{"id":"https://openalex.org/W2128888595","doi":"https://doi.org/10.1109/nems.2011.6017490","title":"Confined etchant layer technique (CELT) for micromanufacture","display_name":"Confined etchant layer technique (CELT) for micromanufacture","publication_year":2011,"publication_date":"2011-02-01","ids":{"openalex":"https://openalex.org/W2128888595","doi":"https://doi.org/10.1109/nems.2011.6017490","mag":"2128888595"},"language":"en","primary_location":{"id":"doi:10.1109/nems.2011.6017490","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2011.6017490","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2011 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5108581409","display_name":"Dongping Zhan","orcid":"https://orcid.org/0000-0003-2433-5369"},"institutions":[{"id":"https://openalex.org/I191208505","display_name":"Xiamen University","ror":"https://ror.org/00mcjh785","country_code":"CN","type":"education","lineage":["https://openalex.org/I191208505"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Dongping Zhan","raw_affiliation_strings":["Department of Chemistry, College of Chemistry and Chemical Engineering, State Key Laboratory of Physical Chemistry of Solid Surfaces, Xiamen University, Xiamen, China","Department of Chemistry, College of Chemistry and Chemical Engineering, Xiamen University, 361005, China"],"affiliations":[{"raw_affiliation_string":"Department of Chemistry, College of Chemistry and Chemical Engineering, State Key Laboratory of Physical Chemistry of Solid Surfaces, Xiamen University, Xiamen, China","institution_ids":["https://openalex.org/I191208505"]},{"raw_affiliation_string":"Department of Chemistry, College of Chemistry and Chemical Engineering, Xiamen University, 361005, China","institution_ids":["https://openalex.org/I191208505"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5032248856","display_name":"Lianhuan Han","orcid":"https://orcid.org/0000-0002-8005-1283"},"institutions":[{"id":"https://openalex.org/I191208505","display_name":"Xiamen University","ror":"https://ror.org/00mcjh785","country_code":"CN","type":"education","lineage":["https://openalex.org/I191208505"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Lianhuan Han","raw_affiliation_strings":["Department of Chemistry, College of Chemistry and Chemical Engineering, State Key Laboratory of Physical Chemistry of Solid Surfaces, Xiamen University, Xiamen, China","Department of Chemistry, College of Chemistry and Chemical Engineering, Xiamen University, 361005, China"],"affiliations":[{"raw_affiliation_string":"Department of Chemistry, College of Chemistry and Chemical Engineering, State Key Laboratory of Physical Chemistry of Solid Surfaces, Xiamen University, Xiamen, China","institution_ids":["https://openalex.org/I191208505"]},{"raw_affiliation_string":"Department of Chemistry, College of Chemistry and Chemical Engineering, Xiamen University, 361005, China","institution_ids":["https://openalex.org/I191208505"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5066615767","display_name":"Dezhi Yang","orcid":"https://orcid.org/0000-0002-3932-8009"},"institutions":[{"id":"https://openalex.org/I191208505","display_name":"Xiamen University","ror":"https://ror.org/00mcjh785","country_code":"CN","type":"education","lineage":["https://openalex.org/I191208505"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Dezhi Yang","raw_affiliation_strings":["Department of Chemistry, College of Chemistry and Chemical Engineering, State Key Laboratory of Physical Chemistry of Solid Surfaces, Xiamen University, Xiamen, China","Department of Chemistry, College of Chemistry and Chemical Engineering, Xiamen University, 361005, China"],"affiliations":[{"raw_affiliation_string":"Department of Chemistry, College of Chemistry and Chemical Engineering, State Key Laboratory of Physical Chemistry of Solid Surfaces, Xiamen University, Xiamen, China","institution_ids":["https://openalex.org/I191208505"]},{"raw_affiliation_string":"Department of Chemistry, College of Chemistry and Chemical Engineering, Xiamen University, 361005, China","institution_ids":["https://openalex.org/I191208505"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101432309","display_name":"Li\u2010Min Jiang","orcid":"https://orcid.org/0000-0003-4135-5599"},"institutions":[{"id":"https://openalex.org/I191208505","display_name":"Xiamen University","ror":"https://ror.org/00mcjh785","country_code":"CN","type":"education","lineage":["https://openalex.org/I191208505"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Li-min Jiang","raw_affiliation_strings":["Department of Chemistry, College of Chemistry and Chemical Engineering, State