{"id":"https://openalex.org/W2116563386","doi":"https://doi.org/10.1109/nems.2010.5592582","title":"High performance MEMS spiral inductors","display_name":"High performance MEMS spiral inductors","publication_year":2010,"publication_date":"2010-01-01","ids":{"openalex":"https://openalex.org/W2116563386","doi":"https://doi.org/10.1109/nems.2010.5592582","mag":"2116563386"},"language":"en","primary_location":{"id":"doi:10.1109/nems.2010.5592582","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2010.5592582","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5036748512","display_name":"Dongming Fang","orcid":null},"institutions":[{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]},{"id":"https://openalex.org/I4210119392","display_name":"Institute of Microelectronics","ror":"https://ror.org/02s6gs133","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Dong-Ming Fang","raw_affiliation_strings":["Institute of Microelectronics, Peking University, Beijing, China","Institute of Microelectronics, Peking University,Beijing,P.R. China"],"affiliations":[{"raw_affiliation_string":"Institute of Microelectronics, Peking University, Beijing, China","institution_ids":["https://openalex.org/I20231570","https://openalex.org/I4210119392"]},{"raw_affiliation_string":"Institute of Microelectronics, Peking University,Beijing,P.R. China","institution_ids":["https://openalex.org/I20231570","https://openalex.org/I4210119392"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5045418817","display_name":"Quan Yuan","orcid":"https://orcid.org/0000-0002-1083-6800"},"institutions":[{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]},{"id":"https://openalex.org/I4210119392","display_name":"Institute of Microelectronics","ror":"https://ror.org/02s6gs133","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Quan Yuan","raw_affiliation_strings":["Institute of Microelectronics, Peking University, Beijing, China","Institute of Microelectronics, Peking University,Beijing,P.R. China"],"affiliations":[{"raw_affiliation_string":"Institute of Microelectronics, Peking University, Beijing, China","institution_ids":["https://openalex.org/I20231570","https://openalex.org/I4210119392"]},{"raw_affiliation_string":"Institute of Microelectronics, Peking University,Beijing,P.R. China","institution_ids":["https://openalex.org/I20231570","https://openalex.org/I4210119392"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5020203925","display_name":"Mengdi Han","orcid":"https://orcid.org/0000-0002-7552-7398"},"institutions":[{"id":"https://openalex.org/I4210119392","display_name":"Institute of Microelectronics","ror":"https://ror.org/02s6gs133","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]},{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xiu-Han Li","raw_affiliation_strings":["Institute of Microelectronics, Peking University, Beijing, China","Institute of Microelectronics, Peking University,Beijing,P.R. China"],"affiliations":[{"raw_affiliation_string":"Institute of Microelectronics, Peking University, Beijing, China","institution_ids":["https://openalex.org/I20231570","https://openalex.org/I4210119392"]},{"raw_affiliation_string":"Institute of Microelectronics, Peking University,Beijing,P.R. China","institution_ids":["https://openalex.org/I20231570","https://openalex.org/I4210119392"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100375644","display_name":"Haixia Zhang","orcid":"https://orcid.org/0000-0003-4565-4123"},"institutions":[{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]},{"id":"https://openalex.org/I4210119392","display_name":"Institute of Microelectronics","ror":"https://ror.org/02s6gs133","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Hai-Xia Zhang","raw_affiliation_strings":["Institute of Microelectronics, Peking University, Beijing, China","Institute of Microelectronics, Peking University,Beijing,P.R. China"],"affiliations":[{"raw_affiliation_string":"Institute of Microelectronics, Peking University, Beijing, China","institution_ids":["https://openalex.org/I20231570","https://openalex.org/I4210119392"]},{"raw_affiliation_string":"Institute of Microelectronics, Peking University,Beijing,P.R. China","institution_ids":["https://openalex.org/I20231570","https://openalex.org/I4210119392"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5037106751","display_name":"Yong Zhou","orcid":"https://orcid.org/0000-0002-5141-1083"},"institutions":[{"id":"https://openalex.org/I183067930","display_name":"Shanghai Jiao Tong University","ror":"https://ror.org/0220qvk04","country_code":"CN","type":"education","lineage":["https://openalex.org/I183067930"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yong Zhou","raw_affiliation_strings":["Research Institute of Micro and Nano Science and Technology, Shanghai Jiaotong University, Shanghai, China","Research Institute of Micro/Nano Science and Technology, Shanghai Jiao Tong University, Shanghai, P.R. China"],"affiliations":[{"raw_affiliation_string":"Research Institute of Micro and Nano Science and Technology, Shanghai Jiaotong University, Shanghai, China","institution_ids":["https://openalex.org/I183067930"]},{"raw_affiliation_string":"Research Institute of Micro/Nano Science and Technology, Shanghai Jiao Tong University, Shanghai, P.R. China","institution_ids":["https://openalex.org/I183067930"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5100725462","display_name":"Xiaolin Zhao","orcid":null},"institutions":[{"id":"https://openalex.org/I183067930","display_name":"Shanghai Jiao Tong University","ror":"https://ror.org/0220qvk04","country_code":"CN","type":"education","lineage":["https://openalex.org/I183067930"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xiao-Lin Zhao","raw_affiliation_strings":["Research Institute of Micro and Nano Science and Technology, Shanghai Jiaotong University, Shanghai, China","Research Institute of Micro/Nano Science and Technology, Shanghai Jiao Tong University, Shanghai, P.R. China"],"affiliations":[{"raw_affiliation_string":"Research Institute of Micro and Nano Science and Technology, Shanghai Jiaotong University, Shanghai, China","institution_ids":["https://openalex.org/I183067930"]},{"raw_affiliation_string":"Research Institute of Micro/Nano Science and Technology, Shanghai Jiao Tong