{"id":"https://openalex.org/W2131461263","doi":"https://doi.org/10.1109/nems.2011.6017282","title":"Virtual prototyping simulation for electrostatically suspended rotor micro gyroscope initial levitation","display_name":"Virtual prototyping simulation for electrostatically suspended rotor micro gyroscope initial levitation","publication_year":2011,"publication_date":"2011-02-01","ids":{"openalex":"https://openalex.org/W2131461263","doi":"https://doi.org/10.1109/nems.2011.6017282","mag":"2131461263"},"language":"en","primary_location":{"id":"doi:10.1109/nems.2011.6017282","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2011.6017282","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2011 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5111917048","display_name":"Dangdang Shao","orcid":null},"institutions":[{"id":"https://openalex.org/I183067930","display_name":"Shanghai Jiao Tong University","ror":"https://ror.org/0220qvk04","country_code":"CN","type":"education","lineage":["https://openalex.org/I183067930"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Dangdang Shao","raw_affiliation_strings":["Research Institute of Micro, Nano Science and Technology, Shanghai Jiaotong University, China","Res. Inst. of Micro/Nano Sci. & Technol., Shanghai Jiaotong Univ., China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Research Institute of Micro, Nano Science and Technology, Shanghai Jiaotong University, China","institution_ids":["https://openalex.org/I183067930"]},{"raw_affiliation_string":"Res. Inst. of Micro/Nano Sci. & Technol., Shanghai Jiaotong Univ., China","institution_ids":["https://openalex.org/I183067930"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101827050","display_name":"Wenyuan Chen","orcid":"https://orcid.org/0000-0002-0973-5922"},"institutions":[{"id":"https://openalex.org/I183067930","display_name":"Shanghai Jiao Tong University","ror":"https://ror.org/0220qvk04","country_code":"CN","type":"education","lineage":["https://openalex.org/I183067930"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Wenyuan Chen","raw_affiliation_strings":["Research Institute of Micro, Nano Science and Technology, Shanghai Jiaotong University, China","Res. Inst. of Micro/Nano Sci. & Technol., Shanghai Jiaotong Univ., China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Research Institute of Micro, Nano Science and Technology, Shanghai Jiaotong University, China","institution_ids":["https://openalex.org/I183067930"]},{"raw_affiliation_string":"Res. Inst. of Micro/Nano Sci. & Technol., Shanghai Jiaotong Univ., China","institution_ids":["https://openalex.org/I183067930"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5049808730","display_name":"Weiping Zhang","orcid":"https://orcid.org/0000-0002-4515-7955"},"institutions":[{"id":"https://openalex.org/I183067930","display_name":"Shanghai Jiao Tong University","ror":"https://ror.org/0220qvk04","country_code":"CN","type":"education","lineage":["https://openalex.org/I183067930"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Weiping Zhang","raw_affiliation_strings":["Research Institute of Micro, Nano Science and Technology, Shanghai Jiaotong University, China","Res. Inst. of Micro/Nano Sci. & Technol., Shanghai Jiaotong Univ., China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Research Institute of Micro, Nano Science and Technology, Shanghai Jiaotong University, China","institution_ids":["https://openalex.org/I183067930"]},{"raw_affiliation_string":"Res. Inst. of Micro/Nano Sci. & Technol., Shanghai Jiaotong Univ., China","institution_ids":["https://openalex.org/I183067930"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100746912","display_name":"Feng Cui","orcid":"https://orcid.org/0009-0009-9617-9124"},"institutions":[{"id":"https://openalex.org/I183067930","display_name":"Shanghai Jiao Tong University","ror":"https://ror.org/0220qvk04","country_code":"CN","type":"education","lineage":["https://openalex.org/I183067930"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Feng Cui","raw_affiliation_strings":["Research Institute of Micro, Nano Science and Technology, Shanghai Jiaotong University, China","Res. Inst. of Micro/Nano Sci. & Technol., Shanghai Jiaotong Univ., China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Research Institute of Micro, Nano Science and Technology, Shanghai Jiaotong University, China","institution_ids":["https://openalex.org/I183067930"]},{"raw_affiliation_string":"Res. Inst. of Micro/Nano Sci. & Technol., Shanghai Jiaotong Univ., China","institution_ids":["https://openalex.org/I183067930"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5056963838","display_name":"Qijun