{"id":"https://openalex.org/W2130607768","doi":"https://doi.org/10.1109/nems.2011.6017354","title":"Silicon nano-column fabricated by catalytic etching for electrode of fuel cell","display_name":"Silicon nano-column fabricated by catalytic etching for electrode of fuel cell","publication_year":2011,"publication_date":"2011-02-01","ids":{"openalex":"https://openalex.org/W2130607768","doi":"https://doi.org/10.1109/nems.2011.6017354","mag":"2130607768"},"language":"en","primary_location":{"id":"doi:10.1109/nems.2011.6017354","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2011.6017354","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2011 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5104087627","display_name":"Mao\u2010Jung Huang","orcid":null},"institutions":[{"id":"https://openalex.org/I4210166867","display_name":"National Applied Research Laboratories","ror":"https://ror.org/05wcstg80","country_code":"TW","type":"funder","lineage":["https://openalex.org/I4210128167","https://openalex.org/I4210166867"]}],"countries":["TW"],"is_corresponding":true,"raw_author_name":"Mao-Jung Huang","raw_affiliation_strings":["Instrument Technology Research Center, National Applied Research Laboratories, Hsinchu, Taiwan"],"affiliations":[{"raw_affiliation_string":"Instrument Technology Research Center, National Applied Research Laboratories, Hsinchu, Taiwan","institution_ids":["https://openalex.org/I4210166867"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5052094343","display_name":"Chun-Ting Lin","orcid":"https://orcid.org/0000-0001-5243-6242"},"institutions":[{"id":"https://openalex.org/I4210166867","display_name":"National Applied Research Laboratories","ror":"https://ror.org/05wcstg80","country_code":"TW","type":"funder","lineage":["https://openalex.org/I4210128167","https://openalex.org/I4210166867"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Chun-Ting Lin","raw_affiliation_strings":["Instrument Technology Research Center, National Applied Research Laboratories, Hsinchu, Taiwan"],"affiliations":[{"raw_affiliation_string":"Instrument Technology Research Center, National Applied Research Laboratories, Hsinchu, Taiwan","institution_ids":["https://openalex.org/I4210166867"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5109230175","display_name":"Chun-Ming Chang","orcid":null},"institutions":[{"id":"https://openalex.org/I4210166867","display_name":"National Applied Research Laboratories","ror":"https://ror.org/05wcstg80","country_code":"TW","type":"funder","lineage":["https://openalex.org/I4210128167","https://openalex.org/I4210166867"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Chun-Ming Chang","raw_affiliation_strings":["Instrument Technology Research Center, National Applied Research Laboratories, Hsinchu, Taiwan"],"affiliations":[{"raw_affiliation_string":"Instrument Technology Research Center, National Applied Research Laboratories, Hsinchu, Taiwan","institution_ids":["https://openalex.org/I4210166867"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5112809906","display_name":"Nien\u2010Nan Chu","orcid":null},"institutions":[{"id":"https://openalex.org/I4210166867","display_name":"National Applied Research Laboratories","ror":"https://ror.org/05wcstg80","country_code":"TW","type":"funder","lineage":["https://openalex.org/I4210128167","https://openalex.org/I4210166867"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Nien-Nan Chu","raw_affiliation_strings":["Instrument Technology Research Center, National Applied Research Laboratories, Hsinchu, Taiwan"],"affiliations":[{"raw_affiliation_string":"Instrument Technology Research Center, National Applied Research Laboratories, Hsinchu, Taiwan","institution_ids":["https://openalex.org/I4210166867"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5007701238","display_name":"Ming\u2010Hua Shiao","orcid":null},"institutions":[{"id":"https://openalex.org/I4210166867","display_name":"National Applied Research Laboratories","ror":"https://ror.org/05wcstg80","country_code":"TW","type":"funder","lineage":["https://openalex.org/I4210128167","https://openalex.org/I4210166867"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Ming-Hua Shiao","raw_affiliation_strings":["Instrument Technology Research Center, National Applied Research Laboratories, Hsinchu, Taiwan"],"affiliations":[{"raw_affiliation_string":"Instrument Technology Research Center, National Applied Research Laboratories, Hsinchu, Taiwan","institution_ids":["https://openalex.org/I4210166867"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5078967436","display_name":"Chii-Rong Yang","orcid":"https://orcid.org/0000-0002-8718-8813"},"institutions":[{"id":"https://openalex.org/I134161618","display_name":"National Taiwan Normal University","ror":"https://ror.org/059dkdx38","country_code":"TW","type":"education","lineage":["https://openalex.org/I134161618"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Chii-Rong Yang","raw_affiliation_strings":["Department of Mechatronic Technology, National Taiwan Normal