University, Shanghai, P.R. China","institution_ids":["https://openalex.org/I183067930"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":6,"corresponding_author_ids":["https://openalex.org/A5036748512"],"corresponding_institution_ids":["https://openalex.org/I20231570","https://openalex.org/I4210119392"],"apc_list":null,"apc_paid":null,"fwci":0.8659,"has_fulltext":false,"cited_by_count":9,"citation_normalized_percentile":{"value":0.78014531,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":97},"biblio":{"volume":"33","issue":null,"first_page":"1033","last_page":"1035"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10187","display_name":"Radio Frequency Integrated Circuit Design","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10187","display_name":"Radio Frequency Integrated Circuit Design","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10262","display_name":"Microwave Engineering and Waveguides","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9994000196456909,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/inductor","display_name":"Inductor","score":0.8971064686775208},{"id":"https://openalex.org/keywords/inductance","display_name":"Inductance","score":0.8582056164741516},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.8190338611602783},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.782726526260376},{"id":"https://openalex.org/keywords/spiral","display_name":"Spiral (railway)","score":0.7163341045379639},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.6284962296485901},{"id":"https://openalex.org/keywords/planar","display_name":"Planar","score":0.4485345482826233},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.44542211294174194},{"id":"https://openalex.org/keywords/q-factor","display_name":"Q factor","score":0.4340575933456421},{"id":"https://openalex.org/keywords/surface-micromachining","display_name":"Surface micromachining","score":0.41524988412857056},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.35508251190185547},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.19165679812431335},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.1753307282924652},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.11302518844604492},{"id":"https://openalex.org/keywords/resonator","display_name":"Resonator","score":0.09797880053520203},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.07679426670074463}],"concepts":[{"id":"https://openalex.org/C144534570","wikidata":"https://www.wikidata.org/wiki/Q5325","display_name":"Inductor","level":3,"score":0.8971064686775208},{"id":"https://openalex.org/C29210110","wikidata":"https://www.wikidata.org/wiki/Q177897","display_name":"Inductance","level":3,"score":0.8582056164741516},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.8190338611602783},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.782726526260376},{"id":"https://openalex.org/C174128100","wikidata":"https://www.wikidata.org/wiki/Q846907","display_name":"Spiral (railway)","level":2,"score":0.7163341045379639},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6284962296485901},{"id":"https://openalex.org/C134786449","wikidata":"https://www.wikidata.org/wiki/Q3391255","display_name":"Planar","level":2,"score":0.4485345482826233},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.44542211294174194},{"id":"https://openalex.org/C187725362","wikidata":"https://www.wikidata.org/wiki/Q830521","display_name":"Q factor","level":3,"score":0.4340575933456421},{"id":"https://openalex.org/C145667562","wikidata":"https://www.wikidata.org/wiki/Q7646003","display_name":"Surface micromachining","level":4,"score":0.41524988412857056},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.35508251190185547},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.19165679812431335},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.1753307282924652},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.11302518844604492},{"id":"https://openalex.org/C97126364","wikidata":"https://www.wikidata.org/wiki/Q349669","display_name":"Resonator","level":2,"score":0.09797880053520203},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.07679426670074463},{"id":"https://openalex.org/C121684516","wikidata":"https://www.wikidata.org/wiki/Q7600677","display_name":"Computer graphics (images)","level":1,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems.2010.5592582","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2010.5592582","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":11,"referenced_works":["https://openalex.org/W1989491178","https://openalex.org/W2018008910","https://openalex.org/W2045518789","https://openalex.org/W2056693201","https://openalex.org/W2102096768","https://openalex.org/W2130914958","https://openalex.org/W2164292894","https://openalex.org/W2167004581","https://openalex.org/W2169539375","https://openalex.org/W2171045439","https://openalex.org/W2788994432"],"related_works":["https://openalex.org/W2769490182","https://openalex.org/W2196183592","https://openalex.org/W2166381952","https://openalex.org/W3168403633","https://openalex.org/W2114486131","https://openalex.org/W2120661608","https://openalex.org/W1487788472","https://openalex.org/W2117520483","https://openalex.org/W4226174229","https://openalex.org/W2584920463"],"abstract_inverted_index":{"In":[0],"this":[1],"paper,":[2],"fabrication":[3,15],"and":[4,33],"performance":[5,44],"of":[6,28,51,63,69,81],"RF":[7],"MEMS":[8],"planar":[9],"spiral":[10,29,40,53,71],"inductors":[11,41],"is":[12,17,56,74],"presented.":[13],"The":[14,48,66],"process":[16],"simple,":[18],"using":[19],"surface":[20],"micromachined":[21],"technology":[22],"with":[23,61,79],"three":[24],"masks.":[25],"Two":[26],"types":[27],"inductor":[30],"were":[31],"fabricated":[32],"the":[34,39,52,70],"measured":[35],"results":[36],"showed":[37],"that":[38],"had":[42],"high":[43,46],"at":[45,58,76],"frequency.":[47],"maximum":[49,67],"quality":[50,68],"inductor-Type":[54,72],"A":[55],"15.8":[57],"1.4":[59],"GHz":[60,78],"inductance":[62,80],"4.61":[64],"nH.":[65,83],"B":[73],"19.7":[75],"4.1":[77],"1.40":[82]},"counts_by_year":[{"year":2019,"cited_by_count":1},{"year":2016,"cited_by_count":2},{"year":2015,"cited_by_count":2},{"year":2014,"cited_by_count":1},{"year":2013,"cited_by_count":3}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}