Xiao","orcid":"https://orcid.org/0000-0002-7811-8784"},"institutions":[{"id":"https://openalex.org/I183067930","display_name":"Shanghai Jiao Tong University","ror":"https://ror.org/0220qvk04","country_code":"CN","type":"education","lineage":["https://openalex.org/I183067930"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Qijun Xiao","raw_affiliation_strings":["Research Institute of Micro, Nano Science and Technology, Shanghai Jiaotong University, China","Res. Inst. of Micro/Nano Sci. & Technol., Shanghai Jiaotong Univ., China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Research Institute of Micro, Nano Science and Technology, Shanghai Jiaotong University, China","institution_ids":["https://openalex.org/I183067930"]},{"raw_affiliation_string":"Res. Inst. of Micro/Nano Sci. & Technol., Shanghai Jiaotong Univ., China","institution_ids":["https://openalex.org/I183067930"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":5,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":{"value":0.15401896,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":94,"max":96},"biblio":{"volume":null,"issue":null,"first_page":"9","last_page":"12"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9923999905586243,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9923999905586243,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9904000163078308,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13885","display_name":"Geophysics and Sensor Technology","score":0.9678000211715698,"subfield":{"id":"https://openalex.org/subfields/2212","display_name":"Ocean Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/virtual-prototyping","display_name":"Virtual prototyping","score":0.8144134283065796},{"id":"https://openalex.org/keywords/levitation","display_name":"Levitation","score":0.8134220242500305},{"id":"https://openalex.org/keywords/gyroscope","display_name":"Gyroscope","score":0.8018271923065186},{"id":"https://openalex.org/keywords/rotor","display_name":"Rotor (electric)","score":0.7367430925369263},{"id":"https://openalex.org/keywords/control-theory","display_name":"Control theory (sociology)","score":0.5757147073745728},{"id":"https://openalex.org/keywords/pid-controller","display_name":"PID controller","score":0.5445429086685181},{"id":"https://openalex.org/keywords/displacement","display_name":"Displacement (psychology)","score":0.5112066268920898},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.44216975569725037},{"id":"https://openalex.org/keywords/torque","display_name":"Torque","score":0.43044987320899963},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.3804287016391754},{"id":"https://openalex.org/keywords/control-engineering","display_name":"Control engineering","score":0.370391309261322},{"id":"https://openalex.org/keywords/simulation","display_name":"Simulation","score":0.2921768128871918},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.2597189247608185},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.17157933115959167},{"id":"https://openalex.org/keywords/control","display_name":"Control (management)","score":0.13400310277938843},{"id":"https://openalex.org/keywords/aerospace-engineering","display_name":"Aerospace engineering","score":0.12490236759185791},{"id":"https://openalex.org/keywords/magnet","display_name":"Magnet","score":0.10174018144607544},{"id":"https://openalex.org/keywords/temperature-control","display_name":"Temperature control","score":0.08255746960639954}],"concepts":[{"id":"https://openalex.org/C2780991453","wikidata":"https://www.wikidata.org/wiki/Q3408177","display_name":"Virtual prototyping","level":2,"score":0.8144134283065796},{"id":"https://openalex.org/C27838914","wikidata":"https://www.wikidata.org/wiki/Q740997","display_name":"Levitation","level":3,"score":0.8134220242500305},{"id":"https://openalex.org/C158488048","wikidata":"https://www.wikidata.org/wiki/Q483400","display_name":"Gyroscope","level":2,"score":0.8018271923065186},{"id":"https://openalex.org/C17281054","wikidata":"https://www.wikidata.org/wiki/Q193466","display_name":"Rotor (electric)","level":2,"score":0.7367430925369263},{"id":"https://openalex.org/C47446073","wikidata":"https://www.wikidata.org/wiki/Q5165890","display_name":"Control theory (sociology)","level":3,"score":0.5757147073745728},{"id":"https://openalex.org/C47116090","wikidata":"https://www.wikidata.org/wiki/Q716829","display_name":"PID controller","level":3,"score":0.5445429086685181},{"id":"https://openalex.org/C107551265","wikidata":"https://www.wikidata.org/wiki/Q1458245","display_name":"Displacement (psychology)","level":2,"score":0.5112066268920898},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.44216975569725037},{"id":"https://openalex.org/C144171764","wikidata":"https://www.wikidata.org/wiki/Q48103","display_name":"Torque","level":2,"score":0.43044987320899963},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.3804287016391754},{"id":"https://openalex.org/C133731056","wikidata":"https://www.wikidata.org/wiki/Q4917288","display_name":"Control engineering","level":1,"score":0.370391309261322},{"id":"https://openalex.org/C44154836","wikidata":"https://www.wikidata.org/wiki/Q45045","display_name":"Simulation","level":1,"score":0.2921768128871918},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.2597189247608185},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.17157933115959167},{"id":"https://openalex.org/C2775924081","wikidata":"https://www.wikidata.org/wiki/Q55608371","display_name":"Control (management)","level":2,"score":0.13400310277938843},{"id":"https://openalex.org/C146978453","wikidata":"https://www.wikidata.org/wiki/Q3798668","display_name":"Aerospace engineering","level":1,"score":0.12490236759185791},{"id":"https://openalex.org/C16389437","wikidata":"https://www.wikidata.org/wiki/Q11421","display_name":"Magnet","level":2,"score":0.10174018144607544},{"id":"https://openalex.org/C536315585","wikidata":"https://www.wikidata.org/wiki/Q7698332","display_name":"Temperature control","level":2,"score":0.08255746960639954},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.0},{"id":"https://openalex.org/C15744967","wikidata":"https://www.wikidata.org/wiki/Q9418","display_name":"Psychology","level":0,"score":0.0},{"id":"https://openalex.org/C97355855","wikidata":"https://www.wikidata.org/wiki/Q11473","display_name":"Thermodynamics","level":1,"score":0.0},{"id":"https://openalex.org/C542102704","wikidata":"https://www.wikidata.org/wiki/Q183257","display_name":"Psychotherapist","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems.2011.6017282","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2011.6017282","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2011 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/8","score":0.4300000071525574,"display_name":"Decent work and economic growth"}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":6,"referenced_works":["https://openalex.org/W1991643183","https://openalex.org/W1996358806","https://openalex.org/W2064939120","https://openalex.org/W2136377292","https://openalex.org/W2349702708","https://openalex.org/W6649499999"],"related_works":["https://openalex.org/W2748952813","https://openalex.org/W1889129279","https://openalex.org/W2058340937","https://openalex.org/W2029722462","https://openalex.org/W4387451989","https://openalex.org/W2069575927","https://openalex.org/W2532412374","https://openalex.org/W2063137106","https://openalex.org/W2315690033","https://openalex.org/W2015833122"],"abstract_inverted_index":{"We":[0],"use":[1],"virtual":[2,35,124],"prototyping":[3,36,125],"technique":[4],"to":[5,18,53,94],"develop":[6],"a":[7],"3D":[8],"model":[9,37,69],"for":[10,43,136],"electrostatically":[11],"suspended":[12],"rotor":[13,55,83,96,106,133],"micro":[14,44],"gyroscope":[15,45],"system":[16,46],"according":[17],"its":[19],"actual":[20],"mechanical":[21],"structure":[22],"and":[23,41,64,80,98,140],"material":[24],"properties.":[25],"System":[26],"level":[27],"dynamic":[28],"simulation":[29,88,126],"results":[30],"obtained":[31],"from":[32],"the":[33,67,117,123,137],"established":[34],"provide":[38],"necessary":[39],"reference":[40],"guidance":[42],"control.":[47,143],"Various":[48],"PID":[49,118],"control":[50,60,119],"methods":[51],"used":[52],"realize":[54,95],"initial":[56,130],"levitation":[57,97,131],"with":[58],"different":[59],"parameters":[61],"are":[62,84],"evaluated":[63],"validated":[65],"by":[66,122],"analytical":[68],"before":[70],"application.":[71],"The":[72,103],"output":[73],"motion":[74,101],"characteristic":[75],"curves":[76],"including":[77],"force,":[78],"velocity":[79],"displacement":[81,104],"of":[82,105,132],"analyzed.":[85],"Based":[86],"on":[87],"results,":[89],"we":[90],"find":[91],"suitable":[92],"strategy":[93],"obtain":[99],"superior":[100],"performance.":[102],"in":[107,111],"Z":[108],"direction":[109],"measured":[110],"real":[112],"working":[113],"environment":[114],"shows":[115],"that":[116],"method":[120],"verified":[121],"is":[127],"workable.":[128],"Rapid":[129],"provides":[134],"prerequisite":[135],"follow-up":[138],"rotating":[139],"torque":[141],"exerting":[142]},"counts_by_year":[{"year":2017,"cited_by_count":2}],"updated_date":"2026-06-11T09:08:48.828518","created_date":"2025-10-10T00:00:00"}