://openalex.org/W2117726296","doi":"https://doi.org/10.1109/nems.2012.6196735","mag":"2117726296"},"language":"en","primary_location":{"id":"doi:10.1109/nems.2012.6196735","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2012.6196735","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5055409069","display_name":"Rungrueang Phatthanakun","orcid":"https://orcid.org/0000-0002-1884-2287"},"institutions":[{"id":"https://openalex.org/I4210090246","display_name":"Synchrotron Light Research Institute","ror":"https://ror.org/00ckxt310","country_code":"TH","type":"facility","lineage":["https://openalex.org/I4210090246"]}],"countries":["TH"],"is_corresponding":true,"raw_author_name":"R. Phatthanakun","raw_affiliation_strings":["Synchrotron Light Research Institute (Public Organization), Thailand"],"affiliations":[{"raw_affiliation_string":"Synchrotron Light Research Institute (Public Organization), Thailand","institution_ids":["https://openalex.org/I4210090246"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5006133442","display_name":"P. Deekla","orcid":null},"institutions":[{"id":"https://openalex.org/I82475049","display_name":"Suranaree University of Technology","ror":"https://ror.org/05sgb8g78","country_code":"TH","type":"education","lineage":["https://openalex.org/I82475049"]}],"countries":["TH"],"is_corresponding":false,"raw_author_name":"P. Deekla","raw_affiliation_strings":["School of Electrical Engineering, Suranaree University\uc2a0of Technology, Thailand","School of Electrical Engineering , Suranaree University of Technology , Thailand"],"affiliations":[{"raw_affiliation_string":"School of Electrical Engineering, Suranaree University\uc2a0of Technology, Thailand","institution_ids":["https://openalex.org/I82475049"]},{"raw_affiliation_string":"School of Electrical Engineering , Suranaree University of Technology , Thailand","institution_ids":["https://openalex.org/I82475049"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5036468760","display_name":"W. Pummara","orcid":null},"institutions":[{"id":"https://openalex.org/I82475049","display_name":"Suranaree University of Technology","ror":"https://ror.org/05sgb8g78","country_code":"TH","type":"education","lineage":["https://openalex.org/I82475049"]}],"countries":["TH"],"is_corresponding":false,"raw_author_name":"W. Pummara","raw_affiliation_strings":["School of Electrical Engineering, Suranaree University\uc2a0of Technology, Thailand","School of Electrical Engineering , Suranaree University of Technology , Thailand"],"affiliations":[{"raw_affiliation_string":"School of Electrical Engineering, Suranaree University\uc2a0of Technology, Thailand","institution_ids":["https://openalex.org/I82475049"]},{"raw_affiliation_string":"School of Electrical Engineering , Suranaree University of Technology , Thailand","institution_ids":["https://openalex.org/I82475049"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5062028169","display_name":"C. Sriphung","orcid":null},"institutions":[{"id":"https://openalex.org/I4210090246","display_name":"Synchrotron Light Research Institute","ror":"https://ror.org/00ckxt310","country_code":"TH","type":"facility","lineage":["https://openalex.org/I4210090246"]}],"countries":["TH"],"is_corresponding":false,"raw_author_name":"C. Sriphung","raw_affiliation_strings":["Synchrotron Light Research Institute (Public Organization), Thailand"],"affiliations":[{"raw_affiliation_string":"Synchrotron Light Research Institute (Public Organization), Thailand","institution_ids":["https://openalex.org/I4210090246"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5057695696","display_name":"C. Pantong","orcid":null},"institutions":[{"id":"https://openalex.org/I82475049","display_name":"Suranaree University of Technology","ror":"https://ror.org/05sgb8g78","country_code":"TH","type":"education","lineage":["https://openalex.org/I82475049"]}],"countries":["TH"],"is_corresponding":false,"raw_author_name":"C. Pantong","raw_affiliation_strings":["School of Electrical Engineering, Suranaree University\uc2a0of Technology, Thailand","School of Electrical Engineering , Suranaree University of Technology , Thailand"],"affiliations":[{"raw_affiliation_string":"School of Electrical Engineering, Suranaree University\uc2a0of Technology, Thailand","institution_ids":["https://openalex.org/I82475049"]},{"raw_affiliation_string":"School of Electrical Engineering , Suranaree University of Technology , Thailand","institution_ids":["https://openalex.org/I82475049"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5107833690","display_name":"Nimit Chomnawang","orcid":null},"institutions":[{"id":"https://openalex.org/I82475049","display_name":"Suranaree