{"id":"https://openalex.org/W2160751983","doi":"https://doi.org/10.1109/nems.2011.6017472","title":"A new integrated temperature and humidity","display_name":"A new integrated temperature and humidity","publication_year":2011,"publication_date":"2011-02-01","ids":{"openalex":"https://openalex.org/W2160751983","doi":"https://doi.org/10.1109/nems.2011.6017472","mag":"2160751983"},"language":"en","primary_location":{"id":"doi:10.1109/nems.2011.6017472","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2011.6017472","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2011 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5108416437","display_name":"Zhen Fang","orcid":"https://orcid.org/0000-0002-2976-3242"},"institutions":[{"id":"https://openalex.org/I4210107198","display_name":"State Key Laboratory of Transducer Technology","ror":"https://ror.org/01qg56n75","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366","https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458","https://openalex.org/I4210147322"]},{"id":"https://openalex.org/I4210110458","display_name":"Institute of Electronics","ror":"https://ror.org/01z143507","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210110458"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zhen Fang","raw_affiliation_strings":["State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy and Sciences, Beijing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy and Sciences, Beijing, China","institution_ids":["https://openalex.org/I4210107198","https://openalex.org/I4210110458"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5071764531","display_name":"Zhan Zhao","orcid":"https://orcid.org/0000-0002-3139-7579"},"institutions":[{"id":"https://openalex.org/I4210107198","display_name":"State Key Laboratory of Transducer Technology","ror":"https://ror.org/01qg56n75","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366","https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458","https://openalex.org/I4210147322"]},{"id":"https://openalex.org/I4210110458","display_name":"Institute of Electronics","ror":"https://ror.org/01z143507","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210110458"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zhan Zhao","raw_affiliation_strings":["State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy and Sciences, Beijing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy and Sciences, Beijing, China","institution_ids":["https://openalex.org/I4210107198","https://openalex.org/I4210110458"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5115593157","display_name":"Jiangang Zhang","orcid":"https://orcid.org/0009-0001-1677-1075"},"institutions":[{"id":"https://openalex.org/I4210107198","display_name":"State Key Laboratory of Transducer Technology","ror":"https://ror.org/01qg56n75","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366","https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458","https://openalex.org/I4210147322"]},{"id":"https://openalex.org/I4210110458","display_name":"Institute of Electronics","ror":"https://ror.org/01z143507","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210110458"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jiangang Zhang","raw_affiliation_strings":["State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy and Sciences, Beijing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy and Sciences, Beijing, China","institution_ids":["https://openalex.org/I4210107198","https://openalex.org/I4210110458"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5029573023","display_name":"Lidong Du","orcid":"https://orcid.org/0000-0002-7581-8152"},"institutions":[{"id":"https://openalex.org/I4210107198","display_name":"State Key Laboratory of Transducer Technology","ror":"https://ror.org/01qg56n75","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366","https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458","https://openalex.org/I4210147322"]},{"id":"https://openalex.org/I4210110458","display_name":"Institute of Electronics","ror":"https://ror.org/01z143507","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210110458"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Lidong Du","raw_affiliation_strings":["State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy and Sciences, Beijing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy and Sciences, Beijing, China","institution_ids":["https://openalex.org/I4210107198","https://openalex.org/I4210110458"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5076697107","display_name":"Jing Xu","orcid":"https://orcid.org/0000-0002-6546-7731"},"institutions":[{"id":"https://openalex.org/I4210107198","display_name":"State Key Laboratory of Transducer Technology","ror":"https://ror.org/01qg56n75","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366","https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458","https://openalex.org/I4210147322"]},{"id":"https://openalex.org/I4210110458","display_name":"Institute of Electronics","ror":"https://ror.org/01z143507","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210110458"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jing Xu","raw_affiliation_strings":["Chinese Academy and Sciences, Beijing, China","State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy and Sciences, Beijing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Chinese Academy and Sciences, Beijing, China","institution_ids":[]},{"raw_affiliation_string":"State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy and Sciences, Beijing, China","institution_ids":["https://openalex.org/I4210107198","https://openalex.org/I4210110458"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5026747993","display_name":"Daoqu Geng","orcid":"https://orcid.org/0000-0001-8675-1136"},"institutions":[{"id":"https://openalex.org/I4210107198","display_name":"State Key Laboratory of Transducer Technology","ror":"https://ror.org/01qg56n75","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366","https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458","https://openalex.org/I4210147322"]},{"id":"https://openalex.org/I4210110458","display_name":"Institute of Electronics","ror":"https://ror.org/01z143507","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210110458"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Daoqu Geng","raw_affiliation_strings":["State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy and Sciences, Beijing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy and Sciences, Beijing, China","institution_ids":["https://openalex.org/I4210107198","https://openalex.org/I4210110458"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5028144464","display_name":"Yaohong Shi","orcid":null},"institutions":[{"id":"https://openalex.org/I4210107198","display_name":"State Key Laboratory of Transducer Technology","ror":"https://ror.org/01qg56n75","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366","https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458","https://openalex.org/I4210147322"]},{"id":"https://openalex.org/I4210110458","display_name":"Institute of Electronics","ror":"https://ror.org/01z143507","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210110458"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yaohong Shi","raw_affiliation_strings":["State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy and Sciences, Beijing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy and Sciences, Beijing, China","institution_ids":["https://openalex.org/I4210107198","https://openalex.org/I4210110458"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.26288577,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":94},"biblio":{"volume":"17","issue":null,"first_page":"788","last_page":"791"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10461","display_name":"Gas Sensing Nanomaterials and Sensors","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10461","display_name":"Gas Sensing Nanomaterials and Sensors","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9986000061035156,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9965999722480774,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.3740028738975525}],"concepts":[{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.3740028738975525}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems.2011.6017472","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2011.6017472","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2011 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy","score":0.7400000095367432}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":6,"referenced_works":["https://openalex.org/W1966480681","https://openalex.org/W1966490532","https://openalex.org/W2015260806","https://openalex.org/W2021682139","https://openalex.org/W2201178397","https://openalex.org/W6687563416"],"related_works":["https://openalex.org/W2748952813","https://openalex.org/W2390279801","https://openalex.org/W2358668433","https://openalex.org/W2376932109","https://openalex.org/W2001405890","https://openalex.org/W2382290278","https://openalex.org/W2478288626","https://openalex.org/W4391913857","https://openalex.org/W2350741829","https://openalex.org/W2530322880"],"abstract_inverted_index":{"MEMS-based":[0],"integrated":[1,43,77,110],"temperature":[2,44,78],"and":[3,18,39,45,53,70,79,95,119],"humidity":[4,38,46,68,80],"sensor":[5,47],"has":[6],"the":[7,42,55,67,72,76,104,112],"advantages":[8],"of":[9,24,31,41,66,75,103],"low":[10,14],"weight,":[11],"small":[12],"size,":[13],"cost,":[15],"easy":[16,27],"integrity":[17],"is":[19,89],"a":[20,84,90,98],"highly":[21],"advanced":[22],"apparatus":[23],"identity,":[25],"reliability,":[26],"production.":[28],"The":[29],"feasibility":[30],"thermal":[32],"conductivity":[33],"method":[34],"used":[35],"to":[36],"measure":[37],"structure":[40],"are":[48],"analyzed":[49],"in":[50,58,121],"this":[51],"paper,":[52],"provides":[54],"measuring":[56,64],"methods":[57],"detail.":[59],"We":[60],"mainly":[61],"focus":[62],"on":[63,108],"result":[65],"part,":[69],"verify":[71],"excellent":[73],"performance":[74],"sensor,":[81,111],"then":[82],"introducing":[83],"function":[85],"W(h)=V22-k*V12,":[86],"here":[87],"k":[88],"constant":[91],"expressed":[92],"by":[93],"k=R2/R1,":[94],"W(h)":[96],"becomes":[97],"simple":[99],"monotonic":[100],"curve":[101],"independent":[102],"ambient":[105],"temperature.":[106],"Based":[107],"designed":[109,118],"portable":[113],"measurement":[114],"device":[115],"have":[116],"been":[117],"tested":[120],"field.":[122]},"counts_by_year":[{"year":2016,"cited_by_count":1}],"updated_date":"2026-07-29T14:22:42.915294","created_date":"2025-10-10T00:00:00"}