Key Laboratory of Physical Chemistry of Solid Surfaces, Xiamen University, Xiamen, China","Department of Chemistry, College of Chemistry and Chemical Engineering, Xiamen University, 361005, China"],"affiliations":[{"raw_affiliation_string":"Department of Chemistry, College of Chemistry and Chemical Engineering, State Key Laboratory of Physical Chemistry of Solid Surfaces, Xiamen University, Xiamen, China","institution_ids":["https://openalex.org/I191208505"]},{"raw_affiliation_string":"Department of Chemistry, College of Chemistry and Chemical Engineering, Xiamen University, 361005, China","institution_ids":["https://openalex.org/I191208505"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5071203246","display_name":"Jing Tang","orcid":"https://orcid.org/0000-0001-7258-2570"},"institutions":[{"id":"https://openalex.org/I191208505","display_name":"Xiamen University","ror":"https://ror.org/00mcjh785","country_code":"CN","type":"education","lineage":["https://openalex.org/I191208505"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jing Tang","raw_affiliation_strings":["Department of Chemistry, College of Chemistry and Chemical Engineering, State Key Laboratory of Physical Chemistry of Solid Surfaces, Xiamen University, Xiamen, China","Department of Chemistry, College of Chemistry and Chemical Engineering, Xiamen University, 361005, China"],"affiliations":[{"raw_affiliation_string":"Department of Chemistry, College of Chemistry and Chemical Engineering, State Key Laboratory of Physical Chemistry of Solid Surfaces, Xiamen University, Xiamen, China","institution_ids":["https://openalex.org/I191208505"]},{"raw_affiliation_string":"Department of Chemistry, College of Chemistry and Chemical Engineering, Xiamen University, 361005, China","institution_ids":["https://openalex.org/I191208505"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5072730673","display_name":"Jian\u2010Jun Sun","orcid":"https://orcid.org/0000-0002-7987-5242"},"institutions":[{"id":"https://openalex.org/I191208505","display_name":"Xiamen University","ror":"https://ror.org/00mcjh785","country_code":"CN","type":"education","lineage":["https://openalex.org/I191208505"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jian-jun Sun","raw_affiliation_strings":["Department of Chemistry, College of Chemistry and Chemical Engineering, State Key Laboratory of Physical Chemistry of Solid Surfaces, Xiamen University, Xiamen, China","Department of Chemistry, College of Chemistry and Chemical Engineering, Xiamen University, 361005, China"],"affiliations":[{"raw_affiliation_string":"Department of Chemistry, College of Chemistry and Chemical Engineering, State Key Laboratory of Physical Chemistry of Solid Surfaces, Xiamen University, Xiamen, China","institution_ids":["https://openalex.org/I191208505"]},{"raw_affiliation_string":"Department of Chemistry, College of Chemistry and Chemical Engineering, Xiamen University, 361005, China","institution_ids":["https://openalex.org/I191208505"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5082438133","display_name":"Kang Shi","orcid":"https://orcid.org/0000-0002-9976-4435"},"institutions":[{"id":"https://openalex.org/I191208505","display_name":"Xiamen University","ror":"https://ror.org/00mcjh785","country_code":"CN","type":"education","lineage":["https://openalex.org/I191208505"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Kang Shi","raw_affiliation_strings":["Department of Chemistry, College of Chemistry and Chemical Engineering, State Key Laboratory of Physical Chemistry of Solid Surfaces, Xiamen University, Xiamen, China","Department of Chemistry, College of Chemistry and Chemical Engineering, Xiamen University, 361005, China"],"affiliations":[{"raw_affiliation_string":"Department of Chemistry, College of Chemistry and Chemical Engineering, State Key Laboratory of Physical Chemistry of Solid Surfaces, Xiamen University, Xiamen, China","institution_ids":["https://openalex.org/I191208505"]},{"raw_affiliation_string":"Department of Chemistry, College of Chemistry and Chemical Engineering, Xiamen University, 361005, China","institution_ids":["https://openalex.org/I191208505"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5069906250","display_name":"Jian\u2010Zhang Zhou","orcid":"https://orcid.org/0000-0001-6382-2333"},"institutions":[{"id":"https://openalex.org/I191208505","display_name":"Xiamen University","ror":"https://ror.org/00mcjh785","country_code":"CN","type":"education","lineage":["https://openalex.org/I191208505"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jianzhang Zhou","raw_affiliation_strings":["Department of Chemistry, College of Chemistry and