{"id":"https://openalex.org/W2038887681","doi":"https://doi.org/10.1109/nems.2010.5592494","title":"Low temperature synthesis and field emission of carbon nanotubes using radio frequency plasma enhanced CVD","display_name":"Low temperature synthesis and field emission of carbon nanotubes using radio frequency plasma enhanced CVD","publication_year":2010,"publication_date":"2010-01-01","ids":{"openalex":"https://openalex.org/W2038887681","doi":"https://doi.org/10.1109/nems.2010.5592494","mag":"2038887681"},"language":"en","primary_location":{"id":"doi:10.1109/nems.2010.5592494","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2010.5592494","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5101767884","display_name":"Yongxiang Liu","orcid":"https://orcid.org/0000-0003-0364-0137"},"institutions":[{"id":"https://openalex.org/I87445476","display_name":"Xi'an Jiaotong University","ror":"https://ror.org/017zhmm22","country_code":"CN","type":"education","lineage":["https://openalex.org/I87445476"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Liu Yong-xiang","raw_affiliation_strings":["School of electrical Engineering, Xi''an Jiaotong University, Xi'an, Shaanxi, China","School of electrical engineering, Xi an Jiaotong university, xi an, Shaan xi, 710049)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of electrical Engineering, Xi''an Jiaotong University, Xi'an, Shaanxi, China","institution_ids":["https://openalex.org/I87445476"]},{"raw_affiliation_string":"School of electrical engineering, Xi an Jiaotong university, xi an, Shaan xi, 710049)","institution_ids":["https://openalex.org/I87445476"]}]},{"author_position":"middle","author":{"id":null,"display_name":"Liu Jun-hua","orcid":null},"institutions":[{"id":"https://openalex.org/I87445476","display_name":"Xi'an Jiaotong University","ror":"https://ror.org/017zhmm22","country_code":"CN","type":"education","lineage":["https://openalex.org/I87445476"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Liu Jun-hua","raw_affiliation_strings":["School of electrical Engineering, Xi''an Jiaotong University, Xi'an, Shaanxi, China","School of electrical engineering, Xi an Jiaotong university, xi an, Shaan xi, 710049)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of electrical Engineering, Xi''an Jiaotong University, Xi'an, Shaanxi, China","institution_ids":["https://openalex.org/I87445476"]},{"raw_affiliation_string":"School of electrical engineering, Xi an Jiaotong university, xi an, Shaan xi, 710049)","institution_ids":["https://openalex.org/I87445476"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5063020727","display_name":"Zhu Chang-Chun","orcid":null},"institutions":[{"id":"https://openalex.org/I87445476","display_name":"Xi'an Jiaotong University","ror":"https://ror.org/017zhmm22","country_code":"CN","type":"education","lineage":["https://openalex.org/I87445476"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zhu Chang-chun","raw_affiliation_strings":["Department of Microelectronics, School of Electronic and Information Engineering, Xi''an Jiaotong University, Xi'an, Shaanxi, China","Department of Microelectronics, School of Electronic and Information Engineering, Xi an Jiaotong university, xi an, Shaan xi, 710049"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Microelectronics, School of Electronic and Information Engineering, Xi''an Jiaotong University, Xi'an, Shaanxi, China","institution_ids":["https://openalex.org/I87445476"]},{"raw_affiliation_string":"Department of Microelectronics, School of Electronic and Information Engineering, Xi an Jiaotong university, xi an, Shaan xi, 710049","institution_ids":["https://openalex.org/I87445476"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I87445476"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.1899604,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"270","issue":null,"first_page":"671","last_page":"675"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10074","display_name":"Carbon Nanotubes in Composites","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10074","display_name":"Carbon Nanotubes in Composites","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10478","display_name":"Diamond and Carbon-based Materials Research","score":0.9988999962806702,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12166","display_name":"Ion-surface interactions and analysis","score":0.998199999332428,"subfield":{"id":"https://openalex.org/subfields/2206","display_name":"Computational Mechanics"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/field-electron-emission","display_name":"Field electron emission","score":0.8261266946792603},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.7795273065567017},{"id":"https://openalex.org/keywords/carbon-nanotube","display_name":"Carbon nanotube","score":0.6985232830047607},{"id":"https://openalex.org/keywords/radio-frequency-power-transmission","display_name":"Radio frequency power transmission","score":0.6898855566978455},{"id":"https://openalex.org/keywords/chemical-vapor-deposition","display_name":"Chemical vapor deposition","score":0.6258550882339478},{"id":"https://openalex.org/keywords/plasma","display_name":"Plasma","score":0.6225007772445679},{"id":"https://openalex.org/keywords/raman-spectroscopy","display_name":"Raman spectroscopy","score":0.6210243701934814},{"id":"https://openalex.org/keywords/plasma-enhanced-chemical-vapor-deposition","display_name":"Plasma-enhanced chemical vapor deposition","score":0.452517032623291},{"id":"https://openalex.org/keywords/analytical-chemistry","display_name":"Analytical Chemistry (journal)","score":0.43110254406929016},{"id":"https://openalex.org/keywords/radio-frequency","display_name":"Radio