{"id":"https://openalex.org/W2131735882","doi":"https://doi.org/10.1109/nems.2011.6017413","title":"Integration and implementation of CMOS-MEMS accelerometer and capacitive sensing circuits","display_name":"Integration and implementation of CMOS-MEMS accelerometer and capacitive sensing circuits","publication_year":2011,"publication_date":"2011-02-01","ids":{"openalex":"https://openalex.org/W2131735882","doi":"https://doi.org/10.1109/nems.2011.6017413","mag":"2131735882"},"language":"en","primary_location":{"id":"doi:10.1109/nems.2011.6017413","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2011.6017413","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2011 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5013757902","display_name":"Ching-Pei Huang","orcid":null},"institutions":[{"id":"https://openalex.org/I25846049","display_name":"National Tsing Hua University","ror":"https://ror.org/00zdnkx70","country_code":"TW","type":"education","lineage":["https://openalex.org/I25846049"]}],"countries":["TW"],"is_corresponding":true,"raw_author_name":"Ching-Pei Huang","raw_affiliation_strings":["Department of Power Mechanical Engineering, National Tsing Hua University, Hsinchu, Taiwan","Department of Power Mechanical Engineering, National Tsing Hua University, HsinChu, TAIWAN"],"affiliations":[{"raw_affiliation_string":"Department of Power Mechanical Engineering, National Tsing Hua University, Hsinchu, Taiwan","institution_ids":["https://openalex.org/I25846049"]},{"raw_affiliation_string":"Department of Power Mechanical Engineering, National Tsing Hua University, HsinChu, TAIWAN","institution_ids":["https://openalex.org/I25846049"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5011308270","display_name":"Rongshun Chen","orcid":null},"institutions":[{"id":"https://openalex.org/I25846049","display_name":"National Tsing Hua University","ror":"https://ror.org/00zdnkx70","country_code":"TW","type":"education","lineage":["https://openalex.org/I25846049"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Rongshun Chen","raw_affiliation_strings":["Department of Power Mechanical Engineering, National Tsing Hua University, Hsinchu, Taiwan","Department of Power Mechanical Engineering, National Tsing Hua University, HsinChu, TAIWAN"],"affiliations":[{"raw_affiliation_string":"Department of Power Mechanical Engineering, National Tsing Hua University, Hsinchu, Taiwan","institution_ids":["https://openalex.org/I25846049"]},{"raw_affiliation_string":"Department of Power Mechanical Engineering, National Tsing Hua University, HsinChu, TAIWAN","institution_ids":["https://openalex.org/I25846049"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":["https://openalex.org/A5013757902"],"corresponding_institution_ids":["https://openalex.org/I25846049"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":{"value":0.15316792,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":94},"biblio":{"volume":"109","issue":null,"first_page":"543","last_page":"546"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9994000196456909,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10205","display_name":"Advanced Fiber Optic Sensors","score":0.9986000061035156,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/capacitive-sensing","display_name":"Capacitive sensing","score":0.835853099822998},{"id":"https://openalex.org/keywords/accelerometer","display_name":"Accelerometer","score":0.8141014575958252},{"id":"https://openalex.org/keywords/sensitivity","display_name":"Sensitivity (control systems)","score":0.6430900692939758},{"id":"https://openalex.org/keywords/cmos","display_name":"CMOS","score":0.6353994011878967},{"id":"https://openalex.org/keywords/noise","display_name":"Noise (video)","score":0.6303803324699402},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.5855427980422974},{"id":"https://openalex.org/keywords/capacitance","display_name":"Capacitance","score":0.5852900743484497},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.5452771782875061},{"id":"https://openalex.org/keywords/signal","display_name":"SIGNAL (programming language)","score":0.5024724006652832},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.4495835602283478},{"id":"https://openalex.org/keywords/chip","display_name":"Chip","score":0.4459135830402374},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.42586055397987366},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.37141668796539307},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.2554577589035034},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.24668201804161072},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.08923205733299255},{"id":"https://openalex.org/keywords/electrode","display_name":"Electrode","score":0.05842310190200806}],"concepts":[{"id":"https://openalex.org/C206755178","wikidata":"https://www.wikidata.org/wiki/Q1131271","display_name":"Capacitive