{"id":"https://openalex.org/W2149025628","doi":"https://doi.org/10.1109/nems.2011.6017409","title":"Micro-machined resonant accelerometer with high sensitivity","display_name":"Micro-machined resonant accelerometer with high sensitivity","publication_year":2011,"publication_date":"2011-02-01","ids":{"openalex":"https://openalex.org/W2149025628","doi":"https://doi.org/10.1109/nems.2011.6017409","mag":"2149025628"},"language":"en","primary_location":{"id":"doi:10.1109/nems.2011.6017409","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2011.6017409","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2011 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5109218676","display_name":"Junbo Wang","orcid":"https://orcid.org/0000-0002-6032-1274"},"institutions":[{"id":"https://openalex.org/I4210107198","display_name":"State Key Laboratory of Transducer Technology","ror":"https://ror.org/01qg56n75","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366","https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458","https://openalex.org/I4210147322"]},{"id":"https://openalex.org/I4210110458","display_name":"Institute of Electronics","ror":"https://ror.org/01z143507","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210110458"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Junbo Wang","raw_affiliation_strings":["State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy and Sciences, Beijing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy and Sciences, Beijing, China","institution_ids":["https://openalex.org/I4210107198","https://openalex.org/I4210110458"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5006044944","display_name":"Yanlong Shang","orcid":null},"institutions":[{"id":"https://openalex.org/I4210107198","display_name":"State Key Laboratory of Transducer Technology","ror":"https://ror.org/01qg56n75","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366","https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458","https://openalex.org/I4210147322"]},{"id":"https://openalex.org/I4210110458","display_name":"Institute of Electronics","ror":"https://ror.org/01z143507","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210110458"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yanlong Shang","raw_affiliation_strings":["State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy and Sciences, Beijing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy and Sciences, Beijing, China","institution_ids":["https://openalex.org/I4210107198","https://openalex.org/I4210110458"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5113558463","display_name":"Sheng Tu","orcid":null},"institutions":[{"id":"https://openalex.org/I4210107198","display_name":"State Key Laboratory of Transducer Technology","ror":"https://ror.org/01qg56n75","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366","https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458","https://openalex.org/I4210147322"]},{"id":"https://openalex.org/I4210110458","display_name":"Institute of Electronics","ror":"https://ror.org/01z143507","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210110458"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Sheng Tu","raw_affiliation_strings":["State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy and Sciences, Beijing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy and Sciences, Beijing, China","institution_ids":["https://openalex.org/I4210107198","https://openalex.org/I4210110458"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100349601","display_name":"Lei Liu","orcid":"https://orcid.org/0000-0002-9714-2130"},"institutions":[{"id":"https://openalex.org/I4210107198","display_name":"State Key Laboratory of Transducer Technology","ror":"https://ror.org/01qg56n75","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366","https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458","https://openalex.org/I4210147322"]},{"id":"https://openalex.org/I4210110458","display_name":"Institute of Electronics","ror":"https://ror.org/01z143507","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210110458"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Lei Liu","raw_affiliation_strings":["State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy and Sciences, Beijing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy and Sciences, Beijing, China","institution_ids":["https://openalex.org/I4210107198","https://openalex.org/I4210110458"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5049215297","display_name":"Deyong Chen","orcid":"https://orcid.org/0000-0001-5856-3592"},"institutions":[{"id":"https://openalex.org/I4210107198","display_name":"State Key Laboratory of Transducer Technology","ror":"https://ror.org/01qg56n75","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366","https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458","https://openalex.org/I4210147322"]},{"id":"https://openalex.org/I4210110458","display_name":"Institute of Electronics","ror":"https://ror.org/01z143507","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210110458"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Deyong Chen","raw_affiliation_strings":["State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy and Sciences, Beijing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy and Sciences, Beijing, China","institution_ids":["https://openalex.org/I4210107198","https://openalex.org/I4210110458"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.895,"has_fulltext":false,"cited_by_count":5,"citation_normalized_percentile":{"value":0.73698537,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":96},"biblio":{"volume":null,"issue":null,"first_page":"527","last_page":"530"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10205","display_name":"Advanced