University, Taipei, Taiwan","Department of Mechatronic Technology, National Taiwan Normal University , Taipei, Taiwan"],"affiliations":[{"raw_affiliation_string":"Department of Mechatronic Technology, National Taiwan Normal University, Taipei, Taiwan","institution_ids":["https://openalex.org/I134161618"]},{"raw_affiliation_string":"Department of Mechatronic Technology, National Taiwan Normal University , Taipei, Taiwan","institution_ids":["https://openalex.org/I134161618"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5108388824","display_name":"Yuang-Cherng Chiou","orcid":null},"institutions":[{"id":"https://openalex.org/I142974352","display_name":"National Sun Yat-sen University","ror":"https://ror.org/00mjawt10","country_code":"TW","type":"education","lineage":["https://openalex.org/I142974352"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Yuang-Cherng Chiou","raw_affiliation_strings":["Department of Mechanical and Electro-Mechanical Engineering, National Sun Yat-Sen University, Kaohsiung, Taiwan","Department of Mechanical and Electro-Mechanical Engineering; National Sun Yat-Sen University; Kaohsiung Taiwan"],"affiliations":[{"raw_affiliation_string":"Department of Mechanical and Electro-Mechanical Engineering, National Sun Yat-Sen University, Kaohsiung, Taiwan","institution_ids":["https://openalex.org/I142974352"]},{"raw_affiliation_string":"Department of Mechanical and Electro-Mechanical Engineering; National Sun Yat-Sen University; Kaohsiung Taiwan","institution_ids":["https://openalex.org/I142974352"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5050184808","display_name":"Rong-Tsong Lee","orcid":null},"institutions":[{"id":"https://openalex.org/I142974352","display_name":"National Sun Yat-sen University","ror":"https://ror.org/00mjawt10","country_code":"TW","type":"education","lineage":["https://openalex.org/I142974352"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Rong-Tsong Lee","raw_affiliation_strings":["Department of Mechanical and Electro-Mechanical Engineering, National Sun Yat-Sen University, Kaohsiung, Taiwan","Department of Mechanical and Electro-Mechanical Engineering; National Sun Yat-Sen University; Kaohsiung Taiwan"],"affiliations":[{"raw_affiliation_string":"Department of Mechanical and Electro-Mechanical Engineering, National Sun Yat-Sen University, Kaohsiung, Taiwan","institution_ids":["https://openalex.org/I142974352"]},{"raw_affiliation_string":"Department of Mechanical and Electro-Mechanical Engineering; National Sun Yat-Sen University; Kaohsiung Taiwan","institution_ids":["https://openalex.org/I142974352"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":8,"corresponding_author_ids":["https://openalex.org/A5104087627"],"corresponding_institution_ids":["https://openalex.org/I4210166867"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.15938994,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"305","last_page":"308"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11272","display_name":"Nanowire Synthesis and Applications","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11272","display_name":"Nanowire Synthesis and Applications","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12340","display_name":"Anodic Oxide Films and Nanostructures","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10913","display_name":"Molecular Junctions and Nanostructures","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/etching","display_name":"Etching (microfabrication)","score":0.8562427163124084},{"id":"https://openalex.org/keywords/electrode","display_name":"Electrode","score":0.7190849184989929},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.7008066177368164},{"id":"https://openalex.org/keywords/nano","display_name":"Nano-","score":0.6943241357803345},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.6151000261306763},{"id":"https://openalex.org/keywords/lithography","display_name":"Lithography","score":0.576109766960144},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.5495697855949402},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.5396921634674072},{"id":"https://openalex.org/keywords/catalysis","display_name":"Catalysis","score":0.5230270624160767},{"id":"https://openalex.org/keywords/nanosphere-lithography","display_name":"Nanosphere lithography","score":0.4915984570980072},{"id":"https://openalex.org/keywords/nanostructure","display_name":"Nanostructure","score":0.45023900270462036},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.4209224581718445},{"id":"https://openalex.org/keywords/column","display_name":"Column (typography)","score":0.4148215353488922},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.1595526933670044},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.1187262237071991},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.11749821901321411},{"id":"https://openalex.org/keywords/layer","display_name":"Layer (electronics)","score":0.11497166752815247},{"id":"https://openalex.org/keywords/organic-chemistry","display_name":"Organic