Chemical Engineering, State Key Laboratory of Physical Chemistry of Solid Surfaces, Xiamen University, Xiamen, China","Department of Chemistry, College of Chemistry and Chemical Engineering, Xiamen University, 361005, China"],"affiliations":[{"raw_affiliation_string":"Department of Chemistry, College of Chemistry and Chemical Engineering, State Key Laboratory of Physical Chemistry of Solid Surfaces, Xiamen University, Xiamen, China","institution_ids":["https://openalex.org/I191208505"]},{"raw_affiliation_string":"Department of Chemistry, College of Chemistry and Chemical Engineering, Xiamen University, 361005, China","institution_ids":["https://openalex.org/I191208505"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100371744","display_name":"Zhong\u2010Qun Tian","orcid":"https://orcid.org/0000-0002-9775-8189"},"institutions":[{"id":"https://openalex.org/I191208505","display_name":"Xiamen University","ror":"https://ror.org/00mcjh785","country_code":"CN","type":"education","lineage":["https://openalex.org/I191208505"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zhong-Qun Tian","raw_affiliation_strings":["Department of Chemistry, College of Chemistry and Chemical Engineering, State Key Laboratory of Physical Chemistry of Solid Surfaces, Xiamen University, Xiamen, China","Department of Chemistry, College of Chemistry and Chemical Engineering, Xiamen University, 361005, China"],"affiliations":[{"raw_affiliation_string":"Department of Chemistry, College of Chemistry and Chemical Engineering, State Key Laboratory of Physical Chemistry of Solid Surfaces, Xiamen University, Xiamen, China","institution_ids":["https://openalex.org/I191208505"]},{"raw_affiliation_string":"Department of Chemistry, College of Chemistry and Chemical Engineering, Xiamen University, 361005, China","institution_ids":["https://openalex.org/I191208505"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5100301952","display_name":"Zhao-Wu Tian","orcid":null},"institutions":[{"id":"https://openalex.org/I191208505","display_name":"Xiamen University","ror":"https://ror.org/00mcjh785","country_code":"CN","type":"education","lineage":["https://openalex.org/I191208505"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zhao-Wu Tian","raw_affiliation_strings":["Department of Chemistry, College of Chemistry and Chemical Engineering, State Key Laboratory of Physical Chemistry of Solid Surfaces, Xiamen University, Xiamen, China","Department of Chemistry, College of Chemistry and Chemical Engineering, Xiamen University, 361005, China"],"affiliations":[{"raw_affiliation_string":"Department of Chemistry, College of Chemistry and Chemical Engineering, State Key Laboratory of Physical Chemistry of Solid Surfaces, Xiamen University, Xiamen, China","institution_ids":["https://openalex.org/I191208505"]},{"raw_affiliation_string":"Department of Chemistry, College of Chemistry and Chemical Engineering, Xiamen University, 361005, China","institution_ids":["https://openalex.org/I191208505"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":10,"corresponding_author_ids":["https://openalex.org/A5108581409"],"corresponding_institution_ids":["https://openalex.org/I191208505"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.16058021,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"21","issue":null,"first_page":"863","last_page":"867"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":0.9988999962806702,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":0.9988999962806702,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11272","display_name":"Nanowire Synthesis and Applications","score":0.9972000122070312,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11472","display_name":"Analytical Chemistry and Sensors","score":0.995199978351593,"subfield":{"id":"https://openalex.org/subfields/1502","display_name":"Bioengineering"},"field":{"id":"https://openalex.org/fields/15","display_name":"Chemical Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/etching","display_name":"Etching (microfabrication)","score":0.7803494334220886},{"id":"https://openalex.org/keywords/layer","display_name":"Layer (electronics)","score":0.6670417785644531},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.6094462871551514},{"id":"https://openalex.org/keywords/isotropic-etching","display_name":"Isotropic etching","score":0.5591104626655579},{"id":"https://openalex.org/keywords/electrical-conductor","display_name":"Electrical