frequency","score":0.4206883907318115},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.3068182170391083},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.2266852855682373},{"id":"https://openalex.org/keywords/electron","display_name":"Electron","score":0.20744246244430542},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.1471801996231079},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.09581306576728821},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.06275781989097595}],"concepts":[{"id":"https://openalex.org/C121029787","wikidata":"https://www.wikidata.org/wiki/Q902877","display_name":"Field electron emission","level":3,"score":0.8261266946792603},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7795273065567017},{"id":"https://openalex.org/C513720949","wikidata":"https://www.wikidata.org/wiki/Q1778729","display_name":"Carbon nanotube","level":2,"score":0.6985232830047607},{"id":"https://openalex.org/C101094754","wikidata":"https://www.wikidata.org/wiki/Q63020344","display_name":"Radio frequency power transmission","level":4,"score":0.6898855566978455},{"id":"https://openalex.org/C57410435","wikidata":"https://www.wikidata.org/wiki/Q505668","display_name":"Chemical vapor deposition","level":2,"score":0.6258550882339478},{"id":"https://openalex.org/C82706917","wikidata":"https://www.wikidata.org/wiki/Q10251","display_name":"Plasma","level":2,"score":0.6225007772445679},{"id":"https://openalex.org/C40003534","wikidata":"https://www.wikidata.org/wiki/Q862228","display_name":"Raman spectroscopy","level":2,"score":0.6210243701934814},{"id":"https://openalex.org/C38347018","wikidata":"https://www.wikidata.org/wiki/Q905958","display_name":"Plasma-enhanced chemical vapor deposition","level":3,"score":0.452517032623291},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.43110254406929016},{"id":"https://openalex.org/C74064498","wikidata":"https://www.wikidata.org/wiki/Q3396184","display_name":"Radio frequency","level":2,"score":0.4206883907318115},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.3068182170391083},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.2266852855682373},{"id":"https://openalex.org/C147120987","wikidata":"https://www.wikidata.org/wiki/Q2225","display_name":"Electron","level":2,"score":0.20744246244430542},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.1471801996231079},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.09581306576728821},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.06275781989097595},{"id":"https://openalex.org/C43617362","wikidata":"https://www.wikidata.org/wiki/Q170050","display_name":"Chromatography","level":1,"score":0.0},{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.0},{"id":"https://openalex.org/C194257627","wikidata":"https://www.wikidata.org/wiki/Q211554","display_name":"Amplifier","level":3,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems.2010.5592494","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2010.5592494","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":13,"referenced_works":["https://openalex.org/W91773989","https://openalex.org/W1974300636","https://openalex.org/W1980516378","https://openalex.org/W1997070558","https://openalex.org/W2008302913","https://openalex.org/W2009508114","https://openalex.org/W2018858346","https://openalex.org/W2043913337","https://openalex.org/W2073254867","https://openalex.org/W2076672475","https://openalex.org/W2096188874","https://openalex.org/W2108272205","https://openalex.org/W2146200259"],"related_works":["https://openalex.org/W2797945640","https://openalex.org/W1971890606","https://openalex.org/W2767032687","https://openalex.org/W4230962414","https://openalex.org/W1989957212","https://openalex.org/W2167335370","https://openalex.org/W2376498440","https://openalex.org/W4285326004","https://openalex.org/W3209221379","https://openalex.org/W4289544889"],"abstract_inverted_index":{"Carbon":[0],"nanotubes":[1],"(CNTs)":[2],"on":[3],"a":[4,8,15],"glass":[5,136,157],"substrate":[6],"at":[7,30,124],"dramatic":[9],"low":[10],"temperature":[11],"was":[12,26,43],"obtained":[13,64],"by":[14],"radio":[16],"frequency":[17],"plasma":[18,36,57,85],"enhanced":[19],"thermal":[20],"chemical":[21],"vapor":[22],"deposition.":[23],"Nickel":[24],"film":[25,114],"heated":[27],"and":[28,53,71,102],"activated":[29],"450\u00b0C":[31],"with":[32,48],"2400":[33,54],"W":[34,52,55],"rf":[35,56,97],"power,":[37],"the":[38,41,62,72,82,91,95,99,113,116,135,153],"deposition":[39],"of":[40,61,112,129,156],"CNTs":[42,63,92],"performed":[44],"for":[45,90,144],"60":[46],"minutes":[47],"600":[49],"W,":[50],"1500":[51],"power.":[58],"The":[59,109],"diameters":[60],"are":[65,74],"from":[66],"8":[67],"to":[68],"40":[69],"nm":[70],"lengths":[73],"about":[75],"over":[76],"1.0":[77],"um.":[78],"SEM":[79],"micrographs":[80],"show":[81],"lower":[83],"synthesis":[84,93],"power":[86],"can":[87],"do":[88],"better":[89],"than":[94],"exorbitant":[96],"plasma,":[98],"Raman":[100],"spectra":[101],"Field":[103],"emission":[104,111,118,126,142,160],"properties":[105],"proved":[106],"this":[107,133],"result.":[108],"field":[110,120,159],"shows":[115],"turn-on":[117],"threshold":[119],"is":[121,148],"1.17":[122],"V/um":[123],"an":[125,149],"current":[127],"density":[128],"1":[130],"uA/cm.":[131],"At":[132],"temperature,":[134],"did":[137],"not":[138],"exhibit":[139],"deformation;":[140],"electron":[141],"sufficient":[143],"flat":[145],"panel":[146],"displays":[147],"important":[150],"progress":[151,155],"in":[152],"integrated":[154],"sealed":[158],"displays.":[161]},"counts_by_year":[],"updated_date":"2026-07-29T14:22:42.915294","created_date":"2025-10-10T00:00:00"}