{"id":"https://openalex.org/W1981427374","doi":"https://doi.org/10.1109/nems.2010.5592489","title":"Fabrication and simulation of PDMS assisted CO<inf>2</inf> laser ablation","display_name":"Fabrication and simulation of PDMS assisted CO<inf>2</inf> laser ablation","publication_year":2010,"publication_date":"2010-01-01","ids":{"openalex":"https://openalex.org/W1981427374","doi":"https://doi.org/10.1109/nems.2010.5592489","mag":"1981427374"},"language":"en","primary_location":{"id":"doi:10.1109/nems.2010.5592489","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2010.5592489","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5032336401","display_name":"C.K. Chung","orcid":"https://orcid.org/0000-0003-4068-5713"},"institutions":[{"id":"https://openalex.org/I108377105","display_name":"Tainan University of Technology","ror":"https://ror.org/03967fe87","country_code":"TW","type":"education","lineage":["https://openalex.org/I108377105"]},{"id":"https://openalex.org/I91807558","display_name":"National Cheng Kung University","ror":"https://ror.org/01b8kcc49","country_code":"TW","type":"education","lineage":["https://openalex.org/I91807558"]}],"countries":["TW"],"is_corresponding":true,"raw_author_name":"C K Chung","raw_affiliation_strings":["National Cheng Kung University, Tainan, TW","Dep't of Mechanical Engineering, Tainan, Taiwan 701, ROC"],"affiliations":[{"raw_affiliation_string":"National Cheng Kung University, Tainan, TW","institution_ids":["https://openalex.org/I91807558"]},{"raw_affiliation_string":"Dep't of Mechanical Engineering, Tainan, Taiwan 701, ROC","institution_ids":["https://openalex.org/I108377105"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5114225955","display_name":"S.L. Lin","orcid":null},"institutions":[{"id":"https://openalex.org/I108377105","display_name":"Tainan University of Technology","ror":"https://ror.org/03967fe87","country_code":"TW","type":"education","lineage":["https://openalex.org/I108377105"]},{"id":"https://openalex.org/I91807558","display_name":"National Cheng Kung University","ror":"https://ror.org/01b8kcc49","country_code":"TW","type":"education","lineage":["https://openalex.org/I91807558"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"S L Lin","raw_affiliation_strings":["Department of Mechanical Engineering, National Cheng Kung University, Tainan, Taiwan","Dep't of Mechanical Engineering, Tainan, Taiwan 701, ROC"],"affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering, National Cheng Kung University, Tainan, Taiwan","institution_ids":["https://openalex.org/I91807558"]},{"raw_affiliation_string":"Dep't of Mechanical Engineering, Tainan, Taiwan 701, ROC","institution_ids":["https://openalex.org/I108377105"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5109305426","display_name":"K.C. Chang","orcid":null},"institutions":[{"id":"https://openalex.org/I91807558","display_name":"National Cheng Kung University","ror":"https://ror.org/01b8kcc49","country_code":"TW","type":"education","lineage":["https://openalex.org/I91807558"]},{"id":"https://openalex.org/I108377105","display_name":"Tainan University of Technology","ror":"https://ror.org/03967fe87","country_code":"TW","type":"education","lineage":["https://openalex.org/I108377105"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"K C Chang","raw_affiliation_strings":["Department of Mechanical Engineering, National Cheng Kung University, Tainan, Taiwan","Dep't of Mechanical Engineering, Tainan, Taiwan 701, ROC"],"affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering, National Cheng Kung University, Tainan, Taiwan","institution_ids":["https://openalex.org/I91807558"]},{"raw_affiliation_string":"Dep't of Mechanical Engineering, Tainan, Taiwan 701, ROC","institution_ids":["https://openalex.org/I108377105"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5018612997","display_name":"Haobo Wang","orcid":"https://orcid.org/0009-0002-7564-7813"},"institutions":[{"id":"https://openalex.org/I91807558","display_name":"National Cheng Kung University","ror":"https://ror.org/01b8kcc49","country_code":"TW","type":"education","lineage":["https://openalex.org/I91807558"]},{"id":"https://openalex.org/I108377105","display_name":"Tainan University of Technology","ror":"https://ror.org/03967fe87","country_code":"TW","type":"education","lineage":["https://openalex.org/I108377105"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"H Y Wang","raw_affiliation_strings":["Department of Mechanical Engineering, National Cheng Kung University, Tainan, Taiwan","Dep't of Mechanical Engineering, Tainan, Taiwan 701, ROC"],"affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering, National Cheng Kung University, Tainan, Taiwan","institution_ids":["https://openalex.org/I91807558"]},{"raw_affiliation_string":"Dep't of Mechanical Engineering, Tainan, Taiwan 701, ROC","institution_ids":["https://openalex.org/I108377105"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":["https://openalex.org/A5032336401"],"corresponding_institution_ids":["https://openalex.org/I108377105","https://openalex.org/I91807558"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.08862814,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":94},"biblio":{"volume":null,"issue":null,"first_page":"650","last_page":"653"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10732","display_name":"Laser Material Processing Techniques","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/2206","display_name":"Computational Mechanics"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10732","display_name":"Laser Material Processing Techniques","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/2206","display_name":"Computational