{"id":"https://openalex.org/W2035162942","doi":"https://doi.org/10.1109/nems.2012.6196718","title":"Metal contact printing photolithography for fabricating sub-micrometer patterned sapphire substrates in light-emitting diodes","display_name":"Metal contact printing photolithography for fabricating sub-micrometer patterned sapphire substrates in light-emitting diodes","publication_year":2012,"publication_date":"2012-03-01","ids":{"openalex":"https://openalex.org/W2035162942","doi":"https://doi.org/10.1109/nems.2012.6196718","mag":"2035162942"},"language":"en","primary_location":{"id":"doi:10.1109/nems.2012.6196718","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2012.6196718","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5103400001","display_name":"Yi-Ta Hsieh","orcid":null},"institutions":[],"countries":[],"is_corresponding":true,"raw_author_name":"Yi-Ta Hsieh","raw_affiliation_strings":["Institute of Nanotechnology and Microsystems Engineering, NCKU, Tainan, Taiwan","[Institute of Nanotechnology and Microsystems Engineering, NCKU, Tainan, Taiwan]"],"affiliations":[{"raw_affiliation_string":"Institute of Nanotechnology and Microsystems Engineering, NCKU, Tainan, Taiwan","institution_ids":[]},{"raw_affiliation_string":"[Institute of Nanotechnology and Microsystems Engineering, NCKU, Tainan, Taiwan]","institution_ids":[]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5068385728","display_name":"Yung-Chun Lee","orcid":"https://orcid.org/0000-0001-8990-6615"},"institutions":[{"id":"https://openalex.org/I134793997","display_name":"National University of Tainan","ror":"https://ror.org/020pqc882","country_code":"TW","type":"education","lineage":["https://openalex.org/I134793997"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Yung-Chun Lee","raw_affiliation_strings":["Department of Mechanical Engineering, NCKU, Tainan, Taiwan"],"affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering, NCKU, Tainan, Taiwan","institution_ids":["https://openalex.org/I134793997"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":["https://openalex.org/A5103400001"],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.2017,"has_fulltext":false,"cited_by_count":3,"citation_normalized_percentile":{"value":0.55618295,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":94},"biblio":{"volume":"15","issue":null,"first_page":"40","last_page":"44"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12224","display_name":"Nanofabrication and Lithography Techniques","score":0.9994000196456909,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12224","display_name":"Nanofabrication and Lithography Techniques","score":0.9994000196456909,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11523","display_name":"Nanomaterials and Printing Technologies","score":0.9991999864578247,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10313","display_name":"Surface Modification and Superhydrophobicity","score":0.9986000061035156,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/photolithography","display_name":"Photolithography","score":0.8912837505340576},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.8067581057548523},{"id":"https://openalex.org/keywords/sapphire","display_name":"Sapphire","score":0.7696028351783752},{"id":"https://openalex.org/keywords/etching","display_name":"Etching (microfabrication)","score":0.6813123226165771},{"id":"https://openalex.org/keywords/contact-print","display_name":"Contact print","score":0.6807710528373718},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.6722501516342163},{"id":"https://openalex.org/keywords/light-emitting-diode","display_name":"Light-emitting diode","score":0.5366442203521729},{"id":"https://openalex.org/keywords/substrate","display_name":"Substrate (aquarium)","score":0.5053039193153381},{"id":"https://openalex.org/keywords/diode","display_name":"Diode","score":0.4782475531101227},{"id":"https://openalex.org/keywords/layer","display_name":"Layer (electronics)","score":0.4668933153152466},{"id":"https://openalex.org/keywords/dry-etching","display_name":"Dry etching","score":0.42642050981521606},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.3163202106952667},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.31496015191078186},{"id":"https://openalex.org/keywords/laser","display_name":"Laser","score":0.10668149590492249},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.05692902207374573}],"concepts":[{"id":"https://openalex.org/C105487726","wikidata":"https://www.wikidata.org/wiki/Q622938","display_name":"Photolithography","level":2,"score":0.8912837505340576},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.8067581057548523},{"id":"https://openalex.org/C2780064504","wikidata":"https://www.wikidata.org/wiki/Q127583","display_name":"Sapphire","level":3,"score":0.7696028351783752},{"id":"https://openalex.org/C100460472","wikidata":"https://www.wikidata.org/wiki/Q2368605","display_name":"Etching (microfabrication)","level":3,"score":0.6813123226165771},{"id":"https://openalex.org/C188079319","wikidata":"https://www.wikidata.org/wiki/Q372487","display_name":"Contact print","level":2,"score":0.6807710528373718},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.6722501516342163},{"id":"https://openalex.org/C176666156","wikidata":"https://www.wikidata.org/wiki/Q25504","display_name":"Light-emitting diode","level":2,"score":0.5366442203521729},{"id":"https://openalex.org/C2777289219","wikidata":"https://www.wikidata.org/wiki/Q7632154","display_name":"Substrate (aquarium)","level":2,"score":0.5053039193153381},{"id":"https://openalex.org/C78434282","wikidata":"https://www.wikidata.org/wiki/Q11656","display_name":"Diode","level":2,"score":0.4782475531101227},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.4668933153152466},{"id":"https://openalex.org/C1291036","wikidata":"https://www.wikidata.org/wiki/Q1191918","display_name":"Dry etching","level":4,"score":0.42642050981521606},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.3163202106952667},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.31496015191078186},{"id":"https://openalex.org/C520434653","wikidata":"https://www.wikidata.org/wiki/Q38867","display_name":"Laser","level":2,"score":0.10668149590492249},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.05692902207374573},{"id":"https://openalex.org/C127313418","wikidata":"https://www.wikidata.org/wiki/Q1069","display_name":"Geology","level":0,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C111368507","wikidata":"https://www.wikidata.org/wiki/Q43518","display_name":"Oceanography","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems.2012.6196718","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2012.6196718","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":20,"referenced_works":["https://openalex.org/W1973381121","https://openalex.org/W1973530545","https://openalex.org/W1982255647","https://openalex.org/W1982421885","https://openalex.org/W1987618728","https://openalex.org/W1994278272","https://openalex.org/W1998314729","https://openalex.org/W2007406598","https://openalex.org/W2035416147","https://openalex.org/W2053913428","https://openalex.org/W2056880515","https://openalex.org/W2057226911","https://openalex.org/W2073453103","https://openalex.org/W2089677409","https://openalex.org/W2099755186","https://openalex.org/W2101460411","https://openalex.org/W2123462559","https://openalex.org/W2144209276","https://openalex.org/W2163387112","https://openalex.org/W2171677346"],"related_works":["https://openalex.org/W2366679122","https://openalex.org/W2082295167","https://openalex.org/W2037430995","https://openalex.org/W2132917903","https://openalex.org/W4242132123","https://openalex.org/W2968163056","https://openalex.org/W2125363864","https://openalex.org/W2035162942","https://openalex.org/W4253294953","https://openalex.org/W3104978375"],"abstract_inverted_index":{"This":[0],"paper":[1],"reports":[2],"a":[3,39,57,97,121,147],"novel":[4,34,89],"process":[5,17,35],"which":[6,46],"is":[7],"combine":[8],"the":[9,43,48,51,67,74,92,107,111,118,129,142],"contact":[10],"metal":[11,40,53],"transfer":[12,38],"method":[13],"and":[14,79,150],"traditional":[15],"photolithography":[16,62],"for":[18,60,100,136],"fabricate":[19],"nano-scale":[20],"pattern":[21,41,54],"sapphire":[22,49,108,153],"substrate":[23],"(NPSS)":[24],"used":[25],"in":[26],"high":[27,68],"brightness":[28],"light":[29],"emitting":[30],"diodes":[31],"(LEDs).":[32],"The":[33],"can":[36,55,95],"directly":[37],"onto":[42],"PR":[44,71,93],"layer":[45],"above":[47],"substrate,":[50],"transferred":[52],"as":[56,96],"perfect":[58,122],"photo-mask":[59],"subsequent":[61],"process.":[63,90],"In":[64],"this":[65,88,133],"work,":[66],"aspect":[69,75],"ratio":[70,76],"structures":[72,140],"with":[73,120],"of":[77,82,131,146],"5":[78],"line":[80],"width":[81],"500":[83],"nm":[84],"are":[85],"created":[86],"by":[87],"Furthermore,":[91],"structure":[94],"etching":[98,105],"mask":[99],"inductively":[101],"coupled":[102],"plasma":[103],"(ICP)":[104],"on":[106,141],"substrate.":[109],"During":[110],"ICP":[112],"etching,":[113],"we":[114],"successfully":[115],"to":[116],"obtain":[117],"NPSS":[119],"cone":[123],"shape.":[124],"Experiments":[125],"have":[126],"been":[127],"demonstrate":[128],"feasibility":[130],"using":[132],"new":[134],"approach":[135],"obtaining":[137],"sub-micrometer":[138],"surface":[139,144],"complete":[143],"area":[145],"2":[148],"inch":[149,152],"4":[151],"substrates.":[154]},"counts_by_year":[{"year":2019,"cited_by_count":1},{"year":2016,"cited_by_count":1},{"year":2015,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}