University of Technology","ror":"https://ror.org/05sgb8g78","country_code":"TH","type":"education","lineage":["https://openalex.org/I82475049"]}],"countries":["TH"],"is_corresponding":false,"raw_author_name":"N. Chomnawang","raw_affiliation_strings":["School of Electrical Engineering, Suranaree University\uc2a0of Technology, Thailand","School of Electrical Engineering , Suranaree University of Technology , Thailand"],"affiliations":[{"raw_affiliation_string":"School of Electrical Engineering, Suranaree University\uc2a0of Technology, Thailand","institution_ids":["https://openalex.org/I82475049"]},{"raw_affiliation_string":"School of Electrical Engineering , Suranaree University of Technology , Thailand","institution_ids":["https://openalex.org/I82475049"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":6,"corresponding_author_ids":["https://openalex.org/A5055409069"],"corresponding_institution_ids":["https://openalex.org/I4210090246"],"apc_list":null,"apc_paid":null,"fwci":1.7185,"has_fulltext":false,"cited_by_count":27,"citation_normalized_percentile":{"value":0.861455,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":98},"biblio":{"volume":null,"issue":null,"first_page":"112","last_page":"115"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10461","display_name":"Gas Sensing Nanomaterials and Sensors","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10461","display_name":"Gas Sensing Nanomaterials and Sensors","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10338","display_name":"Advanced Sensor and Energy Harvesting Materials","score":0.998199999332428,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11472","display_name":"Analytical Chemistry and Sensors","score":0.9965999722480774,"subfield":{"id":"https://openalex.org/subfields/1502","display_name":"Bioengineering"},"field":{"id":"https://openalex.org/fields/15","display_name":"Chemical Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/microheater","display_name":"Microheater","score":0.9935678243637085},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.717010498046875},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.6242185831069946},{"id":"https://openalex.org/keywords/thin-film","display_name":"Thin film","score":0.5756543874740601},{"id":"https://openalex.org/keywords/temperature-control","display_name":"Temperature control","score":0.5189651846885681},{"id":"https://openalex.org/keywords/nickel","display_name":"Nickel","score":0.5150856375694275},{"id":"https://openalex.org/keywords/substrate","display_name":"Substrate (aquarium)","score":0.4789905250072479},{"id":"https://openalex.org/keywords/atmospheric-temperature-range","display_name":"Atmospheric temperature range","score":0.4750397503376007},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.45834609866142273},{"id":"https://openalex.org/keywords/temperature-measurement","display_name":"Temperature measurement","score":0.44195619225502014},{"id":"https://openalex.org/keywords/aluminium","display_name":"Aluminium","score":0.4118919372558594},{"id":"https://openalex.org/keywords/analytical-chemistry","display_name":"Analytical Chemistry (journal)","score":0.3884161710739136},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.3378921449184418},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.2454875409603119},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.21735069155693054},{"id":"https://openalex.org/keywords/thermodynamics","display_name":"Thermodynamics","score":0.1699831187725067},{"id":"https://openalex.org/keywords/metallurgy","display_name":"Metallurgy","score":0.15340307354927063},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.12647846341133118},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.10365715622901917},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.09231680631637573}],"concepts":[{"id":"https://openalex.org/C2779426163","wikidata":"https://www.wikidata.org/wiki/Q17123760","display_name":"Microheater","level":4,"score":0.9935678243637085},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.717010498046875},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.6242185831069946},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.5756543874740601},{"id":"https://openalex.org/C536315585","wikidata":"https://www.wikidata.org/wiki/Q7698332","display_name":"Temperature control","level":2,"score":0.5189651846885681},{"id":"https://openalex.org/C504270822","wikidata":"https://www.wikidata.org/wiki/Q744","display_name":"Nickel","level":2,"score":0.5150856375694275},{"id":"https://openalex.org/C2777289219","wikidata":"https://www.wikidata.org/wiki/Q7632154","display_name":"Substrate (aquarium)","level":2,"score":0.4789905250072479},{"id":"https://openalex.org/C39353612","wikidata":"https://www.wikidata.org/wiki/Q5283759","display_name":"Atmospheric temperature range","level":2,"score":0.4750397503376007},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.45834609866142273},{"id":"https://openalex.org/C72293138","wikidata":"https://www.wikidata.org/wiki/Q909741","display_name":"Temperature measurement","level":2,"score":0.44195619225502014},{"id":"https://openalex.org/C513153333","wikidata":"https://www.wikidata.org/wiki/Q663","display_name":"Aluminium","level":2,"score":0.4118919372558594},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.3884161710739136},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.3378921449184418},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.2454875409603119},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.21735069155693054},{"id":"https://openalex.org/C97355855","wikidata":"https://www.wikidata.org/wiki/Q11473","display_name":"Thermodynamics","level":1,"score":0.1699831187725067},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.15340307354927063},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.12647846341133118},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.10365715622901917},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.09231680631637573},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C111368507","wikidata":"https://www.wikidata.org/wiki/Q43518","display_name":"Oceanography","level":1,"score":0.0},{"id":"https://openalex.org/C43617362","wikidata":"https://www.wikidata.org/wiki/Q170050","display_name":"Chromatography","level":1,"score":0.0},{"id":"https://openalex.org/C127313418","wikidata":"https://www.wikidata.org/wiki/Q1069","display_name":"Geology","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems.2012.6196735","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2012.6196735","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy","score":0.7599999904632568}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":5,"referenced_works":["https://openalex.org/W2025980613","https://openalex.org/W2092982918","https://openalex.org/W2118016988","https://openalex.org/W2126755986","https://openalex.org/W2164065552"],"related_works":["https://openalex.org/W2810048550","https://openalex.org/W4247809522","https://openalex.org/W65622877","https://openalex.org/W2053673665","https://openalex.org/W2398511631","https://openalex.org/W2010778943","https://openalex.org/W2554190867","https://openalex.org/W2767219765","https://openalex.org/W2371191966","https://openalex.org/W2101657632"],"abstract_inverted_index":{"This":[0],"paper":[1],"presents":[2],"development":[3],"of":[4,24,50,67,71,82,109],"a":[5,11,29,54],"thin":[6,35],"film":[7],"aluminum":[8],"microheater":[9,39,83],"and":[10,32,48,76,93],"nickel":[12,51],"temperature":[13,17,56,81,111],"sensor":[14,44,52],"for":[15,119],"low":[16],"applications":[18],"by":[19,34,65],"using":[20],"Micro-Electro-Mechanical":[21],"Systems.":[22],"Both":[23],"them":[25],"are":[26,62,74,99],"fabricated":[27],"onto":[28],"glass":[30],"substrate":[31],"protected":[33],"PDMS":[36],"membrane.":[37],"The":[38],"is":[40,117],"energized":[41,68],"to":[42,79,101,115],"find":[43],"characteristic.":[45],"As":[46],"linearity":[47],"accuracy":[49],"give":[53],"wide":[55],"range,":[57],"its":[58],"electrical":[59],"resistance":[60,72],"variations":[61],"calibrated":[63],"directly":[64],"temperatures":[66],"microheater.":[69],"Variations":[70],"signal":[73],"transformed":[75],"fed":[77],"back":[78],"control":[80],"in":[84,122],"PI":[85],"closed-loop":[86],"feedback":[87],"control.":[88],"K":[89,94],"<sub":[90,95],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[91,96],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">p</sub>":[92],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">i</sub>":[97],"values":[98],"adjusted":[100],"obtain":[102],"the":[103],"optimal":[104],"time":[105],"response.":[106],"Experimental":[107],"testing":[108],"controlled":[110],"ranges":[112],"from":[113],"40\u00b0C":[114],"140\u00b0C":[116],"presented":[118],"their":[120],"integration":[121],"stability":[123],"system.":[124]},"counts_by_year":[{"year":2025,"cited_by_count":2},{"year":2024,"cited_by_count":2},{"year":2023,"cited_by_count":1},{"year":2022,"cited_by_count":2},{"year":2021,"cited_by_count":3},{"year":2020,"cited_by_count":1},{"year":2018,"cited_by_count":5},{"year":2017,"cited_by_count":4},{"year":2015,"cited_by_count":4},{"year":2014,"cited_by_count":2},{"year":2013,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}