sensing","level":2,"score":0.835853099822998},{"id":"https://openalex.org/C89805583","wikidata":"https://www.wikidata.org/wiki/Q192940","display_name":"Accelerometer","level":2,"score":0.8141014575958252},{"id":"https://openalex.org/C21200559","wikidata":"https://www.wikidata.org/wiki/Q7451068","display_name":"Sensitivity (control systems)","level":2,"score":0.6430900692939758},{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.6353994011878967},{"id":"https://openalex.org/C99498987","wikidata":"https://www.wikidata.org/wiki/Q2210247","display_name":"Noise (video)","level":3,"score":0.6303803324699402},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.5855427980422974},{"id":"https://openalex.org/C30066665","wikidata":"https://www.wikidata.org/wiki/Q164399","display_name":"Capacitance","level":3,"score":0.5852900743484497},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.5452771782875061},{"id":"https://openalex.org/C2779843651","wikidata":"https://www.wikidata.org/wiki/Q7390335","display_name":"SIGNAL (programming language)","level":2,"score":0.5024724006652832},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.4495835602283478},{"id":"https://openalex.org/C165005293","wikidata":"https://www.wikidata.org/wiki/Q1074500","display_name":"Chip","level":2,"score":0.4459135830402374},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.42586055397987366},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.37141668796539307},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.2554577589035034},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.24668201804161072},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.08923205733299255},{"id":"https://openalex.org/C17525397","wikidata":"https://www.wikidata.org/wiki/Q176140","display_name":"Electrode","level":2,"score":0.05842310190200806},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C115961682","wikidata":"https://www.wikidata.org/wiki/Q860623","display_name":"Image (mathematics)","level":2,"score":0.0},{"id":"https://openalex.org/C199360897","wikidata":"https://www.wikidata.org/wiki/Q9143","display_name":"Programming language","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems.2011.6017413","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2011.6017413","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2011 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.7900000214576721,"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7"}],"awards":[],"funders":[{"id":"https://openalex.org/F4320321040","display_name":"National Science Council","ror":"https://ror.org/02kv4zf79"}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":4,"referenced_works":["https://openalex.org/W2048663048","https://openalex.org/W2082981272","https://openalex.org/W2104431065","https://openalex.org/W2149979580"],"related_works":["https://openalex.org/W3161496874","https://openalex.org/W2348740411","https://openalex.org/W2051563071","https://openalex.org/W2160325238","https://openalex.org/W1966596465","https://openalex.org/W2902633157","https://openalex.org/W2026330382","https://openalex.org/W2915680872","https://openalex.org/W2287189152","https://openalex.org/W2502505565"],"abstract_inverted_index":{"This":[0],"paper":[1],"presents":[2],"a":[3,38,75],"capacitance":[4],"sensing":[5,59,81,87],"circuit":[6,60],"with":[7,79,85],"low":[8],"noise":[9,29,39],"and":[10,30,56],"tuned-sensitivity":[11],"by":[12],"integrating":[13,84],"an":[14],"in-plane":[15],"micro-accelerometer.":[16],"The":[17,54],"interface":[18],"of":[19,26],"micro-accelerometer":[20],"is":[21,24,82,98],"fully-differential":[22],"which":[23,48],"capable":[25],"reducing":[27],"common-mode":[28],"offering":[31],"higher":[32],"resolution.":[33],"Furthermore,":[34],"this":[35],"work":[36],"constructs":[37],"model":[40],"to":[41,44],"study":[42],"how":[43],"suppress":[45],"the":[46,50,57,64,77,93],"noise,":[47],"influences":[49],"sensitive":[51],"signal":[52],"effectively.":[53],"microstructure":[55,78],"capacitive":[58,86],"were":[61],"fabricated":[62],"through":[63],"tsmc":[65],"0.35":[66],"\u03bcm":[67],"mixed-signal":[68],"2P4M":[69],"polycide":[70],"3.3/5":[71],"V":[72],"process.":[73],"As":[74],"result,":[76],"one-axis":[80],"successfully":[83],"circuit.":[88],"Experimental":[89],"results":[90],"showed":[91],"that":[92],"whole":[94],"chip":[95],"sensitivity":[96],"measurement":[97],"6.1":[99],"mV/g.":[100]},"counts_by_year":[{"year":2020,"cited_by_count":1},{"year":2017,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}