chemistry","score":0.043613314628601074}],"concepts":[{"id":"https://openalex.org/C100460472","wikidata":"https://www.wikidata.org/wiki/Q2368605","display_name":"Etching (microfabrication)","level":3,"score":0.8562427163124084},{"id":"https://openalex.org/C17525397","wikidata":"https://www.wikidata.org/wiki/Q176140","display_name":"Electrode","level":2,"score":0.7190849184989929},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7008066177368164},{"id":"https://openalex.org/C2780357685","wikidata":"https://www.wikidata.org/wiki/Q154357","display_name":"Nano-","level":2,"score":0.6943241357803345},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.6151000261306763},{"id":"https://openalex.org/C204223013","wikidata":"https://www.wikidata.org/wiki/Q133036","display_name":"Lithography","level":2,"score":0.576109766960144},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.5495697855949402},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.5396921634674072},{"id":"https://openalex.org/C161790260","wikidata":"https://www.wikidata.org/wiki/Q82264","display_name":"Catalysis","level":2,"score":0.5230270624160767},{"id":"https://openalex.org/C43766710","wikidata":"https://www.wikidata.org/wiki/Q17043033","display_name":"Nanosphere lithography","level":4,"score":0.4915984570980072},{"id":"https://openalex.org/C186187911","wikidata":"https://www.wikidata.org/wiki/Q1093894","display_name":"Nanostructure","level":2,"score":0.45023900270462036},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.4209224581718445},{"id":"https://openalex.org/C2780551164","wikidata":"https://www.wikidata.org/wiki/Q2306599","display_name":"Column (typography)","level":3,"score":0.4148215353488922},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.1595526933670044},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.1187262237071991},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.11749821901321411},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.11497166752815247},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.043613314628601074},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C126042441","wikidata":"https://www.wikidata.org/wiki/Q1324888","display_name":"Frame (networking)","level":2,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.0},{"id":"https://openalex.org/C147789679","wikidata":"https://www.wikidata.org/wiki/Q11372","display_name":"Physical chemistry","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems.2011.6017354","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2011.6017354","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2011 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.4699999988079071,"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy"}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":14,"referenced_works":["https://openalex.org/W205033418","https://openalex.org/W1636543212","https://openalex.org/W1971148531","https://openalex.org/W1976039385","https://openalex.org/W1985019920","https://openalex.org/W1989583588","https://openalex.org/W1999955312","https://openalex.org/W2021776970","https://openalex.org/W2043901341","https://openalex.org/W2062385933","https://openalex.org/W2064712606","https://openalex.org/W2090976199","https://openalex.org/W2091777171","https://openalex.org/W2115973875"],"related_works":["https://openalex.org/W2117648722","https://openalex.org/W4322495720","https://openalex.org/W2531643796","https://openalex.org/W3185636307","https://openalex.org/W1996879913","https://openalex.org/W2622672966","https://openalex.org/W2072998475","https://openalex.org/W2004679793","https://openalex.org/W3186611280","https://openalex.org/W4240566582"],"abstract_inverted_index":{"With":[0],"advances":[1],"in":[2],"fabrication":[3],"technologies,":[4],"a":[5,16,58,93,111],"number":[6],"of":[7,64,85,100],"methods":[8],"can":[9,55],"be":[10],"used":[11,90],"to":[12,38,91],"create":[13],"micro/nanostructures.":[14],"Herein,":[15],"simple":[17],"and":[18,30,86],"efficient":[19],"silicon":[20],"nano-column":[21,65,80],"array":[22],"is":[23,66,103],"made":[24],"through":[25],"self-assembled":[26],"nano-sphere":[27],"lithography":[28],"(SANL)":[29],"catalytic":[31,74,83],"etching.":[32],"Moreover,":[33],"we":[34],"demonstrate":[35],"the":[36],"ability":[37],"apply":[39],"this":[40],"high":[41],"aspect":[42],"ratio":[43],"structure":[44],"into":[45],"fuel":[46,94],"cell":[47,95],"electrodes.":[48],"The":[49,61],"experimental":[50],"results":[51],"indicate":[52],"that":[53,108],"SANL":[54],"effectively":[56],"define":[57],"nano-patterned":[59],"array.":[60],"highest":[62],"height":[63],"about":[67],"10":[68],"\u03bcm":[69],"which":[70],"were":[71,89],"formed":[72],"by":[73,110],"etching":[75,84],"with":[76,82],"25":[77],"min.":[78],"Furthermore,":[79],"arrays":[81],"15":[87],"min":[88],"produce":[92],"electrode.":[96,113],"Its":[97],"oxidation":[98],"current":[99],"6.04":[101],"mA":[102],"8.1":[104],"times":[105],"higher":[106],"than":[107],"obtained":[109],"planar":[112]},"counts_by_year":[],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}