Fiber Optic Sensors","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/accelerometer","display_name":"Accelerometer","score":0.9185093641281128},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.7619092464447021},{"id":"https://openalex.org/keywords/acceleration","display_name":"Acceleration","score":0.7199804186820984},{"id":"https://openalex.org/keywords/sensitivity","display_name":"Sensitivity (control systems)","score":0.6895588040351868},{"id":"https://openalex.org/keywords/proof-mass","display_name":"Proof mass","score":0.6685580611228943},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.6545618772506714},{"id":"https://openalex.org/keywords/wafer","display_name":"Wafer","score":0.6453800797462463},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.4866977035999298},{"id":"https://openalex.org/keywords/beam","display_name":"Beam (structure)","score":0.48498082160949707},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.4672645926475525},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.4527970254421234},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.3151274621486664},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.21830672025680542},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.20750108361244202},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.18827205896377563}],"concepts":[{"id":"https://openalex.org/C89805583","wikidata":"https://www.wikidata.org/wiki/Q192940","display_name":"Accelerometer","level":2,"score":0.9185093641281128},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.7619092464447021},{"id":"https://openalex.org/C117896860","wikidata":"https://www.wikidata.org/wiki/Q11376","display_name":"Acceleration","level":2,"score":0.7199804186820984},{"id":"https://openalex.org/C21200559","wikidata":"https://www.wikidata.org/wiki/Q7451068","display_name":"Sensitivity (control systems)","level":2,"score":0.6895588040351868},{"id":"https://openalex.org/C2780330379","wikidata":"https://www.wikidata.org/wiki/Q16990023","display_name":"Proof mass","level":3,"score":0.6685580611228943},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6545618772506714},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.6453800797462463},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.4866977035999298},{"id":"https://openalex.org/C168834538","wikidata":"https://www.wikidata.org/wiki/Q3705329","display_name":"Beam (structure)","level":2,"score":0.48498082160949707},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.4672645926475525},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.4527970254421234},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.3151274621486664},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.21830672025680542},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.20750108361244202},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.18827205896377563},{"id":"https://openalex.org/C74650414","wikidata":"https://www.wikidata.org/wiki/Q11397","display_name":"Classical mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems.2011.6017409","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2011.6017409","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2011 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Affordable and clean energy","score":0.8600000143051147,"id":"https://metadata.un.org/sdg/7"}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":4,"referenced_works":["https://openalex.org/W2073111866","https://openalex.org/W2127298535","https://openalex.org/W2149871666","https://openalex.org/W2154759250"],"related_works":["https://openalex.org/W4384517610","https://openalex.org/W4245472411","https://openalex.org/W3161496874","https://openalex.org/W2045042928","https://openalex.org/W4379746342","https://openalex.org/W4288389100","https://openalex.org/W1902800522","https://openalex.org/W4232743211","https://openalex.org/W2145387305","https://openalex.org/W2026330382"],"abstract_inverted_index":{"A":[0],"resonant":[1,28,70,114],"accelerometer":[2,124],"with":[3],"high":[4],"sensitivity,":[5],"fabricated":[6],"through":[7],"MEMS":[8,76],"bulk-silicon":[9,77],"processes,":[10],"is":[11,31,53,116,125],"proposed":[12],"in":[13],"this":[14],"paper.":[15],"The":[16,90],"external":[17,62],"acceleration":[18,63],"can":[19],"be":[20,73],"transferred":[21],"into":[22],"the":[23,27,34,38,42,45,57,61,65,69,87,99,103,110,113,120,123],"frequency":[24],"shift":[25],"of":[26,44,68,102,112,122],"beams":[29],"which":[30,56],"double-clamped":[32],"by":[33],"proof":[35],"mass":[36],"and":[37,64,93,119],"anchor.":[39],"To":[40],"improve":[41],"sensitivity":[43,121],"accelerometer,":[46],"a":[47],"micro":[48],"leverage":[49],"force":[50],"amplifying":[51],"mechanism":[52],"adopted,":[54],"from":[55],"transformation":[58],"efficiency":[59],"between":[60],"axial":[66],"stress":[67],"beam":[71,115],"would":[72],"improved":[74],"obviously.":[75],"processes":[78],"were":[79],"used":[80,96],"on":[81],"single":[82],"one":[83],"wafer":[84],"to":[85,97],"fabricate":[86],"sensor":[88,104],"chip.":[89],"electromagnetic":[91],"excitation":[92],"detection":[94],"was":[95],"make":[98],"closed-loop":[100],"control":[101],"easier.":[105],"Experimental":[106],"results":[107],"show":[108],"that":[109],"Q-factor":[111],"about":[117,126],"450":[118],"1900":[127],"Hz/g.":[128]},"counts_by_year":[{"year":2024,"cited_by_count":1},{"year":2019,"cited_by_count":1},{"year":2016,"cited_by_count":1},{"year":2013,"cited_by_count":2}],"updated_date":"2026-07-29T14:22:42.915294","created_date":"2025-10-10T00:00:00"}