conductor","score":0.4863458275794983},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.45309239625930786},{"id":"https://openalex.org/keywords/engraving","display_name":"Engraving","score":0.44047653675079346},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.26995009183883667},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.24834227561950684}],"concepts":[{"id":"https://openalex.org/C100460472","wikidata":"https://www.wikidata.org/wiki/Q2368605","display_name":"Etching (microfabrication)","level":3,"score":0.7803494334220886},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.6670417785644531},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6094462871551514},{"id":"https://openalex.org/C33220542","wikidata":"https://www.wikidata.org/wiki/Q6086567","display_name":"Isotropic etching","level":4,"score":0.5591104626655579},{"id":"https://openalex.org/C202374169","wikidata":"https://www.wikidata.org/wiki/Q124291","display_name":"Electrical conductor","level":2,"score":0.4863458275794983},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.45309239625930786},{"id":"https://openalex.org/C154843443","wikidata":"https://www.wikidata.org/wiki/Q139106","display_name":"Engraving","level":2,"score":0.44047653675079346},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.26995009183883667},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.24834227561950684}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems.2011.6017490","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2011.6017490","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2011 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":44,"referenced_works":["https://openalex.org/W289194914","https://openalex.org/W1963973818","https://openalex.org/W1967377906","https://openalex.org/W1974459660","https://openalex.org/W1986225230","https://openalex.org/W1988253209","https://openalex.org/W1989157562","https://openalex.org/W1990771466","https://openalex.org/W1991828387","https://openalex.org/W1998907527","https://openalex.org/W2001575447","https://openalex.org/W2021004648","https://openalex.org/W2022202918","https://openalex.org/W2029420623","https://openalex.org/W2039469634","https://openalex.org/W2052629737","https://openalex.org/W2062783634","https://openalex.org/W2076140742","https://openalex.org/W2082152780","https://openalex.org/W2087115848","https://openalex.org/W2105911559","https://openalex.org/W2114275367","https://openalex.org/W2159162209","https://openalex.org/W2162403034","https://openalex.org/W2243782628","https://openalex.org/W2248403861","https://openalex.org/W2334376416","https://openalex.org/W2357118201","https://openalex.org/W2358670599","https://openalex.org/W2359687944","https://openalex.org/W2365836690","https://openalex.org/W2379974595","https://openalex.org/W2380005644","https://openalex.org/W2409513613","https://openalex.org/W2474243327","https://openalex.org/W2912323075","https://openalex.org/W2917490733","https://openalex.org/W3026004774","https://openalex.org/W4251843769","https://openalex.org/W4387399534","https://openalex.org/W6706100919","https://openalex.org/W6706796513","https://openalex.org/W6706898664","https://openalex.org/W6759916015"],"related_works":["https://openalex.org/W2074502480","https://openalex.org/W2788903434","https://openalex.org/W2148274155","https://openalex.org/W1972608542","https://openalex.org/W2091008601","https://openalex.org/W2990644426","https://openalex.org/W581292172","https://openalex.org/W1482397683","https://openalex.org/W2150931894","https://openalex.org/W1972458659"],"abstract_inverted_index":{"Confined":[0],"etchant":[1,49,58],"layer":[2,59],"technique":[3],"(CELT)":[4],"is":[5,23],"an":[6],"electro-and/":[7],"or":[8],"photo-":[9,45],"chemically":[10],"induced":[11],"chemical":[12,46],"etching":[13],"method":[14],"for":[15,72],"micromanufacture":[16,81],"originated":[17],"by":[18],"our":[19,92],"research":[20,101],"group,":[21],"which":[22],"distinguished":[24],"from":[25],"the":[26,32,51,57,70,80],"LIGA":[27],"and":[28,85,99],"EFAB.":[29],"To":[30],"obtain":[31],"micro-/nano-":[33,64],"meter":[34],"precision,":[35],"there":[36],"are":[37],"three":[38],"strategies":[39],"of":[40,48,53,63],"CELT:":[41],"(1)":[42],"electro-":[43],"and/or":[44],"generation":[47],"on":[50,82,94],"surface":[52],"tool;":[54],"(2)":[55],"confining":[56],"to":[60,69],"a":[61],"thickness":[62],"meter;":[65],"(3)":[66],"Approaching":[67],"tool":[68],"workpiece":[71],"micromanufacturing.":[73],"CELT":[74,95],"have":[75],"been":[76],"proved":[77],"successful":[78],"in":[79],"conductive,":[83],"semiconductive":[84],"also":[86,103],"insulate":[87],"workpiece.":[88],"In":[89],"this":[90],"paper,":[91],"work":[93],"will":[96,102],"be":[97,104],"reviewed":[98],"future":[100],"prospected.":[105]},"counts_by_year":[],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}