Mechanics"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13869","display_name":"Ocular and Laser Science Research","score":0.993399977684021,"subfield":{"id":"https://openalex.org/subfields/2731","display_name":"Ophthalmology"},"field":{"id":"https://openalex.org/fields/27","display_name":"Medicine"},"domain":{"id":"https://openalex.org/domains/4","display_name":"Health Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.8498518466949463},{"id":"https://openalex.org/keywords/ablation","display_name":"Ablation","score":0.77341628074646},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.7035936117172241},{"id":"https://openalex.org/keywords/temperature-gradient","display_name":"Temperature gradient","score":0.6944979429244995},{"id":"https://openalex.org/keywords/laser-ablation","display_name":"Laser ablation","score":0.6171440482139587},{"id":"https://openalex.org/keywords/laser","display_name":"Laser","score":0.49294376373291016},{"id":"https://openalex.org/keywords/stress","display_name":"Stress (linguistics)","score":0.4561831057071686},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.42953360080718994},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.3273559808731079}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.8498518466949463},{"id":"https://openalex.org/C2778902805","wikidata":"https://www.wikidata.org/wiki/Q322177","display_name":"Ablation","level":2,"score":0.77341628074646},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.7035936117172241},{"id":"https://openalex.org/C137109543","wikidata":"https://www.wikidata.org/wiki/Q554388","display_name":"Temperature gradient","level":2,"score":0.6944979429244995},{"id":"https://openalex.org/C2779188808","wikidata":"https://www.wikidata.org/wiki/Q1806547","display_name":"Laser ablation","level":3,"score":0.6171440482139587},{"id":"https://openalex.org/C520434653","wikidata":"https://www.wikidata.org/wiki/Q38867","display_name":"Laser","level":2,"score":0.49294376373291016},{"id":"https://openalex.org/C21036866","wikidata":"https://www.wikidata.org/wiki/Q181767","display_name":"Stress (linguistics)","level":2,"score":0.4561831057071686},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.42953360080718994},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.3273559808731079},{"id":"https://openalex.org/C138885662","wikidata":"https://www.wikidata.org/wiki/Q5891","display_name":"Philosophy","level":0,"score":0.0},{"id":"https://openalex.org/C41895202","wikidata":"https://www.wikidata.org/wiki/Q8162","display_name":"Linguistics","level":1,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C146978453","wikidata":"https://www.wikidata.org/wiki/Q3798668","display_name":"Aerospace engineering","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems.2010.5592489","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2010.5592489","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320321040","display_name":"National Science Council","ror":"https://ror.org/02kv4zf79"},{"id":"https://openalex.org/F4320324663","display_name":"National Cheng Kung University","ror":"https://ror.org/01b8kcc49"}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":5,"referenced_works":["https://openalex.org/W2003031607","https://openalex.org/W2020576028","https://openalex.org/W2025772522","https://openalex.org/W2043648105","https://openalex.org/W2062409708"],"related_works":["https://openalex.org/W2080766278","https://openalex.org/W2081305085","https://openalex.org/W1940885666","https://openalex.org/W2147794715","https://openalex.org/W2560330190","https://openalex.org/W2896812212","https://openalex.org/W2052524705","https://openalex.org/W3143833596","https://openalex.org/W1965319168","https://openalex.org/W2090975244"],"abstract_inverted_index":{"The":[0,48,91,127,150],"traditional":[1],"glass":[2,46,148],"forming":[3],"using":[4],"laser":[5,33,49],"ablation":[6,70,157],"in":[7,88,112,122,142,155,176],"air":[8,123,143,177],"would":[9],"produce":[10],"many":[11],"kinds":[12],"of":[13,30,51,56,62,76,105,114],"defects":[14],"such":[15],"as":[16],"bulge,":[17],"debris,":[18],"crack":[19,85,166,183],"and":[20,59,64,86,138,144,163,184],"scorch.":[21],"In":[22,170],"this":[23,89],"paper,":[24],"we":[25],"have":[26],"applied":[27],"the":[28,37,97,103,135,159,165,172,187],"method":[29],"PDMS":[31,54,145],"assisted":[32],"processing":[34],"to":[35,71,133],"reduce":[36],"temperature":[38,136,152,174],"gradient,":[39],"heat-affect":[40,161],"zone":[41,162],"region":[42],"for":[43,69,181],"achieving":[44],"crack-free":[45],"ablation.":[47,149],"power":[50],"15":[52],"W,":[53],"thickness":[55,119],"150":[57,115],"\u03bcm":[58,111,116],"scanning":[60],"speed":[61],"228":[63],"342":[65],"mm/s":[66],"were":[67],"used":[68,132],"obtain":[72],"a":[73],"good":[74],"quality":[75],"cutting":[77],"surface":[78],"which":[79],"was":[80,107,124,130],"clear,":[81],"less":[82],"bugle,":[83],"no":[84],"scorch":[87,185],"technique.":[90],"alpha-step":[92],"measured":[93],"profile":[94],"showed":[95],"that":[96,121],"much":[98],"reduced":[99],"bugle":[100],"height":[101],"around":[102],"rims":[104],"groove":[106],"about":[108],"1.0\u00b1":[109],"0.5":[110],"case":[113],"poly-dimethylsiloxane":[117],"(PDMS)":[118],"while":[120],"15.1":[125],"\u03bcm.":[126],"ANSYS":[128],"software":[129],"also":[131],"analyze":[134],"distribution":[137],"thermal":[139],"stress":[140,180],"field":[141],"ambient":[146],"during":[147,168],"smaller":[151,160],"gradient":[153,175],"observed":[154],"PDMS-assisted":[156],"had":[158],"diminished":[164],"formation":[167],"processing.":[169],"contrast,":[171],"higher":[173,179],"induced":[178],"creating":[182],"on":[186],"surface.":[188]},"counts_by_year":[{"year":2017,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}